The present invention generally relates to limited rotation motor systems, and relates in particular to systems for designing limited rotation motor systems.
Limited rotation motors generally include stepper motors and constant velocity motors. Certain stepper motors are well suited for applications requiring high speed and high duty cycle sawtooth scanning at large scan angles. For example, U.S. Pat. No. 6,275,319 discloses an optical scanning device for raster scanning applications.
Limited rotation motors for certain applications, however, require the rotor to move between two positions with a precise and constant velocity rather than by stepping and settling in a sawtooth fashion. Such applications require that the time needed to reach the constant velocity be as short as possible and that the amount of error in the achieved velocity be as small as possible. Constant velocity motors generally provide a higher torque constant and typically include a rotor and drive circuitry for causing the rotor to rotate about a central axis, as well as a position transducer, e.g., a tachometer or a position sensor, and a feedback circuit coupled to the transducer that permits the rotor to be driven by the drive circuitry responsive to an input signal and a feedback signal. For example, U.S. Pat. No. 5,424,632 discloses a conventional two-pole limited rotation motor.
Such limited rotation motors may be used, for example, in a variety of laser scanning applications, such as high speed surface metrology. Further laser processing applications include laser welding (for example high speed spot welding), surface treatment, cutting, drilling, marking, trimming, laser repair, rapid prototyping, forming microstructures, or forming dense arrays of nanostructures on various materials.
The processing speeds of such systems are typically limited by one or more of mirror speed, X-Y stage speed, material interaction and material thermal time constants, the layout of target material and regions to be processed, and software performance. Generally, in applications where one or more of mirror speed, position accuracy, and settling time are factors that limit performance, any significant improvement in scanning system open loop gain may translate into immediate throughput improvements.
In the limited rotation motor actuator, the open-loop gain is determined by the torque constant of the motor, the inertia of the mirror and rotor structure, and the gain characteristics of the power amplifier. Change in the design of the system, such as changes of head from one size to another size, may cause significant changes in total inertia, and consequently the open-loop gain. Such systems, however, typically must be designed and constructed in order to fully evaluate their performance.
There is a need, therefore, for improved limited rotation motor system, and more particularly, there is a need for optimizing the performance of limited rotation motors.
The invention provides an optimization system for optimizing the performance of a laser processing system that employs a limited rotation motor in accordance with an embodiment. The optimization system includes an input unit for receiving input parameters including stroke speed, stroke delay, jump speed and jump delay, and includes an evaluation unit for identifying one of an optimal stroke speed or stroke quality for achieving a desired processing performance. In accordance with various further embodiments, the evaluation unit identifies an optimal marking speed for achieving a desired marking quality, and in further embodiments, the evaluation unit identifies an optimal marking quality for achieving a desired marking speed.
The following description may be further understood with reference to the accompanying drawings in which:
The drawings are shown for illustrative purposes only.
In accordance with various embodiments of the invention, motor performance in a limited rotation motor system is optimized either for speed or for quality by identifying a particular combination of marking speed (MS), marking delay (MD), jump speed (JS), jump delay (JD), and Laser on-off delay (Lon/off) that achieves the highest speed or quality. The combination of factors that yields the output performance is identified by obtaining a real or virtual image, and comparing the real or virtual image with the input commands for a particular mark or character. The comparison identifies a set of differences between the input data and the real or virtual image for a collection of points on the input data. The system then either obtains an average of the differences for a mark or character (average marking error) or obtains the largest single marking error (maximum marking error). The combination of factors (MS, MD, JS, JD, Lon/Loff) that yields the smallest error for either speed or quality is then chosen.
A system and method, therefore, are provided to optimize the performance of a two-dimensional laser marking system. The marking system in accordance with an embodiment includes two optical scanners. Each scanner includes a limited rotation motor as the actuator. An optimization technique based on this is performed by marking simulations with a model derived from a marking head. For a given pattern, the optimized command sets are determined from simulated marking results of all practical settings of command parameters. Marking quality optimization is achieved by choosing the best quality marking among all markings of the same speed, while marking speed optimization is obtained by searching the highest marking speed that maintains a specified marking quality. Simulation and experimental results show up to 40% improvement in the marking speed, or four times improvement on marking quality, as compared with the standard zero mark command sets.
