The present invention relates to semiconductor memory technology. More specifically, the invention relates to a semiconductor device utilizing an electrically floating body transistor.
Semiconductor memory devices are used extensively to store data. Memory devices can be characterized according to two general types: volatile and non-volatile. Volatile memory devices such as static random access memory (SRAM) and dynamic random access memory (DRAM) lose data that is stored therein when power is not continuously supplied thereto.
A DRAM cell without a capacitor has been investigated previously. Such memory eliminates the capacitor used in the conventional 1T/1C memory cell, and thus is easier to scale to smaller feature size. In addition, such memory allows for a smaller cell size compared to the conventional 1T/1C memory cell. Chatterjee et al. have proposed a Taper Isolated DRAM cell concept in “Taper Isolated Dynamic Gain RAM Cell”, P. K. Chatterjee et al., pp. 698-699, International Electron Devices Meeting, 1978 (“Chatterjee-1”), “Circuit Optimization of the Taper Isolated Dynamic Gain RAM Cell for VLSI Memories”, P. K. Chatterjee et al., pp. 22-23, IEEE International Solid-State Circuits Conference, February 1979 (“Chatterjee-2”), and “DRAM Design Using the Taper-Isolated Dynamic RAM Cell”, J. E. Leiss et al., pp. 337-344, IEEE Journal of Solid-State Circuits, vol. SC-17, no. 2, April 1982 (“Leiss”), which are hereby incorporated herein, in their entireties, by reference thereto. The holes are stored in a local potential minimum, which looks like a bowling alley, where a potential barrier for stored holes is provided. The channel region of the Taper Isolated DRAM cell contains a deep n-type implant and a shallow p-type implant. As shown in “A Survey of High-Density Dynamic RAM Cell Concepts”, P. K. Chatterjee et al., pp. 827-839, IEEE Transactions on Electron Devices, vol. ED-26, no. 6, June 1979 (“Chatterjee-3”), which is hereby incorporated herein, in its entireties, by reference thereto, the deep n-type implant isolates the shallow p-type implant and connects the n-type source and drain regions.
Terada et al. have proposed a Capacitance Coupling (CC) cell in “A New VLSI Memory Cell Using Capacitance Coupling (CC) Cell”, K. Terada et al., pp. 1319-1324, IEEE Transactions on Electron Devices, vol. ED-31, no. 9, September 1984 (“Terada”), while Erb has proposed Stratified Charge Memory in “Stratified Charge Memory”, D. M. Erb, pp. 24-25, IEEE International Solid-State Circuits Conference, February 1978 (“Erb”), both of which are hereby incorporated herein, in their entireties, by reference thereto.
DRAM based on the electrically floating body effect has been proposed both in silicon-on-insulator (SOI) substrate (see for example “The Multistable Charge-Controlled Memory Effect in SOI Transistors at Low Temperatures”, Tack et al., pp. 1373-1382, IEEE Transactions on Electron Devices, vol. 37, May 1990 (“Tack”), “A Capacitor-less 1T-DRAM Cell”, S. Okhonin et al., pp. 85-87, IEEE Electron Device Letters, vol. 23, no. 2, February 2002 (“Okhonin”) and “Memory Design Using One-Transistor Gain Cell on SOI”, T. Ohsawa et al., pp. 152-153, Tech. Digest, 2002 IEEE International Solid-State Circuits Conference, February 2002 (“Ohsawa”), which are hereby incorporated herein, in their entireties, by reference thereto) and in bulk silicon (see for example “A one transistor cell on bulk substrate (1T-Bulk) for low-cost and high density eDRAM”, R. Ranica et al., pp. 128-129, Digest of Technical Papers, 2004 Symposium on VLSI Technology, June 2004 (“Ranica-1”), “Scaled 1T-Bulk Devices Built with CMOS 90 nm Technology for Low-Cost eDRAM Applications”, R. Ranica et al., 2005 Symposium on VLSI Technology, Digest of Technical Papers (“Ranica-2”), “Further Insight Into the Physics and Modeling of Floating-Body Capacitorless DRAMs”, A. Villaret et al, pp. 2447-2454, IEEE Transactions on Electron Devices, vol. 52, no. 11, November 2005 (“Villaret”), “Simulation of intrinsic bipolar transistor mechanisms for future capacitor-less eDRAM on bulk substrate”, R. Pulicani et al., pp. 966-969, 2010 17th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) (“Pulicani”), which are hereby incorporated herein, in their entireties, by reference thereto).
Widjaja and Or-Bach describes a bi-stable SRAM cell incorporating a floating body transistor, where more than one stable state exists for each memory cell (for example as described in U.S. Patent Application Publication No. 2010/00246284 to Widjaja et al., titled “Semiconductor Memory Having Floating Body Transistor and Method of Operating” (“Widjaja-1”) and U.S. Patent Application Publication No. 2010/0034041, “Method of Operating Semiconductor Memory Device with Floating Body Transistor Using Silicon Controlled Rectifier Principle” (“Widjaja-2”), which are both hereby incorporated herein, in their entireties, by reference thereto). This bi-stability is achieved due to the applied back bias which causes impact ionization and generates holes to compensate for the charge leakage current and recombination. During operation as a bi-stable SRAM, the floating body transistor memory cell stores charge in the floating body in order to achieve two stable states. In a low stable state or state 0 the floating body is at a low state or discharged to some voltage such as 0 v. In a high stable state or state 1 the floating body is charged to a higher stable state such as 0.5V. The low stable state will consume little to no standby power beyond a typical NMOS transistor sub threshold leakage. The high stable state however will consume a standby current since a vertical bipolar is enabled to counter any leakage to the floating body.
In one aspect of the present invention, a method of reducing standby power for a floating body memory array having a plurality of floating body memory cells storing charge representative of data is provided, including: counting bits of data before data enters the array, wherein said counting comprises counting at least one of: a total number of bits at state 1 and a total number of all bits; a total number of bits at state 0 and the total number of all bits; or the total number of bits at state 1 and the total number of bits at state 0; detecting whether the total number of bits at state 1 is greater than the total number of bits at state 0; setting an inversion bit when the total number of bits at state 1 is greater than the total number of bits at state 0; and inverting contents of all the bits of data before writing the bits of data to the memory array when the inversion bit has been set.
In at least one embodiment, the floating body memory cells comprise bi-stable SRAM floating body memory cells.
In at least one embodiment, the method further includes outputting contents of the bits of data from the memory array, wherein the method further comprising inverting the bits of data from the memory array prior to the outputting when the inversion bit has been set.
According to another aspect of the present invention, a system for reducing standby power is provided, the system including: a memory array comprising a plurality of floating body memory cells configured to store charge representative of data; a controller configured to control operations of the system; an inversion bit configured to be set to indicate when an inversion of bit data has been performed; a counter and detector configured to count bits of the data before the data enters the array, wherein the counting comprises counting at least one of: a total number of bits at state 1 and a total number of all bits; a total number of bits at state 0 and the total number of all bits; or the total number of bits at state 1 and the total number of bits at state 0, and to detect whether the total number of bits at state 1 is greater than the total number of bits at state 0; wherein when the total number of bits at state 1 is greater than the total number of bits at state 0, the controller sets the inversion bit; and contents of all the bits of data are inverted before writing the bits of data to the memory array when the inversion bit has been set.
In at least one embodiment, the system further includes a page buffer that receives the data from the counter and detector, buffers the data, and inputs the data to the memory array.
In at least one embodiment, the inversion bit is checked by the controller, prior to reading the data out of the array, wherein the inversion bit has been set, the data from the memory array is inverted to restore the data to its state prior to the previous inversion.
In at least one embodiment, the system is configured so that multiple pages, words or bytes of data can share the inversion bit, wherein upon identifying the need to perform a data inversion, any subsets of the data having been previously written to the array are inverted by reading back the subsets having been previously written, inverting and rewriting the subsets back to the array.
In another aspect of the present invention, a method of reducing standby power for a floating body memory array having a plurality of floating body memory cells arranged in a column and row configuration for storing charge representative of data is provided, the method including: identifying at least one row or column of cells storing data that is no longer needed; and setting each of the cells in the at least one row or column to state 0.
In at least one embodiment, the at least one row or column stores data redundantly.
In another aspect of the present invention, a method of reducing standby power for a floating body memory array having a plurality of floating body memory cells configured with DNWell nodes that can be powered to maintain a high potential in the floating body by a vertical bipolar holding mechanism is provided, the method including: performing at least one of: periodically pulsing a source line of the array; periodically pulsing a bit line of the array; periodically floating the source line; or periodically floating the bit line; wherein the periodically pulsing comprises cyclically applying a pulse of positive voltage to the source line or bit line to turn off the vertical bipolar holding mechanism; and removing the positive voltage between the pulses to turn on the vertical bipolar holding mechanism.
In another aspect of the present invention, a method of tracking the state of a floating body memory cell for turning on and off a vertical bipolar holding mechanism to ensure that a state of the floating body memory cell is maintained is provided, the method including: providing a reference cell that measures a potential level of the floating body of the floating body memory cell; providing a high level floating body potential detector and a low level floating body potential detector; inputting the potential level of the floating body to the high and low level floating body potential detectors; receiving output signals from the high and low level floating body potential detector by a controller; and controlling a voltage regulator to control a voltage level input to a source line, bit line or DNWell line of the floating body memory cell to turn off or turn on the vertical bipolar holding mechanism based upon input signals received from the high level floating body potential detector and the low level floating body potential detector.
