This disclosure relates generally to wire saws used to slice ingots into wafers and, more specifically, to systems used to connect an ingot to the wire saw.
Wire saw machines are used, for example, to slice ingots into wafers. These ingots are typically made of silicon or other semiconductor or solar grade material. The ingot is connected to structure of the wire saw by a bond beam and an ingot holder. The ingot is bonded with adhesive to the bond beam, and the bond beam is in turn bonded with adhesive to the ingot holder. The ingot holder is connected by any suitable fastening system to the wire saw structure.
In operation, the ingot is contacted by a web of moving wires in the wire saw that slice the ingot into a plurality of wafers. The wires initially contact the ingot on a periphery of the ingot opposite the bond beam and then slice through the ingot towards the bond beam to form the wafers. The wires may contact the bond beam after slicing through the ingot. The wafers typically remain attached to the bond beam after completion of the slicing operation. The ingot holder, bond beam, and wafers are then removed from the wire saw. The wafers are separated from the bond beam and subjected to wafering processes. The bond beam must then be removed from the ingot holder before the holder is returned to service. Because the bond beam and holder are bonded together with adhesive, separating them is often time-consuming and costly.
Previous attempts to use mechanisms other than adhesive to connect the bond beam to the ingot holder have not yielded satisfactory results. Thus, there exists a need for a more efficient and effective system to connect the bond beam to the ingot holder.
This section is intended to introduce the reader to various aspects of art that may be related to various aspects of the disclosure, which are described and/or claimed below. This discussion is believed to be helpful in providing the reader with background information to facilitate a better understanding of the various aspects of the present invention. Accordingly, it should be understood that these statements are to be read in this light, and not as admissions of prior art.
In one aspect, a system for connecting an ingot to a rail of a wire saw machine is disclosed and comprises an ingot holder, a bond beam, and a bar. The ingot holder is connected to the rail of the wire saw machine and to the bond beam. The bond beam has a first surface and an opposing second surface. The first surface is connected to the ingot holder and has a slot formed therein. A pair of protrusions are positioned adjacent the slot and the slot has an upward-facing recessed surface. The second surface is connected to the ingot. The bar is disposed between the bond beam and the ingot holder. The bar has a mating surface engaging the recessed surface of the slot and the mating surface is angled between about 5 degrees and about 10 degrees relative to the recessed surface when the bar is positioned within the slot. The engagement of the recessed surface by the angled mating surface prevents deflection of the protrusions and the second surface.
In another aspect, a bar for use in a wire saw configured to slice an ingot into wafers is disclosed. The wire saw has an ingot holder configured for connection to the wire saw and a bond beam having a first surface configured for connection to the ingot holder and a second surface configured for connection to the ingot. The bar comprises an upper surface, a lower surface, and a mating surface for engaging a recessed surface in a slot formed in the first surface of the bond beam. The mating surface is disposed in a first plane and the recessed surface is disposed in a second plane. The first plane intersects the second plane when the bar is positioned in the slot.
In yet another aspect, a method for connecting an ingot to a wire saw using an ingot holder, a bond beam, and a bar. The method comprises bonding an ingot to a second surface of the bond beam. The bar is then positioned within a slot formed in the bond beam. The bar has a mating surface that is angled between about 5 degrees and about 10 degrees relative to a upward-facing recessed surface in the slot when the bar is positioned within the slot. A pair of protrusions is formed in the bond beam against the slot. A mechanical fastener is inserted through a coextensive opening formed in the ingot holder and the bar. The fastener is tightened, wherein tightening the fastener results in engagement of the angled mating surface against the recessed surface in the slot and connects the ingot holder to the bond beam and the ingot. Engagement of the angled mating surface against the recessed surface prevents deformation of the protrusions and the second surface of the bond beam. The ingot holder is then connected to the wire saw and connection of the ingot holder to the wire saw results in connection of the ingot to the wire saw.
Various refinements exist of the features noted in relation to the above-mentioned aspects. Further features may also be incorporated in the above-mentioned aspects as well. These refinements and additional features may exist individually or in any combination. For instance, various features discussed below in relation to any of the illustrated embodiments may be incorporated into any of the above-described aspects, alone or in any combination.
Corresponding reference characters indicate corresponding parts throughout the several views of the drawings.
Referring to the drawings, an exemplary system for connecting a silicon ingot 102 to a wire saw 103 is shown in
As shown in
The ingot holder 110 has a plurality of openings 112 formed therein, as shown in
In the example embodiment, the ingot holder 110 has a channel 118 formed into the upper surface 116 therein that is sized to receive the rail 105 of the wire saw 103. The ingot holder 110 is thus operable to slide into and out of the wire saw along the rail 105. Accordingly, the other components of the system 100 connected to the ingot holder 110 are also able to be slid into and out of the wire saw 103. In other embodiments any suitable fastening system (e.g., mechanical fasteners) can be used to connect the ingot holder 110 to the wire saw 103.
The bond beam 130, as shown in
Two slots 136 are formed in the first surface 132 of the bond beam 130 and each has a lower surface 138 and an upward-facing recessed surface 140. Reference is made herein to one of the slots 136, although it should be understood that each of the slots have the same or similar features. Moreover, different numbers of slots 136 may be used without departing from the scope of the embodiments.
