Temperature distribution measuring method and apparatus

Description

[0001] This application is based on Japanese Patent Applications Nos. 2001-008573 and 2001-008574 both filed on Jan. 17, 2001, the contents of which are incorporated hereinto by reference.

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention relates to a method and an apparatus which permit accurate measurement of a distribution of surface temperature of an object made of a plurality of different materials the emissivity values of which are not known.

[0004] 2. Discussion of Related Art

[0005] It is sometimes necessary to accurately measure a distribution of temperature, for example, a distribution of a surface temperature of an article placed within a firing or heating furnace, or a distribution of a surface temperature of a heat-generating body. There has been proposed a surface-temperature distribution, measuring apparatus which uses an image sensor operable to obtain two images of an object body with respective radiations of different wavelengths selected from an optical energy or light emitted from the object body. This measuring apparatus is arranged to obtain a ratio of radiant intensity values at each pair of corresponding local portions of the obtained two images, and measure the surface temperature of the object body, while utilizing the principle of measurement by a dichroic thermometer. JP-B2-7-6844 and JP-A-7-301569 disclose examples of such a surface-temperature distribution measuring apparatus. The apparatuses disclosed in these publications are adapted to calculate a distribution of the surface temperature of the object body, on the basis of the ratio of the actual radiant intensity values corresponding to the two different wavelengths, and according to a predetermined equation based on a known relationship between the radiant intensity ratio and the surface temperature. According to these apparatuses, the calculation is possible even where the emissivity on the surface of the object body is unknown.

[0006] The measuring apparatus disclosed in JP-B2-7-6844 uses an image receiver in the form of a television camera, to detect the radiant intensity values corresponding to the three primary colors RGB (e.g., red color of 590 nm, green color of 530 nm and blue color of 460 nm) of light from the object body, and obtain a plurality of sets of radiant intensity ratios of two colors of the three primary colors, for example, of R and G. The measuring apparatus is arranged to convert the obtained radiant intensity ratios into the surface temperature of the object body according to a predetermined theoretical curve with a compensating function, and display a distribution of the surface temperature.

[0007] The conventional surface-temperature distribution measuring apparatus described above uses the selected two colors of the three primary colors of light of the object body. However, the radiant intensity ratio of the selected two colors cannot be considered to be a ratio of the two radiations having the predetermined wavelengths, so that the principle of measurement of the conventional apparatus does not fully match the principle of measurement by the dichroic thermometer, namely, does not fully meet a prerequisite that the dependency of the emissivity value on the wavelength can be ignored for two radiations the wavelengths of which are close to each other, leading to approximation ε1=ε2. Thus, the conventional measuring apparatus suffers from a large amount of error included in the obtained surface temperature distribution.

[0008] On the other hand, JP-A-7-301569 discloses in its FIG. 2 an apparatus for obtaining a distribution of surface temperature, comprising an image detector (image sensor) having a light detecting surface on which are arranged a multiplicity of photosensitive elements, and two filters which are respectively provided on a first optical path and second optical path along which a light emitted from an object selectively travels to be incident upon the light detecting surface of the image detector and which permit transmission of respective two radiations having respective different wavelengths. Two images, that is, a first and a second image are obtained with the respective radiations of the two wavelengths, and the temperature of the object body at each picture element of its image is calculated on the basis of the radiant intensity ratio at each pair of corresponding picture elements of the two images, while utilizing the principle of measurement by a dichroic thermometer.

[0009] In the apparatus disclosed in JP-A-7-301569, a mirror is employed to permit an incident radiation to be incident upon a selected one of the two filters, by changing its angle. According to the present apparatus, a ratio of the actual radiant intensity values corresponding to the two different wavelengths at a certain moment can not be obtained in the strict sense, since the two images corresponding to the respective radiations having the different wavelengths are not obtained simultaneously. Accordingly, there is a time lag between the moments at which the first and second images are formed. This arrangement suffers from an insufficient measuring accuracy when the measurement of distribution of surface temperature is effected on an object body whose temperature is rising or falling. The above publication also discloses in its paragraph [0020] an apparatus for dealing with this problem, namely, an apparatus in which the light emitted from the object body is split into two components which travel along respective paths, and a filter and an image detector are provided for each of the paths. However, this apparatus also does not exhibit a sufficiently high degree of measuring accuracy due to a variation in detecting sensitivity exhibited by the two image detectors.

SUMMARY OF THE INVENTION

[0010] The present invention was made in view of the background art discussed above. It is a first object of the present invention to provide a method which permits accurate measurement of a distribution of surface temperature of an object body. A second object of the invention is to provide an apparatus suitable for practicing the method.

[0011] The first object may be achieved according to a first aspect of this invention, which provides a method of measuring a surface temperature of an object body, by calculating a temperature of the object body at each picture element of its image on the basis of a radiant intensity ratio at each pair of corresponding picture elements of a first and a second image which are obtained with respective radiations having respective first and second wavelengths and selected from a light emitted from a surface of the object body, the method comprising:

[0012] a first wavelength-selecting step of selecting the radiation having the first wavelength from the light emitted from the surface of the object body, by using a first filter which permits transmission therethrough a radiation having the first wavelength which is selected according to a radiant-intensity curve corresponding to a wavelength of a black body at a lower limit of a range of the temperature to be measured, and which is within a high radiant-intensity range in which the radiant intensity is higher than a radiant intensity at a normal room temperature; and

[0013] a second wavelength-selecting step of selecting the radiation having the second wavelength from the light emitted from the surface of the object body, by using a second filter which permits transmission therethrough a radiation having the second wavelength which is selected within the high radiant-intensity range, such that the second wavelength is different from the first wavelength by a predetermined difference which is not larger than {fraction (1/12)} of the first wavelength and which is not smaller than a sum of a half width of the first wavelength and a half width of the second wavelength.

