Claims
- 1. A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:
- a pressurized vessel capable of withstanding pressures of at least about 800 pounds per square inch and having a chamber for containing the substrate to be cleaned and a volume of the pressurized fluid solvent;
- a primary flow line extending from and in fluid communication with the chamber, the primary flow line including a pump for continuously cycling a primary flow of the pressurized fluid solvent therethrough;
- at least one filter positioned along the primary flow line to continuously remove contaminants from the pressurized fluid solvent of the primary flow, the primary flow line configured to cycle the pressurized fluid solvent of the primary flow back to the chamber after passing through the filter;
- a secondary flow line extending from and in fluid communication with the chamber, the secondary flow line including an evaporator to evaporate a secondary flow of the pressurized fluid solvent directed through the secondary flow line into a vapor and to separate contaminants therefrom; and
- a condenser in fluid communication with the evaporator to liquify the vapor from the evaporator to create rejuvenated pressurized fluid solvent substantially free of contaminants, the condenser also in fluid communication with the chamber to redirect the rejuvenated pressurized fluid solvent to the chamber for further use.
- 2. The system of claim 1, wherein the evaporator and the condenser each include a heat exchanger for adjusting temperature respectively therein.
- 3. The system of claim 1, wherein the evaporator and the condenser each include a pressure regulator for adjusting pressure respectively therein.
- 4. The system of claim 1, wherein the evaporator and the condenser are provided together as an integral unit.
- 5. The system of claim 1, wherein the secondary flow line extends from and is in fluid communication with the chamber through fluid communication with the primary flow line so that the secondary flow of pressurized fluid solvent is obtained from at least a portion of the primary flow of pressurized fluid solvent.
- 6. The system of claim 1 further including a tank in fluid communication with the chamber for storing and supplying pressurized fluid solvent, and a pressure equalization line in fluid communication with and extending between the tank and at least one of either the filter and the chamber for displacing solvent vapor therebetween.
- 7. A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:
- a pressurized vessel capable of withstanding pressures of at least about 800 pounds per square inch and having a chamber for containing the substrate to be cleaned and a volume of the pressurized fluid solvent;
- a primary flow line extending from and in fluid communication with the chamber, the primary flow line including a pump for continuously cycling a primary flow of the pressurized fluid solvent therethrough;
- at least one filter positioned along the primary flow line to continuously remove contaminants from the pressurized fluid solvent of the primary flow, the primary flow line configured to cycle the pressurized fluid solvent of the primary flow back to the chamber after passing through the filter;
- a secondary flow line extending from and in fluid communication with the chamber, the secondary flow line including an evaporator to evaporate a secondary flow of the pressurized fluid solvent directed through the secondary flow line into a vapor and to separate contaminants therefrom; and
- a compressor in fluid communication with the evaporator to compress the vapor from the evaporator to create rejuvenated pressurized fluid solvent substantially free of contaminants, the compressor also in fluid communication with the chamber to redirect the rejuvenated pressurized fluid solvent to the chamber for further use.
- 8. A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:
- a pressurized vessel for containing the substrate to be cleaned and a volume of the pressurized fluid solvent, the pressurized vessel being capable of withstanding pressures of at least about 800 pounds per square inch;
- a primary flow line in fluid communication with the pressurized vessel, the primary flow line including a pump for continuously cycling a primary flow of the pressurized fluid solvent therethrough;
- at least one filter positioned along the primary flow line to continuously remove contaminants from the pressurized fluid solvent of the primary flow, the primary flow line configured to cycle the pressurized fluid solvent of the primary flow back to the pressurized vessel after passing through the filter;
- a secondary flow line in fluid communication with the pressurized vessel, the secondary flow line including an evaporator to evaporate a secondary flow of the pressurized fluid solvent directed through the secondary flow line into a vapor and to separate contaminants therefrom, the secondary flow line being in fluid communication with the pressurized vessel by extending from and in fluid communication with the primary flow line so that the secondary flow of pressurized fluid solvent is obtained from at least a portion of the primary flow of pressurized fluid solvent; and
- at least one of either
- (a) a condenser in fluid communication with the evaporator to liquify the vapor from the evaporator to create rejuvenated pressurized fluid solvent substantially free of contaminants, the condenser being in fluid communication with the pressurized vessel to redirect the rejuvenated pressurized fluid solvent to the pressurized vessel for further use, and
- (b) a vent connected in fluid communication with the evaporator to vent the vapor from the evaporator to a location outside the system, a source of new pressurized fluid solvent being provided in fluid communication with the pressurized vessel to replace new pressurized fluid solvent into the pressurized vessel.
