The present invention generally relates to limited rotation motor systems, and relates in particular to systems for designing limited rotation motor systems.
Limited rotation motors generally include stepper motors and constant velocity motors. Certain stepper motors are well suited for applications requiring high speed and high duty cycle sawtooth scanning at large scan angles. For example, U.S. Pat. No. 6,275,319 discloses an optical scanning device for raster scanning applications.
Limited rotation motors for certain applications, however, require the rotor to move between two positions with a precise and constant velocity rather than by stepping and settling in a sawtooth fashion. Such applications require that the time needed to reach the constant velocity be as short as possible and that the amount of error in the achieved velocity be as small as possible. Constant velocity motors generally provide a higher torque constant and typically include a rotor and drive circuitry for causing the rotor to rotate about a central axis, as well as a position transducer, e.g., a tachometer or a position sensor, and a feedback circuit coupled to the transducer that permits the rotor to be driven by the drive circuitry responsive to an input signal and a feedback signal. For example, U.S. Pat. No. 5,424,632 discloses a conventional two-pole limited rotation motor.
A requirement of a desired limited rotation motor for certain applications is a system that is capable of changing the angular position of a load such as a mirror from angle A to angle B, with angles A and B both within the range of angular motion of the scanner, and both defined arbitrarily precisely, in an arbitrarily short time while maintaining a desired linearity of velocity within an arbitrarily small error. Both the minimum time of response of this system and the minimum velocity error are dominated by the effective bandwidth of the system. The effective bandwidth of the system, however, is governed by many factors, including the open loop gain of the system.
A limited rotation torque motor may be modeled or represented by a double-integrator model plus several flexible modes and low frequency non-linear effects. A typical closed-loop servo system for a galvanometer includes integral actions for low frequency uncertainties and a notch filter for high frequency resonant modes. System operation is chosen at the mid-frequency range where the system is well modeled by the rigid body. For a double integrator rigid body model, there is a direct relationship between the open-loop gain and the cross-over frequency on the frequency response plot. For example, an automatic tuning system for a servowriter head positioning system is disclosed in Autotuning of a servowriter head positioning system with minimum positioning error, Y. H. Huang, S. Weerasooriya and T. S. Low, J. Applied Physics, v.79 pp. 5674-5676 (1996).
Such limited rotation motors may be used, for example, in a variety of laser scanning applications, such as high speed surface metrology. Further laser processing applications include laser welding (for example high speed spot welding), surface treatment, cutting, drilling, marking, trimming, laser repair, rapid prototyping, forming microstructures, or forming dense arrays of nanostructures on various materials.
The processing speeds of such systems are typically limited by one of more of mirror speed, X-Y stage speed, material interaction and material thermal time constants, the layout of target material and regions to be processed, and software performance. Generally, in applications where one or more of mirror speed, position accuracy, and settling time are factors that limit performance, any significant improvement in scanning system open loop gain may translate into immediate throughput improvements.
In the limited rotation motor actuator, the open-loop gain is determined by the torque constant of the motor, the inertia of the mirror and rotor structure, and the gain characteristics of the power amplifier. Change in the design of the system, such as changes of head from one size to another size, may cause significant changes in total inertia, and consequently the open-loop gain. Such systems, however, typically must be designed and constructed in order to fully evaluate their performance.
There is a need, therefore, for an improved method for designing and evaluating limited rotation motor system, and more particularly, there is a need for the efficient and economical production of limited rotation motor systems that provides maximum performance for specific applications.
The invention provides a virtual marking system for simulating the performance of a limited rotation motor system in accordance with an embodiment. The virtual marking system includes a command generation unit, a limited rotation motor system unit, and an optical-mechanical modeling unit. The command generation unit is for receiving data representative of a pattern to be marked and for providing a set of commands for marking the pattern to be marked. The limited rotation motor system unit is for receiving the set of commands for marking the pattern to be marked and for providing optical element response signals that are representative of virtual positions of an optical element. The optical-mechanical modeling unit is for receiving the optical element response signals and for providing a virtual image of the pattern to be marked.