[0014] The second object indicated above may be achieved according to a second aspect of the present invention, which provides an apparatus for measuring a surface temperature of an object body, by calculating a temperature of the object body at each picture element of its image on the basis of a radiant intensity ratio at each pair of corresponding picture elements of a first and a second image which are obtained with respective radiations having respective first and second wavelengths and selected from a light emitted from a surface of the object body, the apparatus comprising:

[0015] a first filter for selecting the radiation having the first wavelength from the light emitted from the surface of the object body, the first filter permitting transmission therethrough a radiation having the first wavelength which is selected according to a radiant-intensity curve corresponding to a wavelength of a black body at a lower limit of a range of the temperature to be measured, and which is within a high radiant-intensity range in which the radiant intensity is higher than a radiant intensity at a normal room temperature; and

[0016] a second filter for selecting the radiation having the second wavelength from the light emitted from the surface of the object body, the second filter permitting transmission therethrough a radiation having the second wavelength which is selected within the high radiant-intensity range, such that the second wavelength is different from the first wavelength by a predetermined difference which is not larger than {fraction (1/12)} of the first wavelength and which is not smaller than a sum of a half width of the first wavelength and a half width of the second wavelength.

[0017] In the method and apparatus of the invention as described above, the temperature of the object body at each picture element of its image is calculated on the basis of the radiant intensity ratio at each pair of corresponding picture elements of the first and second images and obtained with the respective radiations of the first and second wavelengths selected from the light emitted from the surface of the object body. Thus, the distribution of the surface temperature of the object body is measured on the basis of the temperature Tij at each picture element. To select the radiation having the first wavelength from the light emitted from the surface of the object body, the present invention uses the first filter which permits transmission therethrough a radiation having the first wavelength which is selected according to a radiant-intensity curve corresponding to the wavelength of a black body at the lower limit of the range of the temperature to be measured, and which is within a high radiant-intensity range in which the radiant intensity is higher than the radiant intensity at a normal room temperature. The present invention further uses the second filter which permits transmission therethrough a radiation having the second wavelength which is selected within the above-indicated high radiant-intensity range, such that the second wavelength is different from the first wavelength by a predetermined difference which is not larger than {fraction (1/12)} of the first wavelength and which is not smaller than a sum of the half width of the first wavelength and the half width of the second wavelength. Accordingly, optical signals having sufficiently high radiation intensities can be obtained, leading to an accordingly high S/N ratio of the apparatus. In addition, the first and second wavelengths are close to each other, so that the principle of measurement according to the present invention fully matches the principle of measurement by a dichroic thermometer, namely, fully meets a prerequisite that the dependency of the emissivity on the wavelength can be ignored for two radiations the wavelengths of which are close to each other, leading to approximation ε1=ε2. Thus, the present measuring apparatus permits highly accurate measurement of the temperature distribution.

[0018] In the method and apparatus of the present invention, the first and second filters are preferably arranged such that the first filter permits transmission therethrough the radiation having the half width which is not larger than {fraction (1/20)} of the first wavelength, while the second filter permits transmission therethrough the radiation having the half width which is not larger than {fraction (1/20)} of the first wavelength. According to this arrangement, the radiations having the first and second wavelengths are considered to exhibit a sufficiently high degree of monochromatism. Therefore, the present invention meets the prerequisite for the principle of measurement by a dichroic thermometer, resulting in an improved accuracy of measurement of the temperature distribution.

[0019] The first and second filters used in the method and apparatus of the invention are preferably arranged such that the first and second filters have transmittance values whose difference is not higher than 30%. This arrangement assures high sensitivity and S/N ratio, even for one of the two radiations of the first and second wavelengths which has a lower luminance value, permitting accurate measurement of the temperature distribution.

[0020] The first object may also be achieved according to a third aspect of this invention, which provides a method of measuring a surface temperature of an object body, by utilizing an image detector having a light detecting surface on which are arranged a multiplicity of photosensitive elements, the method comprising: (a) a first image-forming step of forming a first image at a first position on the light detecting surface with a radiation having a first wavelength selected from a light emitted from a surface of the object body; (b) a second image-forming step of forming, simultaneously with the first image, a second image at a second position on the light detecting surface with a radiation having a second wavelength selected from a light emitted from a surface of the object body, the second position being spaced from the first position; (c) a first calculating step of obtaining a radiant intensity ratio at each picture element of the image of said object body, based on radiant intensity values detected by each pair of the photosensitive elements which are located at corresponding local portions of the obtained first and second images; (d) a second calculating step of obtaining a temperature at each picture element based on the obtained radiant intensity ratio and according to a predetermined relationship between the temperature and the radiant intensity ratio; and (e) a displaying step of displaying a distribution of the surface temperature of the object body on the basis of the temperature obtained with respect to each picture element in the second calculating step.

[0021] The second object may also be achieved according to a fourth aspect of this invention, which provides an apparatus of measuring a surface temperature of an object body, by utilizing an image detector having a light detecting surface on which are arranged a multiplicity of photosensitive elements, the apparatus comprising: (a) an optical image-forming device for forming a first image at a first position on the light detecting surface with a radiation having a first wavelength selected from a light emitted from a surface of the object body, and a second image, simultaneously with the first image, at a second position on the light detecting surface with a radiation having a second wavelength selected from the light emitted from the surface of the object body, the second position being spaced from the first position; (b) a first calculating means for obtaining a radiant intensity ratio at each picture element of the image of the object body, based on radiant intensity values detected by each pair of the photosensitive elements which are located at corresponding local portions of the obtained first and second images; (c) a second calculating means for obtaining a temperature at each picture element based on the obtained radiant intensity ratio and according to a predetermined relationship between the temperature and the radiant intensity; and (d) a display device for displaying a distribution of the surface temperature of the object body on the basis of the temperature obtained with respect to each picture element in the second calculating means.