In at least one embodiment, when the low level floating body potential detector inputs a signal to the controller indicating that a predetermined low potential has been measured, the controller controls the voltage regulator to increase the voltage level input to the source line or bit line to turn on the vertical bipolar holding mechanism; and when the high level floating body potential detector inputs a signal to the controller indicating that a predetermined high potential has been measured, the controller controls the voltage regulator to turn off the voltage level input to the source line or bit line to turn off the vertical bipolar holding mechanism.
In at least one embodiment, when the low level floating body potential detector inputs a signal to the controller indicating that a predetermined low potential has been measured, the controller controls the voltage regulator to turn off the voltage level input to the DNWell line to turn on the vertical bipolar holding mechanism; and when the high level floating body potential detector inputs a signal to the controller indicating that a predetermined high potential has been measured, the controller controls the voltage regulator to increase the voltage level input to the DNWell line to turn off the vertical bipolar holding mechanism.
In at least one embodiment, the method further includes providing a plurality of the DNWell lines, source lines or bit lines; connecting the plurality of DNWell lines, source lines or bit lines with a plurality of equalization transistors; inputting a signal to the plurality of equalization transistors to turn on the equalization transistors to equalize charge among the plurality of the DNWell lines, source lines or bit lines, prior to the controlling the voltage regulator; and turning off the equalization transistors prior to the controlling the voltage regulator.
In another aspect of the present invention, a semiconductor memory array configured for reducing standby power is provided, the array including: a plurality of floating body memory cells configured to store charge representative of data; and
In at least one embodiment, the at least two floating body cells of the reference cell are set to state 1.
In at least one embodiment, the reference cell is used for at least one of: a current reference, a voltage reference or a monitor of transient response to bit line discharge.
In another aspect of the present invention, a semiconductor memory array configured for reducing standby power is provided, the array including: a plurality of floating body memory cells configured to store charge representative of data; and at least two more of the floating body memory cells interconnected by a segmented source line to form a reference cell.
In at least one embodiment, a plurality of the reference cells is connected in a dedicated column or row of the array and to different rows or columns of the floating body memory cells configured to store charge representative of data; and a dedicated reference bit line is connected to the plurality of reference cells.
In at least one embodiment, a plurality of the reference cells is connected to different rows or columns of the floating body memory cells configured to store charge representative of data; and source isolation devices are connected between the reference cells.
Before the present methods, schemes and devices are described, it is to be understood that this invention is not limited to particular embodiments described, as such may, of course, vary. It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting, since the scope of the present invention will be limited only by the appended claims.
Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed within the invention. The upper and lower limits of these smaller ranges may independently be included or excluded in the range, and each range where either, neither or both limits are included in the smaller ranges is also encompassed within the invention, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included in the invention.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Although any methods and materials similar or equivalent to those described herein can be used in the practice or testing of the present invention, the preferred methods and materials are now described. All publications mentioned herein are incorporated herein by reference to disclose and describe the methods and/or materials in connection with which the publications are cited.
It must be noted that as used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to “a floating body” includes a plurality of such floating bodies and reference to “the memory cell” includes reference to one or more memory cells and equivalents thereof known to those skilled in the art, and so forth.
The publications discussed herein are provided solely for their disclosure prior to the filing date of the present application. The dates of publication provided may be different from the actual publication dates which may need to be independently confirmed.
Widjaja and Or-Bach describes a bi-stable SRAM cell incorporating a floating body transistor, where more than one stable state exists for each memory cell (for example as described in U.S. Patent Application Publication No. 2010/00246284 to Widjaja et al., titled “Semiconductor Memory Having Floating Body Transistor and Method of Operating” (“Widjaja-1”) and U.S. Patent Application Publication No. 2010/0034041, “Method of Operating Semiconductor Memory Device with Floating Body Transistor Using Silicon Controlled Rectifier Principle” (“Widjaja-2”), which are both hereby incorporated herein, in their entireties, by reference thereto). This floating body SRAM memory cell device is formed from an NMOS device with a Deep NWell (DNWell) layer to isolate the p-type well of the NMOS transistor.
For state 1, the floating body 24 will be at a high stable potential, such as, but not limited to 0.5V. Vertical bipolar devices between DNWell 22 and source 16 and drain 18 will turn on to counter any leakage from the floating body 24. However in return this leakage will cause an active standby current. Methods and techniques described within this invention will show how to reduce standby power.
In an array operation typically data will be stored 50% as state 0 and 50% as state 1. However in situations where the data is not symmetrical, an additional inversion flag bit can be provided which indicates that the data within the page, byte or row has been inverted to reduce power consumption for the floating body SRAM memory cell 50. Additional circuitry can be provided during the write data operations to count the number of cells 50 at state 1. If the number of cells 50 at state 1 exceeds 50% of the total number of cells 50 providing data for the page, byte or row, the write circuitry can set the inversion flag and invert the data prior to a writing operation.
Upon read back of the data within the array the inversion bit 206 must first be checked before data is output as shown in
The system could also be designed so that multiple pages, words or bytes could reference a single shared inversion bit 206. However upon identifying the need to perform a data inversion, the previously written data subsets would require a data inversion. For example this could apply on the chip level. Once it was determined that the number of bits in the state 1 status exceeded 50%, a data inversion could be implemented for all the incoming data. At the same time, the system would have to recognize previously written pages and implement a data inversion on those pages. This data inversion on previously written pages could be implemented as a background operation. For example if a 256 bit page was set to utilize a single inversion bit and after writing half of the page, the data was determined to be more than 50% in state 1, the remaining half page will be written with inverted data. The previous half page must have its data inverted so during idle time the previously written data could be read back, inverted and the re-written back to the array.
A controller may be modified to implement the data state counting and data inversion in addition to its normal array control functions as shown in
Another method in which power could be saved would be in a situation where the system determines that data within the row or column of an array is no longer needed. Often times such rows are simply left alone to be overwritten at a later time or an expiration flag bit is set to indicate the contents of the row have expired and/or are no longer valid. In these cases, in order to conserve power in a floating body SRAM array these rows/columns of unused data can all be set to state 0. As mentioned before, since the vertical bipolar is not activated with a low floating body potential voltage, the leakage current from the floating body SRAM device is significantly reduced if unused rows, columns or bits are set to state 0.
This power saving technique can extend to other types of floating body SRAM array constructs such as dummy columns, dummy rows, redundant columns, redundant rows and redundant blocks. In all cases, when the data element is either not being actively used or does not contain any valid data, their contents can be all set to state 0 in order to conserve power within the floating body SRAM array. This can be implemented with minimal design impact by using a common line such as a source line (for redundant rows, blocks and dummy rows) and pulsing the source line negative to implement a write 0 operation. For redundant columns or dummy columns this could be implemented by pulsing the bit line negative to implement a write 0. These conditioning operations would ideally be implemented during or shortly after power up. Additional options would include but are not limited to implementing the preconditioning upon first read or write command, implementing the preconditioning upon a dummy command after power up, implementing the preconditioning during a reset command after power up.
Yet another method to save power in a floating body SRAM array would be to temporarily disable the vertical bipolar holding mechanism by periodically pulsing the source line or bit line high or periodically have the source line or bit line floating. Referring back to
As an example, the bit line 74 can be floated or driven to a high potential such as Vdd or 1.2V to disable the vertical bipolar holding mechanism and the source line 72 can be cycled to conserve power in the floating body SRAM cell 50. In this example, the source line 72 can be alternated between a low potential such as 0V or ground and high potential such as Vdd or 1.2V to repeatedly disable and re-enable the vertical bipolar holding mechanism. As mentioned previously, the source line 72 driver in this case could also be electrically floated instead of being actively driven to Vdd or 1.2V in order to disable the vertical bipolar holding mechanism. Those skilled in the art will understand that the source and drain terminals of a transistor device can be easily interchanged, and accordingly in this invention the source line 72 and bit line 74 terminals can also be interchanged but is not shown.
In using this technique it is important that the vertical bipolar holding mechanism be restored before the floating body SRAM cells 50 that were previously at state 1 drop below the transition point between state 1 and state 0. To ensure that this threshold is properly detected a reference scheme utilizing a floating body reference cell can be provided. The reference cell 250 shown in
A control block 502 takes the input from detectors 504 and 506 through signals 516 and 518. The output 512 of control block 502 drives the enablement of the source standby voltage regulator/driver 500. The possible outputs of this standby regulator 500 range from a low potential such as ground/0V to a high output which can be as high as Vdd. Standby source regulator 500 can also float the source line by disconnecting all supplies. The regulator 500 is enabled when driving a high potential or when electrically floating. When disabled the regulator 500 will drive a low potential such as 0V. A possible but non limiting method to implement control block 502 is by using an SR (Set Reset) Latch which may be composed by a pair of cross coupled NOR or NAND gates. In this exemplary implementation, the floating body low voltage detector 506 can be connected to the reset pin of the SR latch to reset or disable the voltage regulator in order to force the source line 510 to ground, restoring the vertical bipolar holding mechanism/device for maintaining the state of the floating body 24 SRAM. This in turn would start to restore the floating body 24 voltage to a higher potential. Once the floating body 24 reaches the trip point of the high detector 504, the control block 502 sets the SR latch to cause the source line 510 to be driven high or electrically floated thus disabling the vertical bipolar holding mechanism, which in turn disables the bi-stability of the floating body 24 SRAM and removes any associated state 1 standby leakage current. When the source line voltage 510 is high or electrically floated, the floating body 24 voltage discharges. Eventually when the floating body 24 discharges to the FB Low Regulator trip, the source standby voltage regulator 500 will be again disabled by the control block 502 via input from the floating body low detector 506 which drives the source line 510 voltage low and re-establishes the vertical bipolar holding mechanism and the floating body 24 SRAM bi-stability. This cycle of events can repeat indefinitely to help improve standby power consumption. Additional logic is needed to combine this operation with normal array operations such as read and write, but this logic can be easily understood and realized by those skilled in the art.
