Number | Name | Date | Kind |
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5693889 | Nadolink | Dec 1997 |
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M. Jarosz, L. Kocsanyi, and J. Giber, "In situ deformation measurement on e surface of silicon wafers." J. Phys. E: Sci. Instrum., vol. 15, No. 7, pp. 746-748 Copyright 1982 The Institute of Physics, Jul. 1982. |