[0022] In the method and apparatus according to the third and fourth aspects of the present invention as described above, the ratio of the radiant intensity values based on which the surface temperature of the object body is calculated is obtained such that the radiant intensities are detected at the corresponding local portions or picture elements of the first and second images, which images are simultaneously formed on the light detecting surface at the respective positions spaced from each other, with the respective radiations having respective wavelengths. The temperature corresponding to each picture element is then calculated based on the obtained radiant intensity ratio, and displayed as the distribution of temperature of the object body on the screen of the display device. According to this arrangement, a ratio of actual radiant intensity values corresponding to the two different wavelengths is obtained for the concurrently emitted radiations. Therefore, the present arrangement assures a sufficiently high degree of measuring accuracy of the surface temperature of the object body, even while the temperature of the object body is changing. Further, since the first and second images are detected by the light detecting surface of a single image detector, the sensitivity of the image detector with respect to the two images to be detected is equal, thereby providing high measuring accuracy.

BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The above and other objects, features, advantages and technical and industrial significance of the present invention will be better understood by reading the following detailed description of presently preferred embodiment of the invention, when considered in connection with the accompanying drawings, in which:

[0024]
FIG. 1 is a view schematically illustrating an arrangement of a temperature-distribution measuring apparatus constructed according to a first embodiment of this invention;

[0025]
FIG. 2 is a view for explaining a manner of determining wavelengths λ1 and λ2 of respective first and second filters shown in FIG. 1;

[0026]
FIG. 3 is a view for explaining first and second images G1 and G2 formed on a light detecting surface 26 of an image detector 32 shown in FIG. 1;

[0027]
FIG. 4 is a flow chart for explaining a relevant part of a control operation performed by an arithmetic control device shown in FIG. 1;

[0028]
FIG. 5 is a view indicating a relationship used in a picture-element temperature calculating step of FIG. 4, to obtain a surface temperature T from a radiant intensity ratio R;

[0029]
FIG. 6 is a view indicating a relationship used in a temperature-distribution displaying step of FIG. 4, to determine a display color from the surface temperature T;

[0030]
FIG. 7 is a view corresponding to that of FIG. 1, illustrating an optical system of a temperature-distribution measuring apparatus according to a second embodiment of this invention;

[0031]
FIG. 8 is a view corresponding to that of FIG. 1, illustrating an optical system of a temperature-distribution measuring apparatus according to a third embodiment of this invention;

[0032]
FIG. 9 is a view corresponding to that of FIG. 1, illustrating an optical system of a temperature-distribution measuring apparatus according to a fourth embodiment of this invention;

[0033]
FIG. 10 is a view corresponding to that of FIG. 1, illustrating an optical system of a temperature-distribution measuring apparatus according to a fifth embodiment of this invention; and

[0034]
FIG. 11 is a view corresponding to that of FIG. 1, illustrating an optical system of a temperature-distribution measuring apparatus according to a sixth embodiment of this invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0035] Referring first to FIG. 1, there is shown an arrangement of a temperature-distribution measuring apparatus 10 of a first embodiment of this invention, wherein a light emitted from a surface of an object body 12 being heated within a firing furnace or a heating furnace is split by a half mirror (beam splitter) 14 into a first component traveling along a first optical path 16 and a second component traveling along a second optical path 18. The first and second optical paths 16, 18 are bent substantially at right angles by respective mirrors 20, 22, so that the first and second components are both incident upon a half mirror 24, and are reflected by the half mirror 24, so as to be incident upon an image detector 32 which has a CCD device 28 and a lens device 30. The CCD device 28 has a light detecting surface 26 on which are arranged a multiplicity of photosensitive elements. The lens device 30 is arranged to focus images of the object body 12 on the light detecting surface 26.

[0036] The first optical path 16 is provided with a first filter 34 which permits transmission therethrough a radiation having a first wavelength (band) λ1 (e.g., center wavelength of 600 nm) and a half width of about 10 nm, for example. The second optical path 18 is provided with a second filter 36 which permits transmission therethrough a radiation having a second wavelength (band) λ2 (e.g., center wavelength of 650 nm) and a half width of about 10 nm, for example. The first and second filters 34, 36 are so-called “interference filters” permitting transmission of radiations in selected wavelength bands, utilizing an optical interference.

[0037] The first and second wavelengths λ1 and λ2 are determined in the following manner, for instance. Initially, there is obtained according to the Planck's law a relationship between a wavelength and a radiant intensity of a black body at a lower limit (e.g., 500° C.) of a range of the temperature to be measured. Namely, a curve L1 shown in FIG. 2 is obtained. Then, a background radiant intensity EBG of the object body 12 is measured at a room temperature, for example, at 25° C. Next, the wavelength λ at a desired point which lies on a portion of the curve L1 and which is larger than the background radiant intensity EBG multiplied by three, that is, larger than a value 3×EBG is determined to be the first wavelength λ1, so that the radiant intensity used for the measurement is high enough to prevent an error of measurement of the temperature. Then, the second wavelength λ2 is determined to be larger or smaller than the first wavelength λ1 by a predetermined difference Δλ, which is not larger than {fraction (1/12)} of the first wavelength λ1. Where the first wavelength λ1 is 600 nm, for example, the second wavelength λ2 is determined to be 650 nm, which is larger than the first wavelength λ1 by 50 nm. This manner of determination of the first and second wavelengths λ1 and λ1 is intended to satisfy an approximating equation (1) which represents the principle of measurement of a dichroic thermometer, which will be described. It is noted that the difference Δλ between the first and second wavelengths λ1 and λ2 must be equal to or larger than a value two times as large as a half width described below, in order to maintain a high degree of accuracy of measurement of the radiant intensity. For the radiations of the first and second radiations λ1 and λ2 to maintain properties of a monochromic light, the half widths must be equal to or smaller than {fraction (1/20)} of the center wavelengths, for example, equal to or smaller than about 20 nm. Further, the first and second filters 34, 36 have transmittance values whose difference is 30% or lower. If the difference were higher than 30%, the sensitivity of one of the two radiations of the first and second wavelengths λ1λ2 which has a lower luminance value would be lowered, resulting in a reduced S/N ratio of the image detector 32 and an accordingly reduced accuracy of display of the temperature.