An exemplary graph of the floating body 24 voltage including high and low detect levels, according to an embodiment of the present invention, is provided in
Note that the above figures and examples all are using the source terminal (510, 72) for the power saving technique. As mentioned previously, this same technique can be alternately applied to the bit line 74 instead of the source line 72. In these cases the source line 72 will be driven to a high state or electrically floated while the bit line 74 is alternated between a low potential such as ground or 0V to enable the vertical bipolar holding mechanism, and either electrically floated or actively driven to a high potential such as Vdd or 1.2V to disable the vertical bipolar holding mechanism.
Alternatively the vertical bipolar holding mechanism of the floating body SRAM memory cell 50 can be disabled by pulling the DNWell terminal 22 of
An additional method in which to conserve energy according to an embodiment of the present invention is shown in
The charge sharing technique described in regard to
In all of the above charge sharing techniques, the point at which to start the transition between alternating signals is not trivial. A possible non limiting method in which to trigger the alternating transition is to only look at the floating body SRAM reference cell detectors in those floating body SRAM cells 50 that have had their vertical bipolar holding mechanisms disabled. The cells 50 that have had the vertical bipolar holding mechanism disabled are then controlled as described previously to allow the floating body 24 of each of these cells 50 to capacitively discharge. Once the floating bodies 24 of the reference cells 250 have dropped to a set safety point, like the floating body Low Regulator Det Level 602 in
An alternative technique to trigger a charge sharing and voltage swap operation is to monitor both alternating signal floating body voltages and initiate the charge sharing swap operation based on the first voltage to hit its target regulation voltage. For example, in
Other possible methods to implement a charge sharing operation and voltage swap between alternating supply lines could include but are not limited to: fixed time delay, variable delay based on temperature, variable delay based on programmable trims, and using only a high voltage detect level on the floating body reference cells 250.
A diagram of another embodiment of the present invention is shown in
A non-limiting method according to an embodiment of the present invention to set reference cell 100 to state 1 includes setting bit lines 120 to a high potential, such as, but not limited to 0.8V, 1.2V or Vdd, while also setting word lines 124 and 126 to a high potential like 0.8V, 1.2V or Vdd. Source line 128 is at a low potential such as 0V or ground. These bias conditions cause impact ionization on the drain of device 100 which in turn cause holes to be injected into device 100. After enough holes are injected, the floating body SRAM cell 100 will be set to state 1. Cell 104 will not be set to state 1, since the voltage on its source or drain terminals will not be high enough to induce impact ionization. Note that bit line 122 could also have been taken high at the same time that bit line 120 was set high, and this would have allowed the simultaneous setting of cells 100 and 102 to state 1.
To set floating body SRAM cell 104 to state 1, the voltage conditions between source and bit line can be reversed. In this case bit line 120 is set to 0V, while source line 128 is set to a high potential, such as, but not limited to 1.2V. Word lines 124 and 126 will again be taken to a high potential such as 0.8V, 1.2V or Vdd. This will then cause impact ionization on device 104 (and 106, when bit line 122 is also set to 0V). Again holes will be injected into the floating body of device 104 (and 106) until it is set to state 1. Other methods to set floating body devices to state 1 but not shown here are also available, such as, but not limited to: gate coupling, DNWell to floating body p-n junction breakdown, source to floating body p-n junction breakdown and drain to floating body p-n junction breakdown. The example identified here was meant for exemplary purposes only and is not meant to limit the scope of this invention. Terminal 130 is the substrate connection to the floating body SRAM cells 100, 102, 104, 106. For the intents of this invention, this voltage will be always assumed to be a low voltage such as 0V or ground. Terminal 132 is the DNWell connection to the floating body SRAM cells 100, 102, 104, 106. For the intent of this invention, this terminal will always be driven to a high voltage such as 0.8V, 1.2V or Vdd unless mentioned otherwise. Lines 134 is the word line or gate connection for a plurality of floating body memory cells. Line 136 is a source line connected to a plurality of floating body memory cells. Line 138 is the Substrate connection to a plurality of floating body memory cells. Line 140 is the DNWell connection to a plurality of floating body memory cells.
Methods to utilize reference cell (100, 104 and/or 102, 106) can vary as those skilled in the art will appreciate. Pluralities of floating body serial reference cells can be used in rows or columns within an array. These reference cells may also be used in dedicated reference columns, dedicated reference rows, or combinations of both dedicated columns and rows. Possible methods to utilize this reference cell in sense applications include, but are not limited to: using the reference cell as a current reference, using the reference cell as a voltage reference, and using the reference cell as a transient response to the bit line discharge. An exemplary method to utilize this reference cell as a current reference would be to connect a sense amplifier or detector to bit line 120 and have it drive out a fixed voltage. Word lines 124 and 126 will be driven to a high potential such as 1.2V or Vdd. The voltage on this word line would ideally be identical to the voltage applied to a normal array word line. The reference bit line 120 will be driven to a high potential such as 0.8V, 1.0V, 1.2V or Vdd. Source line 128 will be at a low potential such as 0V or ground. This will cause a reference current which is about half of the normal cell current to flow from bit line 120 to source line 128. With the reference current being set at about half of the normal cell current, it becomes an ideal reference for any sense amplifier/detector circuit. Note that the embodiment in
An alternative method which would allow for operation within a single bank has dedicated reference bit lines in which the memory cells in the array can be disabled via potential methods such as but not limited to: floating the gates of the memory cells within the reference bit line, floating the sources of the memory cells within the reference bit line, floating the gates and sources of the memory cells within the reference bit line, floating the drain contacts for the memory cells within the reference bit line, grounding the gates of the memory cells within the reference bit line, applying a negative voltage to the memory cells within the reference bit line.
In a single bank architecture, an additional modification must also be made such that non-reference bit lines could disable the reference cells. Methods to disable reference cells in non-reference bit lines include, but are not limited to: grounding the gates of the reference cells in non-reference bit lines; disconnecting drain contact to reference cells in non-reference bit lines; forcing 0V or a negative voltage to shut off reference cells in non-reference bit lines; disconnecting the gates and sources of reference cells; disconnecting gates, source and drain of reference cells. Simply not printing the reference cells on non-reference bit lines is also another option but may have ramifications with layout and yield.
An alternate embodiment of the present invention is shown in
In order to set the reference cell 200, 202 to state 1 in this embodiment, the bit line 240 can be driven to a high potential such as Vdd or 1.2V while the opposing bit line 242 is set to a low potential such as ground or 0V. Word line 220 can then be driven to a high voltage such as 0.8V, 1.0V, Vdd or 1.2V. This will induce impact ionization on device 200 which will inject holes into the floating body 24 of device 200. This will in turn set the device to state 1. The bit line conditions can be reversed between bit line 240 and 242 in order to set device 202 to state 1. Another benefit to the embodiment shown in
Another embodiment is shown in
Note that the example in
Yet another embodiment is shown in
A non-limiting method to set the devices in
The above embodiments were all presented for electrically floating body transistors fabricated on bulk silicon comprising of buried well region (electrically connected to the DNWell terminal). However this invention and all of the above embodiments may also be applied to other floating body memory cell technologies such as that fabricated on silicon on insulator (SOI) substrate, for example as described by Tack, Okhonin, and Ohsawa. In the case of the floating body memory cell fabricated on SOI, the DNWell implant may not be available and the SOI floating body memory cell may not be bi-stable with two stables states. Instead the SOI floating body memory cell may decay similar to a capacitor like that of a DRAM cell. However this invention would still provide a reliable reference cell that could track process, temperature, and voltage variations.
While the present invention has been described with reference to the specific embodiments thereof, it should be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the true spirit and scope of the invention. In addition, many modifications may be made to adapt a particular situation, material, composition of matter, process, process step or steps, to the objective, spirit and scope of the present invention. All such modifications are intended to be within the scope of the claims appended hereto.
This application is a continuation of co-pending application Ser. No. 16/923,555, filed on Jul. 8, 2020, which is a continuation of application Ser. No. 16/435,551, filed on Jun. 9, 2019, now U.S. Pat. No. 10,783,952, which is a division of application Ser. No. 16/189,806, filed on Nov. 13, 2018, now U.S. Pat. No. 10,354,718, which is a division of application Ser. No. 15/920,111, filed on Mar. 13, 2018, now U.S. Pat. No. 10,157,663, which is a division of application Ser. No. 15/361,627, filed on Nov. 28, 2016, now U.S. Pat. No. 9,947,387, which is a division of application Ser. No. 15/010,300, filed on Jan. 29, 2016, now U.S. Pat. No. 9,536,595, which is a division of application Ser. No. 14/328,633, filed on Jul. 10, 2014, now U.S. Pat. No. 9,281,022, which claims the benefit of U.S. Provisional Application Nos. 61/844,832, filed Jul. 10, 2013 and 61/846,720, filed Jul. 16, 2013. Each of the aforementioned applications and patents is hereby incorporated herein, in its entirety, by reference thereto. We claim priority to application Ser. Nos. 16/932,555; 16/435,551; 16/189,806; 15/920,111; 15/361,627; 15/010,300 and 14/328,633 under 35 U.S.C. Section 120 and claim priority to Application Ser. Nos. 61/844,832 and 61/846,720 under 35 U.S.C. Section 119.
