Embodiments of the invention relate to thermal sensors. More particularly, embodiments of the invention relate to design, manufacture and use of Micro Electro Mechanical (MEMS) thermal sensors on a flexible substrate within electronic components and systems.
Platform (e.g., computer system, hand held devices like cell phones, mobile internet devices) temperature is currently monitored using thermal diodes or thermistors. These thermal diodes experience junction voltage changes that correspond to temperature changes while thermistors resistance change with temperature. The output voltage from the diode or across the thermistors is then digitized and translated to temperature.
This approach to thermal sensing may limit the number of sensors used because of limiting factors such as cost and package rigidity. This approach may also suffer from low accuracy and may require an analog-to-digital converter to digitize the signal. The requirement of the analog-to-digital converter increases cost and complexity of the host platform.
Further, the diode is manufactured on a solid silicon substrate and packaged in a mechanically rigid package that limits deployment of these sensors to printed circuit board, or printed circuit board like, applications or placement in very specific locations within the platform chassis where mechanical support and electrical traces are available. This limits design options and may further increase system complexity.
Embodiments of the invention are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings in which like reference numerals refer to similar elements.
a-m illustrate various steps in one embodiment of a process for manufacturing a MEMS copper resonator structure on a flexible substrate that may be used as a thermal sensor.
In the following description, numerous specific details are set forth. However, embodiments of the invention may be practiced without these specific details. In other instances, well-known circuits, structures and techniques have not been shown in detail in order not to obscure the understanding of this description.
Increased thermal sensing may be used to support improved system performance. However, in order to achieve wide acceptance, the costs of increased thermal sensing must be within an acceptable range. Described herein is a resonator structure that may provide an inexpensive, accurate thermal sensing solution that can support increased thermal sensing applications.
In one embodiment, a Micro-Electro-Mechanical Systems (MEMS) resonator to monitor the platform temperature. Fabricating the resonator on a relatively low cost flexible polymer substrate rather than silicon provides mechanical flexibility as well as design flexibility with respect to sensor placement. Sensor readout and control circuits can be on silicon if desired, for example, a positive feedback amplifier to form an oscillator in conjunction with the resonator and a counter to count oscillator frequency.
In one embodiment a thermal sensor that takes advantage of the low deposition temperature of copper to pattern a copper resonator structure on a flexible polymer substrate may be utilized. Using a polymer flexible substrate may enable a very flexible package that can be mechanically and electrically connected to any point in a platform, which provides flexibility of deployment. The sensor may be coupled to the printed circuit board via wires and/or connectors (e.g., ZIF connector), which may allow the sensor to be positioned anywhere within the platform.
Further, use of copper as the resonator structural material may increase the thermal dependence of the resonator frequency on temperature and hence improve the overall sensor accuracy. In one embodiment, the resonator may be connected in a positive feedback topology with a transimpedance amplifier that can be formed on silicon to provide an oscillator. The output of the oscillator is a signal with a frequency that is dependent on the resonator temperature and the frequency is counted with a simple counter circuit that can also be implemented on silicon.
Electronic system 100 may have any number of thermal sensors, which may include resonator structures and/or thermal diodes. The example of
Electronic system 100 includes bus 105 or other communication device to communicate information, and processor 110 coupled to bus 105 that may process information. While electronic system 100 is illustrated with a single processor, electronic system 100 may include multiple processors and/or co-processors. Electronic system 100 further may include random access memory (RAM) or other dynamic storage device (included in memory 120), coupled to bus 105 and may store information and instructions that may be executed by processor 110. Memory 120 may also be used to store temporary variables or other intermediate information during execution of instructions by processor 110. Memory 120 may also include read only memory (ROM) and/or other static storage device that may store static information and instructions for processor 110.
Electronic system 100 may include thermal management system 130 that may provide thermal monitoring and/or cooling functionality. Thermal management system 130 may include one or more fans and/or one or more liquid cooling mechanisms to cool various components of electronic system 100. Further, thermal management system 130 may include monitoring circuitry to monitor the temperature of various component and areas in electronic system 100. Data storage device 140 may be coupled to bus 105 to store information and instructions. Data storage device 140 such as a magnetic disk or optical disc and corresponding drive may be coupled to electronic system 100.