The bond beam 130 also includes two protrusions 142 positioned vertically above the slot 136 and function to restrain the tee bar 150 from moving vertically through the slot. The lower surface 138 and the recessed surface 140 are spaced apart a distance to permit the tee bar 150 to be positioned between the two. The distance is large enough to allow for sufficient clearance between the surfaces 138, 140 and the tee bar 150 to ease installation of the tee bar. The lower surface 138 and the recessed surface 140 are parallel in the example embodiment, although in other embodiments they may lie in intersecting planes that intersect at angle of between 2 and 20 degrees.
In the example embodiment, the bond beam 130 has a plurality of cleaning lance openings 144, although other embodiments may not use such openings. The lance openings 144 can be used in a cleaning operation following slicing of the ingot 102. During use, the wires 106 of the saw 103 may contact the bond beam 130 after slicing the ingot 102 into wafers in order to ensure that the ingot has been completely sliced into wafers. The bond beam 130 is formed from a material that is easily sawn by the wire saw 103 during slicing of the ingot 102 into wafers without damaging the wires 106 of the saw. Examples of such materials include epoxy, glass, and other resins.
The tee bar 150, best seen in
A pair of mating surfaces 160 form the uppermost section of the first portion 152, as shown in
As shown in
In operation, the ingot 102 may first be adhesively bonded or otherwise attached to the second surface 134 of the bond beam 130. In other embodiments, the ingot 102 is adhesively bonded or otherwise attached to the second surface 134 of the bond beam 130 at a later point in time.
The tee bar 150 is placed within the slot 136 formed in the bond beam 130. Mechanical fasteners are then inserted through the openings 112 in the ingot holder 110 and into the openings 162 in the tee bar 150. The fasteners are then rotated to tighten the fasteners, which pulls the tee bar 150 upwards towards the ingot holder 110. This upward movement brings the mating surfaces 160 of the tee bar 150 into contact and engagement with the recessed surfaces 140 of the slot 136, as shown in
The mating surfaces 202, 204 may be disposed at the same or similar angles as those of the mating surfaces 160 described above. Likewise, the mating surfaces 202, 204 serve the same or similar purpose as the mating surfaces 160 as described above. As best seen in
Prior attempts to use tee bars to connect the bond beam to the ingot holder yielded unsatisfactory results. The tee bars used in these prior attempts had mating surfaces that were parallel to the recessed surfaces of the slots. Thus as the fasteners were tightened, the contact or engagement by the mating surface against the recessed surface displaced the protrusions of the bond beam in an upward direction, towards the ingot holder. In other words, the slots were “spread open” by the action of the mating surface against the recessed surface. The upward deflection resulted in the deflection of the second surface of the bond beam. This deflection in the second surface resulted in the second surface having an unacceptable flatness which compromised the adhesive bond between the bond beam and the ingot. Thus prior systems were unable to use tee bars to connect the bond beam to the ingot holder and were instead reliant on adhesive bonding to connect the two together.
Embodiments of the present disclosure solve the problem presented by the use of prior art tee bars having mating surfaces parallel to the recessed surfaces of the slots. In use, the angled mating surface 160 (or mating surfaces 202, 204) disclosed herein acts upon the recessed surface 140 of the slot 136 as the fasteners are tightened. The angle of the mating surface 160 (or mating surfaces 202, 204) with respect to the recessed surface 140 reduces or eliminates deflection of the protrusions 142 and prevents the slots 136 from being spread open. This reduction or elimination of deflection in turn reduces or eliminates deformation of the second surface 134 of the bond beam 130. Accordingly, the flatness of the second surface 134 of the bond beam 130 is not affected and the integrity of the adhesive bond between the bond beam and the ingot 102 is not compromised.
The protrusions 256, 258 of the tee bar 200 also serve a similar function as the angled mating surfaces. When in use, the protrusions 256, 258 act upon the recessed surface 140 of the slot 136 as the fasteners are tightened. The engagement of the protrusions 256, 258 and recessed surface 140 reduces or eliminates deflection of the protrusions 142 and prevents the slot 136 from being spread open.
The use of the disclosed tee bars 150, 250 and bar 200 provides a mechanical connection between the ingot holder 110 and the bond beam 130. The bond beam 130 and the ingot holder 110 may thus be quickly and efficiently connected before commencement of the slicing operation by the wire saw 103. The two may likewise also be separated at the conclusion of the slicing operation, as described above. The ingot holder 110 can thus be readily returned to service, as time-consuming and costly operations (i.e., such as those required in prior systems to separate adhesively bonded ingot holders and bond beams) are not required to separate it from the bond beam 130.