[0038] Thus, the temperature-distribution measuring apparatus 10 according to the present embodiment is arranged to select the two radiations having the respective first and second wavelengths λ1 and λ2 from the light emitted from the surface of the object body 12. To this end, the first filter 34 permits transmission therethrough the radiation having the first wavelength λ1 and the first half width which is not larger than {fraction (1/20)} of that wavelength. The first wavelength λ1 is selected according to the radiant-intensity curve L1 corresponding to the wavelength of a black body at the lower limit of the range of the temperature to be measured, and within a high radiant-intensity range in which the radiant intensity is sufficiently higher than the background radiant intensity EBG at a normal room temperature. On the other hand, the second filter 26 permits transmission therethrough the radiation having the second wavelength λ2 and the second half width which is not larger than {fraction (1/20)} of that wavelength. The second wavelength λ2 is selected within the above-indicated high radiant-intensity range, such that the second wavelength λ2 is different from the first wavelength λ1 by a predetermined difference which is not larger than {fraction (1/12)} of the first wavelength λ1 and which is not smaller than a sum of the above-indicated first and second half widths.

[0039] In the optical system of FIG. 1, portions of the first and second optical paths 16, 18 between the half mirror 24 and the image detector 32 are spaced from each other by a small distance in a direction parallel to the light detecting surface 26 of the CCD device 28, in order to prevent overlapping of first and second images G1 and G2 formed on the light detecting surface 26. This spaced-apart relation of the optical paths 16, 18 is established by suitably orienting the respective mirrors 20, 22, so that the first and second images G1 and G2of respective different wavelengths are formed on the light detecting surface 26 in a spaced-apart relation with each other. Described in detail by reference to FIG. 3, the first image G1 is formed at a first position B1 on the light detecting surface 26 of the CCD device 28 of the image detector 32, by the radiation having the first wavelength λ1 selected by the first filter 34 from the light emitted from the surface of the object body 12, while the second image G2 is formed at a second position B2 on the light detecting surface 26, by the radiation having the second wavelength λ2 selected by the second filter 36 from the light emitted from the surface of the object body 12, such that the first and second positions B1 and B2 are spaced apart from each other in the direction parallel to the light detecting surface 26, as indicated in FIG. 3. According to this arrangement, the multiple photosensitive elements arranged on the light detecting surface 26 detect the radiant intensity values at respective picture elements of the first image G1, and the radiant intensity values at respective picture elements of the second image G2, such that the picture elements correspond to the respective photosensitive elements. The mirrors 20, 22, half mirrors 14, 24 and lens device 30 cooperate with each other to constitute an optical imaging device capable of performing first and second wavelength-selecting steps of selecting the first and second wavelengths for concurrently forming respective images of the object body 12 at respective positions.

[0040] The arithmetic control device 40 is a so-called microcomputer incorporating a central processing unit (CPU), a random-access memory (RAM), a read-only memory (ROM) and an input-output interface. The CPU operates according to a control program stored in the ROM, to process input signals, namely, the output signals of the multiple photosensitive elements arranged on the light detecting surface 26, and control an image display device 42 to display a distribution of the surface temperature of the object body 12.

[0041] Referring to the flow chart of FIG. 4, there will be described a relevant portion of a control operation of the arithmetic control device 40. The control operation is initiated with step S1 to read the output signals of the multiple photosensitive elements arranged on the light detecting surface 26, for obtaining radiant intensity values E1ij at respective picture elements of the first image G1, and radiant intensity values E2ij at respective picture elements of the second image G2. Then, the control flow goes to step S2 corresponding to a radiant intensity ratio calculating step or means, to calculate a radiant intensity ratio Rij (=E1ji/E2ij) at each pair of corresponding picture elements of the first and second images G1 and G2 which are formed at the respective first and second positions B1 and B2 on the light detecting surface 26. The radiant intensity ratio Rij is a ratio of the radiant intensity value E1ji of the first wavelength λ1 detected by the photosensitive element at each picture element of the first image G1, to the radiant intensity value E2ji of the second wavelength λ2 detected by the photosensitive element at the corresponding picture element of the second image G2. Then, step S3 corresponding to a picture-element temperature calculating step or means is implemented to calculate a temperature Tij at each picture element of the image of the object body 12, on the basis of the calculated actual radiant intensity ratio Rij at each pair of corresponding picture elements of the first and second images G1, G2, and according to a predetermined relationship between the radiant intensity R and the temperature T as shown in FIG. 5, by way of example. Data representative of the predetermined relationship are stored in the ROM. For instance, the relationship as shown in FIG. 5 may be represented by the following equation 1, which is an approximating equation representing the principle of measurement of a dichroic thermometer. The equation 1 is formulated to permit determination of the surface temperature T of the object body 12 on the basis of the ratio R of the radiant intensity values at the respective different wavelengths λ1 and λ2, without having to use the emissivity of the object body 12. In the following equations, the second wavelength λ2 is larger than the first wavelength λ1, and “T”, “C1” and “C2” respectively represent the absolute temperature, and first and second constants of Planck's law of radiation.

\begin{matrix} R = {(\frac{λ_{2}}{λ_{1}})}^{5} \exp [(\frac{C_{2}}{T}) \cdot (\frac{1}{λ_{2}} - \frac{1}{λ_{1}})] & (Equation  1) \end{matrix}

