Claims
- 1. A substrate holder for marking a substrate during the film growth process so that the different sides of the substrate can be distinguished, comprising:
a set of fingers having a groove for holding the substrate, said fingers extending over a surface of the substrate for shielding incoming material being deposited onto the surface of the substrate leaving a portion of the surface uncovered; and wherein the said set of fingers includes a plurality of fingers positioned asymmetrically.
- 2. The substrate holder of claim 1 wherein said set of fingers includes a first finger, a second finger, and a third finger, with a distance between said first finger and said second finger is less than the distance between said first finger and said third finger and is less than the distance between said second finger and said third finger.
- 3. The substrate holder of claim 1 wherein said groove of said set of fingers are U-shaped.
- 4. The substrate holder of claim 1 wherein said groove of said set of fingers are V-shaped.
- 5. The substrate holder of claim 1 further including a second set of fingers that extend over a second surface of said substrate for shielding incoming material being deposited onto the second surface of the substrate leaving a portion of the second surface uncovered.
- 6. The substrate holder of claim wherein said first set of fingers and said second set of fingers are aligned together.
- 7. A film deposition system for depositing a film of a material onto a substrate, comprising:
a chamber for controlling processing conditions of a deposition process; a target made of the material to be deposited onto the substrate; a substrate holder having a set of fingers with a groove for holding the substrate, said set of fingers including a plurality of fingers positioned asymmetrically to each other and extending over a surface of the substrate for shielding incoming material being deposited onto the surface of the substrate leaving a portion of the surface uncovered.
- 8. The substrate holder of claim 7 wherein said set of fingers includes a first finger, a second finger, and a third finger, with a distance between said first finger and said second finger is less than the distance between said first finger and said third finger and is less than the distance between said second finger and said third finger.
- 9. The substrate holder of claim 7 wherein said groove of said set of fingers are selected from the group consisting of U-shaped and V-shaped.
- 10. The substrate holder of claim 7 further including a second set of fingers that extend over a second surface of said substrate for shielding incoming material being deposited onto the second surface of the substrate leaving a portion of the second surface uncovered.
- 11. The substrate holder of claim 10 wherein said first set of fingers and said second set of fingers are aligned together.
- 12. A disk, comprising:
a substrate having a first surface and a second surface for depositing a layer of material; a first layer deposited on the first surface and a second layer deposited on the second surface; a first set of identification marks located on the first surface near an edge of the substrate, said first set of identification marks having a first pattern with at least two marks closely spaced to each other and a third mark further spaced apart; and a second set of identification marks located on the second surface near the edge of the substrate, said second set of identification marks having a second pattern with at least two marks closely spaced to each other and a third mark further spaced apart.
- 13. The disk of claim 12 wherein said first pattern is the same as said second pattern.
- 14. The disk of claim 12 wherein said first layer and said second layer are the same and are magnetic.
- 15. The disk of claim 12 wherein said first set of identification marks are regions on the first surface of the substrate that are void of said first layer material and said second set of identification marks are regions on the second surface of the substrate that are void of said second layer material.
- 16. The disk of claim 12 wherein:
said first set of identification marks further includes a first identification mark, a second identification mark, and a third identification mark, with a distance between said first identification mark and said second identification mark is less than the distance between said first identification mark and said third identification mark and is less than the distance between said second identification mark and said third identification mark; and said second set of identification marks further includes a fourth identification mark, a fifth identification mark, and a sixth identification mark, with a distance between said fourth identification mark and said fifth identification mark is less than the distance between said fourth identification mark and said sixth identification mark and is less than the distance between said fifth identification mark and said sixth identification mark.
- 17. A hard drive for storing data, comprising:
a disk for recording information; a motor for spinning the disk to access different portions of the disk; and a read/write head for recording and retrieving information from the disk; wherein said disk includes a first surface with a first set of identification marks located on the first surface near an edge of the disk, said first set of identification marks having a first pattern with at least two marks closely spaced to each other and a third mark further spaced apart.
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application claims the benefit of U.S. Provisional Application No. 60/414,986, filed Sep. 30, 2002.
Provisional Applications (1)
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Number |
Date |
Country |
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60414986 |
Sep 2002 |
US |