While reference is made herein to the mating surfaces 160 of the tee bar 150 (and the mating surfaces 202, 204 of the bar 200) being angled with respect to the recessed surface 140 and the recessed surface being parallel to the second surface of the bond beam, other configurations are contemplated in different embodiments. For example, in one embodiment the mating surface 160 of the tee bar 150 (or the mating surfaces 202, 204 of the bar 200) is parallel to the lower surface 156 of the tee bar. The recessed surface 140 of the slot, however, is angled with respect to the second surface 134 of the bond beam 130 (i.e., the two are not parallel). The magnitude of this angle may be the same as or similar to the range of angles disclosed above in regards to the angled mating surface 160 (or the mating surfaces 202, 204). In another embodiment, the mating surface 160 (or the mating surfaces 202, 204) is angled to some extent and the recessed surface 140 is also angled to some extent to achieve the desired effect of reducing or eliminating deflection of the second surface 134 of the bond beam 130.
When introducing elements of the present disclosure or the embodiment(s) thereof, the articles “a”, “an”, “the” and “said” are intended to mean that there are one or more of the elements. The terms “comprising”, “including” and “having” are intended to be inclusive and mean that there may be additional elements other than the listed elements.
As various changes could be made in the above without departing from the scope of the present disclosure, it is intended that all matter contained in the above description and shown in the accompanying drawings shall be interpreted as illustrative and not in a limiting sense.
Number | Name | Date | Kind |
---|---|---|---|
3180636 | Carpenter | Apr 1965 | A |
4949700 | Ebashi | Aug 1990 | A |
4957402 | Klein et al. | Sep 1990 | A |
5356488 | Hezel | Oct 1994 | A |
5398857 | Shinozaki et al. | Mar 1995 | A |
5449626 | Hezel | Sep 1995 | A |
5465892 | Shinozaki et al. | Nov 1995 | A |
5469200 | Terai | Nov 1995 | A |
5551618 | Shinozaki et al. | Sep 1996 | A |
5661503 | Terai | Aug 1997 | A |
5738731 | Shindo et al. | Apr 1998 | A |
5809986 | Katamachi | Sep 1998 | A |
5857454 | Shibaoka | Jan 1999 | A |
5904136 | Nagatsuka et al. | May 1999 | A |
5908025 | Katamachi | Jun 1999 | A |
5950643 | Miyazaki et al. | Sep 1999 | A |
5961944 | Aratani et al. | Oct 1999 | A |
6025252 | Shindo et al. | Feb 2000 | A |
6106734 | Shindo et al. | Aug 2000 | A |
6135103 | Katamachi | Oct 2000 | A |
6137120 | Shindo et al. | Oct 2000 | A |
6139591 | Nakaura et al. | Oct 2000 | A |
6145422 | Katamachi et al. | Nov 2000 | A |
6177706 | Shindo et al. | Jan 2001 | B1 |
6225668 | Shindo et al. | May 2001 | B1 |
6468923 | Yonehara et al. | Oct 2002 | B1 |
6576831 | Woditsch et al. | Jun 2003 | B2 |
6656271 | Yonehara et al. | Dec 2003 | B2 |
6660643 | Kardauskas et al. | Dec 2003 | B1 |
6677214 | Shindo et al. | Jan 2004 | B1 |
6941940 | Zavattari et al. | Sep 2005 | B1 |
7025665 | Bender | Apr 2006 | B2 |
7271888 | Frodis et al. | Sep 2007 | B2 |
7294779 | Watabe et al. | Nov 2007 | B2 |
7314517 | Dwilinski et al. | Jan 2008 | B2 |
7351282 | Yamaguchi | Apr 2008 | B2 |
7368015 | D'Evelyn et al. | May 2008 | B2 |
7387677 | Dwilinski et al. | Jun 2008 | B2 |
7410539 | Dwilinski et al. | Aug 2008 | B2 |
7456104 | Kusumoto et al. | Nov 2008 | B2 |
7485900 | Nonaka et al. | Feb 2009 | B2 |
7512297 | Farah | Mar 2009 | B2 |
7588674 | Frodis et al. | Sep 2009 | B2 |
7638815 | D'Evelyn et al. | Dec 2009 | B2 |
7700535 | Ward | Apr 2010 | B1 |
7727874 | Hanser et al. | Jun 2010 | B2 |
7728383 | Kusumoto et al. | Jun 2010 | B2 |
7763146 | Eguchi | Jul 2010 | B2 |
7786503 | D'Evelyn et al. | Aug 2010 | B2 |
7793647 | Skovgaard-Soerensen | Sep 2010 | B2 |
7811380 | Dwilinski et al. | Oct 2010 | B2 |
7827980 | Skovgaard-Soerensen et al. | Nov 2010 | B2 |
7859008 | D'Evelyn et al. | Dec 2010 | B2 |
8181949 | Hung | May 2012 | B2 |
20110100348 | Bucher et al. | May 2011 | A1 |
Number | Date | Country |
---|---|---|
102009023119 | Nov 2010 | DE |
0841492 | May 1998 | EP |
2111960 | Oct 2009 | EP |
2580689 | Oct 1986 | FR |
Entry |
---|
PCT International Search Report and Written Opinion of the International Searching Authority mailed on Dec. 7, 2012 regarding PCT/US2012/057614 filed on Sep. 27, 2012; 10 pgs. |
Number | Date | Country | |
---|---|---|---|
20130087132 A1 | Apr 2013 | US |