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CPC
C23C14/50

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/50Substrate holders

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Patents Grantslast 30 patents

Information Patent Grant
Support structure for thermal processing systems
- Patent number 12,176,241
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning electrostatic chuck
- Patent number 12,170,218
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yueh-Lin Yang
- B08 - CLEANING
Information Patent Grant
Substrate rotating apparatus
- Patent number 12,152,297
- Issue date Nov 26, 2024
- Santec Holdings Corporation
- Noboru Uehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metallic coating process for combustor panels using a barrel config...
- Patent number 12,139,786
- Issue date Nov 12, 2024
- RTX Corporation
- Frank J. Trzcinski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device and method for manufacturing same
- Patent number 12,136,540
- Issue date Nov 5, 2024
- LG Display Co., Ltd.
- Young Gon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for introducing an optical lens into a turning...
- Patent number 12,129,540
- Issue date Oct 29, 2024
- Carl Zeiss Vision International GmbH
- Frank Macionczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tetrahedral amorphous hydrogenated carbon and amorphous siloxane di...
- Patent number 12,129,539
- Issue date Oct 29, 2024
- Thin Film Service, Inc.
- Ollivier Lefevre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fixture assembly for coating combustor panels
- Patent number 12,121,921
- Issue date Oct 22, 2024
- RTX Corporation
- Timothy William Quinn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for solvent-free perovskite deposition
- Patent number 12,116,663
- Issue date Oct 15, 2024
- CUBICPV INC.
- Michael D. Irwin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport carrier, deposition apparatus, and electronic device manu...
- Patent number 12,116,664
- Issue date Oct 15, 2024
- CANON TOKKI CORPORATION
- Shigeyuki Ogawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Magnetic levitation system, base and carrier of a magnetic levitati...
- Patent number 12,119,173
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Henning Aust
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for perovskite device processing by vapor transport deposition
- Patent number 12,112,897
- Issue date Oct 8, 2024
- First Solar, Inc.
- Le Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for depositing coatings on surfaces and associated methods
- Patent number 12,104,241
- Issue date Oct 1, 2024
- Continental Reifen Deutschland GmbH
- Andrew Grant
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Deposition ring for thin substrate handling via edge clamping
- Patent number 12,100,579
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Abhishek Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings for enhancement of properties and performance of substrate...
- Patent number 12,084,778
- Issue date Sep 10, 2024
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool
- Patent number 12,084,769
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method for manufacturing film-formed molded product
- Patent number 12,083,722
- Issue date Sep 10, 2024
- Mitsuba Corporation
- Takao Umezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier component and coating developer device
- Patent number 12,084,756
- Issue date Sep 10, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Buxiang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods of sublimation for repeatable uniform or patt...
- Patent number 12,077,846
- Issue date Sep 3, 2024
- Vanderbilt University
- David Anderson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Movement systems for sputter coating of non-flat substrates
- Patent number 12,080,527
- Issue date Sep 3, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert De Bosscher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamping device
- Patent number 12,071,683
- Issue date Aug 27, 2024
- KUNSHAN GO-VISIONOX OPTO-ELECTRONICS CO., LTD.
- Haitao Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 12,068,142
- Issue date Aug 20, 2024
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,065,725
- Issue date Aug 20, 2024
- Kioxia Corporation
- Yuta Konno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Roller for transporting a flexible substrate, vacuum processing app...
- Patent number 12,060,634
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with integrated cooling on a rotating drum
- Patent number 12,057,297
- Issue date Aug 6, 2024
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multicathode deposition system and methods
- Patent number 12,051,576
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Sanjay Bhat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Programmable electrostatic chuck to enhance aluminum film morphology
- Patent number 12,046,460
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Yaoying Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Programmable ESC to enhance aluminum film morphology
- Patent number 12,037,676
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Yaoying Zhong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holding body
- Patent number 12,033,880
- Issue date Jul 9, 2024
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...
- Publication number 20240424514
- Publication date Dec 26, 2024
- Leybold GmbH
- Maik Burkhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...
- Publication number 20240425971
- Publication date Dec 26, 2024
- ANGSTROM ENGINEERING INC.
- Jonathan Boulanger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Solvent Free Perovskite Deposition
- Publication number 20240425968
- Publication date Dec 26, 2024
- CubicPV Inc.
- Michael D. Irwin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417848
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417847
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...
- Publication number 20240410050
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES
- Publication number 20240412954
- Publication date Dec 12, 2024
- Dinkesh HUDERI SOMANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME
- Publication number 20240410054
- Publication date Dec 12, 2024
- MICO CERAMICS LTD.
- Min-Ho JI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION
- Publication number 20240401185
- Publication date Dec 5, 2024
- Li-Metal Corp.
- Maciej JASTRZEBSKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...
- Publication number 20240401186
- Publication date Dec 5, 2024
- ANGSTROM ENGINEERING INC.
- Jonathan Boulanger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20240392430
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- B08 - CLEANING
Information Patent Application
WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD
- Publication number 20240395512
- Publication date Nov 28, 2024
- Disco Corporation
- Kazuma SEKIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL
- Publication number 20240384416
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
- Publication number 20240379400
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADJUSTABLE CLAMP FOR PHYSICAL VAPOR DEPOSITION
- Publication number 20240376591
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Sathiyamurthi GOVINDASAMY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC SEAL SYSTEM FOR A VACUUM PROCESSING SYSTEM
- Publication number 20240368752
- Publication date Nov 7, 2024
- Plasma-Therm NES LLC
- Sarpangala Hariharakeshava Hegde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS
- Publication number 20240360543
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANETARY ROTATION SYSTEM WITH LUNAR ROTATION
- Publication number 20240337010
- Publication date Oct 10, 2024
- Vacuum Innovations LLC
- James OLIVER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING MACHINES, SUBSTRATE HOLDERS, AND SPUTTERING PROCESSES WI...
- Publication number 20240337009
- Publication date Oct 10, 2024
- Virginia Commonwealth University
- Santiago Vargas GIRALDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION DEVICE CAPABLE OF RECIPROCATING ROTATION AND LIFTING
- Publication number 20240327987
- Publication date Oct 3, 2024
- BETONE TECHNOLOGY SHANGHAI, INC.
- Weicong SONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...
- Publication number 20240332046
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR A THERMAL EVAPORATION SYSTEM AND METHOD OF COATING A...
- Publication number 20240318301
- Publication date Sep 26, 2024
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang Braun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT APPARATUS
- Publication number 20240318303
- Publication date Sep 26, 2024
- SHIBAURA MACHINE CO., LTD.
- Kazuhiro FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240321563
- Publication date Sep 26, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Shigeki MATSUNAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Brake Disk and Method of Making Same
- Publication number 20240309921
- Publication date Sep 19, 2024
- Tech M3, Inc.
- Nathan K. Meckel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DLC FILM DEPOSITION APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM I...
- Publication number 20240287668
- Publication date Aug 29, 2024
- Samsung Electronics Co., Ltd.
- Se Jun PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20240279792
- Publication date Aug 22, 2024
- SCREEN Holdings Co., Ltd.
- Hirofumi TONAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION COATING APPARATUS
- Publication number 20240271269
- Publication date Aug 15, 2024
- WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Ruiting HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
- Publication number 20240263298
- Publication date Aug 8, 2024
- InnoLux Corporation
- Cheng-Wei LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Substrate holders