[0042] The above equation 1 is obtained in the following manner. That is, it is known that an intensity (energy) Eb of a radiation of a wavelength λ emitted from a unit surface area of a black body for a unit time, and the wavelength satisfy the following equation 2, which is the Planck's equation. It is also known that the following equation 3, which is the Wien's approximating equation, is satisfied when exp(C2/λT)>>1. For ordinary bodies having gray colors, the following equation 4 is obtained by converting the equation 3 with insertion of the emissivity ε. The following equation 5 is obtained from the equation 4, for obtaining the ratio R of the radiant intensity values E1 and E2 of the two wavelength values λ1 and λ2. Where the two wavelength values λ1 and λ2 are close to each other, the dependency of the emissivity ε on the wavelength can be ignored, that is, ε1=ε2. Thus, the above equation 1 is obtained. Accordingly, the temperatures T of object bodies having different emissivity values ε can be obtained without an influence of the emissivity.

Eb=C

1
/λ5[exp(C2/λT)−1] (Equation 2)

Eb=C

1
exp(−C2/T)/λ5 (Equation 3)

E=ε·C

1
exp(−C2/λT)/λ5 (Equation 4)

\begin{matrix} E = (\frac{ε_{1}}{ε_{2}}) {(\frac{λ_{2}}{λ_{1}})}^{5} \exp [(\frac{C_{2}}{T}) \cdot (\frac{1}{λ_{2}} - \frac{1}{λ_{1}})] & (Equation  5) \end{matrix}

[0043] After the temperature Tij at each picture element of the image of the object body 12 has been calculated in step S3 as described above, the control flow goes to step S4 corresponding to a temperature-distribution displaying step or means, to display a distribution of the surface temperature of the object body 12, on the basis of the actual temperature Tij calculated at each picture element, and a predetermined relationship between the temperature T and the display color. Data representative of the predetermined relationship are stored in the ROM. FIG. 5 shows an example of the predetermined relationship between the temperature T and the display color. In this case, the distribution of the surface temperature of the object body 12 is shown in predetermined different colors.

[0044] There will be described an experimentation conducted by the present inventors, using the optical system shown in FIG. 1 wherein an CCD camera (model ST-7 available from Santa Barbara Instruments Group) comprising a telephotographic lens “AF Zoom Nikkor ED 70-300 mm F4-5.6D” available from Nihon Kougaku Kabushiki Kaisha, Japan (whose company name is now “Nikon”), is employed as the image detector 32, and each of the half mirrors 14, 24 is a half mirror of BK7 available from Sigma Koki, Japan, which is provided with chrome plating for a visible radiation. The half mirror 14, 24 reflects 30% of an incident radiation and transmits 30% of the incident radiation. The mirrors 20, 22 are aluminum plane mirrors of BK7 available from Sigma Koki, Japan. The filters 34, 36 are available from Sigma Koki, Co., Ltd., Japan. The first filter 34 permits transmission therethrough a radiation having a wavelength of 600 nm and a half width of 10 nm, while the second filter 36 permits transmission therethrough a radiation having a wavelength of 650 nm and a half width of 10 nm. The object body 12 used in the experimentation is an alumina substrate (50×50×0.8 mm) the surface of which is locally covered with a baked black paint whose emissivity is different from that of the alumina substrate. This object body 12 was placed in a central part of a heating furnace, and the temperature within the furnace was raised from the room temperature up to 1000° C. at a rate of 10° C./min. The distribution of the surface temperature of the alumina substrate was measured when the temperature within the furnace reached 950° C. during the rise up to 1000° C. The experimentation under the conditions described above indicated an even distribution of the temperature of the alumina substrate over the entire surface, irrespective of the baked black paint which locally covers the surface of the aluminum substrate and which has the emissivity different from that of the aluminum substrate. The experimentation indicated a reproduction error of 2° C. of repeated measurements in a central part of the display screen of the display device 42.

[0045] A comparative experimentation under the same conditions as described above was made by using a comparative optical system arranged as shown in FIG. 2 of JP-7-301569. This experimentation indicated an uneven distribution of the surface temperature of the alumina substrate due to a time difference between the moments of detection of two images corresponding to the respective wavelengths, which time difference arises from a need of pivoting the mirror to selectively use the different wavelengths. This time difference caused a slight difference between the image of a surface area of the alumina substrate covered by the baked black paint the emissivity of which is different from that of the alumina substrate, and the image of the other surface area of the alumina substrate, so that there existed a difference of about 50° C. between the temperatures measured in the two surface areas. Further, the comparative experimentation indicated a reproduction error of 13° C. of repeated measurements in a central part of the display screen of the display device 42.

[0046] As described above, the present embodiment is arranged to calculate the temperature Tij of the object body 12 at each picture element of its image, on the basis of the radiant intensity ratio Rij at each pair of corresponding picture elements of the first and second images G1 and G2 obtained with the respective radiations of the first and second wavelengths λ1 and λ2 selected from the light emitted from the surface of the object body 12. Thus, the distribution of the surface temperature of the object body 12 is measured on the basis of the temperature Tij at each picture element. To select the radiation having the first wavelength λ1 from the light emitted from the surface of the object body 12, the optical system of the present embodiment uses the first filter 34 which permits transmission therethrough the radiation having the first wavelength λ1 which is selected according to the radiant-intensity curve L1 corresponding to the wavelength of the black body at the substantially lower limit of the range of the temperature to be measured, and which is within a high radiant-intensity range in which the radiant intensity is higher than the background radiant intensity EBG at a normal room temperature. The optical system further uses the second filter 26 which permits transmission therethrough the radiation having the second wavelength λ2 which is selected within the above-indicated high radiant-intensity range, such that the second wavelength λ2 is different from the first wavelength λ1 by a predetermined difference which is not larger than {fraction (1/12)} of the first wavelength λ1 and which is not smaller than a sum of a half width Δλ1 of the first wavelength λ1 and a half width Δλ2 of the second wavelength λ2. Accordingly, optical signals having sufficiently high radiation intensities can be obtained, leading to an accordingly high S/N ratio of the image detector 32. In addition, the first and second wavelengths λ1 and λ2 are close to each other, so that the principle of measurement of the present optical system fully matches the principle of measurement of a dichroic thermometer, namely, fully meets a prerequisite that the dependency of the emissivity on the wavelength can be ignored for two radiations the wavelengths of which are close to each other, leading to approximation ε1=ε2. Thus, the present measuring apparatus permits highly accurate measurement of the temperature distribution.

