for drying

Industry

CPC
H01L21/67034

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67034for drying

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,708
- Issue date Jan 28, 2025
- SCREEN Holdings Co., Ltd.
- Shuichi Yasuda
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 12,198,923
- Issue date Jan 14, 2025
- Semes Co., Ltd.
- Hae-Won Choi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,198,948
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Jun Nonaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,183,613
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Kouzou Kanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,172,194
- Issue date Dec 24, 2024
- Kioxia Corporation
- Minako Inukai
- B08 - CLEANING
Information Patent Grant
Cleaning unit and substrate processing apparatus including same
- Patent number 12,165,885
- Issue date Dec 10, 2024
- Semes Co., Ltd.
- Sok Taek Lim
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,154,797
- Issue date Nov 26, 2024
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating substrate
- Patent number 12,154,796
- Issue date Nov 26, 2024
- Semes Co., Ltd.
- Joo Jib Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 12,142,474
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Gentaro Goshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 12,131,923
- Issue date Oct 29, 2024
- Ebara Corporation
- Yuta Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure vessel and closure system for improved pressure processing
- Patent number 12,121,884
- Issue date Oct 22, 2024
- Brian Hansen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate drying device and method of drying substrate using the sa...
- Patent number 12,119,240
- Issue date Oct 15, 2024
- Samsung Electronics Co., Ltd.
- Ansook Sul
- B08 - CLEANING
Information Patent Grant
Substrate processing system, load port and method
- Patent number 12,112,961
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chuang Li
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for fabricating semiconductor device having upper and low...
- Patent number 12,110,593
- Issue date Oct 8, 2024
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,094,732
- Issue date Sep 17, 2024
- SCREEN Holdings Co., Ltd.
- Keisuke Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and substrate treating apparatus
- Patent number 12,094,705
- Issue date Sep 17, 2024
- Semes Co., Ltd.
- Jin Woo Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying apparatus
- Patent number 12,094,731
- Issue date Sep 17, 2024
- Ebara Corporation
- Hirotaka Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor fabrication system
- Patent number 12,086,505
- Issue date Sep 10, 2024
- Samsung Electronics Co., Ltd.
- Seora Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for in-situ Marangoni cleaning
- Patent number 12,080,567
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Chun Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System configurations for fabrication of micro-LED displays
- Patent number 12,062,735
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Hou T. Ng
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,057,326
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate and apparatus for measuring concen...
- Patent number 12,057,335
- Issue date Aug 6, 2024
- Semes Co., Ltd.
- Sang Min Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,042,813
- Issue date Jul 23, 2024
- SCREEN Holdings Co., Ltd.
- Hiroshi Abe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and method of cleaning substrate pro...
- Patent number 12,046,485
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Shusei Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus and substrate processing apparatus
- Patent number 12,046,500
- Issue date Jul 23, 2024
- Ebara Corporation
- Hao Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate and method for treating substrate
- Patent number 12,027,381
- Issue date Jul 2, 2024
- Semes Co., Ltd.
- Youngseop Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Progressive thermal drying chamber for quantum circuits
- Patent number 12,022,745
- Issue date Jun 25, 2024
- Microsoft Technology Licensing, LLC
- Quang Thanh Tran
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for processing substrate
- Patent number 12,014,938
- Issue date Jun 18, 2024
- Semes Co., Ltd.
- Yong Hee Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic substrate cleaning system and method
- Patent number 12,009,227
- Issue date Jun 11, 2024
- KLA Corporation
- Shai Mark
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE DRYING DEVICE, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE...
- Publication number 20250052494
- Publication date Feb 13, 2025
- DAIKIN FINETECH, LTD.
- Yasunori DEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250046628
- Publication date Feb 6, 2025
- EBARA CORPORATION
- Itsuki KOBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20250029845
- Publication date Jan 23, 2025
- Samsung Electronics Co., Ltd.
- Hunjae JANG
- B08 - CLEANING
Information Patent Application
SYSTEM AND METHOD OF THINNING WAFER SUBSTRATE
- Publication number 20250018486
- Publication date Jan 16, 2025
- COMPTAKE TECHNOLOGY INC.
- YAO-GUANG YANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250022730
- Publication date Jan 16, 2025
- TES CO., LTD.
- Jin-Hyung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...
- Publication number 20250014915
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF CONTROLLING SUBSTRATE PRO...
- Publication number 20250006517
- Publication date Jan 2, 2025
- SEMES CO., LTD.
- Sang Min LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM ETCH PROCESS FOR CONTACT PLUG ANCHORING
- Publication number 20250006518
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Shiyu YUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE HAVING UPPER AND LOW...
- Publication number 20240425988
- Publication date Dec 26, 2024
- Samsung Electronics Co., Ltd.
- Yong-Jhin CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME
- Publication number 20240412984
- Publication date Dec 12, 2024
- Samsung Electronics Co., Ltd.
- Ansook Sul
- B08 - CLEANING
Information Patent Application
Ramped Spin-Dry on Semiconductor Wafer
- Publication number 20240404843
- Publication date Dec 5, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Volk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING TOOL AND METHOD
- Publication number 20240395537
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-hsiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, LOAD DEVICE AND METHOD
- Publication number 20240387213
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chuang LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DRYING WAFER
- Publication number 20240387163
- Publication date Nov 21, 2024
- NATIONAL SUN YAT-SEN UNIVERSITY
- TING-CHANG CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRYING APPARATUS AND METHOD BASED ON SUPERCRITICAL FLUID
- Publication number 20240363370
- Publication date Oct 31, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240363372
- Publication date Oct 31, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR IN-SITU MARANGONI CLEANING
- Publication number 20240363373
- Publication date Oct 31, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Wei-Chun HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240339339
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND CLEANING ME...
- Publication number 20240321601
- Publication date Sep 26, 2024
- EBARA CORPORATION
- Fumitoshi OIKAWA
- B08 - CLEANING
Information Patent Application
PROGRESSIVE THERMAL DRYING CHAMBER FOR QUANTUM CIRCUITS
- Publication number 20240298550
- Publication date Sep 5, 2024
- Microsoft Technology Licensing, LLC
- Quang Thanh TRAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE TREATING METHOD, SUBSTRATE TREATING APPARATUS, TREATMENT...
- Publication number 20240290635
- Publication date Aug 29, 2024
- SCREEN Holdings Co., Ltd.
- Shogo KUNIEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD, SUBSTRATE TREATING APPARATUS, AND TREATM...
- Publication number 20240290636
- Publication date Aug 29, 2024
- SCREEN Holdings Co., Ltd.
- Shogo KUNIEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE
- Publication number 20240282596
- Publication date Aug 22, 2024
- HUAYING RESEARCH CO., LTD
- Sophia WEN
- B08 - CLEANING
Information Patent Application
METHODS FOR RETAINING A PROCESSING LIQUID ON A SURFACE OF A SEMICON...
- Publication number 20240282597
- Publication date Aug 22, 2024
- TOKYO ELECTRON LIMITED
- Shan Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...
- Publication number 20240280906
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240261814
- Publication date Aug 8, 2024
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20240253093
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Koji ANDO
- B08 - CLEANING
Information Patent Application
ELECTRONIC COMPONENT CLEANING APPARATUS
- Publication number 20240258125
- Publication date Aug 1, 2024
- Yamaha Robotics Holdings Co., Ltd.
- Hiroshi KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...
- Publication number 20240242978
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240242985
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing system