Number | Name | Date | Kind |
---|---|---|---|
4300212 | Simko | Nov 1981 | A |
4959812 | Momodomi et al. | Sep 1990 | A |
5519831 | Holzhammer | May 1996 | A |
5581504 | Chang et al. | Dec 1996 | A |
5767549 | Chen et al. | Jun 1998 | A |
5999444 | Fujiwara et al. | Dec 1999 | A |
6005818 | Ferrant et al. | Dec 1999 | A |
6141248 | Forbes et al. | Oct 2000 | A |
6163048 | Hirose et al. | Dec 2000 | A |
6166407 | Ohta | Dec 2000 | A |
6229161 | Nemati et al. | May 2001 | B1 |
6341087 | Kunikiyo et al. | Jan 2002 | B1 |
6356485 | Proebsting et al. | Mar 2002 | B1 |
6376876 | Shin et al. | Apr 2002 | B1 |
6376880 | Hoist | Apr 2002 | B1 |
6542411 | Tanikawa et al. | Apr 2003 | B2 |
6614684 | Shukuri et al. | Sep 2003 | B1 |
6653175 | Nemati et al. | Nov 2003 | B1 |
6661042 | Hsu | Dec 2003 | B2 |
6686624 | Hsu | Feb 2004 | B2 |
6724657 | Shukuri et al. | Apr 2004 | B2 |
6791882 | Seki et al. | Sep 2004 | B2 |
6801452 | Miwa et al. | Oct 2004 | B2 |
6885581 | Nemati et al. | Apr 2005 | B2 |
6913964 | Hsu | Jul 2005 | B2 |
6925006 | Fazan et al. | Aug 2005 | B2 |
6937516 | Fazen et al. | Aug 2005 | B2 |
6954377 | Choi et al. | Oct 2005 | B2 |
6956256 | Forbes | Oct 2005 | B2 |
6969662 | Fazan et al. | Nov 2005 | B2 |
7061806 | Tang et al. | Jun 2006 | B2 |
7081653 | Kawanaka | Jul 2006 | B2 |
7085156 | Ferrant et al. | Aug 2006 | B2 |
7118986 | Steigerwalt et al. | Oct 2006 | B2 |
7170807 | Fazan et al. | Jan 2007 | B2 |
7224019 | Hieda et al. | May 2007 | B2 |
7224020 | Wang et al. | May 2007 | B2 |
7259420 | Anderson | Aug 2007 | B2 |
7259992 | Shirota | Aug 2007 | B2 |
7285820 | Park et al. | Oct 2007 | B2 |
7285832 | Hoefler et al. | Oct 2007 | B2 |
7301803 | Okhonin et al. | Nov 2007 | B2 |
7329580 | Cho et al. | Feb 2008 | B2 |
7391640 | Tang et al. | Jun 2008 | B2 |
7440333 | Hsia et al. | Oct 2008 | B2 |
7447068 | Tsai et al. | Nov 2008 | B2 |
7450423 | Lai et al. | Nov 2008 | B2 |
7473611 | Cho et al. | Jan 2009 | B2 |
7504302 | Mathew et al. | Mar 2009 | B2 |
7541636 | Ranica et al. | Jun 2009 | B2 |
7542345 | Okhonin et al. | Jun 2009 | B2 |
7579241 | Hieda et al. | Aug 2009 | B2 |
7609551 | Shino et al. | Oct 2009 | B2 |
7622761 | Park et al. | Nov 2009 | B2 |
7683430 | Okhonin | Mar 2010 | B2 |
7701751 | Kang et al. | Apr 2010 | B2 |
7701763 | Roohparvar | Apr 2010 | B2 |
7733693 | Ferrant et al. | Jun 2010 | B2 |
7738312 | Shimano et al. | Jun 2010 | B2 |
7759715 | Bhattacharyya | Jul 2010 | B2 |
7760548 | Widjaja | Jul 2010 | B2 |
7847338 | Widjaja | Dec 2010 | B2 |
7898009 | Wilson et al. | Mar 2011 | B2 |
7903472 | Chen et al. | Mar 2011 | B2 |
7924630 | Carman | Apr 2011 | B2 |
7933140 | Wang et al. | Apr 2011 | B2 |
3014200 | Widjaja | Sep 2011 | A1 |
8018007 | Chang et al. | Sep 2011 | B2 |
3036033 | Widjaja | Oct 2011 | A1 |
8059459 | Widjaja | Nov 2011 | B2 |
8077536 | Widjaja | Dec 2011 | B2 |
8130547 | Widjaja et al. | Mar 2012 | B2 |
8130548 | Widjaja et al. | Mar 2012 | B2 |
8159878 | Widjaja | Apr 2012 | B2 |
8174886 | Widjaja et al. | May 2012 | B2 |
8194451 | Widjaja | Jun 2012 | B2 |
8208302 | Widjaja et al. | Jun 2012 | B2 |
8243499 | Widjaja | Aug 2012 | B2 |
8264875 | Widjaja et al. | Sep 2012 | B2 |
8294193 | Widjaja | Oct 2012 | B2 |
8391066 | Widjaja | Mar 2013 | B2 |
8472249 | Widjaja | Jun 2013 | B2 |
8514622 | Widjaja | Aug 2013 | B2 |
8514623 | Widjaja et al. | Aug 2013 | B2 |
8531881 | Widjaja | Sep 2013 | B2 |
8547756 | Widjaja et al. | Oct 2013 | B2 |
8559257 | Widjaja | Oct 2013 | B2 |
8570803 | Widjaja | Oct 2013 | B2 |
8582359 | Widjaja | Nov 2013 | B2 |
8654583 | Widjaja | Feb 2014 | B2 |
8711622 | Widjaja | Apr 2014 | B2 |
8716810 | Chang et al. | May 2014 | B2 |
8767458 | Widjaja | Jul 2014 | B2 |
8787085 | Widjaja | Jul 2014 | B2 |
8817548 | Widjaja et al. | Aug 2014 | B2 |
8837247 | Widjaja | Sep 2014 | B2 |
8923052 | Widjaja | Dec 2014 | B2 |
8934296 | Widjaja | Jan 2015 | B2 |
8937834 | Widjaja et al. | Jan 2015 | B2 |
8957458 | Widjaja | Feb 2015 | B2 |
8995186 | Widjaja | Mar 2015 | B2 |
9001581 | Widjaja | Apr 2015 | B2 |
9025358 | Widjaja | May 2015 | B2 |
9029922 | Han et al. | May 2015 | B2 |
9030872 | Widjaja et al. | May 2015 | B2 |
9087580 | Widjaja | Jul 2015 | B2 |
9153309 | Widjaja et al. | Oct 2015 | B2 |
9153333 | Widjaja | Oct 2015 | B2 |
9208840 | Widjaja et al. | Dec 2015 | B2 |
9208880 | Louie et al. | Dec 2015 | B2 |
9209188 | Widjaja | Dec 2015 | B2 |
9230651 | Widjaja et al. | Jan 2016 | B2 |
9230965 | Widjaja | Jan 2016 | B2 |
9236382 | Widjaja et al. | Jan 2016 | B2 |
9257179 | Widjaja | Feb 2016 | B2 |
9275723 | Louie et al. | Mar 2016 | B2 |
9281022 | Louie et al. | Mar 2016 | B2 |
9368625 | Louie et al. | Jun 2016 | B2 |
9391079 | Widjaja | Jul 2016 | B2 |
9401206 | Widjaja | Jul 2016 | B2 |
9431401 | Han et al. | Aug 2016 | B2 |
9455262 | Widjaja | Sep 2016 | B2 |
9460790 | Widjaja | Oct 2016 | B2 |
9484082 | Widjaja | Nov 2016 | B2 |
9490012 | Widjaja | Nov 2016 | B2 |
9514803 | Widjaja et al. | Dec 2016 | B2 |
9524970 | Widjaja | Dec 2016 | B2 |
9536595 | Louie et al. | Jan 2017 | B2 |
9576962 | Widjaja et al. | Feb 2017 | B2 |
9589963 | Widjaja | Mar 2017 | B2 |
9601493 | Widjaja | Mar 2017 | B2 |
9614080 | Widjaja | Apr 2017 | B2 |
9646693 | Widjaja | May 2017 | B2 |
9653467 | Widjaja et al. | May 2017 | B2 |
9666275 | Widjaja | May 2017 | B2 |
9679648 | Widjaja | Jun 2017 | B2 |
9704578 | Louie et al. | Jul 2017 | B2 |
9704870 | Widjaja | Jul 2017 | B2 |
9715932 | Widjaja | Jul 2017 | B2 |
9747983 | Widjaja | Aug 2017 | B2 |
9761311 | Widjaja | Sep 2017 | B2 |
9761589 | Widjaja | Sep 2017 | B2 |
9793277 | Widjaja et al. | Oct 2017 | B2 |
9812203 | Widjaja | Nov 2017 | B2 |
9812456 | Widjaja | Nov 2017 | B2 |
9831247 | Han et al. | Nov 2017 | B2 |
9847131 | Widjaja | Dec 2017 | B2 |
9865332 | Louie et al. | Jan 2018 | B2 |
9893067 | Widjaja et al. | Feb 2018 | B2 |
9905564 | Widjaja et al. | Feb 2018 | B2 |
9922711 | Widjaja | Mar 2018 | B2 |
9922981 | Widjaja | Mar 2018 | B2 |
9928910 | Widjaja | Mar 2018 | B2 |
9947387 | Louie et al. | Apr 2018 | B2 |
9960166 | Widjaja | May 2018 | B2 |
9978450 | Widjaja | May 2018 | B2 |
10008266 | Widjaja | Jun 2018 | B1 |
10026479 | Louie et al. | Jul 2018 | B2 |
10032514 | Widjaja | Jul 2018 | B2 |
10032776 | Widjaja et al. | Jul 2018 | B2 |
10056387 | Widjaja | Aug 2018 | B2 |
10074653 | Widjaja | Sep 2018 | B2 |
10079236 | Widjaja | Sep 2018 | B2 |
10103148 | Louie et al. | Oct 2018 | B2 |
10103149 | Han et al. | Oct 2018 | B2 |
10109349 | Widjaja | Oct 2018 | B2 |
10157663 | Louie et al. | Dec 2018 | B2 |
10163907 | Widjaja et al. | Dec 2018 | B2 |
10181471 | Widjaja et al. | Jan 2019 | B2 |
10192872 | Widjaja et al. | Jan 2019 | B2 |
10204684 | Widjaja | Feb 2019 | B2 |