[0047] Further, the present embodiment is arranged such that the first filter 34 permits transmission therethrough the radiation having the half width Δλ1 which is not larger than {fraction (1/20)} of the first wavelength λ1, while the second filter 36 permits transmission therethrough the radiation having the half width Δλ2 which is not larger than {fraction (1/20)} of the first wavelength λ2, so that the radiations having these first and second wavelengths λ1 and λ2 are considered to exhibit a sufficiently high degree of monochromatism. Accordingly, the present embodiment meets the prerequisite for the principle of measurement by a dichroic thermometer, resulting in an improved accuracy of measurement of the temperature distribution.

[0048] In addition, the present embodiment is arranged such that the first and second filters 34, 36 have transmittance values whose difference is not higher than 30%, so that the present optical system has high sensitivity and S/N ratio, even for one of the two radiations of the first and second wavelengths λ1 λ2 which has a lower luminance value, permitting accurate measurement of the temperature distribution.

[0049] Moreover, the present embodiment is arranged such that the radiant intensity ratio Rij at each pair of corresponding picture elements of the first and second images G1 and G2 required for obtaining the temperature Tij at each picture element is calculated based on the radiant intensity values E1ij and E2ij at the corresponding picture elements of the first and second images G1 and G2, which are simultaneously formed with the radiations having respective wavelengths λ1 and λ2 at the respective first and second positions B1 and B2 on the light detecting surface 26. Therefore, a ratio R of radiant intensity values detected at the same moment can be obtained, assuring a high measuring accuracy even when the measurement is effected while the temperature of the object body is raising or falling. Further, the first and second images G1 and G2 are detected by a single or common light detecting surface 26 of the image detector 32. This arrangement assures a sufficiently high degree of accuracy of measurement of the surface temperature, since the first and second images G1 and G2 are detected without a variation in the detecting sensitivity therebetween.

[0050] Other embodiments of the present invention will be described. In the following description, the same reference signs as used in the preceding embodiment will be used to identify the corresponding elements, which will not be described.

[0051] Referring to FIG. 7, there is schematically illustrated an arrangement of a temperature-distribution measuring apparatus according to another embodiment of this invention. In the embodiment of FIG. 7, a pair of mirrors 50, 52 are disposed such that each of these mirrors 50, 52 is pivotable about its fixed end between a first position indicated by broken line and a second position indicated by solid line. When the mirrors 50, 52 are placed in the first position, a light emitted from the surface of the object body 12 is incident upon the image detector 32 along the first optical path 16. When the mirrors 50, 52 are placed in the second position, the light is incident upon the image detector 32 along the second optical path 18. As in the preceding embodiment, the first optical path 16 is provided with the first filter 34, while the second optical path 18 is provided with the second filter 36, so that the first and second images G1 and G2 are formed by the respective two radiations having the respective first and second wavelengths λ1 and λ2, with a predetermined time difference. Thus, the present embodiment has the same advantage as the preceding embodiment.

[0052] In an embodiment shown in FIG. 8, a rotary disc 56 is disposed such that the rotary disc 56 is rotatable by an electric motor 54, about an axis which is parallel to an optical path extending between the object body 12 and the image detector 32 and which is offset from the optical path in a radial direction of the rotary disc 56, by a suitable distance. The rotary disc 56 carries the first filter 34 and the second filter 36 such that these first and second filters 34, 36 are selectively aligned with the optical path by rotation of the rotary disc 56 by the electric motor 54. The first image G1 is formed with the radiation which has the first wavelength λ1 and which has been transmitted through the first filter 34, and the second image G2 is formed with the radiation which has the second wavelength λ2 and which has been transmitted through the second filter 36. These first and second images G1 and G2 are successively obtained by rotating the rotary disc 56. Thus, the present embodiment has the same advantages as the preceding embodiments. In the present embodiment, the first optical path 16 and the second optical path 18 are considered to be selectively established between the rotary disc 56 and the image detector 32.

[0053] In an embodiment of FIG. 9, the light emitted from the surface of the object body 12 is split by the half mirror 14 into a first component traveling along the first optical path 16 and a second component traveling along the second optical path 18. The first optical path 16 is provided with the image detector 32. On the other hand, the second optical path 16 is provided with another image detector 32′. In the present embodiment, too, the first image G1 is formed with the radiation having the first wavelength λ1 which is selected from the light emitted from the surface of the object body 12, as a result of transmission of the light through the first filter 34, and at the same time the second image G2 is formed with the radiation having the second wavelength λ2 which is selected from the light from the object body 12 as a result of transmission of the light through the second filter 36. Thus, the present embodiment has a result of experimentation as obtained in the first embodiment of FIG. 1.

[0054] In an embodiment of FIG. 10, a first convex lens 60 for converging light rays emitted from the surface of the object body 12 into parallel rays is provided between the object body 12 and the half mirror 14, while a second convex lens 62 for converging the parallel rays reflected by the half mirror 24 is provided between the half mirror 24 and the image detector 32. The present embodiment is otherwise constructed similarly to the optical system of FIG. 1. According to this embodiment, the light emitted from the object body 12 and traveling to the image detector 32 takes the form of substantially parallel rays. This arrangement can prevent a loss of light due to diffusion.

