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CPC
C23C14/50

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/50Substrate holders

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Patents Grantslast 30 patents

Information Patent Grant
Wafer chuck structure with holes in upper surface to improve temper...
- Patent number 12,272,585
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic vapor jet printing system
- Patent number 12,274,155
- Issue date Apr 8, 2025
- Universal Display Corporation
- Kent Khuong Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,272,590
- Issue date Apr 8, 2025
- Tokyo Electron Limited
- Junnosuke Taguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transfer apparatus and film deposition apparatus using transfer app...
- Patent number 12,270,100
- Issue date Apr 8, 2025
- SHINCRON CO., LTD.
- Yoshinori Ogo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming device, film-forming unit, and film-forming method
- Patent number 12,270,099
- Issue date Apr 8, 2025
- Takashi Iizuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus for coating of 3D-objects
- Patent number 12,272,525
- Issue date Apr 8, 2025
- EVATEC AG
- Stephan Voser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System, method and support for coating eyeglass lenses
- Patent number 12,261,031
- Issue date Mar 25, 2025
- Schneider GmbH & Co. KG
- Gunter Schneider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for producing layers with improved uniformity in...
- Patent number 12,258,661
- Issue date Mar 25, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Michael Vergöhl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrying device and semiconductor processing apparatus
- Patent number 12,252,776
- Issue date Mar 18, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter deposition
- Patent number 12,249,498
- Issue date Mar 11, 2025
- Dyson Technology Limited
- Michael Edward Rendall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Holding system for holding substrates during a processing of the su...
- Patent number 12,241,154
- Issue date Mar 4, 2025
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Max Siebert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming method of plasma resistant oxyfluoride coating layer
- Patent number 12,237,153
- Issue date Feb 25, 2025
- KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY
- Sung min Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputter desposition system
- Patent number 12,234,542
- Issue date Feb 25, 2025
- FOX BIOSYSTEMS NV
- Filip Delport
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing bismuth oxide nanowire films by heating in ups...
- Patent number 12,234,543
- Issue date Feb 25, 2025
- Institute of Analysis. Guangdong Academy of Sciences (China National Analytic...
- Fuxian Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition device capable of reciprocating rotation and lifting
- Patent number 12,227,845
- Issue date Feb 18, 2025
- Betone Technology Shanghai, Inc.
- Weicong Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Housing, mobile terminal, and sputter coating apparatus
- Patent number 12,228,759
- Issue date Feb 18, 2025
- Huawei Technologies Co., Ltd.
- Peiling Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and methods
- Patent number 12,227,832
- Issue date Feb 18, 2025
- RTX Corporation
- Brian T. Hazel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas mixing method to enhance plasma
- Patent number 12,224,159
- Issue date Feb 11, 2025
- SKY TECH INC.
- Ta-Hao Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-line monitoring of OLED layer thickness and dopant concentration
- Patent number 12,225,808
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolated volume seals and method of forming an isolated volume with...
- Patent number 12,217,982
- Issue date Feb 4, 2025
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shutter disc for a semiconductor processing tool
- Patent number 12,215,414
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Lin Wang
- B08 - CLEANING
Information Patent Grant
Device for conveying a sheet of substrate
- Patent number 12,208,972
- Issue date Jan 28, 2025
- Saint-Gobain Glass France
- Nicolas Cordero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum system and method to deposit a compound layer
- Patent number 12,209,302
- Issue date Jan 28, 2025
- EVATEC AG
- Kai Wenz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device and method of manufacturing substrate p...
- Patent number 12,211,706
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering device with microwave heating mechanism
- Patent number 12,195,842
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Molin Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multicathode PVD system for high aspect ratio barrier seed deposition
- Patent number 12,195,843
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Harish V. Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microchannel plate and method of making the microchannel plate with...
- Patent number 12,198,916
- Issue date Jan 14, 2025
- Elbit Systems of America, LLC
- Stephen Carroll
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for physical vapor deposition and method for forming a layer
- Patent number 12,191,127
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Hsin-Liang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for temperature control in a substrate processing chamber
- Patent number 12,183,559
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support structure for thermal processing systems
- Patent number 12,176,241
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250116002
- Publication date Apr 10, 2025
- MICO CERAMICS LTD.
- Hyosung PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION APPARATUS AND METHOD OF HYDROXYAPATITE-CONTAINING THIN FILM
- Publication number 20250109482
- Publication date Apr 3, 2025
- Brainy Inc.
- Nobukiyo Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION
- Publication number 20250101572
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Harish Y. PENMETHSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Support Structure for Thermal Processing Systems
- Publication number 20250096032
- Publication date Mar 20, 2025
- Mattson Technology, Inc.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PHYSICAL VAPOUR DEPOSITION OF METALLIC ACTIVE MATERIA...
- Publication number 20250092507
- Publication date Mar 20, 2025
- Li-Metal Corp.
- Maciej Jastrzebski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE HOLDER FOR MASS PRODUCTION OF SURFACE-ENHANCED RAMAN SCAT...
- Publication number 20250084527
- Publication date Mar 13, 2025
- TSINGHUA UNIVERSITY
- Zhengjun ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20250079135
- Publication date Mar 6, 2025
- SAMSUNG DISPLAY CO., LTD.
- Jun Hyeuk KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE LASER-BASED SAMPLE HEATER WITH SAMPLE EXCHANGE TURRET
- Publication number 20250066903
- Publication date Feb 27, 2025
- UT-Battelle, LLC
- CHRISTOPHER ROULEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION
- Publication number 20250066899
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Yen LIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS OF SUBLIMATION FOR REPEATABLE UNIFORM OR PATT...
- Publication number 20250051904
- Publication date Feb 13, 2025
- Vanderbilt University
- David ANDERSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS MIXING METHOD TO ENHANCE PLASMA
- Publication number 20250054732
- Publication date Feb 13, 2025
- SKY TECH INC.
- TA-HAO KUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Producing a Substoichiometric Layer of Titanium, Vanadiu...
- Publication number 20250051906
- Publication date Feb 13, 2025
- SOCIETE DES CERAMIQUES TECHNIQUES
- Aimée SAVOUREY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METALLIC COATING PROCESS FOR COMBUSTOR PANELS USING A BARREL CONFIG...
- Publication number 20250043412
- Publication date Feb 6, 2025
- RTX Corporation
- Frank J. Trzcinski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Perovskite Device Processing by Vapor Transport Deposition
- Publication number 20250029792
- Publication date Jan 23, 2025
- First Solar, Inc.
- Le Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...
- Publication number 20250011918
- Publication date Jan 9, 2025
- Seoul National University R&DB Foundation
- Gyu Chul Yi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20250014873
- Publication date Jan 9, 2025
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS
- Publication number 20250011919
- Publication date Jan 9, 2025
- The Batteries Sp. Z.O.O.
- Ayrat K. KHISAMOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION MACHINE WITH A THERMAL EVAPORATOR HAVING...
- Publication number 20250003053
- Publication date Jan 2, 2025
- Essilor International
- Olivier BEINAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...
- Publication number 20240425971
- Publication date Dec 26, 2024
- ANGSTROM ENGINEERING INC.
- Jonathan Boulanger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...
- Publication number 20240424514
- Publication date Dec 26, 2024
- Leybold GmbH
- Maik Burkhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Solvent Free Perovskite Deposition
- Publication number 20240425968
- Publication date Dec 26, 2024
- CubicPV Inc.
- Michael D. Irwin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417848
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417847
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...
- Publication number 20240410050
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES
- Publication number 20240412954
- Publication date Dec 12, 2024
- Dinkesh HUDERI SOMANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME
- Publication number 20240410054
- Publication date Dec 12, 2024
- MICO CERAMICS LTD.
- Min-Ho JI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION
- Publication number 20240401185
- Publication date Dec 5, 2024
- Li-Metal Corp.
- Maciej JASTRZEBSKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...
- Publication number 20240401186
- Publication date Dec 5, 2024
- ANGSTROM ENGINEERING INC.
- Jonathan Boulanger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20240392430
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- B08 - CLEANING

