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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67034
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Patents Grants
last 30 patents
Information
Patent Grant
Method for producing liquid containing sublimable substance, substr...
Patent number
12,362,167
Issue date
Jul 15, 2025
SCREEN Holdings Co., Ltd.
Masayuki Otsuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Supercritical fluid processing apparatus and substrate processing s...
Patent number
12,362,200
Issue date
Jul 15, 2025
Samsung Electronics Co., Ltd.
Seohyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating substrate
Patent number
12,352,498
Issue date
Jul 8, 2025
Semes Co., Ltd.
Sang Min Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
12,334,370
Issue date
Jun 17, 2025
Semes Co., Ltd.
Sangmin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus
Patent number
12,334,330
Issue date
Jun 17, 2025
Semes Co., Ltd.
Miso Park
B08 - CLEANING
Information
Patent Grant
Substrate treating apparatus and substrate treating method
Patent number
12,325,053
Issue date
Jun 10, 2025
Semes Co., Ltd.
Jin Woo Jung
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,322,606
Issue date
Jun 3, 2025
Tokyo Electron Limited
Shota Umezaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sublimation in forming a semiconductor
Patent number
12,322,585
Issue date
Jun 3, 2025
Micron Technology, Inc.
Matthew S. Thorum
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for drying substrate
Patent number
12,308,255
Issue date
May 20, 2025
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating substrate and temperature control method
Patent number
12,300,517
Issue date
May 13, 2025
Semes Co., Ltd.
Sang Min Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus
Patent number
12,300,483
Issue date
May 13, 2025
Semes Co., Ltd.
Miso Park
B08 - CLEANING
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
12,293,928
Issue date
May 6, 2025
Semes Co., Ltd.
Eui Sang Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for retaining a processing liquid on a surface of a semicon...
Patent number
12,288,698
Issue date
Apr 29, 2025
Tokyo Electron Limited
Shan Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Core module for semiconductor production facility machinery
Patent number
12,288,697
Issue date
Apr 29, 2025
Brooks Automation (Germany), GMBH
Lutz Rebstock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer processing equipment and method of manufacturing semiconducto...
Patent number
12,287,147
Issue date
Apr 29, 2025
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,283,495
Issue date
Apr 22, 2025
Tokyo Electron Limited
Mikio Nakashima
B08 - CLEANING
Information
Patent Grant
Apparatus for transferring substrate, and apparatus and method for...
Patent number
12,278,128
Issue date
Apr 15, 2025
Semes Co., Ltd.
Jinwoo Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating substrate
Patent number
12,278,119
Issue date
Apr 15, 2025
Semes Co., Ltd.
Myung Seok Cha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for treating substrate and temperature control method
Patent number
12,272,569
Issue date
Apr 8, 2025
Semes Co., Ltd.
Sang Min Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,255,081
Issue date
Mar 18, 2025
Tokyo Electron Limited
Shinichi Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method
Patent number
12,255,082
Issue date
Mar 18, 2025
Tokyo Electron Limited
Yuta Hamashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support, lithographic apparatus, method for manipulating...
Patent number
12,242,204
Issue date
Mar 4, 2025
ASML Netherlands B.V.
Ruud Antonius Catharina Maria Beerens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus and filler member provided therein
Patent number
12,234,555
Issue date
Feb 25, 2025
Semes Co., Ltd.
Jin Mo Jae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,237,177
Issue date
Feb 25, 2025
Tokyo Electron Limited
Shogo Fukui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transporter and substrate processing apparatus including...
Patent number
12,237,194
Issue date
Feb 25, 2025
EBARA CORPORATION
Akihiro Yazawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,237,178
Issue date
Feb 25, 2025
Tokyo Electron Limited
Masataka Gosho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,211,708
Issue date
Jan 28, 2025
SCREEN Holdings Co., Ltd.
Shuichi Yasuda
B08 - CLEANING
Information
Patent Grant
Substrate processing method and substrate processing system
Patent number
12,198,923
Issue date
Jan 14, 2025
Semes Co., Ltd.
Hae-Won Choi
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Substrate processing apparatus
Patent number
12,198,948
Issue date
Jan 14, 2025
Tokyo Electron Limited
Jun Nonaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
12,183,613
Issue date
Dec 31, 2024
Tokyo Electron Limited
Kouzou Kanagawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WAFER CLEANING SYSTEM
Publication number
20250239466
Publication date
Jul 24, 2025
Samsung Electronics Co., Ltd.