[0055] An embodiment of FIG. 11 is a modification of the embodiment of FIG. 10. The optical system of FIG. 11 includes a first, a second and a third convex lens 60, 62, 70. In the optical system of FIG. 11, a light emitted from the object body 12 is converged by the third convex lens 70 to form a real image (space image) 64, which is a reduced image of the object body 12, between the object body 12 and the first convex lens 60, resulting in forming of two real images (space images) 66, 68 between the second convex lens 62 and the image detector 32. Accordingly, a first and a second image G1, G2 are formed with respective radiations having respective wavelengths on the light detecting surface 26 of the image detector 32 as shown in FIG. 3. In this embodiment in which the third convex lens 70 functions as a size-reducing lens or a wide-angle lens, the first and second images G1, G2 formed on the light detecting surface 26 of the CCD device 28 are spaced from each other without an overlap of the two images.

[0056] While the preferred embodiments of the present invention have been described in detail by reference to the drawings, it is to be understood that the present invention may be otherwise embodied.

[0057] In the illustrated embodiments, the first and second wavelengths λ1 and λ2 are selected according to the radiant-intensity curve L1 of FIG. 2 corresponding to the wavelength of the black body at the lower limit of the range of the temperature to be measured, and which is within a high radiant-intensity range in which the radiant intensity is at least three times the background radiant intensity EBG at a normal room temperature. However, the radiant intensity need not be at least three times the background radiant intensity EBG, since the principle of the present invention is satisfied as long as the radiant intensity is sufficiently higher than the background radiant intensity EBG at the normal room temperature.

[0058] In the illustrated embodiments, the half width Δλ1 of the first wavelength λ1 is equal to or smaller than {fraction (1/20)} of the first wavelength λ1, and the half width Δλ2 of the second wavelength λ2 is equal to or smaller than {fraction (1/20)} of the first wavelength λ2. However, the half widths need not be equal to or smaller than {fraction (1/20)} of the wavelength values, but may be slightly larger than {fraction (1/20)} of the wavelength values, according to the principle of the invention.

[0059] In the illustrated embodiments, a difference of the transmittance values of the first and second filters 34, 36 is equal to or smaller than 30%. However, the difference need not be equal to or smaller than 30%, but may be slightly larger than 30%, according to the principle of the invention.

[0060] Although the surface temperature of the object body 12 is indicated in different colors in step S4 of FIG. 4, the surface temperature may be indicated in any other fashion, for example, by contour lines or in different density values.

[0061] While the image detector 32, 32′ used in the illustrated embodiments uses the CCD device 28 having the light detecting surface 26, the image detector may use any other light sensitive element such as a color image tube.

[0062] It is to be understood that the present invention may be embodied with various other changes, modifications and improvements, which may occur to those skilled in the art, in the light of the technical teachings of the present invention which have been described.