The following description may be further understood with reference to the accompanying drawings in which:
The drawings are shown for illustrative purposes only.
In accordance with an embodiment, the invention provides that input commands are provided to a virtual limited rotation motor controller, and the virtual limited rotation motor controller provides output commands to a virtual motor, output shaft and mirror system. A position detection system records the position detection signals at the times that a laser would have been on, and thereby determines a virtual laser marking image.
A computer model, therefore, simulates the laser marking system. The virtual optical marker converts a specified pattern to be marked into the image of a marked pattern together with various real time signals of the marker in marking the given pattern.
The system 30 also includes a closed loop actuator system 34 that simulates the dynamic response of the beam-deflecting surfaces actuated by the motors, as well as optical-mechanical models or components 36 are employed to translate the mirror angle into beam trajectories on the target surface. The laser marking system receives customer adjustable scanning parameters via a parameter input unit 38 and a pattern to be marked via a pattern input 40. The closed-loop actuator system 34 provides the motor current, power, and angular position trajectory as shown at 42.
The optical-mechanical components provide laser beam trajectories on mirrors, lenses and the target as shown at 43. The system 30 may also include a laser system 44, and the system provides images of the marked patterns as shown at 48.
The optical path of the laser beam may be as shown in
By combining the laser control signal and the mirror position trajectories, the laser light intensity profile trajectories on the mirror, lens and target surface may be constructed mathematically. The marked image is then obtained by shape and/or material property changes on the target surface as the result of the interaction between the surface material and laser intensity changes during the marking process.
The customer adjustable scanning parameters may include mark speed (MS), which is the speed of the reference beam during marking, mark delay (MD), which is the wait period at the end of each marking, jump speed (JS), which is the speed of the reference beam during jump, jump delay (JD), which is the wait period at then end of each jump, laser-on delay (L-ON), which is the time difference between the beginning of reference marking and turning the laser beam on, and laser-off delay (L-OFF), which is the time difference between the end of reference marking and turning the laser beam off.
During operation, the specified pattern to be marked is first converted into a sequence of a laser beam positions. Next, the desired laser beam position is translated into angular positions of the X and Y axis mirror using the user specified marking parameters, including marking speed, mark delay, jump speed and jump delay. The desired mirror angular position commands are represented by an array of position values together with the corresponding time values. For example,
A pattern to be marked may be defined as the desired trajectory of the mirror positions with its corresponding mark and jump control. For example, pattern data shown in Table 1 below represent a jump to the origin of the field followed by the marking of the triangle 68 as shown in
The command generation and laser control unit 32 converts the pattern into the position commands to the scan head using the user defined scanning parameters, i.e., MS, MD, JS, JD, Laser-On and Laser-Off. These commands are represented by a time-stamped sequence of reference mirror positions of both the X and Y axis. The sequence of laser on/off control is also generated using the Laser-On and Laser-Off control parameters. Note that the following relationships exist between the above parameters: MS*MS=MSx*MSx+MSy*MSy and JS*JS=JSx*JSx+JSy*JSy.
The corresponding mathematical equations of the commands and laser control signals are derived as follows. Note that a marking job comprises a series of mark and jump commands. For a jump at time to from point A at (x1,y1) to point B at (x2,y2) on the making surface, the duration of the operation is T, where T=L/JS+JD, and where L is the distance between A and B and is defined as:
L={square root}{square root over ((x2−x1)2+(y2−y1)2)}
The commands to the x and y axis may now be defined as functions of time X(t) and Y(t)
The speed of x command JSx and that of y command JSy are solutions to the following equations:
JSx2+JSy2=JS2
and
|x2−x1|/JSx=|y2−y1|/JSy
The laser control signal LASER(t) is given by
where Laser-ON and Laser-OFF are laser on and laser off period, respectively.