10204908 | Widjaja | Feb 2019 | B2 |
10210934 | Widjaja | Feb 2019 | B2 |
10211209 | Widjaja | Feb 2019 | B2 |
10242739 | Widjaja | Mar 2019 | B2 |
10249368 | Widjaja | Apr 2019 | B2 |
10340006 | Widjaja | Jul 2019 | B2 |
10340276 | Widjaja et al. | Jul 2019 | B2 |
10347636 | Widjaja | Jul 2019 | B2 |
10354718 | Louie et al. | Jul 2019 | B2 |
10373685 | Louie et al. | Aug 2019 | B2 |
10388378 | Widjaja | Aug 2019 | B2 |
10403361 | Widjaja | Sep 2019 | B2 |
10453847 | Widjaja et al. | Oct 2019 | B2 |
10461083 | Han et al. | Oct 2019 | B2 |
10461084 | Widjaja | Oct 2019 | B2 |
10468102 | Widjaja | Nov 2019 | B2 |
10497443 | Widjaja | Dec 2019 | B2 |
10504585 | Louie et al. | Dec 2019 | B2 |
10515968 | Widjaja | Dec 2019 | B2 |
10529424 | Widjaja | Jan 2020 | B2 |
10546860 | Louie et al. | Jan 2020 | B2 |
10553281 | Widjaja | Feb 2020 | B2 |
10593675 | Widjaja et al. | Mar 2020 | B2 |
10615163 | Widjaja | Apr 2020 | B2 |
10622069 | Widjaja | Apr 2020 | B2 |
10629599 | Widjaja et al. | Apr 2020 | B2 |
10644001 | Widjaja et al. | May 2020 | B2 |
10644002 | Widjaja | May 2020 | B2 |
10707209 | Widjaja | Jul 2020 | B2 |
10734076 | Widjaja | Aug 2020 | B2 |
10748904 | Widjaja et al. | Aug 2020 | B2 |
10783952 | Louie et al. | Sep 2020 | B2 |
10797055 | Widjaja et al. | Oct 2020 | B2 |
10804276 | Widjaja | Oct 2020 | B2 |
10818354 | Widjaja | Oct 2020 | B2 |
10825520 | Widjaja | Nov 2020 | B2 |
10839905 | Louie et al. | Nov 2020 | B2 |
10861548 | Widjaja | Dec 2020 | B2 |
10867676 | Widjaja | Dec 2020 | B2 |
10978455 | Widjaja et al. | Apr 2021 | B2 |
10991697 | Louie et al. | Apr 2021 | B2 |
10991698 | Widjaja | Apr 2021 | B2 |
11004512 | Widjaja | May 2021 | B2 |
11011232 | Widjaja | May 2021 | B2 |
11018136 | Widjaja et al. | May 2021 | B2 |
11031401 | Han et al. | Jun 2021 | B2 |
11037929 | Widjaja | Jun 2021 | B2 |
11063048 | Widjaja | Jul 2021 | B2 |
11100994 | Louie et al. | Aug 2021 | B2 |
11133313 | Widjaja | Sep 2021 | B2 |
11183498 | Widjaja et al. | Nov 2021 | B2 |
11211125 | Widjaja | Dec 2021 | B2 |
11217300 | Louie et al. | Jan 2022 | B2 |
11295813 | Widjaja | Apr 2022 | B2 |
11342018 | Louie et al. | May 2022 | B2 |
11348922 | Widjaja et al. | May 2022 | B2 |
11348923 | Widjaja | May 2022 | B2 |
20020018366 | Von Schwerin et al. | Feb 2002 | A1 |
20020048193 | Tanikawa et al. | Apr 2002 | A1 |
20040243758 | Notani | Dec 2004 | A1 |
20040252573 | Hanson et al. | Dec 2004 | A1 |
20050024968 | Lee et al. | Feb 2005 | A1 |
20050032313 | Forbes | Feb 2005 | A1 |
20050124120 | Du et al. | Jun 2005 | A1 |
20060044915 | Park et al. | Mar 2006 | A1 |
20060125010 | Bhattacharyya | Jun 2006 | A1 |
20060157679 | Scheuerlein | Jul 2006 | A1 |
20060227601 | Bhattacharyya | Oct 2006 | A1 |
20060237770 | Huang et al. | Oct 2006 | A1 |
20060278915 | Lee et al. | Dec 2006 | A1 |
20060285422 | Scheuerlein | Dec 2006 | A1 |
20070001199 | Shen et al. | Jan 2007 | A1 |
20070004149 | Tews | Jan 2007 | A1 |
20070090443 | Choi et al. | Apr 2007 | A1 |
20070097751 | Popoff | May 2007 | A1 |
20070164351 | Hamamoto | Jul 2007 | A1 |
20070164352 | Padilla | Jul 2007 | A1 |
20070210338 | Orlowski | Sep 2007 | A1 |
20070211535 | Kim | Sep 2007 | A1 |
20070215954 | Mouli | Sep 2007 | A1 |
20070284648 | Park et al. | Dec 2007 | A1 |
20080048239 | Huo et al. | Feb 2008 | A1 |
20080080248 | Lue et al. | Apr 2008 | A1 |
20080123418 | Widjaja | May 2008 | A1 |
20080130358 | Fukuda | Jun 2008 | A1 |
20080165605 | Fisch et al. | Jul 2008 | A1 |
20080179656 | Aoki | Jul 2008 | A1 |
20080224202 | Young et al. | Sep 2008 | A1 |
20080232184 | Ohsawa | Sep 2008 | A1 |
20080265305 | He et al. | Oct 2008 | A1 |
20080298139 | Fisch et al. | Dec 2008 | A1 |
20080303079 | Cho et al. | Dec 2008 | A1 |
20090016101 | Okhonin et al. | Jan 2009 | A1 |
20090034320 | Ueda | Feb 2009 | A1 |
20090065853 | Hanafi | Mar 2009 | A1 |
20090080244 | Carman et al. | Mar 2009 | A1 |
20090081835 | Kim et al. | Mar 2009 | A1 |
20090085089 | Chang et al. | Apr 2009 | A1 |
20090108322 | Widjaja | Apr 2009 | A1 |
20090108351 | Yang et al. | Apr 2009 | A1 |
20090109750 | Widjaja | Apr 2009 | A1 |
20090173985 | Lee et al. | Jul 2009 | A1 |
20090190402 | Hsu et al. | Jul 2009 | A1 |
20090201723 | Okhonin et al. | Aug 2009 | A1 |
20090251966 | Widjaja | Oct 2009 | A1 |
20090316492 | Widjaja | Dec 2009 | A1 |
20100008139 | Bae | Jan 2010 | A1 |
20100034041 | Widjaja | Feb 2010 | A1 |
20100046287 | Widjaja | Feb 2010 | A1 |
20100221877 | Park et al. | Sep 2010 | A1 |
20100246277 | Widjaja | Sep 2010 | A1 |
20100246284 | Widjaja | Sep 2010 | A1 |
20110032756 | Widjaja | Feb 2011 | A1 |
20110042736 | Widjaja | Feb 2011 | A1 |
20110044110 | Widjaja | Feb 2011 | A1 |
20110170343 | Mazure et al. | Jul 2011 | A1 |
20110228591 | Widjaja | Sep 2011 | A1 |
20110292723 | Xiao et al. | Dec 2011 | A1 |
20110305085 | Widjaja | Dec 2011 | A1 |
20120012915 | Widjaja et al. | Jan 2012 | A1 |
20120014180 | Widjaja | Jan 2012 | A1 |
20120014188 | Widjaja et al. | Jan 2012 | A1 |
20120069652 | Widjaja | Mar 2012 | A1 |
20120106234 | Widjaja | May 2012 | A1 |
20120113712 | Widjaja | May 2012 | A1 |
20120120752 | Widjaja | May 2012 | A1 |
20120217549 | Widjaja | Aug 2012 | A1 |
20120230123 | Widjaja et al. | Sep 2012 | A1 |
20130015517 | Widjaja et al. | Jan 2013 | A1 |
20130094280 | Widjaja | Apr 2013 | A1 |
20130148422 | Widjaja | Jun 2013 | A1 |
20130250685 | Widjaja | Sep 2013 | A1 |
20130264656 | Widjaja et al. | Oct 2013 | A1 |
20130292635 | Widjaja | Nov 2013 | A1 |
20130301349 | Widjaja | Nov 2013 | A1 |
20140021549 | Widjaja | Jan 2014 | A1 |
20140036577 | Widjaja et al. | Feb 2014 | A1 |
20140084232 | Van Buskirk | Mar 2014 | A1 |
20140159156 | Widjaja | Jun 2014 | A1 |
20140160868 | Widjaja et al. | Jun 2014 | A1 |
20140198551 | Louie et al. | Jul 2014 | A1 |
20140307501 | Louie et al. | Oct 2014 | A1 |
20140328128 | Louie et al. | Nov 2014 | A1 |
20140332899 | Widjaja | Nov 2014 | A1 |
20140340972 | Widjaja et al. | Nov 2014 | A1 |
20140355343 | Widjaja | Dec 2014 | A1 |
20150016207 | Louie et al. | Jan 2015 | A1 |
20150023105 | Widjaja et al. | Jan 2015 | A1 |
20150092486 | Widjaja | Apr 2015 | A1 |
20150109860 | Widjaja | Apr 2015 | A1 |
20150155284 | Widjaja | Jun 2015 | A1 |
20150170743 | Widjaja | Jun 2015 | A1 |
20150187776 | Widjaja | Jul 2015 | A1 |
20150200005 | Han et al. | Jul 2015 | A1 |
20150213892 | Widjaja | Jul 2015 | A1 |
20150221650 | Widjaja et al. | Aug 2015 | A1 |
20150221653 | Han et al. | Aug 2015 | A1 |
20150310917 | Widjaja | Oct 2015 | A1 |
20150371707 | Widjaja | Dec 2015 | A1 |
20160005741 | Widjaja | Jan 2016 | A1 |
20160005750 | Widjaja | Jan 2016 | A1 |
20160078921 | Widjaja et al. | Mar 2016 | A1 |