Laser marking systems are widely used in industries with applications ranging from marking labels on the semiconductor wafer to engines of very large trucks. In these applications, marking is performed by deflecting the incoming laser beam with two individually controlled mirrors to create horizontal and vertical movements of the beam spot on the marking surface. Usually the mirrors are driven by a specially designed direct current (DC) limited rotation torque motor sometimes called a galvanometer. The speed of marking a given pattern is limited by the speed of the servo system with the motor. With the continuing demand for more efficient production of limited rotation motors, improving the marking speed while maintaining a specified marking quality has become a challenge for marking system designs and users.
From a control system perspective, a laser marking system may be characterized as a servo motor system wherein the marking laser beam is required to follow faithfully to the set of strokes that draw the desired pattern. Although the quality of the marking is related to the overall tracking errors, it is the differences between the reference marking pattern and the actual marking that determines the quality of the marking. Since the actual marking consists of only portions of the overall time response of the scanner movement, the optimization schemes that minimize overall tracking errors may not result in the optimal marking performance of the marking system.
Two functions proposed herein may be used in accordance with various embodiments of the invention to evaluate the performance of the marking system based on the quality of the actual marking: these are the maximum marking error (MME) and the average marking error (AME).
To generate the marking commands for a given marking pattern, the pattern may be broken up into small line segments called strokes. Each stroke includes a constant speed ramp command followed by a fixed delay time. The speed of the ramp is called Mark Speed (MS), and the delay time is called Mark Delay (MD). Methods are proposed herein to select the optimal MS and MD setting for a given marking head and marking pattern using marking quality evaluation functions.
An X-Y laser marking system in accordance with an embodiment includes two scanners. The horizontal axis of the marking spot may be defined as the X-axis and the vertical axis may be defined as the Y-axis. The scanner in each axis consists of a limited rotation torque as the actuator, a mirror as a beam deflecting device and associated control and driver electronics. A focusing lens may also be inserted in the beam path between the target plane and the Y-axis mirror to reduce the spot size and increase the energy density of the laser spot.
During laser marking, the laser beam is projected from the laser head onto the target to be marked, called marking plane. The X and Y mirrors in the path of the laser beam control the position of the beam spot on the marking plane by the rotation angles of the X and Y scanner, respectively. Marks are created at the interaction points between the target material and the laser.
The position reference commands to each scanner for marking a given pattern are continuous waveforms of desired angular positions of the X and Y scanner. These position reference commands are generated from a set of stroke vectors and the mark speed and mark delay settings. Each stroke vector is a straight-line segment from which the whole pattern is constructed. If we project the pattern on the complex plane, the segments may be visualized as a vector with the direction of the vector represents the moving direction of the laser beam during marking. Since the pattern to be marked is represented by a sequence of small vectors, this type of laser marking is also called vector marking.
For example, the sequence of vectors that results in capital letter A is shown at 30 in
Note that the MS and MD settings are global settings. In other words, the same MS and MD values are used for all the vectors in the pattern. The total time from the beginning of marking to the end of marking determines the speed of marking the given pattern. Larger MS and smaller MD for the same vector sequence results in higher marking speed, but larger MS may also result in significant degradation of quality.
For example,
Because servo systems have finite tracking capabilities, for a fixed MD value, the higher the MS value, the faster the marking speed. However, the higher marking speed is achieved at the expense of a degraded marking quality.
Since the marking speed is determined not only by the MS value but also by the MD value, there are many combinations of the MS and MD values that result in the same marking speed (i.e., total marking speed=MS+MD and total jump speed=JS+JD). Applicant has discovered that there exists a set of MS and MD that gives the best marking value. It is also desirable in some applications to find the maximum marking speed achievable at an accepted marking quality level.