Substrate holders

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer chuck structure with holes in upper surface to improve temper...

Organic vapor jet printing system

Substrate processing apparatus

Transfer apparatus and film deposition apparatus using transfer app...

Film-forming device, film-forming unit, and film-forming method

Sputtering apparatus for coating of 3D-objects

System, method and support for coating eyeglass lenses

Device and method for producing layers with improved uniformity in...

Carrying device and semiconductor processing apparatus

Sputter deposition

Holding system for holding substrates during a processing of the su...

Forming method of plasma resistant oxyfluoride coating layer

Sputter desposition system

Method for preparing bismuth oxide nanowire films by heating in ups...

Vapor deposition device capable of reciprocating rotation and lifting

Housing, mobile terminal, and sputter coating apparatus

Deposition apparatus and methods

Gas mixing method to enhance plasma

In-line monitoring of OLED layer thickness and dopant concentration

Isolated volume seals and method of forming an isolated volume with...

Shutter disc for a semiconductor processing tool

Device for conveying a sheet of substrate

Vacuum system and method to deposit a compound layer

Substrate processing device and method of manufacturing substrate p...

Sputtering device with microwave heating mechanism

Multicathode PVD system for high aspect ratio barrier seed deposition

Microchannel plate and method of making the microchannel plate with...

Apparatus for physical vapor deposition and method for forming a layer

Apparatus for temperature control in a substrate processing chamber

Support structure for thermal processing systems

Patents Applicationslast 30 patents

CERAMIC SUSCEPTOR

FORMATION APPARATUS AND METHOD OF HYDROXYAPATITE-CONTAINING THIN FILM

MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION

Support Structure for Thermal Processing Systems

APPARATUS FOR PHYSICAL VAPOUR DEPOSITION OF METALLIC ACTIVE MATERIA...

SUBSTRATE HOLDER FOR MASS PRODUCTION OF SURFACE-ENHANCED RAMAN SCAT...

DEPOSITION APPARATUS AND METHOD OF OPERATING THE SAME

REMOTE LASER-BASED SAMPLE HEATER WITH SAMPLE EXCHANGE TURRET

METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION

APPARATUS AND METHODS OF SUBLIMATION FOR REPEATABLE UNIFORM OR PATT...

GAS MIXING METHOD TO ENHANCE PLASMA

Method for Producing a Substoichiometric Layer of Titanium, Vanadiu...

METALLIC COATING PROCESS FOR COMBUSTOR PANELS USING A BARREL CONFIG...

Methods for Perovskite Device Processing by Vapor Transport Deposition

AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS

PHYSICAL VAPOR DEPOSITION MACHINE WITH A THERMAL EVAPORATOR HAVING...

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...

COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...

Method for Solvent Free Perovskite Deposition

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...

PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...

DEPOSITION SYSTEM AND METHOD