This Application is related to co-pending, commonly owned U.S. patent application Ser. No. 10/956,722 filed Sep. 30, 2004, entitled “Systems and Methods for Integrated Circuits comprising Multiple Body Bias Domains” to Koniaris et al., which is hereby incorporated herein by reference in its entirety.
Embodiments in accordance with the present invention relate to systems and methods for integrated circuits comprising multiple body bias domains.
It is desirable to adjust or change operating characteristics, for example, maximum frequency of operation, leakage current, slew rate and the like, of transistors and more complex circuits of an integrated circuit after the integrated circuit has been produced.
Therefore, systems and methods for integrated circuits comprising multiple body bias domains would be highly desirable.
Accordingly, systems and methods for integrated circuits comprising multiple body bias domains are disclosed. In accordance with a first embodiment of the present invention, an integrated circuit is constructed comprising active semiconductor devices in first and second body bias domains. A first body biasing voltage is coupled to the first body bias domain, and a second body biasing voltage is coupled to the second body bias domain. The first and the second body biasing voltages are adjusted to achieve a desirable relative performance between the active semiconductor devices in the first and the second body bias domains.
In accordance with another embodiment of the present invention, a body bias voltage is adjusted to adjust a slew rate of an output cell of an integrated circuit.
In accordance with yet another embodiment of the present invention, a tap granularity of a delay locked loop circuit is adjusted by adjusting a body bias voltage of the delay locked loop circuit.
In the following detailed description of the present invention, systems and methods for integrated circuits comprising multiple body bias domains, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be recognized by one skilled in the art that the present invention may be practiced without these specific details or with equivalents thereof. In other instances, well-known methods, procedures, components, and circuits have not been described in detail as not to unnecessarily obscure aspects of the present invention.
Some portions of the detailed descriptions which follow (e.g., processes 400, 500 and 600) are presented in terms of procedures, steps, logic blocks, processing, and other symbolic representations of operations on data bits that can be performed on computer memory. These descriptions and representations are the means used by those skilled in the data processing arts to most effectively convey the substance of their work to others skilled in the art. A procedure, computer executed step, logic block, process, etc., is here, and generally, conceived to be a self-consistent sequence of steps or instructions leading to a desired result. The steps are those requiring physical manipulations of physical quantities. Usually, though not necessarily, these quantities take the form of electrical or magnetic signals capable of being stored, transferred, combined, compared, and otherwise manipulated in a computer system. It has proven convenient at times, principally for reasons of common usage, to refer to these signals as bits, values, elements, symbols, characters, terms, numbers, or the like.
It should be borne in mind, however, that all of these and similar terms are to be associated with the appropriate physical quantities and are merely convenient labels applied to these quantities. Unless specifically stated otherwise as apparent from the following discussions, it is appreciated that throughout the present invention, discussions utilizing terms such as “storing” or “dividing” or “computing” or “testing” or “calculating” or “determining” or “storing” or “measuring” or “adjusting” or “generating” or “performing” or “comparing” or “synchronizing” or “accessing” or “retrieving” or “conveying” or “sending” or “resuming” or “installing” or “gathering” or the like, refer to the action and processes of a computer system, or similar electronic computing device that manipulates and transforms data represented as physical (electronic) quantities within the computer system's registers and memories into other data similarly represented as physical quantities within the computer system memories or registers or other such information storage, transmission or display devices.
Embodiments in accordance with the present invention are described in the context of design and operation of integrated semiconductors. More particularly, embodiments of the present invention relate to systems and methods for integrated circuits comprising multiple body bias domains. It is appreciated, however, that elements of the present invention may be utilized in other areas of semiconductor operation.
The following description of embodiments in accordance with the present invention is directed toward coupling a body-bias voltage to pFETs (or p-type metal oxide semiconductor field effect transistors [MOSFETS]) formed in surface N-wells and/or nFETs (or n-type MOSFETS) formed in surface P-wells when a p-type substrate and an N-well process are utilized. For example, the coupling can comprise a conductive sub-surface region of N-type doping, e.g., a deep N-well. It is to be appreciated, however, that embodiments in accordance with the present invention are equally applicable to coupling a body-bias voltage to nFETs (or n-type MOSFETS) formed in surface P-wells and/or pFETs (or p-type MOSFETS) formed in surface N-wells when an n-type substrate and a P-well process are utilized, e.g., comprising a conductive sub-surface region of P-type doping, e.g., a deep P-well. Consequently, embodiments in accordance with the present invention are well suited to semiconductors formed in both p-type and n-type materials, and such embodiments are considered within the scope of the present invention.
