Patent Application
20150078517
This disclosure, in general, relates to systems and methods for testing ceramic coatings.
In industries, such as the semiconductor, microfluidics, micro-electromechanical (MEMs), and optical industries, the quality of substrates and layers upon which or within which devices are constructed influences the performance of such devices. In particular, impurities within substrates or ceramic layers can influence the performance of the substrate or can leach into other device layers, influencing the functionality of other layers or influencing the performance of the device. As such, testing substrates and ceramic layers for impurities can improve process control and enhance device performance.
Conventional techniques for testing quality and composition of ceramic layers on substrates rely upon destructive testing. A sample from a batch of coated substrates is selected and subjected to destructive testing. From the results of the destructive testing, the quality and composition of the substrates and coatings of the remaining substrates is inferred. However, such testing reduces yields by destroying expensive substrate stock and may have limited use when dealing with ceramic coatings that are resistant to conventional destructive testing methods.
As such, an improved testing method would be desirable.
The present disclosure may be better understood, and its numerous features and advantages made apparent to those skilled in the art by referencing the accompanying drawings.
The use of the same reference symbols in different drawings indicates similar or identical items.
In an exemplary embodiment, a method for testing a ceramic coating on a substrate includes directing an x-ray source at a surface of the ceramic coating and detecting fluorescence emanating from the coating. The fluorescence emanating from the coating can be indicative of impurities within the coating. Characteristics of the fluorescence, such as wavelength, frequency or energy, can be compared with characteristics of impurities. As such, impurities can be detected using such a method. In a further example, relative characteristics of impurities, such as peak height or counts, can be compared to relative characteristics of electromagnetic signals indicative of other components of the ceramic coating, and as a result, relative composition of the ceramic coating can be measured.
In a particular example, the ceramic coating is an amorphous ceramic coating or a polycrystalline ceramic coating. The substrate over which the coating is formed can be crystalline, such as monocrystalline. In particular, the crystalline substrate can be a monocrystalline silicon substrate. Applicants have discovered that when directing x-rays at a coating that is polycrystalline or amorphous and disposed over a crystalline substrate, the x-rays penetrate and migrate through the coating and reflect from a surface of the crystalline substrate.
For example, as illustrated in
When the x-rays 210 impinge on the surface 216 of the ceramic coating 204, the x-rays migrate to the surface 214, which forms an interface between the crystalline substrate 202 and the ceramic coating 204. At the interface 214, the x-rays are reflected, penetrating not greater than, for example, 100 Å into the crystalline structure of the substrate 202 before being reflected back through the ceramic coating 204. As the x-rays migrate through the bulk material of the ceramic coating, the x-rays can cause constituent atoms and impurities to fluoresce, emitting electromagnetic radiation indicative of the atom fluorescing.
Returning to
It has been discovered that the distance the x-rays 210 will traverse a ceramic coating 204 toward the interface 214 can be at least 10 nm and is not limited by the wavelength of the x-rays 210. For example, the thickness can be at least 100 nm, such as at least 1 μm, or even at least 5 μm. In an example, the coating thickness is not greater than 1 mm.
In a particular example, the coating is amorphous. In another example, the coating is polycrystalline. The coating can include alumina, yttria, aluminum nitride, amorphous silicon, polycrystalline silicon, zirconia, tantalum oxide, or any combination thereof. In general, the coating may be x-ray transmissive. In an example, the coating comprises is an alumina-based ceramic. In another example, the coating is an aluminosilicate-based ceramic. For example, the coating can be doped with a variety of dopants, such as yttrium or zirconium, or can include various impurities, such as iron, copper, and other transition metals. In particular example, the coating includes yttria doped alumina.
Returning to
Further, relative characteristics of the detected electromagnetic radiation can be compared between detected impurities and constituent atoms to determine composition and levels of impurity, as illustrated at 108 of
In a particular example,
In a first aspect, a method of testing for impurities includes directing an x-ray source toward a surface at an angle α relative to the plane of the surface, the surface defined by a ceramic coating over a crystalline substrate; detecting electromagnetic radiation emitted from the ceramic coating at an angle θ different from the angle α and its supplementary angle; and comparing characteristics of the detected electromagnetic radiation to characteristics associated with impurities.