- 9. A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:
- a pressurized vessel for containing the substrate to be cleaned and a volume of the pressurized fluid solvent, the pressurized vessel being capable of withstanding pressures of at least about 800 pounds per square inch;
- a primary flow line in fluid communication with the pressurized vessel, the primary flow line including a pump for continuously cycling a primary flow of the pressurized fluid solvent therethrough;
- at least one filter positioned along the primary flow line to continuously remove contaminants from the pressurized fluid solvent of the primary flow, the primary flow line configured to cycle the pressurized fluid solvent of the primary flow back to the pressurized vessel after passing through the filter;
- a secondary flow line in fluid communication with the pressurized vessel, the secondary flow line including an evaporator to evaporate a secondary flow of the pressurized fluid solvent directed through the secondary flow line into a vapor and to separate contaminants therefrom;
- at least one of either
- (a) a condenser in fluid communication with the evaporator to liquify the vapor from the evaporator to create rejuvenated pressurized fluid solvent substantially free of contaminants, the condenser being in fluid communication with the pressurized vessel to redirect the rejuvenated pressurized fluid solvent to the pressurized vessel for further use, and
- (b) a vent connected in fluid communication with the evaporator to vent the vapor from the evaporator to a location outside the system;
- a tank in fluid communication with the pressurized vessel for storing and supplying pressurized fluid solvent to the pressurized vessel; and
- a pressure equalization line in fluid communication with and extending between the tank and at least one of either the filter and the pressurized vessel for displacing solvent vapor therebetween.
- 10. A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:
- a pressurized vessel having a chamber for containing the substrate to be cleaned and a volume of the pressurized fluid solvent;
- a primary flow line extending from and in fluid communication with the chamber, the primary flow line including a pump for continuously cycling a primary flow of the pressurized fluid solvent therethrough;
- at least one filter positioned along the primary flow line to continuously remove contaminants from the pressurized fluid solvent of the primary flow, the primary flow line configured to cycle the pressurized fluid solvent of the primary flow back to the chamber after passing through the filter;
- a secondary flow line extending from and in fluid communication with the chamber and bypassing at least one filter, the secondary flow line including an evaporator to evaporate a secondary flow of the pressurized fluid solvent directed through the secondary flow line into a vapor and to separate contaminants therefrom; and
- a condenser in fluid communication with the evaporator to liquify the vapor from the evaporator to create rejuvenated pressurized fluid solvent substantially free of contaminants, the condenser also in fluid communication with the chamber to redirect the rejuvenated pressurized fluid solvent to the chamber for further use.
- 11. The system of claim 10, wherein the evaporator and the condenser each include a heat exchanger for adjusting the temperature respectively therein.
- 12. The system of claim 10, wherein the evaporator and the condenser each include a pressure regulator for adjusting the pressure respectively therein.
- 13. The system of claim 10, wherein the evaporator and the condenser are provided together as an integral unit.
- 14. The system of claim 10, wherein the secondary flow line extends from and is in fluid communication with the chamber through fluid communication with the primary flow line so that the secondary flow of pressurized fluid solvent is obtained from at least a portion of the primary flow of pressurized fluid solvent.
- 15. The system of claim 10, further including a tank in fluid communication with the chamber for storing and supplying pressurized fluid solvent, and a pressure equalization line in fluid communication with and extending between the tank and at least one of either the filter and the chamber for displacing solvent vapor therebetween.
- 16. A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:
- a pressurized vessel having a chamber for containing the substrate to be cleaned and a volume of the pressurized fluid solvent;
- a primary flow line extending from and in fluid communication with the chamber, the primary flow line including a pump for continuously cycling a primary flow of the pressurized fluid solvent therethrough;
- at least one filter positioned along the primary flow line to continuously remove contaminants from the pressurized fluid solvent of the primary flow, the primary flow line configured to cycle the pressurized fluid solvent of the primary flow back to the chamber after passing through the filter;
- a secondary flow line extending from and in fluid communication with the chamber and bypassing at least one filter, the secondary flow line including an evaporator to evaporate a secondary flow of the pressurized fluid solvent directed through the secondary flow line into a vapor and to separate contaminants therefrom; and
- a compressor in fluid communication with the evaporator to compress the vapor from the evaporator to create rejuvenated pressurized fluid solvent substantially free of contaminants, the compressor also in fluid communication with the chamber to redirect the rejuvenated pressurized fluid solvent to the chamber for further use.