Similarly, for a mark at time to from point A at (x1,y1) to point B at (x2,y2) on the making surface, the duration of the operation is T, where T=L/MS+MD, wherein L is the distance between A and B and is defined as:
L={square root}{square root over ((x2−x1)2+(y2−y1)2)}
The commands to the x and y axis may now be defined as functions of time X(t) and Y(t)
The speed of x command MSx and that of y command MSy are solutions to the following equations
MSx2+MSy2=MS2
and
|x2−x1|/MSx=|y2−y1|/MSy
The laser control signal LASER(t) is given by
The positions of the X and Y mirrors are generated using the closed-loop system model of the motor system. There are different ways of representing the system model for the purpose of simulating the time response of the optical scanners. These include a set of differential/difference equations, transfer functions, state space matrices, frequency response data, and graphical system models such as the model discussed below.
In particular and as shown in
The laser command sequence along the y axis initially jumps to zero (as shown at 92) and then waits for a jump delay 94 as shown in
The mathematical model of the closed-loop motor system 34 may either be derived from physical laws or be identified from real system measurements, or may be formed as a combination of both. The purpose is to simulate the dynamic response of the motor system when commanded with the command signals generated by the command generation and laser control system 32.
A limited rotation motor, for example, may be described by the following differential equation
{umlaut over (x)}=k*i
where {umlaut over (x)} is the angular displacement of the mirror, i is the driving current, and k is the torque constant of the motor. An equivalent transfer function is
X(s)/I(s)=k/s2
where X(s) and I(s) are the Laplace transforms of position x and i, respectively.
The optical-mechanical components 36 convert a given mirror position into the position of the laser beam on the marking surface. This is done by modeling the laser beam from the laser source as a set of parallel lines in the space. The mirrors are then modeled as the planes in the space. First, the beam landing on the focusing lens is calculated as lines reflected by two planes defined by the x and y mirror positions. Next, beam position and shape on the marking surface is calculated using the optical equations that govern the lens used. For example, for standard lenses, the in and out beam follows the cosine rule, and the F-theta lenses, the out beam angle is proportional to the angle of the in beam. Laser control is used in determining whether or not a beam spot should be formed on the marking surface.
As an example of how the beam position is determined, consider the following case with two mirrors, M1 and M2, and incoming beam L1, output beam L3. First, we represent the mirrors by planes in the space as M1 and M2, and incoming beam L1 as straight line in the space. The problem of finding the beam position of output beam L3 with a given mirror position becomes deriving the line equation of the line L3. Let the equation of mirror plane M1 be
where (x1,y1,z1), (x2,y2,z2), and(x3,y3,z3) are three known points in space that plane M1 passes. The equation of incoming beam L1 may be
where (x4,y4,z4) and (x5,y5,z5) are the two know points that line L1 passes.
As shown at 140 in
The reflection point of A on M1, A′ is calculated by
where D is the distance between point A and plane M1 and n is the directional vector of plane M1, which can be derived directly from the equation of M1.
Once points B and A′ are calculated, the reflecting line L2 is defined by the coordinates of B and A′ as shown at 142 in
The trajectory of the laser spot on the marking surface is then used to form the image of markings. This is done by linear superposition of beam spots of all the beams landed on a given area of the marking surface during the entire process of marking. Mathematically, this is done by a multidimensional convolution. For instance, in 2D case, we can represent the intensity distribution of a beam by a matrix with elements represent the intensity of beam at the position corresponding to the indexes of each element,
With the given trajectory of the center of the beams,
P=[1 1 1]
the trajectory of the laser beam intensity may be calculated as
The above virtual marking systems may be employed in limited rotation motors in order to evaluate ongoing performance of the limited rotation motor systems when used, for example, in specific applications such as laser marking.
Those skilled in the art will appreciate that numerous modifications and variations may be made to the above disclosed embodiments without departing from the spirit and scope of the invention.
The present application claims priority to U.S. Provisional Patent Application Ser. No. 60/538,842 filed Jan. 23, 2004, and claims priority to U.S. Provisional Patent Application Ser. No. 60/575,255 filed May 28, 2004, and claims priority to U.S. Provisional Patent Application Ser. No. 60/613,962 filed Sep. 28, 2004.
Number | Date | Country | |
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60538842 | Jan 2004 | US | |
60575255 | May 2004 | US | |
60613962 | Sep 2004 | US |