20160086655 | Widjaja | Mar 2016 | A1 |
20160086954 | Widjaja et al. | Mar 2016 | A1 |
20160111158 | Widjaja | Apr 2016 | A1 |
20160148675 | Louie et al. | May 2016 | A1 |
20160267982 | Louie et al. | Sep 2016 | A1 |
20160300613 | Widjaja | Oct 2016 | A1 |
20160300841 | Widjaja | Oct 2016 | A1 |
20160336326 | Han et al. | Nov 2016 | A1 |
20160365444 | Widjaja | Dec 2016 | A1 |
20170025534 | Widjaja | Jan 2017 | A1 |
20170032842 | Widjaja | Feb 2017 | A1 |
20170040326 | Widjaja | Feb 2017 | A1 |
20170053919 | Widjaja et al. | Feb 2017 | A1 |
20170076784 | Louie et al. | Mar 2017 | A1 |
20170092359 | Louie et al. | Mar 2017 | A1 |
20170092648 | Widjaja | Mar 2017 | A1 |
20170125421 | Widjaja et al. | May 2017 | A1 |
20170133091 | Widjaja | May 2017 | A1 |
20170133382 | Widjaja | May 2017 | A1 |
20170154888 | Widjaja | Jun 2017 | A1 |
20170169887 | Widjaja | Jun 2017 | A1 |
20170213593 | Widjaja | Jul 2017 | A1 |
20170221900 | Widjaja et al. | Aug 2017 | A1 |
20170229178 | Widjaja | Aug 2017 | A1 |
20170229466 | Widjaja et al. | Aug 2017 | A1 |
20170271339 | Widjaja | Sep 2017 | A1 |
20170294230 | Widjaja | Oct 2017 | A1 |
20170294438 | Louie et al. | Oct 2017 | A1 |
20170365340 | Widjaja | Dec 2017 | A1 |
20170365607 | Widjaja | Dec 2017 | A1 |
20180012893 | Widjaja et al. | Jan 2018 | A1 |
20180025780 | Widjaja | Jan 2018 | A1 |
20180047731 | Widjaja | Feb 2018 | A1 |
20180069008 | Han et al. | Mar 2018 | A1 |
20180075907 | Widjaja | Mar 2018 | A1 |
20180096721 | Louie et al. | Apr 2018 | A1 |
20180158825 | Widjaja et al. | Jun 2018 | A1 |
20180166446 | Widjaja | Jun 2018 | A1 |
20180174654 | Widjaja | Jun 2018 | A1 |
20180182458 | Widjaja | Jun 2018 | A1 |
20180182460 | Widjaja | Jun 2018 | A1 |
20180204611 | Louie et al. | Jul 2018 | A1 |
20180219013 | Widjaja | Aug 2018 | A1 |
20180233199 | Widjaja | Aug 2018 | A1 |
20180301191 | Widjaja | Oct 2018 | A1 |
20180301192 | Louie et al. | Oct 2018 | A1 |
20180308848 | Widjaja et al. | Oct 2018 | A1 |
20180330790 | Widjaja | Nov 2018 | A1 |
20180331109 | Widjaja | Nov 2018 | A1 |
20180358360 | Han et al. | Dec 2018 | A1 |
20180374854 | Widjaja | Dec 2018 | A1 |
20190006367 | Widjaja | Jan 2019 | A1 |
20190027220 | Widjaja | Jan 2019 | A1 |
20190027476 | Louie et al. | Jan 2019 | A1 |
20190066768 | Han et al. | Feb 2019 | A1 |
20190067289 | Widjaja et al. | Feb 2019 | A1 |
20190080746 | Louie et al. | Mar 2019 | A1 |
20190096889 | Widjaja et al. | Mar 2019 | A1 |
20190131305 | Widjaja et al. | May 2019 | A1 |
20190139962 | Widjaja | May 2019 | A1 |
20190148381 | Widjaja et al. | May 2019 | A1 |
20190156889 | Widjaja | May 2019 | A1 |
20190156890 | Widjaja | May 2019 | A1 |
20190164974 | Widjaja | May 2019 | A1 |
20190180820 | Widjaja | Jun 2019 | A1 |
20190189212 | Widjaja | Jun 2019 | A1 |
20190259763 | Widjaja et al. | Aug 2019 | A1 |
20190267089 | Widjaja | Aug 2019 | A1 |
20190267382 | Widjaja | Aug 2019 | A1 |
20190295629 | Louie et al. | Sep 2019 | A1 |
20190295646 | Widjaja | Sep 2019 | A1 |
20190311769 | Louie et al. | Oct 2019 | A1 |
20190355419 | Widjaja | Nov 2019 | A1 |
20200013780 | Widjaja | Jan 2020 | A1 |
20200013781 | Widjaja et al. | Jan 2020 | A1 |
20200035682 | Han et al. | Jan 2020 | A1 |
20200051633 | Widjaja | Feb 2020 | A1 |
20200075091 | Louie et al. | Mar 2020 | A1 |
20200091155 | Widjaja | Mar 2020 | A1 |
20200111792 | Louie et al. | Apr 2020 | A1 |
20200118627 | Widjaja | Apr 2020 | A1 |
20200118628 | Widjaja | Apr 2020 | A1 |
20200168609 | Widjaja et al. | May 2020 | A1 |
20200203346 | Widjaja | Jun 2020 | A1 |
20200227415 | Widjaja et al. | Jul 2020 | A1 |
20200243529 | Widjaja et al. | Jul 2020 | A1 |
20200243530 | Widjaja | Jul 2020 | A1 |
20200312855 | Widjaja | Oct 2020 | A1 |
20200335156 | Louie et al. | Oct 2020 | A1 |
20200335503 | Widjaja et al. | Oct 2020 | A1 |
20200342939 | Widjaja | Oct 2020 | A1 |
20200411521 | Widjaja et al. | Dec 2020 | A1 |
20210005608 | Widjaja | Jan 2021 | A1 |
20210050059 | Widjaja | Feb 2021 | A1 |
20210057027 | Louie et al. | Feb 2021 | A1 |
20210074358 | Widjaja | Mar 2021 | A1 |
20210217754 | Louie et al. | Jul 2021 | A1 |
20210225844 | Widjaja et al. | Jul 2021 | A1 |
20210249078 | Widjaja | Aug 2021 | A1 |
20210257025 | Widjaja | Aug 2021 | A1 |
20210257365 | Widjaja | Aug 2021 | A1 |
20210288051 | Han et al. | Sep 2021 | A1 |
20210327880 | Widjaja | Oct 2021 | A1 |
20210358547 | Louie et al. | Nov 2021 | A1 |
20210375870 | Widjaja | Dec 2021 | A1 |
20210398981 | Widjaja | Dec 2021 | A1 |
20220059537 | Widjaja et al. | Feb 2022 | A1 |
20220093175 | Widjaja | Mar 2022 | A1 |
20220115061 | Louie et al. | Apr 2022 | A1 |
20220199160 | Widjaja | Jun 2022 | A1 |
Entry |
---|
Almeida, et al., “Comparison between low and high read bias in FB-RAM on UTBOX FDSOI devices”, Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on, Mar. 6, 2012, pp. 61-64. |
Andrade, et al., “The Impact of Back Bias on the Floating Body Effect in UTBOX SOI Devices for 1T-FBRAM Memory Applications”, Devices, Circuits and Systems (ICCDCS), 2012 8th International Caribbean Conference on. IEEE, 2012, pp. 1-4. |
Aoulaiche, et al. “Junction Field Effect on the Retention Time for One-Transistor Floating-Body RAM.” Electron Devices, IEEE Transactions on, vol. 59, No. 8, 2012, pp. 2167-2172. |
Aoulaiche, et al. “Hot hole induced damage in 1T-FBRAM on bulk FinFET.” Reliability Physics Symposium (IRPS), 2011 IEEE International. IEEE, 2011, pp. 99-104. |
Avci, et al. “Floating-Body Diode—A Novel DRAM Device.” Electron Device Letters, IEEE, vol. 33, No. 2, 2012, pp. 161-163. |
Bawedin, et al., “Floating-Body SOI Memory: Concepts, Physics, and Challenges”, ECS Transactions 19.4 (2009), pp. 243-256. |
Ban, et al. “Integration of Back-Gate doping for 15-nm node floating body cell (FBC) memory.” VLSI Technology (VLSIT), 2010 Symposium on. IEEE, 2010, pp. 159-160. |
Cho, et al. “Variation-aware study of BJT-based capacitorless DRAM cell scaling limit.” Silicon Nanoelectronics Workshop (SNW), 2012 IEEE. IEEE, 2012, pp. 1-2. |
Cho, et al. “Variation Study and Implications for BJT-Based Thin-Body Capacitorless DRAM.” Electron Device Letters, IEEE, vol. 33, No. 3, 2012, pp. 312-314. |
Chiu, et al. “Characteristics of a new trench-oxide thin-film transistor and its 1T-DRAM applications.” Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on. IEEE, 2010, pp. 1106-1108. |
Chiu, et al. “A simple process of thin-film transistor using the trench-oxide layer for improving 1T-DRAM performance.” Next-Generation Electronics (ISNE), 2010 International Symposium on. IEEE, 2010, pp. 254-257. |
Chun, et al. “A 1.1 V, 667MHz random cycle, asymmetric 2T gain cell embedded DRAM with a 99.9 percentile retention time of 110μsec.” VLSI Circuits (VLSIC), 2010 IEEE Symposium on. IEEE, 2010, pp. 191-192. |