Body bias domain 101 comprises an isolation tub 135 such that the body terminals of field effect transistors, e.g., field effect transistor 105, within such body bias domains are not directly coupled to the substrate of integrated circuit 100. The isolation tub 135 is formed by n-wells 130 on the sides and a deep n-well layer 140 on the bottom. It is appreciated that the sidewall n-well 130 structures extend beyond the plane of
A body biasing voltage 110 Vpw1 is coupled to the body terminals of transistors within body bias domain 101, e.g., field effect transistor 105. By adjusting a body biasing voltage of a transistor, e.g., body biasing voltage 110 Vpw1, the threshold voltage of that transistor can be adjusted, e.g., increased or decreased, relative to the nominal threshold voltage of that transistor without an applied body biasing voltage.
In a similar fashion, integrated circuit 100 comprises a body bias domain 102. Body bias domain 102 comprises p-type field effect transistor 106. It is to be appreciated that a body bias domain may generally comprise more than the single transistor illustrated in
A body biasing voltage 120 Vnw1 is coupled to the body terminals of transistors within body bias domain 102, e.g., field effect transistor 106. By adjusting a body biasing voltage of a transistor, e.g., body biasing voltage 120 Vnw1, the threshold voltage of that transistor can be adjusted, e.g., increased or decreased, relative to the nominal threshold voltage of that transistor without an applied body biasing voltage.
It is to be appreciated that embodiments in accordance with the present invention are not limited to the structures illustrated herein for isolating body terminals and applying body biasing voltages to such body terminals. Rather, embodiments in accordance with the present invention are well suited to a wide variety of means to couple to and isolate transistor body terminals in an integrated circuit.
Because integrated circuits typically comprise both n-type and p-type devices, e.g., complimentary metal oxide semiconductors (CMOS), the term “body bias domain” may also be used to represent or refer to a group of n-type devices and p-type devices sharing one body biasing voltage or a pair of body biasing voltages, referred to as a “set” of body biasing voltages. The set of body biasing voltages will generally be utilized in tandem to adjust operating characteristics of the group of devices as a whole. For example, generally a set of body biasing voltages will be adjusted to achieve similar adjustments to operating characteristics of both n-type and p-type devices, e.g., increase threshold voltages of both n-type and p-type devices. However, it is to be appreciated that it may be desirable to perform different adjustments of p-type device and n-type devices within a body bias domain. For example, it may be desirable to increase the threshold voltage of n-type devices while decreasing the threshold voltage of p-type devices. Similarly, it may be desirable to decrease the threshold voltage of n-type devices and not adjust the threshold voltage of p-type devices. All such paired adjustments are considered within the scope of embodiments of the present invention.
Such adjustments of threshold voltage generally result in changes to other characteristics of a transistor, for example, maximum frequency of operation, leakage current and/or power consumption. It is to be appreciated that such changes to transistor characteristics can be realized without changes to the physical structure of the transistor. More particularly, such changes to transistor characteristics can be realized in a time-variable nature after an integrated circuit has been produced. For example, a transistor within a body bias domain can be operated at a first set of characteristics corresponding to a first applied body biasing voltage at one time, and the same transistor can be operated at a second set of characteristics corresponding to a second applied body biasing voltage at a second time.
Slew Rate Control
Slew rate control is an area of great interest in the semiconductor arts. For example, it is desirable to control the slew rate of off-chip driver circuits, e.g., output cells that drive signals off of an integrated circuit, in order to reduce radiated electro-magnetic emissions. However, such off-chip driver circuits should still meet a minimum slew rate required for timing and/or trigging conditions of the driven circuitry. Such slew rate requirements are strongly influenced by a variety of considerations specific to a particular application of an integrated circuit, e.g., the circuitry being driven and/or the physical layout of a variety of integrated circuits on a printed wiring board. Consequently, a desirable slew rate can vary for a given integrated circuit, e.g., a microprocessor, by application.