Tae Ha YOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250232986
Publication date
Jul 17, 2025
Samsung Electronics Co., Ltd.
Junho Lee
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250232973
Publication date
Jul 17, 2025
SCREEN Holdings Co., Ltd.
Tetsuya EMOTO
B08 - CLEANING
Information
Patent Application
WAFER PROCESSING EQUIPMENT AND METHOD OF MANUFACTURING SEMICONDUCTO...
Publication number
20250224177
Publication date
Jul 10, 2025
Samsung Electronics Co., Ltd.
Sangjine PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING DEVICE
Publication number
20250218807
Publication date
Jul 3, 2025
HUAYING RESEARCH CO., LTD
Sophia WEN
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20250218808
Publication date
Jul 3, 2025
SEMES CO., LTD.
Eun Seok KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
Publication number
20250218809
Publication date
Jul 3, 2025
SEMES CO., LTD.
Mi So PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE DRYING APPARATUS AND SUBSTRATE DRYING METHOD
Publication number
20250218810
Publication date
Jul 3, 2025
Samsung Electronics Co., Ltd.
Junho YOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250218762
Publication date
Jul 3, 2025
SEMES CO., LTD.
Hye Bin GWON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND METHOD
Publication number
20250218741
Publication date
Jul 3, 2025
SEMES CO., LTD.
Jin Hyeok KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20250210379
Publication date
Jun 26, 2025
SEMES CO., LTD.
Gu Won SEON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING METHOD AND TREATMENT LIQUID EVALUATING METHOD
Publication number
20250201587
Publication date
Jun 19, 2025
SCREEN Holdings Co., Ltd.
Yuta SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20250201593
Publication date
Jun 19, 2025
SCREEN Holdings Co., Ltd.
Masaki INABA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
Publication number
20250201588
Publication date
Jun 19, 2025
Samsung Electronics Co., Ltd.
Dae-Woong CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND CONTROL METH...
Publication number
20250201591
Publication date
Jun 19, 2025
SEMES CO., LTD.
Do Hyeon YOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A METHOD OF CLEANING A SEMICONDUCTOR SUBSTRATE FOR A SOLAR CELL, AN...
Publication number
20250174453
Publication date
May 29, 2025
REC SOLAR PTE. LTD.
Chui Yu CHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250167011
Publication date
May 22, 2025
TOKYO ELECTRON LIMITED
Shogo Fukui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE...
Publication number
20250167010
Publication date
May 22, 2025
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20250149327
Publication date
May 8, 2025
SCREEN Holdings Co., Ltd.
Noritake SUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILLER MEMBER AND SUBSTRATE TREATING APPARATUS
Publication number
20250140577
Publication date
May 1, 2025
SEMES CO., LTD.
Ju Yeon SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, MANUFACTURING METHOD, AND SUBSTRATE PR...
Publication number
20250140576
Publication date
May 1, 2025
SEMES CO., LTD.
Jun Hee CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250140585
Publication date
May 1, 2025
Tokyo Electron Limited
Shogo FUKUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250132172
Publication date
Apr 24, 2025
SEMES CO., LTD.
Tae Jong CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250125160
Publication date
Apr 17, 2025
Samsung Electronics Co., Ltd.
Taeheon KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING A...
Publication number
20250096011
Publication date
Mar 20, 2025
KIOXIA Corporation
Takahiro KAWATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PACKAGE CUTTING SYSTEM AND METHOD
Publication number
20250087503
Publication date
Mar 13, 2025
SEMES CO., LTD.
Changhoon OK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
Publication number
20250087515
Publication date
Mar 13, 2025
TOKYO ELECTRON LIMITED
Kouzou KANAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20250079152
Publication date
Mar 6, 2025
SCREEN Holdings Co., Ltd.
Noritake SUMI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20250079153
Publication date
Mar 6, 2025
SCREEN Holdings Co., Ltd.
Noritake SUMI
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20250079197
Publication date
Mar 6, 2025
SEMES CO., LTD.
Pil Kyun HEO
H01 - BASIC ELECTRIC ELEMENTS