Number | Name | Date | Kind |
---|---|---|---|
3561954 | Brook | Feb 1971 | |
4393096 | Gajda et al. | Jul 1983 | |
4595429 | LeCaer et al. | Jun 1986 | |
5071791 | Inoue et al | Dec 1991 | |
5205770 | Lowrey et al. | Apr 1993 | |
5229316 | Lee et al. | Jul 1993 | |
5300155 | Sandhu et al. | Apr 1994 | |
5354712 | Ho et al. | Oct 1994 | |
5395801 | Doan et al. | Mar 1995 | |
5409563 | Cathey | Apr 1995 | |
5416045 | Kauffman et al. | May 1995 | |
5497017 | Gonzales | Mar 1996 | |
5527561 | Dobson et al. | Jun 1996 | |
5641545 | Sandhu | Jun 1997 | |
5644166 | Honeycutt et al. | Jul 1997 | |
5814557 | Venkatraman et al. | Sep 1998 | |
5994221 | Kizilyalli et al. | Nov 1999 | |
6017144 | Guo et al. | Jan 2000 | |
6090710 | Andricaces et al. | Jul 2000 | |
6110829 | Besser et al. | Aug 2000 |
Number | Date | Country |
---|---|---|
1211563 | Nov 1970 | GB |
60-187654A | Sep 1985 | JP |
61-159545A | Jul 1986 | JP |
63-179041A | Jul 1988 | JP |
Entry |
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Zolotorevskii, V.S., et al., “The effect of Mg +Si and Mg +Ge addns. on the structure and mech. properties of Al-Cu alloys after aging at 170 degrees”, Izv. Vyssh. Uchebn. Zaved., Tsvetn. Metall., 5, Abstract only, (1983). |
Kaanta, C., et al., “Dual Damascene: A ULSI Wiring Technology”, VMIC Conference, 144-152, (Jun. 1991). |
Licata, T., et al., “Dual Damascene AL Wiring for 256M DRAM”, VMIC Conference, 596-602, (Jun. 1995). |