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CPC
C23C14/50

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/50Substrate holders

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for improved high pressure plasma processing
- Patent number 12,368,028
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- William R. Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 12,365,976
- Issue date Jul 22, 2025
- Shibaura Mechatronics Corporation
- Shigeki Matsunaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diaphragm assembly for delimiting the coating region of a sputter s...
- Patent number 12,365,978
- Issue date Jul 22, 2025
- Solayer GmbH
- Dzmitry Hrunski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support body, manufacturing apparatus for support body, and manufac...
- Patent number 12,368,034
- Issue date Jul 22, 2025
- Keio University
- Atsushi Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming layer
- Patent number 12,362,160
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Hsin-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition device having contact structure and deposition system ha...
- Patent number 12,359,305
- Issue date Jul 15, 2025
- JOINSOLUTION CO., LTD.
- Sang Bin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition processing systems having active temperature control and...
- Patent number 12,359,306
- Issue date Jul 15, 2025
- Technetics Group LLC
- Angus McFadden
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, temperature control method of subst...
- Patent number 12,362,155
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 12,359,302
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and display panel manufacturing apparatus incl...
- Patent number 12,354,903
- Issue date Jul 8, 2025
- Samsung Display Co., Ltd.
- Gyungmin Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 12,354,854
- Issue date Jul 8, 2025
- Shibaura Mechatronics Corporation
- Hisashi Nishigaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning electrostatic chuck
- Patent number 12,347,716
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yueh-Lin Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for producing thin-film catalyst
- Patent number 12,343,716
- Issue date Jul 1, 2025
- SUZHOU TAONE SINCERE NANOMATERIAL TECHNOLOGY CO., LTD.
- Ruoqi Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus
- Patent number 12,338,526
- Issue date Jun 24, 2025
- Canon Anelva Corporation
- Masahiro Atsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing target material in deposition chamber with ti...
- Patent number 12,341,042
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Workpiece carrier device, method for coating a workpiece, and workp...
- Patent number 12,331,391
- Issue date Jun 17, 2025
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Rudolf Meiler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 12,331,392
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- B08 - CLEANING
Information Patent Grant
Mounting table structure, substrate processing apparatus, and metho...
- Patent number 12,315,707
- Issue date May 27, 2025
- Tokyo Electron Limited
- Motoi Yamagata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor substrate support power transmission components
- Patent number 12,300,474
- Issue date May 13, 2025
- Applied Materials, Inc.
- Paul L. Brillhart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for heating a wide bandgap substrate
- Patent number 12,291,773
- Issue date May 6, 2025
- SILANNA UV TECHNOLOGIES PTE LTD
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structures and methods for processing a semiconductor substrate
- Patent number 12,286,706
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ming-Yi Shen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater and stage having the heater
- Patent number 12,284,731
- Issue date Apr 22, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation method of niobium diselenide film with ultra-low fricti...
- Patent number 12,281,379
- Issue date Apr 22, 2025
- LANZHOU INSTITUTE OF CHEMICAL PHYSICS CAS
- Li Ji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Engineered multi-dimensional metallurgical properties in PVD materials
- Patent number 12,276,017
- Issue date Apr 15, 2025
- Vactronix Scientific, LLC.
- Scott P. Carpenter
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Transport device and method
- Patent number 12,276,019
- Issue date Apr 15, 2025
- VON ARDENNE Asset GmbH & Co. KG
- Christoph Kaiser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dummy bar configured to align laser diode bar during deposition of...
- Patent number 12,278,459
- Issue date Apr 15, 2025
- Mitsubishi Electric Corporation
- Masato Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck structure with holes in upper surface to improve temper...
- Patent number 12,272,585
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic vapor jet printing system
- Patent number 12,274,155
- Issue date Apr 8, 2025
- Universal Display Corporation
- Kent Khuong Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,272,590
- Issue date Apr 8, 2025
- Tokyo Electron Limited
- Junnosuke Taguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transfer apparatus and film deposition apparatus using transfer app...
- Patent number 12,270,100
- Issue date Apr 8, 2025
- SHINCRON CO., LTD.
- Yoshinori Ogo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Dielectric Deposition Ring with Fins for Physical Vapor Deposition