The basic concept of evaluating marking quality is to compare the resulting marking with the reference pattern. This is achieved by reconstructing the reference pattern and the actual marked pattern from its corresponding time sequences. The trajectories of the actual marking are derived from only portions of the time responses of the scanner heads. This is because in character marking, as in many other vector marking applications, the laser beam is turned off for some moves of the scanner. The vector with dashed line in
To quantify the marking errors, we divide each continuous marking spatially into equal length sections and form error vectors by connecting the corresponding division points between the reference marking and the actual markings.
For example, as shown in
The differences (or error vectors) between the markings 96 and 98 at the error points may be generated by choosing an increment value for spacing between error vectors. For example, In accordance with an embodiment, the system may characterize each stroke of the markings 96 as a string of positions. The beginning and end of each stroke is identified, and the mid point along the stroke is also identified. If the stroke is rather long, the process may again identify a mid point in each half of the full stroke. The system would then characterize each stroke of the markings 98 as a string of positions and identify the ends and midpoint(s) as appropriate and as done with the markings 96. Each error vector is then defined as the distance between corresponding points on the markings 96 and 98.
For example,
In accordance with further embodiments, error vectors may be determined in a grid pattern that covers the mark with a uniform spacing between each point of about 10 to 1000 micrometers. These error vectors may be quantified in a variety of ways. Again, the lengths of these error vectors defined indicate the deviations of the actual marking from the reference marking.
Two evaluation functions of marking qualities may be employed to quantify the error vectors: Maximum Marking Error (MME) is defined as the maximal length of all the error vectors, while Average Marking Error (AME) is defined as the average of the lengths of all the error vectors. The MME, therefore, is the maximal deviation of the actual marking from the ideal marking. The AME, on the other hand, represents the marking errors for the entire pattern. In fact, for sufficiently large division numbers, AMR indicates the total area of the band formed by the reference marking and actual marking.
With the evaluation function defined, the optimal command sets for a given pattern may be determined by comparing the quality evaluation function values among all possible markings. Specifically, markings with different MS and MD settings for the desired pattern may be simulated, the marking speed together with the marking quality defined by the evaluation function values may be recorded.
For quality-optimal markings the command sets may be selected that give the smallest evaluation function numbers at a specified marking speed. For speed-optimal markings, the command set may be chosen that yields the highest marking speed at a pre-defined quality level.
Simulation and experimental results of command set optimization on commercially available marking heads show that scanning system may be optimized in accordance with the invention. The scanner model used in marking simulation is derived from the marking head used using system identification techniques. A string of “ABCDEFGHIJ” is used in the marking. Marking speed and marking delay settings are normalized. Larger values in MS and MD represent higher marking speed and longer mark delay period respectively. The marking quality values, i.e., MME and AME values, are normalized by the height of the characters marked and converted in decibels.
In marking quality optimization, the marking quality values MME and AME are calculated for all practical combinations of MS and MD that result in the given marking speed.
In accordance with another embodiment, the invention provides that the quality of a marking may be quantified by comparing the desired marking with a virtual marking rather than an actual marking. A virtual marking is one that is determined through mathematical modeling to represent the actual marking in a particular system under a particular set of parameters.
Upon quantifying the quality of a marking, the system may incrementally adjust one of MS, MD, JS, JD while maintaining either speed or quality fixed to determine the optimal set of parameters. The process is then repeated until the desired performance characteristic (speed or quality) begins to fall. In other embodiments, the system may employ a look-up table of previously recorded values, and simply look up the highest achievable speed or quality for the desired performance.
A virtual marking system is shown in
A computer model, therefore, simulates the laser marking system. The virtual optical marker converts a specified pattern to be marked into the image of a marked pattern together with various real time signals of the marker in marking the given pattern. As shown in
The system 160 also includes a closed loop actuator system 164 that simulates the dynamic response of the beam-deflecting surfaces actuated by the motors, as well as optical-mechanical models or components 166 are employed to translate the mirror angle into beam trajectories on the target surface. The laser marking system receives customer adjustable scanning parameters via a parameter input unit 168 and a pattern to be marked via a pattern input 170. The closed-loop actuator system 164 provides the motor current, power, and angular position trajectory as shown at 172.