In addition, a desirable slew rate can vary even for the same integrated circuit in the same application. For example, a desirable slew rate, or range of slew rates, for an off-chip driver circuit of a microprocessor can vary according to the operating frequency of the microprocessor. As it is frequently desirable to operate microprocessors at a variety of operating frequencies, e.g., to limit power consumption, such desirable slew rates can vary according to desired operating frequencies of the microprocessor. Consequently, it would be highly advantageous to be able to adjust the slew rate of a portion of an integrated circuit after the integrated circuit has been manufactured, e.g., on a per-application basis and/or during operation of the integrated circuit.
In accordance with embodiments of the present invention, an applied body bias voltage can be adjusted to adjust and/or control the slew rate of a transistor device on an integrated circuit. For example, referring once again to
Integrated circuit 100 generally comprises circuitry (not shown) that is not a part of the illustrated body bias domain 103. Such circuitry may be part of a separate body bias domain, or such circuitry may not comprise a body biasing capability. Since body bias domain 103 is isolated from such other circuitry, the other circuitry can be operated independently of characteristic changes to circuitry within body bias domain 103. For example, the operating characteristics of transistors comprising other logic on integrated circuit 100 will generally not be affected by changes to the operating characteristics of field effect transistor 105 and/or field effect transistor 106. Consequently, operating characteristics of field effect transistor 105 and/or field effect transistor 106 can beneficially be manipulated without detrimental impact to other devices on the integrated circuit.
In block 420, a first signal to be output from the integrated circuit is accessed at the output cell. In block 430, a second signal corresponding to the first signal is output from the output cell. In optional block 440, the body biasing voltage is changed to a second body biasing voltage.
In accordance with embodiments of the present invention, the second signal, output from the output cell, can comprise a desirable slew rate. The output slew rate can be less than a slew rate generated by the output cell without the body biasing voltage applied.
In accordance with other embodiments of the present invention, the body biasing voltage can be changed to a second body biasing voltage, for example, to change the slew rate of the output signal. The slew rate can be increased or decreased. For example, in a microprocessor comprising the output cell, the slew rate should generally be increased corresponding to increases in operating frequency of the microprocessor.
Delay Locked Loops
Synchronous integrated circuit designs, e.g., microprocessors, generally rely on globally synchronized clocks. With increases in clock rates, low-skew clock distribution trees are becoming increasingly critical to achieving design speed objectives. High-speed circuits may also require clocks with programmable duty cycle and delay. Delay-locked loop (DLL) circuits are widely used for such clock management purposes.
Delay-locked loop (DLL) circuits generally comprise a plurality of “taps,” or circuit outputs that can be utilized to achieve varying amounts of delay. For example, accessing an output at a first tap produces a delay of a one unit, while accessing an output at a second tap produces a delay of two units. It is appreciated that the time relationship between taps need not be linear. Frequently, it would be desirable to increase the range of available delay(s) and/or to increase the granularity of delay increments available in a specific delay locked loop within an integrated circuit. A conventional approach to increase such characteristics is to increase the number of taps in the delay locked loop design, e.g., a change to the design of the delay locked loop circuit. However, increases in the number of taps generally require corresponding increases in integrated circuit area that undesirably increase the cost of an integrated circuit. Further, even with a large number of taps, the delay range and granularity remain finite.
In accordance with embodiments of the present invention, applied body bias voltage(s) can be adjusted to adjust and/or control the delay range and/or delay granularity of a delay locked loop. For example, a delay locked loop circuit can be constructed within a body bias domain, such that changes to body biasing voltage(s) affect all elements (or all like-typed elements) of the delay locked loop. By utilizing such a design, the delay locked loop circuit can be made to operate faster or slower by adjusting body biasing voltage(s) applied to the body bias domain comprising the delay locked loop.