- Publication number 20250236947
- Publication date Jul 24, 2025
- Applied Materials, Inc.
- Ming-Jui LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION TOOL WITH DIELECTRIC COATED CHAMBER SIDEWALLS TO IMPROVE...
- Publication number 20250232959
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
- Publication number 20250215551
- Publication date Jul 3, 2025
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR PRODUCING THIN-FILM CATALYST
- Publication number 20250214074
- Publication date Jul 3, 2025
- SUZHOU TAONE SINCERE NANOMATERIAL TECHNOLOGY CO., LTD.
- Ruoqi QIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR UNIFORM COATING OF ROLLING SPHERES
- Publication number 20250207240
- Publication date Jun 26, 2025
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Sergei O. KUCHEYEV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD APPARATUS AND METHOD
- Publication number 20250207241
- Publication date Jun 26, 2025
- SPTS TECHNOLOGIES LIMITED
- Kyle HUTCHINGS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING FILM ON END FACES OF LASER DIODE BAR
- Publication number 20250192510
- Publication date Jun 12, 2025
- Mitsubishi Electric Corporation
- Masato SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES
- Publication number 20250191900
- Publication date Jun 12, 2025
- SCHNEIDER GMBH & CO. KG
- Gunter SCHNEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM LAYER DEPOSITION APPARATUS AND METHOD OF DEPOSITING A LAYER...
- Publication number 20250188594
- Publication date Jun 12, 2025
- Evatec AG
- Jurgen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARRANGEMENT FOR ROTATABLE POSITIONING OF A SUBSTRATE
- Publication number 20250188595
- Publication date Jun 12, 2025
- Scienta Omicron GmbH
- Martin HEISS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOUSING, MOBILE TERMINAL, AND SPUTTER COATING APPARATUS
- Publication number 20250155622
- Publication date May 15, 2025
- Huawei Technologies Co., Ltd
- Peiling Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SET COMPRISING A PHYSICAL VAPOR DEPOSITION MACHINE AND AN OBSTRUCTI...
- Publication number 20250154641
- Publication date May 15, 2025
- Essilor International
- Francis HENKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-CARRIER STRUCTURE
- Publication number 20250154653
- Publication date May 15, 2025
- SGL CARBON SE
- Shane BRAUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Surface Pre-oxidized AlCrVTiSiON Nano-gradient Coating and Preparat...
- Publication number 20250146124
- Publication date May 8, 2025
- Tianjin University of Technology and Education
- Tiegang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
- Publication number 20250146127
- Publication date May 8, 2025
- Japan Display Inc.
- Masanobu IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20250146125
- Publication date May 8, 2025
- Japan Display Inc.
- Masanobu IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL
- Publication number 20250137114
- Publication date May 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Lin WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...
- Publication number 20250129485
- Publication date Apr 24, 2025
- Bryan C. Hendrix
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME
- Publication number 20250125184
- Publication date Apr 17, 2025
- MiCo Ceramics Ltd.
- Min-Ho JI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250116002
- Publication date Apr 10, 2025
- MICO CERAMICS LTD.
- Hyosung PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION APPARATUS AND METHOD OF HYDROXYAPATITE-CONTAINING THIN FILM
- Publication number 20250109482
- Publication date Apr 3, 2025
- Brainy Inc.
- Nobukiyo Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION
- Publication number 20250101572
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Harish Y. PENMETHSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Support Structure for Thermal Processing Systems
- Publication number 20250096032
- Publication date Mar 20, 2025
- Mattson Technology, Inc.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PHYSICAL VAPOUR DEPOSITION OF METALLIC ACTIVE MATERIA...
- Publication number 20250092507
- Publication date Mar 20, 2025
- Li-Metal Corp.
- Maciej Jastrzebski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE HOLDER FOR MASS PRODUCTION OF SURFACE-ENHANCED RAMAN SCAT...
- Publication number 20250084527
- Publication date Mar 13, 2025
- TSINGHUA UNIVERSITY
- Zhengjun ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20250079135
- Publication date Mar 6, 2025
- SAMSUNG DISPLAY CO., LTD.
- Jun Hyeuk KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE LASER-BASED SAMPLE HEATER WITH SAMPLE EXCHANGE TURRET
- Publication number 20250066903
- Publication date Feb 27, 2025
- UT-Battelle, LLC
- CHRISTOPHER ROULEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION
- Publication number 20250066899
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Yen LIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS OF SUBLIMATION FOR REPEATABLE UNIFORM OR PATT...
- Publication number 20250051904
- Publication date Feb 13, 2025
- Vanderbilt University
- David ANDERSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS MIXING METHOD TO ENHANCE PLASMA
- Publication number 20250054732
- Publication date Feb 13, 2025
- SKY TECH INC.
- TA-HAO KUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Substrate holders