Substrate processing apparatus

Substrate processing system and substrate processing method

Substrate processing apparatus and substrate processing method

Cleaning unit and substrate processing apparatus including same

Substrate processing method and substrate processing apparatus

Method for treating substrate

Substrate processing method and substrate processing system

Polishing apparatus and polishing method

Pressure vessel and closure system for improved pressure processing

Substrate drying device and method of drying substrate using the sa...

Substrate processing system, load port and method

Apparatus for fabricating semiconductor device having upper and low...

PECVD apparatus

Substrate processing method and substrate processing apparatus

Substrate treating method and substrate treating apparatus

Substrate drying apparatus

Method of manufacturing semiconductor fabrication system

Systems and methods for in-situ Marangoni cleaning

System configurations for fabrication of micro-LED displays

Substrate processing apparatus and substrate processing method

Apparatus for treating substrate and apparatus for measuring concen...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and method of cleaning substrate pro...

Transport apparatus and substrate processing apparatus

Apparatus for treating substrate and method for treating substrate

Progressive thermal drying chamber for quantum circuits

Apparatus and method for processing substrate

Electrostatic substrate cleaning system and method

Patents Applicationslast 30 patents

SUBSTRATE DRYING DEVICE, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

SYSTEM AND METHOD OF THINNING WAFER SUBSTRATE

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...

SUBSTRATE PROCESSING APPARATUS, METHOD OF CONTROLLING SUBSTRATE PRO...

BOTTOM ETCH PROCESS FOR CONTACT PLUG ANCHORING

APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE HAVING UPPER AND LOW...

SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME

Ramped Spin-Dry on Semiconductor Wafer

PROCESSING TOOL AND METHOD

SUBSTRATE PROCESSING SYSTEM, LOAD DEVICE AND METHOD

METHOD FOR DRYING WAFER

DRYING APPARATUS AND METHOD BASED ON SUPERCRITICAL FLUID

SUBSTRATE PROCESSING APPARATUS

SYSTEMS AND METHODS FOR IN-SITU MARANGONI CLEANING

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND CLEANING ME...

PROGRESSIVE THERMAL DRYING CHAMBER FOR QUANTUM CIRCUITS

SUBSTRATE TREATING METHOD, SUBSTRATE TREATING APPARATUS, TREATMENT...

SUBSTRATE TREATING METHOD, SUBSTRATE TREATING APPARATUS, AND TREATM...

SEMICONDUCTOR PROCESSING DEVICE

METHODS FOR RETAINING A PROCESSING LIQUID ON A SURFACE OF A SEMICON...

SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

ELECTRONIC COMPONENT CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...