In an example of the first aspect, the angle α is not greater than a critical angle. For example, the angle α is not greater than 15° relative to the plane of the surface, such as not greater than 10°. In an example, the angle α is in a range of 0.01° to 10°, such as a range of 0.015° to 5.0°, or a range of 1.0° to 5.0°.
In another example of the first aspect and the above examples, the angle θ is greater than the critical angle. For example, the angle θ is in a range of 20° to 160° relative to the plane of the surface, such as a range of 45° to 135°, or a range of 75° to 105°.
In a further example of the first aspect and the above examples, the x-rays derived from the x-ray source have a wavelength in the range of 0.01 nm to 10 nm, such as a range of 0.01 nm to 1 nm.
In an additional example of the first aspect and the above examples, the crystalline substrate is a monocrystalline silicon substrate.
In another example of the first aspect and the above examples, the ceramic coating is polycrystalline.
In a further example of the first aspect and the above examples, the ceramic coating is amorphous.
In an additional example of the first aspect and the above examples, the ceramic coating is x-ray transmissive.
In another example of the first aspect and the above examples, the ceramic coating comprises alumina. For example, the ceramic coating can include yttria doped alumina.
In a further example of the first aspect and the above examples, the impurity is a transition metal.
In an additional example of the first aspect and the above examples, the fluoresced electromagnetic radiation has a wavelength in a range of 0.05 nm to 30 nm.
In another example of the first aspect and the above examples, the ceramic coating has a thickness of at least 10 nm. For example, the thickness is at least 100 nm, such as at least 1 micron, or at least 5 microns. In an example, the thickness is not greater than 1 mm.
In a further example of the first aspect and the above examples, the characteristic includes wavelength, frequency, or energy.
In an additional example of the first aspect and the above examples, the method further includes determining a concentration of the impurity based on a relative characteristic of the detected electromagnetic radiation. For example, the relative characteristic includes peak height or count associated with an impurity atom relative to the peak height or count of electromagnetic radiation associated with a constituent atom.
Note that not all of the activities described above in the general description or the examples are required, that a portion of a specific activity may not be required, and that one or more further activities may be performed in addition to those described. Still further, the order in which activities are listed are not necessarily the order in which they are performed.
In the foregoing specification, the concepts have been described with reference to specific embodiments. However, one of ordinary skill in the art appreciates that various modifications and changes can be made without departing from the scope of the invention as set forth in the claims below. Accordingly, the specification and figures are to be regarded in an illustrative rather than a restrictive sense, and all such modifications are intended to be included within the scope of invention.
As used herein, the terms “comprises,” “comprising,” “includes,” “including,” “has,” “having” or any other variation thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, article, or apparatus that comprises a list of features is not necessarily limited only to those features but may include other features not expressly listed or inherent to such process, method, article, or apparatus. Further, unless expressly stated to the contrary, “or” refers to an inclusive-or and not to an exclusive-or. For example, a condition A or B is satisfied by any one of the following: A is true (or present) and B is false (or not present), A is false (or not present) and B is true (or present), and both A and B are true (or present).
Also, the use of “a” or “an” are employed to describe elements and components described herein. This is done merely for convenience and to give a general sense of the scope of the invention. This description should be read to include one or at least one and the singular also includes the plural unless it is obvious that it is meant otherwise.
Benefits, other advantages, and solutions to problems have been described above with regard to specific embodiments. However, the benefits, advantages, solutions to problems, and any feature(s) that may cause any benefit, advantage, or solution to occur or become more pronounced are not to be construed as a critical, required, or essential feature of any or all the claims.
After reading the specification, skilled artisans will appreciate that certain features are, for clarity, described herein in the context of separate embodiments, may also be provided in combination in a single embodiment. Conversely, various features that are, for brevity, described in the context of a single embodiment, may also be provided separately or in any subcombination. Further, references to values stated in ranges include each and every value within that range.
The present application claims benefit of and is a non-provisional of U.S. Provisional Patent Application No. 61/878,550, entitled “SYSTEM AND METHOD FOR TESTING CERAMIC COATINGS” filed on Sep. 16, 2013, the entirety of which is herein incorporated by reference.
| Number | Date | Country | |
|---|---|---|---|
| 61878550 | Sep 2013 | US |