Vnw 220 is the body biasing voltage applied to body terminals of p-type devices within body bias domain 200. Vnw corresponds to Vnw1120 of
In block 520, a body biasing voltage is applied to the delay locked loop circuit. In block 530, the delay locked loop circuit of the integrated circuit is operated at a second tap granularity.
In optional block 440, a signal from other circuit of the integrated circuit is accessed at the delay locked loop circuit. The other circuit is independent of the body biasing voltage. In optional block 450, the body biasing voltage is changed.
In this novel manner, operational characteristics of a delay locked loop circuit are modified, e.g., to change a capture frequency and/or to change tap granularity, according to an applied body biasing voltage. It is appreciated that such changes are effected without layout changes to the circuitry.
Independent Circuit Adjustment
As described previously, body bias domain 330 comprises circuitry that is capable of accessing applied body bias voltages Vnw1320 and Vpw1310. Similarly, body bias domain 340 comprises circuitry that is capable of accessing applied body bias voltages Vnw2325 and Vpw2315. Integrated circuit 300 further comprises other circuitry 360 that is not a part of body bias domain 330 and not a part of body bias domain 340. Other circuitry 360 may or may not be a part of, or comprise, a separate body bias domain. Circuitry of body bias domain 330 is functionally coupled (350) to circuitry of body bias domain 340 and/or other circuitry 360.
Operational characteristics, e.g., threshold voltage, operating frequency and/or gate delays of the circuitry within body bias domain 330 can be adjusted by adjusting an applied body biasing voltage, e.g., body biasing voltage Vnw1320 and/or body biasing voltage Vpw1310. It is to be appreciated that such adjustments to body biasing voltage Vnw1320 and/or body biasing voltage Vpw1310, and consequent adjustments to operational characteristics of the circuitry within body bias domain 330, do not change operational characteristics of other circuitry of integrated circuit 300, e.g., the circuitry of body bias domain 340 or other circuitry 360. For example, the circuitry of body bias domain 330 can be adjusted to operate faster than nominal, while the circuitry of body bias domain 340 and/or other circuitry 360 maintain nominal operation.
By the novel creation of a plurality of independent body bias domains, numerous advantages can be realized. As previously discussed, for example, body bias domain 330 can comprise a delay locked loop or major functional units of a microprocessor, e.g., a floating point unit or a video controller. Other circuitry of integrated circuit 300, e.g., circuitry of body bias domain 340 and/or other circuitry 360 can access a signal generated within body bias domain 330. If, for example, finer granularity between delay taps of the delay locked loop is needed, body biasing voltage(s) to body bias domain 330 can be adjusted to achieve such finer granularity between delay taps. It is appreciated that no design or layout changes need be made to the exemplary delay locked loop within body bias domain 330 to achieve such a change.
In a similar manner, relative timing of circuitry in bias domain 330 and bias domain 340 can be adjusted by adjusting corresponding body biasing voltages. For example, if circuitry within a body bias domain does not meet required timing, such circuitry can be “sped up,” or made to operate faster by adjusting body biasing voltages for a body bias domain comprising the circuitry. Such a capability of changing operating characteristics after manufacture of an integrated circuit can beneficially increase yield of usable integrated circuit devices. It is appreciated that other circuitry in other body bias domains can be operated at different, e.g., nominal, operating characteristics.
Because semiconductor device characteristics can vary within an individual die (or chip), for example large microprocessors, multiple independent body bias domains can be utilized to compensate for such intra-die process variations. Additionally, body biasing voltages can be utilized to compensate for more global process variations.
In block 620, a second body biasing voltage is applied to second circuitry of a second body bias domain. In block 630, a signal between the first and the second circuitry is accessed.
In accordance with embodiments of the present invention, either the first or the second body biasing voltages described above can be zero. For example, circuitry in one of the body bias domains can be operated with no applied body biasing voltage.
However, applying a body biasing voltage, e.g., a first body biasing voltage applied to first circuitry of a first body bias domain, can cause the first circuitry to switch faster than the first circuitry would switch without application of the first body biasing voltage. Such a change in switching speed can be sufficient to change the first circuitry from non-functional (due to timing) to functional.