Chun, et al. “A 667 MHz Logic-Compatible Embedded DRAM Featuring an Asymmetric 2T Gain Cell for High Speed On-Die Caches.” Solid-State Circuits, IEEE Journal of, vol. 47, No. 2, 2012, pp. 547-559. |
Cao, et al. “A Novel 1T-1D DRAM Cell for Embedded Application.” Electron Devices, IEEE Transactions on, vol. 59, No. 5, 2012, pp. 1304-1310. |
Collaert, et al. “Substrate bias dependency of sense margin and retention in bulk FinFET 1T-DRAM cells.” Solid-State Electronics 65 (2011), pp. 205-210. |
Collaert, et al. “A low-voltage biasing scheme for aggressively scaled bulk FinFET 1T-DRAM featuring 10s retention at 85 C.” VLSI Technology (VLSIT), 2010 Symposium on. IEEE, 2010, pp. 161-162. |
Chatterjee, et al. “Taper isolated dynamic gain RAM cell.” Electron Devices Meeting, 1978 International. vol. 24. IEEE, 1978, pp. 698-699. |
Chatterjee, et al. Circuit Optimization of the Paper Isolated Dynamic Gain RAM Cell for VLSI Memories, pp. 22-23, 1979 IEEE International Solid-State Circuits Conference. |
Chatterjee, et al. “a survey of high-density dynamic RAM cell concepts.” Electron Devices, IEEE Transactions on 26.6 (1979): 827-839. |
Erb, D. “Stratified charge memory.” Solid-State Circuits Conference. Digest of Technical Papers. 1978 IEEE International. vol. 21. IEEE, 1978, pp. 24-25. |
Galeti, M., et al. “BJT effect analysis in p-and n-SOI MuGFETs with high-k gate dielectrics and TiN metal gate electrode for a 1T-DRAM application.” SOI Conference (SOI), 2011 IEEE International. IEEE, 2011, pp. 1-2. |
Gamiz, et al. “3D Trigate 1T-DRAM Memory Cell for 2x nm Nodes.” Memory Workshop (IMW), 2012 4th IEEE International. IEEE, 2012, pp. 1-4. |
Gamiz, et al. “A 20nm low-power triple-gate multibody 1T-DRAM cell.” VLSI Technology, Systems, and Applications (VLSI-TSA), 2012 International Symposium on. IEEE, 2012, pp. 1-2. |
Giusi, et al. “Bipolar mode operation and scalability of double-gate capacitorless 1T-DRAM cells.” Electron Devices, IEEE Transactions on, vol. 57, No. 8 (2010), pp. 1743-1750. |
Gupta, et al. “32nm high-density high-speed T-RAM embedded memory technology.” Electron Devices Meeting (IEDM), 2010 IEEE International. IEEE, 2010, pp. 12-1. |
Han, et al. “Bistable resistor (biristor)-gateless silicon nanowire memory.” VLSI Technology (VLSIT), 2010 Symposium on. IEEE, 2010, pp. 171-172. |
Han, et al. “Biristor—Bistable resistor based on a silicon nanowire.” Electron Device Letters, IEEE 31.8 (2010): 797-799. |
Hubert, et al., “Experimental comparison of programming mechanisms in 1T-DRAM cells with variable channel length”, Solid-State Device Research Conference (ESSDERC), 2010 Proceedings of the European, pp. 150-153, Sep. 14-16, 2010. |
Hwang, et al. “Offset buried metal gate vertical floating body memory technology with excellent retention time for DRAM application.” VLSI Technology (VLSIT), 2011 Symposium on. IEEE, 2011, pp. 172-173. |
Kim, et al. “Vertical double gate Z-RAM technology with remarkable low voltage operation for DRAM application.” VLSI Technology (VLSIT), 2010 Symposium on, 2010, pp. 163-164. |
Kim, et al. “Silicon on replacement insulator (SRI) floating body cell (FBC) memory.” VLSI Technology (VLSIT), 2010 Symposium on. IEEE, 2010, pp. 165-166. |
Kim, et al. “Optical charge-pumping: A universal trap characterization technique for nanoscale floating body devices.” VLSI Technology (VLSIT), 2011 Symposium on. IEEE, 2011, pp. 190-191. |
Kim, et al. “Investigation of 1T DRAM cell with non-overlap structure and recessed channel.” Silicon Nanoelectronics Workshop (SNW), 2010. IEEE, 2010, pp. 1-2. |
Lu, et al., “A Simplified Superior Floating-Body/Gate DRAM Cell”, IEEE Elec. Dev. Letters, vol. 30, No. 3, Mar. 2009, pp. 282-284. |
Lu, et al., “A Floating-Body/Gate DRAM Cell Upgraded for Long Retention Time”, IEEE Elec. Dev. Letters, vol. 32, No. 3, pp. 731-733, Jun. 2011. |
Liu, Xuelian, et al. “A three-dimensional DRAM using floating body cell in FDSOI devices.” Design and Diagnostics of Electronic Circuits & Systems (DDECS), 2012 IEEE 15th International Symposium on. IEEE, 2012, pp. 159-162. |
Lee, et al. “A Novel Capacitorless 1T DRAM Cell for Data Retention Time Improvement.” Nanotechnology, IEEE Transactions on, vol. 10, No. 3, 2011, pp. 462-466. |
Leiss, et al., “dRAM Design Using the Taper-Isolated Dynamic RAM Cell.” Solid-State Circuits, IEEE Journal of 17.2 (1982): 337-344. |
Mahatme, et al. “Total ionizing dose effects on ultra thin buried oxide floating body memories.” Reliability Physics Symposium (IRPS), 2012 IEEE International, 2012, pp. 1-5. |
Moon, et al. “Fin-width dependence of BJT-based 1T-DRAM implemented on FinFET.” Electron Device Letters, vol. 31, No. 9 (2010): 909-911. |
Moon, et al. “An optically assisted program method for capacitorless 1T-DRAM.” Electron Devices, IEEE Transactions on, vol. 57, No. 7, 2010, pp. 1714-1718. |
Moon, et al. “Multi-functional universal device using a band-engineered vertical structure.” Electron Devices Meeting (IEDM), 2011 IEEE International. IEEE, 2011, pp. 24.6.2-24.6.4. |
Moon, et al. “Ultimately scaled 20nm unified-RAM.” Electron Devices Meeting (IEDM), 2010 IEEE International. IEEE, 2010, pp. 12.2.1-12.2.4. |
Nicoletti, et al. “The Dependence of Retention Time on Gate Length in UTBOX FBRAM With Different Source/Drain Junction Engineering.” Electron Device Letters, vol. 33, No. 7, 2012, pp. 940-942. |
Ohsawa, et al., “A Novel Capacitor-less DRAM Cell: Floating Body Cell”, CRC Press, Taylor & Francis Group, 2012, pp. 1-7. |
Ranica, et al. “A one transistor cell on bulk substrate (1T-Bulk) for low-cost and high density eDRAM.” VLSI Technology, 2004. Digest of Technical Papers. 2004 Symposium on. IEEE, 2004, pp. 128-129. |
Okhonin et al. A Capicitor-Less IT-DRAM Cell, IEEE Electron Device Letters, vol. 23, No. 2, Feb. 2002, pp. 85-87. |
Ohsawa, et al. “Autonomous refresh of floating body cell (FBC).” Electron Devices Meeting, 2008. IEDM 2008. IEEE International. IEEE, 2008, pp. 801-804. |
Ohsawa et al., Memory Design Using One-Transistor Gain Cell on SOI, Tech. Digest, IEEE International Solid-State Circuits, vol. 37, No. 11, 2002, pp. 1510-1522. |
Pulicani, R., et al. “Simulation of intrinsic bipolar transistor mechanisms for future capacitor-less eDRAM on bulk substrate.” Electronics, Circuits, and Systems (ICECS), 2010 17th IEEE International Conference on. IEEE, 2010, pp. 966-969. |
Ban et al., A Scaled Floating Body Cell (FBC) Memory with High-k+Metal Gate on Thin-Silicon and Thin-BOX for 16-nm Technology Node and Beyond, Symposium on VLSI Technology, 2008, pp. 92-93. |
Campardo G. et al., VLSI Design of Non-Volatile Memories, Springer Berlin Heidelberg New York, 2005, pp. 94-95. |
