Patent Application
20200158807
The present invention relates to a position calibration device, particularly to a test position alignment and calibration device, which is able to determine the displacement distance between the image detection position and the actual test position.
In semiconductor or integrated circuit (IC) industry, the elements are tested in different stages, no matter in fabrication stages or assemblage stages, to guarantee the yield, quality, and normal operation of the elements.
For an ordinary automatic test apparatus, the test head or grasp-release device is mounted on a horizontal moving platform and a vertical moving platform. In test, the test head or grasp-release device is normally moved by the horizontal moving platform to the above of the tested element beforehand, and then moved downward by the vertical moving platform to contact the tested element and tests it. However, the center of the test head or grasp-release device, which is mounted on the vertical moving platform, cannot match the center of the image capture device. In other words, a displacement distance exists between the image detection position and the actual test position of the test head or grasp-release device. In practical operation, we need to determine the displacement distance exactly. At present, the displacement distance is normally measured manually. However, manual measurement not only consumes much time but also lacks sufficient precision. Besides, manual measurement usually suffers the problems of assemblage and alignment in mechanics. Therefore, manual measurement of the displacement distance has much uncertainty and affects the positioning precision of the entire element.
Accordingly, the present invention proposes a test position alignment and calibration device to overcome the conventional technical problems and provide a higher positioning accuracy.
The primary objective of the present invention is to provide a test position alignment and calibration device, which turns on a light-emitting element in a contact way to more accurately obtain the displacement distance between the image detection position and the actual test position, whereby to achieve a higher positioning accuracy.
Another objective of the present invention is to provide a test position alignment and calibration device, which can periodically update the displacement distance, whereby to maintain the positioning accuracy persistently.
In order to achieve the abovementioned objectives, the present invention proposes a test position alignment and calibration device, which is disposed below a vertical moving platform. The vertical moving platform is mounted on a horizontal moving platform. An aligned device disposed on the vertical moving platform, and an image capture device is disposed beside the aligned device. The test position alignment and calibration device of the present invention comprises a base; a calibration probe disposed on the base; at least one passive element; a light-emitting element; and a power module. The horizontal moving platform and the vertical moving platform can drive the aligned device to move and make the aligned device contact the calibration probe. The passive element and the light-emitting element are disposed on the base and electrically connected with the calibration probe. While the calibration probe contacts the aligned device, an electric loop is formed among the calibration probe, the passive element, the light-emitting element and the aligned device. Thereby, the light-emitting element is turned on to acquire an actual test position. The power module is electrically connected with a light-emitting diode and supplies power to the abovementioned elements. The horizontal moving platform makes the image capture device able to align to the calibration probe, whereby to obtain an image detection position. The displacement distance can be accurately obtained via calculating the difference between the image detection position and the actual test position. The accurate displacement distance will be used in the following tests to increase the overall precision.
The bottom of the base has a negative-electrode plate functioning as the grounding terminal. An electric-conduction clamp is electrically connected with the aligned device and the negative-electrode plate to complete electric connection of the electric loop. One end of the electric-conduction clamp has a plug. A socket is disposed on the base corresponding to the plug. The socket is electrically connected with the negative-electrode plate. While the plug is inserted into the socket and the electric-conduction clamp is electrically connected with the aligned device, electric conduction takes place between the aligned device and the negative-electrode plate, which can facilitate the lighting-up of the light-emitting element.
Below, embodiments are described in detail in cooperation with the attached drawings to make easily understood the objectives, technical contents, and accomplishments of the present invention.
The test position alignment and calibration device of the present invention uses the horizontal moving platform and the vertical moving platform to precisely determine the image detection position and the actual test position, whereby to acquire a more accurate displacement distance and achieve a higher positioning accuracy.
In one embodiment, the test position alignment and calibration device 10 of the present invention uses an electric-conduction clamp 22. The electric-conduction clamp 22 is electrically connected with the test head 34 and the negative-electrode plate 122 to implement the abovementioned electric loop. One end of the electric-conduction clamp 22 has a plug 24. The base 12 has a socket 26 corresponding to the plug 24. The socket 26 is electrically connected with the negative-electrode plate 122. While the plug 24 is inserted into the socket 26 and the electric-conduction clamp 22 is fixed to the upper portion of a test probe 342 of the test head 34, the test head 34 is electrically connected with the negative-electrode plate 122 to facilitate the electric loop.
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In conclusion, the present invention proposes a test position alignment and calibration device, which lights up a light-emitting element after contact is done to assist in obtaining a more accurate displacement distance between the image detection position and the actual test position. Thereby, the present invention can achieve a higher accuracy of positioning. Further, the present invention is convenient to install, and easy to operate. Thus, the present invention is favorable to calibrate positions and update the actual displacement distance periodically. Therefore, the present invention can maintain the positioning accuracy and avoid mechanical errors for a longer period of time.
The embodiments have been described above to demonstrate the technical thoughts and characteristics of the present invention to enable the persons skilled in the art to understand, make, and use the present invention. However, these embodiments are only to exemplify the present invention but not to limit the scope of the present invention. Any equivalent modification or variation according to the spirit of the present invention is to be also included by the scope of the present invention.