For example, if the first circuitry was designed to function under nominal manufacturing process conditions, a particular instance of the integrated circuit may not function due to process variations. Applying a body biasing voltage to the first circuitry can modify its operation such that it becomes functional under the biasing conditions.
Alternatively, the first circuitry could be designed not to function under nominal manufacturing process conditions. For example, the manufacturing process conditions could be “tuned” to skew the manufacturing distribution toward lower power, slower parts. Such skewing can be acceptable for many circuits on the integrated circuit, for example. However, there can be some circuits that are “designed” not to work at projected process conditions. The behavior of such circuits can be adjusted after manufacture by the application of body biasing voltage(s) such that the circuits function under biased operational conditions.
It is appreciated that locating such circuitry in an independent body bias domain of the integrated circuit enables such adjustments without undesired adjustment of the other, working, circuitry of the integrated circuit.
Embodiments in accordance with the present invention provide for adjusting threshold voltages of transistors within multiple independent body bias domains of an integrated circuit, for example in highly integrated semiconductors, e.g., microprocessors. Adjusting threshold voltages, for example, can beneficially adjust circuit timings, including relative timings, reduce power consumption and heat generation of such integrated circuits and/or to eliminate process variation effects on threshold voltage.
Embodiments in accordance with the present invention, systems and methods for integrated circuits comprising multiple body bias domains, are thus described. While the present invention has been described in particular embodiments, it should be appreciated that the present invention should not be construed as limited by such embodiments, but rather construed according to the below claims.
This Application is a Divisional Application of U.S. patent application Ser. No. 10/956,218, filed Sep. 30, 2004 now U.S. Pat. No. 7,256,639, to Koniaris and Burr, which is a continuation-in-part of commonly owned U.S. patent application Ser. No. 10/771,015, filed Feb. 2, 2004 now U.S. Pat. No. 7,205,758, entitled “Systems and Methods for Adjusting Threshold Voltage” to Masleid and Burr. Both prior applications are hereby incorporated herein by reference in their entirety.
Number | Name | Date | Kind |
---|---|---|---|
5086501 | DeLuca et al. | Feb 1992 | A |
5096084 | Wells | Mar 1992 | A |
5167024 | Smith et al. | Nov 1992 | A |
5201059 | Nguyen | Apr 1993 | A |
5204863 | Saint-Joigny et al. | Apr 1993 | A |
5218704 | Watts, Jr. et al. | Jun 1993 | A |
5230055 | Katz et al. | Jul 1993 | A |
5239652 | Seibert et al. | Aug 1993 | A |
5243559 | Murai | Sep 1993 | A |
5422591 | Rastegar et al. | Jun 1995 | A |
5422806 | Chen et al. | Jun 1995 | A |
5440520 | Schutz et al. | Aug 1995 | A |
5461266 | Koreeda et al. | Oct 1995 | A |
5502838 | Kikinis | Mar 1996 | A |