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for improved high pressure plasma processing

Film forming apparatus

Diaphragm assembly for delimiting the coating region of a sputter s...

Support body, manufacturing apparatus for support body, and manufac...

Method for forming layer

Deposition device having contact structure and deposition system ha...

Deposition processing systems having active temperature control and...

Substrate processing apparatus, temperature control method of subst...

Film deposition apparatus and film deposition method

Deposition apparatus and display panel manufacturing apparatus incl...

Film formation apparatus

Method for cleaning electrostatic chuck

Device and method for producing thin-film catalyst

Deposition apparatus

Method for depositing target material in deposition chamber with ti...

Workpiece carrier device, method for coating a workpiece, and workp...

Deposition system and method

Mounting table structure, substrate processing apparatus, and metho...

Semiconductor substrate support power transmission components

Methods and systems for heating a wide bandgap substrate

Structures and methods for processing a semiconductor substrate

Heater and stage having the heater

Preparation method of niobium diselenide film with ultra-low fricti...

Engineered multi-dimensional metallurgical properties in PVD materials

Transport device and method

Dummy bar configured to align laser diode bar during deposition of...

Wafer chuck structure with holes in upper surface to improve temper...

Organic vapor jet printing system

Substrate processing apparatus

Transfer apparatus and film deposition apparatus using transfer app...

Patents Applicationslast 30 patents

Dielectric Deposition Ring with Fins for Physical Vapor Deposition

DEPOSITION TOOL WITH DIELECTRIC COATED CHAMBER SIDEWALLS TO IMPROVE...

METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE

DEVICE AND METHOD FOR PRODUCING THIN-FILM CATALYST

SYSTEMS AND METHODS FOR UNIFORM COATING OF ROLLING SPHERES

PVD APPARATUS AND METHOD

METHOD FOR DEPOSITING FILM ON END FACES OF LASER DIODE BAR

INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES

VACUUM LAYER DEPOSITION APPARATUS AND METHOD OF DEPOSITING A LAYER...

ARRANGEMENT FOR ROTATABLE POSITIONING OF A SUBSTRATE

HOUSING, MOBILE TERMINAL, AND SPUTTER COATING APPARATUS

SET COMPRISING A PHYSICAL VAPOR DEPOSITION MACHINE AND AN OBSTRUCTI...

SUBSTRATE-CARRIER STRUCTURE

Surface Pre-oxidized AlCrVTiSiON Nano-gradient Coating and Preparat...

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...

FILM FORMATION APPARATUS

SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...

CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME

CERAMIC SUSCEPTOR

FORMATION APPARATUS AND METHOD OF HYDROXYAPATITE-CONTAINING THIN FILM

MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION

Support Structure for Thermal Processing Systems

APPARATUS FOR PHYSICAL VAPOUR DEPOSITION OF METALLIC ACTIVE MATERIA...

SUBSTRATE HOLDER FOR MASS PRODUCTION OF SURFACE-ENHANCED RAMAN SCAT...

DEPOSITION APPARATUS AND METHOD OF OPERATING THE SAME

REMOTE LASER-BASED SAMPLE HEATER WITH SAMPLE EXCHANGE TURRET

METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION

APPARATUS AND METHODS OF SUBLIMATION FOR REPEATABLE UNIFORM OR PATT...

GAS MIXING METHOD TO ENHANCE PLASMA