Cho et al., A novel capacitor-less DRAM cell using Thin Capacitively-Coupled Thyristor (TCCT), pp. 1-4, 2005. |
Celler et al., “Frontiers of Silicon-on-insulator”, Journal of Applied Physics, vol. 93, No. 9, pp. 4955-4978, May 2003. |
Han et al. Programming/Erasing Characteristics of 45 nm NOR-Type Flash Memory Based on SOI FinFET Structure. J. Korean Phys. Society, vol. 47, Nov. 2005, pp. S564-S567. |
Headland. Hot electron injection, Feb. 19, 2004. |
Langholz, et al., Foundations of Digital Logic Design, World Scientific Publishing Co., 1998, pp. 339-342 and 344. |
Lanyon, et al., “Bandgap Narrowing in Moderately to Heavily Doped Silicon”, IEEE Trans. on Electron Devices, vol. ED-26, No. 7, 1979, pp. 1014-1018. |
Lin, et al., “A new 1T DRAM Cell with enhanced Floating Body Effect”, Proc. of 2006 IEEE International Workshop on Memory Tech., Design and Testing, pp. 1-5, 2006. |
Montaanaro et al., A 160-MHz, 32-b, 05-W CMOS RISC Microprocessor, IEEE J. Solid State Circuits, vol. 31, No. 11, pp. 1703-1714, Nov. 1996. |
Oh, et al., “a 4-Bit Double SONOS memory (DSM) with 4 Storage Nodes Per Cell for Ultimate Multi-Bit Operation”, 2006 Symposium on VLSI Tech. Digest of Tech. Papers, pp. 1-2, 2006. |
Okhonin, et al., Principles of Transient Charge Pumping on Partially Depleted SOI MOSFETs, IEEE Electron Device Letters, vol. 23, No. 5, May 2002, pp. 279-281. |
Okhonin et al. A SOI Capacitor-less 1T-DRAM Concept, 2001 IEEE International SOI Conference, 2001, pp. 153-154. |
Ohsawa et al., An 18.5ns 128Mb SOI DRAM with a Floating body Cell, IEEE International Solid-State Circuits Conference, 2005, pp. 458-459, 609. |
Pellizzer et al., A 90nm Phase Change Memory Technology for Stand-Alone Non-Volatile Memory Applications, IEEE 2006 Symposium on VLSI Tech. Digest of Tech. Papers, pp. 1-2, 2006. |
Ranica, et al. “Scaled IT-Bulk devices built with CMOS 90nm technology for low-cost eDRAM applications.” VLSI Technology, 2005. Digest of Technical Papers. 2005 Symposium on. IEEE, 2005, pp. 38-39. |
Rothemund, et al., The importance of being modular, Nature, vol. 485, May 2012 pp. 584-585. |
Reisch, “On bistable behavior and open-base breakdown of bipolar transistors in the avalanche regime-modeling and applications.” Electron Devices, IEEE Transactions on 39.6 (1992): 1398-1409. |
Robert F. Pierret. Semiconductor Device Fundamentals, ISBN: 0-201-54393-1, 1996, by Addison-Wesley Publishing Company, Inc. PNPN Devices 463-476. |
Rodriguez, et al. “A-RAM: Novel capacitor-less DRAM memory.” In SOI Conference, 2009 IEEE International, pp. 1-2. IEEE, 2009. |
Rodriguez, et al. “A-RAM memory cell: concept and operation.” Electron Device Letters, IEEE, vol. 31, No. 9 (2010), pp. 972-974. |
Rodriguez, et al. “Novel capacitodess 1T-DRAM cell for 22-nm node compatible with bulk and SOI substrates.” Electron Devices, IEEE Transactions on, vol. 58, No. 8 (2011), pp. 2371-2377. |
Romanjek, et al., “Compact (Wg/Lg=80/85nm) FDSOI 1T-DRAM programmed by Meta Stable Dip”, Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on, Mar. 6, 2012, pp. 199-202. |
Sugizaki et al., Ultra-high-speed Novel Bulk Thyristor-SRAM (BT-RAM) Cell with Selective Epitaxy Anode (SEA), pp. 1-4, 2006. |
Sakui, K., et al. “A new static memory cell based on the reverse base current effect of bipolar transistors.” Electron Devices, IEEE Transactions on 36.6 (1989): 1215-1217. |
Sakui, Koji, et al. “A new static memory cell based on reverse base current (RBC) effect of bipolar transistor.” Electron Devices Meeting, 1988. IEDM'88. Technical Digest., International. IEEE, 1988, pp. 44-47. |
Shim, Kyung-Suk, In-Young Chung, and Young June Park. “A BJT-Based Heterostructure 1T-DRAM for Low-Voltage Operation.” Electron Device Letters, vol. 33, No. 1, 2012, pp. 14-16. |
Shin, et al. “Vertical-Gate Si/SiGe Double-HBT-Based Capacitodess 1T DRAM Cell for Extended Retention Time at Low Latch Voltage.” Electron Device Letters, vol. 33, No. 2, 2012, pp. 134-136. |
Shin, et al. “A novel double HBT-based capacitodess 1T DRAM cell with Si/SiGe heterojunctions.” Electron Device Letters, vol. 32, No. 7, 2011, pp. 850-852. |
Sze, et al. Physics of Semiconductor Devices, Wiley-Interscience, 2007, p. 104. |
Tack, et al. “The multistable charge-controlled memory effect in SOI MOS transistors at low temperatures.” Electron Devices, IEEE Transactions on 37.5 (1990): 1373-1382. |
Terada, et al. “A new VLSI memory cell using capacitance coupling (CC cell).” Electron Devices, IEEE Transactions on 31.9 (1984): pp. 319-1324. |
Villaret, et al. “Further insight into the physics and modeling of floating-body capacitorless DRAMs.” Electron Devices, IEEE Transactions on 52.11 (2005): pp. 2447-2454. |
Ventrice, et al. “Analytical model of deeply-scaled thyristors for memory applications.” Microelectronics and Electron Devices (WMED), 2012 IEEE Workshop on. IEEE, 2012, pp. 1-4. |
Wu, et al. “Experimental Demonstration of the High-Performance Floating-Body/Gate DRAM Cell for Embedded Memories”, IEEE Elec. Dev. Letter, vol. 33, No. 6, Jun. 2012, pp. 743-745. |
Yoshida et al., A Design of a Capacitodess 1T-DRAM Cell Using Gate-Induced Drain Leakage (GIDL) Current for Low-power and High-speed Embedded Memory , International Electron Devices Meeting, 2003, pp. 1-4. |
Zhang, et al. “Total Ionizing Dose Effects on FinFET-Based Capacitor-Less 1T-DRAMs.” Nuclear Science, IEEE Transactions on, vol. 57, No. 6, 2010, pp. 3298-3304. |
Ohsawa, et al. Autonomous refresh of floating body cell (FBC), IEEE, pp. 801-804, 2008. |
Ohsawa, et al. Autonomous refresh of floating-body cell due to Current Anomaly of Impact Ionization, IEEE Transactions on Electron Devices, vol. 56, No. 10, pp. 2302-2311, 2009. |
Ohsawa et al., “a Novel Capacitor-less DRAM Cell Floating Body Cell”, Pan Stanford Publishing, 2012, Table of Contents and Preface. |
Villaret et al., “Mechanisms of charge modulation in the floating body of triple-well nMOSFET capacitor-less DRAMs”, Microelectronic Engineering 72 (2004) 434-439. |
Number | Date | Country | |
---|---|---|---|
20220262430 A1 | Aug 2022 | US |
Number | Date | Country | |
---|---|---|---|
61846720 | Jul 2013 | US | |
61844832 | Jul 2013 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 16189806 | Nov 2018 | US |
Child | 16435551 | US | |
Parent | 15920111 | Mar 2018 | US |
Child | 16189806 | US | |
Parent | 15361627 | Nov 2016 | US |
Child | 15920111 | US | |
Parent | 15010300 | Jan 2016 | US |
Child | 15361627 | US | |
Parent | 14328633 | Jul 2014 | US |
Child | 15010300 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 16923555 | Jul 2020 | US |
Child | 17736220 | US | |
Parent | 16435551 | Jun 2019 | US |
Child | 16923555 | US |