5511203 | Wisor et al. | Apr 1996 | A |
5519309 | Smith | May 1996 | A |
5560020 | Nakatani et al. | Sep 1996 | A |
5592173 | Lau et al. | Jan 1997 | A |
5610533 | Arimoto et al. | Mar 1997 | A |
5682093 | Kivela | Oct 1997 | A |
5692204 | Rawson et al. | Nov 1997 | A |
5717319 | Jokinen | Feb 1998 | A |
5719800 | Mittal et al. | Feb 1998 | A |
5727208 | Brown | Mar 1998 | A |
5745375 | Reinhardt et al. | Apr 1998 | A |
5752011 | Thomas et al. | May 1998 | A |
5754869 | Holzhammer et al. | May 1998 | A |
5757171 | Babcock | May 1998 | A |
5778237 | Yamamoto et al. | Jul 1998 | A |
5812860 | Horden et al. | Sep 1998 | A |
5815724 | Mates | Sep 1998 | A |
5825674 | Jackson | Oct 1998 | A |
5848281 | Smalley et al. | Dec 1998 | A |
5880620 | Gitlin et al. | Mar 1999 | A |
5884049 | Atkinson | Mar 1999 | A |
5894577 | MacDonald et al. | Apr 1999 | A |
5923545 | Nguyen | Jul 1999 | A |
5933649 | Lim et al. | Aug 1999 | A |
5940785 | Georgiou et al. | Aug 1999 | A |
5940786 | Steeby | Aug 1999 | A |
5973526 | Dabral | Oct 1999 | A |
5974557 | Thomas et al. | Oct 1999 | A |
5996083 | Gupta et al. | Nov 1999 | A |
5996084 | Watts | Nov 1999 | A |
6023186 | Kuroda | Feb 2000 | A |
6035407 | Gebara et al. | Mar 2000 | A |
6047248 | Georgiou et al. | Apr 2000 | A |
6048746 | Burr | Apr 2000 | A |
6055644 | Henkel | Apr 2000 | A |
6055655 | Momohara | Apr 2000 | A |
6078319 | Bril et al. | Jun 2000 | A |
6087892 | Burr | Jul 2000 | A |
6091283 | Murgula et al. | Jul 2000 | A |
6097242 | Forbes et al. | Aug 2000 | A |
6118306 | Orton et al. | Sep 2000 | A |
6119241 | Michail et al. | Sep 2000 | A |
6157092 | Hofmann | Dec 2000 | A |
6202104 | Ober | Mar 2001 | B1 |
6216235 | Thomas et al. | Apr 2001 | B1 |
6218708 | Burr | Apr 2001 | B1 |
6218892 | Soumyanath et al. | Apr 2001 | B1 |
6218895 | De et al. | Apr 2001 | B1 |
6232793 | Arimoto et al. | May 2001 | B1 |
6232827 | De et al. | May 2001 | B1 |
6272642 | Pole, II et al. | Aug 2001 | B2 |
6272666 | Borkar et al. | Aug 2001 | B1 |
6279048 | Fadavi-Ardekani et al. | Aug 2001 | B1 |
6303444 | Burr | Oct 2001 | B1 |
6304824 | Bausch et al. | Oct 2001 | B1 |
6311287 | Dischler et al. | Oct 2001 | B1 |
6314522 | Chu et al. | Nov 2001 | B1 |
6333571 | Teraoka et al. | Dec 2001 | B1 |
6341087 | Kunikiyo | Jan 2002 | B1 |
6345363 | Levy-Kendler | Feb 2002 | B1 |
6347379 | Dai et al. | Feb 2002 | B1 |
6378081 | Hammond | Apr 2002 | B1 |
6388432 | Uchida | May 2002 | B2 |
6392467 | Oowaki et al. | May 2002 | B1 |
6411156 | Borkar et al. | Jun 2002 | B1 |
6415388 | Browning et al. | Jul 2002 | B1 |
6425086 | Clark et al. | Jul 2002 | B1 |
6427211 | Watts, Jr. | Jul 2002 | B2 |
6442746 | James et al. | Aug 2002 | B1 |
6456157 | Forbes et al. | Sep 2002 | B1 |
6457135 | Cooper | Sep 2002 | B1 |
6466077 | Miyazaki et al. | Oct 2002 | B1 |
6477654 | Dean et al. | Nov 2002 | B1 |
6484265 | Borkar et al. | Nov 2002 | B2 |
6487668 | Thomas et al. | Nov 2002 | B2 |
6489224 | Burr | Dec 2002 | B1 |
6510400 | Moriyama | Jan 2003 | B1 |
6510525 | Nookala et al. | Jan 2003 | B1 |
6513124 | Furuichi et al. | Jan 2003 | B1 |
6518826 | Zhang | Feb 2003 | B2 |
6519706 | Ogoro | Feb 2003 | B1 |