Electronic system 100 may also be coupled via bus 105 to display device 150, such as a cathode ray tube (CRT) or liquid crystal display (LCD), to display information to a user. Alphanumeric input device 160, including alphanumeric and other keys, may be coupled to bus 105 to communicate information and command selections to processor 110. Another type of user input device is cursor control 170, such as a mouse, a trackball, or cursor direction keys to communicate direction information and command selections to processor 110 and to control cursor movement on display 150.
Electronic system 100 further may include network interface(s) 180 to provide access to a network, such as a local area network. Network interface(s) 180 may include, for example, a wireless network interface having antenna 185, which may represent one or more antenna(e). Network interface(s) 180 may also include, for example, a wired network interface to communicate with remote devices via network cable 187, which may be, for example, an Ethernet cable, a coaxial cable, a fiber optic cable, a serial cable, or a parallel cable.
In one embodiment, network interface(s) 180 may provide access to a local area network, for example, by conforming to IEEE 802.11b and/or IEEE 802.11g standards, and/or the wireless network interface may provide access to a personal area network, for example, by conforming to Bluetooth standards. Other wireless network interfaces and/or protocols can also be supported.
IEEE 802.11b corresponds to IEEE Std. 802.11b-1999 entitled “Local and Metropolitan Area Networks, Part 11: Wireless LAN Medium Access Control (MAC) and Physical Layer (PHY) Specifications: Higher-Speed Physical Layer Extension in the 2.4 GHz Band,” approved Sep. 16, 1999 as well as related documents. IEEE 802.11g corresponds to IEEE Std. 802.11g-2003 entitled “Local and Metropolitan Area Networks, Part 11: Wireless LAN Medium Access Control (MAC) and Physical Layer (PHY) Specifications, Amendment 4: Further Higher Rate Extension in the 2.4 GHz Band,” approved Jun. 27, 2003 as well as related documents. Bluetooth protocols are described in “Specification of the Bluetooth System: Core, Version 1.1,” published Feb. 22, 2001 by the Bluetooth Special Interest Group, Inc. Associated as well as previous or subsequent versions of the Bluetooth standard may also be supported.
In addition to, or instead of, communication via wireless LAN standards, network interface(s) 180 may provide wireless communications using, for example, Time Division, Multiple Access (TDMA) protocols, Global System for Mobile Communications (GSM) protocols, Code Division, Multiple Access (CDMA) protocols, and/or any other type of wireless communications protocol.
where keff is the effective stiffness of the resonator material, meff is the effective mass of the resonator material, E is Young's Modulus and ρ is the density of the resonator material. Thus, as the capacitance, C(t), changes with flexure of the resonator structure, the voltage, Vin(t), applied to the resonator structure results in a proportional change in output current, Io(t).
In one embodiment, one or more leads 420 extend from sensor 400 to contacts 430. In one embodiment, leads 420 are fabricated on flexible substrate 410. Leads 420 and contacts 430 allow the placement of sensor 400 to be independent of a motherboard or connector as well as computational elements of a thermal management system.
In one embodiment, connector 440 is located on a motherboard of the host system. Connector 440 may be, for example, a Zero Insertion Force (ZIF) connector that provides an electrical connection via contacts 430. Connector 440 may be connected to other components of the host system via traces on a printed circuit board or physical wires.
a-m illustrate various steps in one embodiment of a process for manufacturing a MEMS copper resonator structure on a flexible substrate that may be used as a thermal sensor.
c illustrates ILD 635 after deposition of photoresist 640 and etching of vias 645 in ILD 635.
g illustrates the structure after polymer layer 610 has been etched.
Reference in the specification to “one embodiment” or “an embodiment” means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. The appearances of the phrase “in one embodiment” in various places in the specification are not necessarily all referring to the same embodiment.
While the invention has been described in terms of several embodiments, those skilled in the art will recognize that the invention is not limited to the embodiments described, but can be practiced with modification and alteration within the spirit and scope of the appended claims. The description is thus to be regarded as illustrative instead of limiting.