The optical-mechanical components provide laser beam trajectories on mirrors, lenses and the target as shown at 174. The system 160 may also include a laser system 176, and the system provides images of the marked patterns as shown at 178.
The independent laser control signal is derived as a timed data sequence representing the one and off status of the laser at any given time during the marking process. The motor system model simulates the time responses of the X and Y motor systems subject to the input command generated above. The primary output of the motor system model is the angular displacement of the X and Y mirrors represented by an array of angular position data together with the corresponding time values. Additional output from the motor system includes real time motor current and power dissipation of the motor system.
The optical path of the laser beam may be as shown in
By combining the laser control signal and the mirror position trajectories, the laser light intensity profile trajectories on the mirror, lens and target surface may be constructed mathematically. The marked image is then obtained by shape and/or material property changes on the target surface as the result of the interaction between the surface material and laser intensity changes during the marking process.
The customer adjustable scanning parameters may include mark speed, which is the speed of the reference beam during marking, mark delay, which is the wait period at the end of each marking, jump speed, which is the speed of the reference beam during jump, jump delay, which is the wait period at then end of each jump, laser-on delay, which is the time difference between the beginning of reference marking and turning the laser beam on, and laser-off delay, which is the time difference between the end of reference marking and turning the laser beam off.
During operation, the specified pattern to be marked is first converted into a sequence of a laser beam positions. Next, the desired laser beam position is translated into angular positions of the X and Y axis mirror using the user specified marking parameters, including marking speed, mark delay, jump speed and jump delay. The desired mirror angular position commands are represented by an array of position values together with the corresponding time values. A pattern to be marked may be defined as the desired trajectory of the mirror positions with its corresponding mark and jump control.
The command generation and laser control unit 162 converts the pattern into the position commands to the scan head using the user defined scanning parameters, i.e., MS, MD, JS, JD, Laser-On and Laser-Off. These commands are represented by a time-stamped sequence of reference mirror positions of both the X and Y axis. The sequence of laser on/off control is also generated using the Laser-On and Laser-Off control parameters. Note that the following relationships exist between the above parameters: MS*MS=MSx*MSx+MSy*MSy and JS*JS=JSx*JSx+JSy*JSy.
The positions of the X and Y mirrors are generated using the closed-loop system model of the motor system. There are different ways of representing the system model for the purpose of simulating the time response of the optical scanners. These include a set of differential/difference equations, transfer functions, state space matrices, frequency response data, and graphical system models such as the model discussed below. The mathematical model of the closed-loop motor system 164 may either be derived from physical laws or be identified from real system measurements, or may be formed as a combination of both. The purpose is to simulate the dynamic response of the motor system when commanded with the command signals generated by the command generation and laser control system 162.
The optical-mechanical components 166 convert a given mirror position into the position of the laser beam on the marking surface. This is done by modeling the laser beam from the laser source as a set of parallel lines in the space. The mirrors are then modeled as the planes in the space. First, the beam landing on the focusing lens is calculated as lines reflected by two planes defined by the x and y mirror positions. Next, beam position and shape on the marking surface is calculated using the optical equations that govern the lens used. For example, for standard lenses, the in and out beam follows the cosine rule, and the F-theta lenses, the out beam angle is proportional to the angle of the in beam. Laser control is used in determining whether or not a beam spot should be formed on the marking surface.
The trajectory of the laser spot on the marking surface is then used to form the image of markings. This is done by linear superposition of beam spots of all the beams landed on a given area of the marking surface during the entire process of marking. Mathematically, this is done by a multidimensional convolution.
Those skilled in the art will appreciate that numerous modifications and variations may be made to the above disclosed embodiments without departing from the spirit and scope of the invention.
The present application claims priority to U.S. Provisional Patent Application Ser. No. 60/538,842 filed Jan. 23, 2004, and claims priority to U.S. Provisional Patent Application Ser. No. 60/575,255 filed May 28, 2004, and claims priority to U.S. Provisional Patent Application Ser. No. 60/613,962 filed Sep. 28, 2004.
Number | Date | Country | |
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60538842 | Jan 2004 | US | |
60575255 | May 2004 | US | |
60613962 | Sep 2004 | US |