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Support structure for thermal processing systems

Method for cleaning electrostatic chuck

Substrate rotating apparatus

Metallic coating process for combustor panels using a barrel config...

Substrate processing device and method for manufacturing same

Apparatus and method for introducing an optical lens into a turning...

Tetrahedral amorphous hydrogenated carbon and amorphous siloxane di...

Fixture assembly for coating combustor panels

Method for solvent-free perovskite deposition

Transport carrier, deposition apparatus, and electronic device manu...

Magnetic levitation system, base and carrier of a magnetic levitati...

Methods for perovskite device processing by vapor transport deposition

Systems for depositing coatings on surfaces and associated methods

Deposition ring for thin substrate handling via edge clamping

Coatings for enhancement of properties and performance of substrate...

Semiconductor processing tool

Method for manufacturing film-formed molded product

Carrier component and coating developer device

In-situ film growth rate monitoring apparatus, systems, and methods...

Apparatus and methods of sublimation for repeatable uniform or patt...

Movement systems for sputter coating of non-flat substrates

Clamping device

Carrier with vertical grid for supporting substrates in coater

Film forming apparatus and film forming method

Roller for transporting a flexible substrate, vacuum processing app...

Deposition system with integrated cooling on a rotating drum

Multicathode deposition system and methods

Programmable electrostatic chuck to enhance aluminum film morphology

Programmable ESC to enhance aluminum film morphology

Wafer holding body

Patents Applicationslast 30 patents

COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...

Method for Solvent Free Perovskite Deposition

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...

PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...

DEPOSITION SYSTEM AND METHOD

WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD

SEMICONDUCTOR PROCESSING TOOL

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...

ADJUSTABLE CLAMP FOR PHYSICAL VAPOR DEPOSITION

DYNAMIC SEAL SYSTEM FOR A VACUUM PROCESSING SYSTEM

FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS

PLANETARY ROTATION SYSTEM WITH LUNAR ROTATION

SPUTTERING MACHINES, SUBSTRATE HOLDERS, AND SPUTTERING PROCESSES WI...

VAPOR DEPOSITION DEVICE CAPABLE OF RECIPROCATING ROTATION AND LIFTING

ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...

APPARATUS FOR A THERMAL EVAPORATION SYSTEM AND METHOD OF COATING A...

SURFACE TREATMENT APPARATUS

FILM FORMING APPARATUS

Brake Disk and Method of Making Same

DLC FILM DEPOSITION APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM I...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

EVAPORATION COATING APPARATUS

DEPOSITION APPARATUS AND DEPOSITION METHOD