Claims

1. A method of measuring a surface temperature of an object body, by calculating a temperature of the object body at each picture element of its image on the basis of a radiant intensity ratio at each pair of corresponding picture elements of a first and a second image which are obtained with respective radiations having respective first and second wavelengths and selected from a light emitted from a surface of said object body, said method comprising: a first wavelength-selecting step of selecting said radiation having said first wavelength from the light emitted from the surface of said object body, by using a first filter which permits transmission therethrough a radiation having said first wavelength which is selected according to a radiant-intensity curve corresponding to a wavelength of a black body at a lower limit of a range of the temperature to be measured, and which is within a high radiant-intensity range in which the radiant intensity is higher than a radiant intensity at a normal room temperature; and a second wavelength-selecting step of selecting said radiation having said second wavelength from the light emitted from the surface of said object body, by using a second filter which permits transmission therethrough a radiation having said second wavelength which is selected within said high radiant-intensity range, such that said second wavelength is different from said first wavelength by a predetermined difference which is not larger than {fraction (1/12)} of said first wavelength and which is not smaller than a sum of a half width of said first wavelength and a half width of said second wavelength.
2. A method according to claim 1, wherein said first filter permits transmission therethrough a radiation having a half width which is not larger than {fraction (1/20)} of said first wavelength, while said second filter permits transmission therethrough a radiation having a half width which is not larger than {fraction (1/20)} of said first wavelength.
3. A method according to claim 1, wherein said first and second filters have transmittance values whose difference is not higher than 30%
4. An apparatus for measuring a surface temperature of an object body, by calculating a temperature of the object body at each picture element of its image on the basis of a radiant intensity ratio at each pair of corresponding picture elements of a first and a second image which are obtained with respective radiations having respective first and second wavelengths and selected from a light emitted from a surface of said object body, said apparatus comprising: a first filter for selecting said radiation having said first wavelength from the light emitted from the surface of said object body, said first filter permitting transmission therethrough a radiation having said first wavelength which is selected according to a radiant-intensity curve corresponding to a wavelength of a black body at a lower limit of a range of the temperature to be measured, and which is within a high radiant-intensity range in which the radiant intensity is higher than a radiant intensity at a normal room temperature; and a second filter for selecting said radiation having said second wavelength from the light emitted from the surface of said object body, said second filter permitting transmission therethrough a radiation having said second wavelength which is selected within said high radiant-intensity range, such that said second wavelength is different from said first wavelength by a predetermined difference which is not larger than {fraction (1/12)} of said first wavelength and which is not smaller than a sum of a half width of said first wavelength and a half width of said second wavelength.
5. An apparatus according to claim 4, wherein said first filter permits transmission therethrough a radiation having a half width which is not larger than {fraction (1/20)} of said first wavelength, while said second filter permits transmission therethrough a radiation having a half width which is not larger than {fraction (1/20)} of said first wavelength.
6. An apparatus according to claim 4, wherein: the first and second filters have transmittance values whose difference is not higher than 30%
7. An apparatus according to claim 4, further comprising: a first half mirror for splitting said light emitted from the surface of said object body into two components traveling along respective first and second optical paths which are provided with said first and second filters), respectively; a second half mirror disposed so as to receive the radiations of said first and second wavelengths from said first and second filters; and and an image detector including a multiplicity of photosensitive elements operable in response to the radiations of said first and second wavelengths, to form two images of said object body on the basis of said radiations of said first and second wavelengths, respectively, such that said two images are spaced apart from each other.
8. An apparatus according to claim 4, further comprising: a pair of mirrors each movable between a first position in which the light emitted from the surface of said object body travels along a first path provided with said first filter, and a second position in which a corresponding one of said pair of mirrors reflects said light such that the light travels along a second optical path provided with said second filter; and an image detector including a multiplicity of photosensitive elements operable in response to the radiations of said first and second wavelengths, to form two images of said object body on the basis of said radiations of said first and second wavelengths, respectively, such that said two images are spaced apart from each other.
9. An apparatus according to claim 4, further comprising: a rotary disc carrying said first and second filters fixed thereto and rotatable about an axis parallel to an optical path which extends from said object body, said first and second filters being disposed on said rotary disc such that said first and second filters are selectively aligned with said optical path, by rotation of said rotary disc; an electric motor operable to rotate said rotary disc; and an image detector including a plurality of photosensitive elements operable in response to the radiations of said first and second wavelengths, to form two images of said object body on the basis of said radiations of said first and second wavelengths, respectively, such that said two images are spaced apart from each other.
10. An apparatus according to claim 4, further comprising: a half mirror for splitting said light emitted from the surface of said object body into two components traveling along respective first and second optical paths which are provided with said first and second filters, respectively; and a pair of image detectors disposed to receive the radiations of said first and second wavelengths, respectively, each of said pair of image detectors including a multiplicity of photosensitive elements operable in response to a corresponding one of the radiations of said first and second wavelengths, to an image of said object body on the basis of said corresponding radiation.
11. A method of measuring a surface temperature of an object body, by utilizing an image detector having a light detecting surface on which are arranged a multiplicity of photosensitive elements, said method comprising: a first image-forming step of forming a first image at a first position on said light detecting surface with a radiation having a first wavelength selected from a light emitted from a surface of said object body; a second image-forming step of forming, simultaneously with said first image, a second image at a second position on said light detecting surface with a radiation having a second wavelength selected from the light emitted from the surface of said object body, said second position being spaced from said first position; a first calculating step of obtaining a radiant intensity ratio at each picture element of the image of said object body, based on intensity values detected by each pair of said photosensitive elements which are located at corresponding local portions of the obtained first and second images; a second calculating step of obtaining a temperature at each picture element based on the obtained radiant intensity ratio and according to a predetermined relationship between the temperature and the radiant intensity ratio; and a displaying step of displaying a distribution of the surface temperature of said object body on the basis of the temperature obtained with respect to each picture element in said second calculating step.
12. An apparatus of measuring a surface temperature of an object body, by utilizing an image detector having a light detecting surface on which are arranged a multiplicity of photosensitive elements, said apparatus comprising: an optical image-forming device for forming a first image at a first position on said light detecting surface with a radiation having a first wavelength selected from a light emitted from a surface of said object body, and a second image, simultaneously with said first image, at a second position on said light detecting surface with a radiation having a second wavelength selected from the light emitted from the surface of said object body, said second position being spaced from said first position; a first calculating means for obtaining a radiant intensity ratio at each picture element of the image of said object body, based on radiant intensity values detected by each pair of said photosensitive elements which are located at corresponding local portions of the obtained first and second images; a second calculating means for obtaining a temperature at each picture element based on the obtained radiant intensity ratio and according to a predetermined relationship between the temperature and the radiant intensity ratio; and a display device for displaying a distribution of a surface temperature of said object body on the basis of the temperature calculated with respect to each picture element as obtained in said second calculating means.
13. An apparatus according to claim 12, further comprising: a first half mirror for splitting said light emitted from the surface of said object body into two components traveling along respective first and second optical paths which are provided with said first and second filters, respectively; a second half mirror disposed so as to receive the radiations of said first and second wavelengths from said first and second filters; an image detector including a multiplicity of photosensitive elements operable in response to the radiations of said first and second wavelengths, to form two images of said object body on the basis of said radiations of said first and second wavelengths, respectively, such that said two images are spaced apart from each other; a first convex lens disposed between said object body and said first half mirror for converging said light emitted from the surface of said object body into parallel rays; and a second convex lens disposed between said second half mirror and said image detector for converging two radiations having respective wavelengths, which have been respectively transmitted and reflected by said second half mirror.
14. An apparatus according to claim 12, further comprising: a first half mirror for splitting said light emitted from the surface of said object body into two components traveling along respective first and second optical paths which are provided with said first and second filters, respectively; a second half mirror disposed so as to receive the radiations of said first and second wavelengths from said first and second filters; an image detector including a multiplicity of photosensitive elements operable in response to the radiations of said first and second wavelengths, to form two images of said object body on the basis of said radiations of said first and second wavelengths, respectively, such that said two images are spaced apart from each other; a first convex lens disposed between said object body and said first half mirror for converging said light emitted from the surface of said object body into parallel rays; a second convex lens disposed between said second half mirror and said image detector for converging two radiations having respective wavelengths, which have been respectively transmitted and reflected by said second half mirror; and a third convex lens for forming a real space image of said object body at a position between said object body and said first convex lens, so that two real space images are formed at a position between said second convex lens and said image detector with the respective radiations having the respective wavelengths.

Temperature distribution measuring method and apparatus

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