Claims
- 1. A method for filling one or more cylinders with a process material using a filling apparatus comprising a source of purge gas, a source of process materials, and a manifold in fluid communication with said source of purge gas with said source of process material, and with a holding tank, said manifold operatively connectable to said cylinder and said manifold are in fluid communication, said method comprising the steps of:(a) pressurizing said manifold with said purge gas; (b) depressurizing said manifold; (c) connecting at least two cylinders to said manifold; (d) displacing said purge gas within said process material; and (e) filling at least one of said at least two cylinders, leaving at least one cylinder unfilled; (f) sealing said manifold from said source of process material (g) depressurizing said manifold by flowing said process material into at least one of the unfilled cylinders connected to said manifold; and (h) disconnecting tile filled cylinders from said manifold.
- 2. The method according to claim 1 further comprising the steps of:(j) connecting cylinders to said manifold in place of the disconnected cylinders; (k) filling at least one of said cylinders connected to said manifold; (l) sealing said manifold from said source of process material; and (m) depressurizing said manifold by flowing said process material into at least one of the non-filled cylinders connected to said manifold.
- 3. The method according to claim 2 further comprising the step of repeating steps (j)-(m) until a desired number of said cylinders are filled.
- 4. The method according to claim 3 further comprising the step of disconnecting the filled cylinders from said manifold.
- 5. The method according to claim 4 further comprising the step of repeating steps (j)-(l) until a desired number of cylinders are filled.
- 6. The method according to claim 3 further comprising the step of evacuating said manifold.
- 7. The method according to claim 6 further comprising the step of evacuating said manifold comprises the steps of:(i) pressurizing said manifold with said purge gas and any remaining process material; (ii) allowing said purge gas and any remaining process material within said manifold to flow into said holding tank; (iii) repeating steps (i) and (ii) until the concentration of process materials within the manifold is less than 1 ppm.
- 8. The method according to claim 7 further comprising the step of disconnecting the filled cylinders from said manifold.
- 9. The method according to claim 7 further comprising the step of repeating steps (i) and (ii) until the concentration of process material with in said manifold is less than 0.3 ppm.
- 10. The method according to claim 9 further comprising the step of filtering substantially all particles from said process material entering said manifold.
- 11. The method according to claim 10 further comprising the step of filtering substantially all particles from said purge gas entering said purge gas port.
- 12. The method according to claim 11 wherein said manifold is pressurized to at least 90 psig.
- 13. The method according to claim 12 wherein said manifold is depressurized to about 0.5 psig.
- 14. The method according to claim 13 wherein said purge gas is selected from the group consisting of air, nitrogen, argon, inert gas and a combination thereof.
- 15. The method according to claim 13 wherein said purge gas is inert to said process material.
- 16. The method according to claim 11 wherein said manifold is pressurized to between about 120 and about 130 psig.
- 17. The method according to claim 2 wherein the step of filling at least one of said cylinders connected to said manifold comprises filling the cylinder used to depressurize said manifold.
- 18. The method according to claim 1 wherein said process material is chlorine.
- 19. A cylinder filling apparatus comprising:(a) a source of purge gas; (i) a compressor having a purge gas inlet; (ii) a dryer fluidly connected to said compressor; and (iii) a filter fluidly connected to said dryer; (b) a source of process material; and (c) a manifold comprising an inlet and an outlet, said inlet operatively connectable to said source of purge gas and said source of process material, said outlet operatively connectable to a holding tank; and, at least one cylinder port whereby a cylinder can attach to said manifold for filling.
- 20. The apparatus according to claim 19 wherein said purge gas is selected from the group consisting of air, nitrogen, argon, inert gas and a combination thereof.
- 21. The apparatus according to claim 20 wherein said purge gas is inert to said process material.
- 22. The apparatus according to claim 21 further comprising a connection tee, said connection tee having a first inlet connectable to said source of purge gas, a second inlet connectable to said source of process material, and an outlet fluidly connectable to said manifold.
- 23. The apparatus according to claim 22 wherein said manifold further comprises an inlet and an outlet valve.
- 24. The apparatus according to claim 23 further comprising a valve positioned between said connection tee and said inlet valve.
- 25. The apparatus according to claim 22 further comprising a pump operatively positioned between said source of process material and said cylinder port.
- 26. The apparatus according to claim 25 further comprising a filter operatively positioned between said connection tee and said inlet valve.
- 27. The apparatus according to claim 21 further comprising a holding tank connected to said manifold outlet, said holding tank having a neutralization agent therein, whereby said neutralization agent neutralizes said process material.
- 28. A method for filling at least one container with a process material using a manifold in fluid communication with a source of process material comprising:connecting at least two containers to said manifold; supplying said process material to said manifold; filling at least one of said at least two containers, leaving at least one of said at least two containers unfilled, sealing said manifold from said source of process material; allowing process material in said manifold to flow into at least one of the unfilled containers connected to said manifold; and disconnecting the filled containers from said manifold.
- 29. A method as claimed in claim 28 wherein said manifold is also in fluid communication with a source of purge gas, further comprising:providing said purge gas to said manifold, displacing said purge gas within said manifold with said process material.
- 30. A method as claimed in claim 29 wherein said manifold is pressurized with said purge gas; further including depressurizing said manifold pressurized with said purge gas.
- 31. A filling apparatus comprising(a) a source of purge gas comprising, a dryer connected to receive said purge gas; and a filter connected to said dryer: (b) a source of process material; and (c) a manifold comprising an inlet and an outlet, said inlet connected to said source of purge gas and said source of process material, said outlet connected to a holding tank; and at least one container port whereby a container can attach to said manifold for filling.
Parent Case Info
This is a continuation of application Ser. No. 09/280,776 filed Mar. 29, 1999 and now abandoned, the disclosure of which is incorporated herein by reference.
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Continuations (1)
|
Number |
Date |
Country |
Parent |
09/280776 |
Mar 1999 |
US |
Child |
09/819035 |
|
US |