Number | Date | Country | Kind |
---|---|---|---|
11-079052 | Mar 1999 | JP |
Number | Name | Date | Kind |
---|---|---|---|
4111717 | Baxter | Sep 1978 | A |
4665276 | Elbel et al. | May 1987 | A |
5100479 | Wise et al. | Mar 1992 | A |
Number | Date | Country |
---|---|---|
4221037 | Jan 1994 | DE |
49-73986 | Jul 1974 | JP |
53-132282 | Nov 1978 | JP |
59-94023 | May 1984 | JP |
64-8644 | Jan 1989 | JP |
3-191834 | Aug 1991 | JP |
4-43783 | Oct 1992 | JP |
Entry |
---|
“A Batch-Fabricated Silicon Thermopile Infrared Detector”, G.R. Lahiji et al., IEEE Transactions on Electron Devices, vol. ED-29, No. 1, Jan. 1982, pp. 14-22. |
“Thermopiles Fabricated using Silicon Planar Technology”, G.D. Nieveld, Sensors and Actuators, 3 (1982/83), pp. 179-183, No month provided. |
“High Sensitivity and Detectivity Radiation Thermopiles Made by Multi-Layer Technology”, F. Völklein et al., Sensors and Actuators A, 24 (1990), pp. 1-4, No month provided. |