- 17. A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:
- a pressurized vessel for containing the substrate to be cleaned and a volume of the pressurized fluid solvent;
- a primary flow line in fluid communication with the pressurized vessel, the primary flow line including a pump for continuously cycling a primary flow of the pressurized fluid solvent therethrough;
- at least one filter positioned along the primary flow line to continuously remove contaminants from the pressurized fluid solvent of the primary flow, the primary flow line configured to cycle the pressurized fluid solvent of the primary flow back to the pressurized vessel after passing through the filter;
- a secondary flow line in fluid communication with the pressurized vessel and bypassing at least one filter, the secondary flow line including an evaporator to evaporate a secondary flow of the pressurized fluid solvent directed through the secondary flow line into a vapor and to separate contaminants therefrom, the secondary flow line being in fluid communication with the pressurized vessel by extending from and in fluid communication with the primary flow line so that the secondary flow of pressurized fluid solvent is obtained from at least a portion of the primary flow of pressurized fluid solvent; and
- at least one of either
- (a) a condenser in fluid communication with the evaporator to liquify the vapor from the evaporator to create rejuvenated pressurized fluid solvent substantially free of contaminants, the condenser being in fluid communication with the pressurized vessel to redirect the rejuvenated pressurized fluid solvent to the pressurized vessel for further use, and
- (b) a vent connected in fluid communication with the evaporator to vent the vapor from the evaporator to a location outside the system, a source of new pressurized fluid solvent being provided in fluid communication with the pressurized vessel to replace new pressurized fluid solvent into the pressurized vessel.
- 18. A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:
- a pressurized vessel for containing the substrate to be cleaned and a volume of the pressurized fluid solvent;
- a primary flow line in fluid communication with the pressurized vessel, the primary flow line including a pump for continuously cycling a primary flow of the pressurized fluid solvent therethrough;
- at least one filter positioned along the primary flow line to continuously remove contaminants from the pressurized fluid solvent of the primary flow, the primary flow line configured to cycle the pressurized fluid solvent of the primary flow back to the pressurized vessel after passing through the filter;
- a secondary flow line in fluid communication with the pressurized vessel and bypassing at least one filter, the secondary flow line including an evaporator to evaporate a secondary flow of the pressurized fluid solvent directed through the secondary flow line into a vapor and to separate contaminants therefrom;
- at least one of either
- (a) a condenser in fluid communication with the evaporator to liquify the vapor from the evaporator to create rejuvenated pressurized fluid solvent substantially free of contaminants, the condenser being in fluid communication with the pressurized vessel to redirect the rejuvenated pressurized fluid solvent to the pressurized vessel for further use, and
- (b) a vent connected in fluid communication with the evaporator to vent the vapor from the evaporator to a location outside the system;
- a tank in fluid communication with the pressurized vessel for storing and supplying pressurized fluid solvent to the pressurized vessel; and
- a pressure equalization line in fluid communication with and extending between the tank and at least one of either the filter and the pressurized vessel for displacing solvent vapor therebetween.
Parent Case Info
This is a divisional of U.S. patent application Ser. No. 09/014,197, filed on Jan. 27, 1998, issued as U.S. Pat. No. 5,937,675, which is a divisional of U.S. patent application Ser. No. 08/680,909, filed Jul. 12, 1996, issued as U.S. Pat. No. 5,772,783, which is a continuation of U.S. patent application Ser. No. 08/506,508, filed Jul. 25, 1995, now abandoned, which is a continuation-in-part of U.S. patent application Ser. No. 08/336,588, filed Nov. 9, 1994, now abandoned. The entire disclosures of Serial Nos. 09/014,197, 08/680,909, 08/506,508, and 08/336,588 are incorporated herein by reference.
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Divisions (2)
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Number |
Date |
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Parent |
014197 |
Jan 1998 |
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Parent |
680909 |
Jul 1996 |
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Continuations (1)
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Number |
Date |
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Parent |
506508 |
Jul 1995 |
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Continuation in Parts (1)
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Number |
Date |
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Parent |
336588 |
Nov 1994 |
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