6574739 | Kung et al. | Jun 2003 | B1 |
6600346 | Macaluso | Jul 2003 | B1 |
6614301 | Casper et al. | Sep 2003 | B2 |
6621325 | Hart et al. | Sep 2003 | B2 |
6653890 | Ono et al. | Nov 2003 | B2 |
6731157 | Fulkerson | May 2004 | B2 |
6777978 | Hart et al. | Aug 2004 | B2 |
6784722 | Tang et al. | Aug 2004 | B2 |
6792379 | Ando | Sep 2004 | B2 |
6794630 | Keshavarzi et al. | Sep 2004 | B2 |
6812758 | Gauthier et al. | Nov 2004 | B2 |
6847252 | Ono et al. | Jan 2005 | B1 |
6858897 | Chen | Feb 2005 | B2 |
6864539 | Ishibashi et al. | Mar 2005 | B2 |
6912155 | Sakurai et al. | Jun 2005 | B2 |
6936898 | Pelham et al. | Aug 2005 | B2 |
6967522 | Chandrakasan et al. | Nov 2005 | B2 |
6992508 | Chow | Jan 2006 | B2 |
7129745 | Lewis et al. | Oct 2006 | B2 |
7205758 | Masleid et al. | Apr 2007 | B1 |
7334198 | Ditzel et al. | Feb 2008 | B2 |
7348827 | Rahim et al. | Mar 2008 | B2 |
20020002689 | Yeh | Jan 2002 | A1 |
20020026597 | Dai et al. | Feb 2002 | A1 |
20020029352 | Borkar et al. | Mar 2002 | A1 |
20020030533 | De et al. | Mar 2002 | A1 |
20020033510 | Tomita | Mar 2002 | A1 |
20020073348 | Tani | Jun 2002 | A1 |
20020083356 | Dai | Jun 2002 | A1 |
20020087896 | Cline et al. | Jul 2002 | A1 |
20020113628 | Ajit | Aug 2002 | A1 |
20020116650 | Halepete et al. | Aug 2002 | A1 |
20020138778 | Cole et al. | Sep 2002 | A1 |
20020140494 | Thomas et al. | Oct 2002 | A1 |
20020178390 | Lee | Nov 2002 | A1 |
20020194509 | Plante et al. | Dec 2002 | A1 |
20030005378 | Tschanz et al. | Jan 2003 | A1 |
20030021161 | Fifield et al. | Jan 2003 | A1 |
20030036876 | Fuller, III et al. | Feb 2003 | A1 |
20030037068 | Thomas et al. | Feb 2003 | A1 |
20030063513 | Tsunoda et al. | Apr 2003 | A1 |
20030065960 | Rusu et al. | Apr 2003 | A1 |
20030074591 | McClendon et al. | Apr 2003 | A1 |
20030080802 | Ono et al. | May 2003 | A1 |
20030132735 | Fulkerson | Jul 2003 | A1 |
20030149988 | Ellis et al. | Aug 2003 | A1 |
20040014268 | Ishibashi et al. | Jan 2004 | A1 |
20040016977 | Miyazaki et al. | Jan 2004 | A1 |
20040021501 | Das et al. | Feb 2004 | A1 |
20040025061 | Lawrence | Feb 2004 | A1 |
20040073821 | Naveh et al. | Apr 2004 | A1 |
20040109354 | Wang et al. | Jun 2004 | A1 |
20040123170 | Tschanz et al. | Jun 2004 | A1 |
20040125644 | Komatsuzaki | Jul 2004 | A1 |
20040128631 | Ditzel et al. | Jul 2004 | A1 |
20040155696 | Gauthier et al. | Aug 2004 | A1 |
20040217372 | Chen | Nov 2004 | A1 |
20050160465 | Walker | Jul 2005 | A1 |
20050225376 | Kin Law | Oct 2005 | A1 |
20050237083 | Bakker et al. | Oct 2005 | A1 |
20050280437 | Lewis et al. | Dec 2005 | A1 |
20060157815 | Chang et al. | Jul 2006 | A1 |
20060157818 | Williams et al. | Jul 2006 | A1 |
20060223257 | Williams et al. | Oct 2006 | A1 |
Number | Date | Country |
---|---|---|
0381021 | Aug 1990 | EP |
0474963 | Mar 1992 | EP |
0501655 | Sep 1992 | EP |
40915589 | Jul 1997 | JP |
0127728 | Apr 2001 | WO |
Number | Date | Country | |
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Parent | 10956218 | Sep 2004 | US |
Child | 11880351 | US |
Number | Date | Country | |
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Parent | 10771015 | Feb 2004 | US |
Child | 10956218 | US |