Number | Name | Date | Kind |
---|---|---|---|
4354897 | Nakajima | Oct 1982 | |
4356040 | Fu et al. | Oct 1982 | |
4356623 | Hunter | Nov 1982 | |
4371403 | Ikubo et al. | Feb 1983 | |
4373965 | Smigelski | Feb 1983 | |
4433468 | Kawamata | Feb 1984 | |
4435896 | Parillo et al. | Mar 1984 | |
4439270 | Powell et al. | Mar 1984 | |
4512073 | Hsa | Apr 1985 | |
4536943 | Kakuma | Aug 1985 | |
4546534 | Nicholas | Oct 1985 |
Number | Date | Country |
---|---|---|
0087666 | Jul 1981 | JPX |
0036866 | Feb 1982 | JPX |
0055665 | Mar 1985 | JPX |
Entry |
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Karl L. Wang et al., "Direct Moat Isolation for VLSI", IEEE Trans. Electr. Dev., vol. ED-29, No. 4, Apr. 1982, pp. 541-547. |
C. B. Zarowin, "Plasma Etch Anisotropy- . . . ", J. Electrochem. Soc., vol. 130, No. 5, May 1983, pp. 1144-1152. |