The present invention relates to a thickness measurement device and method for measuring the thickness of a living body or an object.
An integument layer or exocarp layer, which is the outermost layer of a plant leaf, is covered with a wax-based cuticular layer that is several hundred nm to several microns thick. The cuticular layer is thought to prevent the entry of disease-causing bacteria and control transpiration, and its thickness changes depending on the health of the plant. However, because the thickness of the thin layer is less than the wavelength of visible light, it is impossible to measure the thickness accurately with an optical microscope. In the past, the thickness of the material has been estimated exclusively by an electron microscopy (TEM) (hereinafter referred to as “Conventional example 1) (See, for example, non-patent document 1).
However, the electron microscopy cannot observe the living body as it is, and requires many steps and a great deal of time to replace materials. As a result, it is impossible to capture changes in thickness in the living state. In addition, because each of the materials is as small as a few millimeters, there is a limit to the representativeness of the entire leaf.
For example, a method of measuring the thickness of a thin film with a thickness of 200 nm or less (hereinafter referred to as “Conventional example 2”) is disclosed in Patent Document 1. In the film thickness measurement method, the following configuration is used to measure the film thickness of thin films of 200 nm or less accurately and with high throughput by using an optical interference film thickness measurement method without drastically changing the equipment configuration. Irradiated light from a light source is incident on a film on a substrate, which is the measurement target. The reflected light that causes interference from the film is reflected by the light receiving means while changing the incident angle of the irradiated light to the main surface of the film, and the reflected intensity of the P-polarized light that has passed through the deflection filter with the light transmission axis set in the surface direction where the optical axis meets the stage movement direction is measured. The film thickness of the aforementioned film is obtained from the reflection angle that takes the minimum value in the intensity variation of the measured reflected light.
However, when the thickness of the cuticular layer, which is the integument layer of the plant leaf and contains wax component, is measured by using the film thickness measurement method for thin films in the Conventional example 2 and then the reflection intensity of P-polarized light is measured, the absorption of P-polarized light waves in the cuticular layer and its inner layer is large. The absorption of light waves is large in the cuticular layer and its inner layer. In the case of the thin film thickness measurement method using the P-polarized light, there is a large absorption of P-polarized light waves in the cuticular layer and its inner layer. Therefore, a large reflection intensity cannot be obtained, and the thickness of the cuticular layer cannot be measured with sufficient accuracy.
In addition, the thickness of not only the cuticular layer, but also the thickness of each of living bodies and objects cannot be measured with higher accuracy than that of the conventional techniques.
The purpose of the present invention is to solve the above problems and to provide a thickness measurement device and method that can measure the thickness of a living body or an object more easily and with higher accuracy than that of the conventional techniques.
According to the first aspect of the present invention, there is provided a thickness measurement device for measuring a thickness of a first layer of a living body or an object including the first layer and a second layer, where the first layer has an incident surface and an opposing surface opposing the incident surface, and the second layer is in contact with the opposing surface of the first layer. The thickness measurement device includes a light source, a light receiving device, and a controller. The light source causes light of a predetermined wavelength A to enter the incident surface as an incident light from an air layer at a predetermined incident angle θi. The light receiving device receives a combined reflected light obtained by combining first and second reflected lights, and detects a light intensity of an S-polarized light component perpendicular to the incident surface among the combined reflected light. The controller is configured to calculates and outputs the thickness t of the first layer. The first reflected light is obtained such that the incident light is reflected at a reflection angle identical to the incident angle θi at the incident surface. The second reflected light is obtained such that the incident light is refracted at a refraction angle θ2 at the incident surface, is incident onto the first layer, and then, is reflected by the opposing surface of the first layer, and returns to the incident surface, and is refracted by the incident surface and outputted. The controller is configured to detect the light intensities of the S-polarized light components for each of the incident angles θi while changing the incident angle θi, searches for the incident angle θi corresponding to a minimum value of the light intensities of the detected S-polarized light components, and calculates and outputs the thickness t of the first layer by using the following equation:
and
n
0×sin θi=n1×sin θ2,
where m is a natural number,
n1 is a refractive index of the air layer, and
n2 is a refractive index of the first layer.
According to the second aspect of the invention, there is provided a thickness measurement method of measuring a thickness of a first layer of a living body or an object including the first layer and a second layer, where the first layer has an incident surface and an opposing surface opposing the incident surface, and the second layer is in contact with the opposing surface of the first layer. The thickness measurement method includes the steps of: causing light of a predetermined wavelength λ from a light source to enter the incident surface as an incident light from an air layer at a predetermined incident angle θi; by a light receiving device, receiving a combined reflected light obtained by combining first and second reflected lights, and detects a light intensity of an S-polarized light component perpendicular to the incident surface among the combined reflected light; and by a controller, calculating and outputting the thickness t of the first layer. The first reflected light is obtained such that the incident light is reflected at a reflection angle identical to the incident angle θi at the incident surface. The second reflected light is obtained such that the incident light is refracted at a refraction angle θ2 at the incident surface, is incident onto the first layer, and then, is reflected by the opposing surface of the first layer, and returns to the incident surface, and is refracted by the incident surface and outputted. The controller is configured to detect the light intensities of the S-polarized light components for each of the incident angles θi while changing the incident angle θi, searches for the incident angle θi corresponding to a minimum value of the light intensities of the detected S-polarized light components, and calculates and outputs the thickness t of the first layer by using the following equation:
and
n
0×sin θi=n1×sin θ2,
where m is a natural number,
n1 is a refractive index of the air layer, and
n2 is a refractive index of the first layer.
Therefore, according to the thickness measurement device and method of the present invention, the device and method can measure the thickness of the living body or the object more easily and with higher accuracy than that of the prior art.
Embodiments of the present invention will be described below with reference to the drawings. The same numerical reference is attached to the same or similar components.
First of all, the principle of the method of measuring a thickness of an integument layer of each of plant leaves is described below.
This method of measuring the thickness of the integument layer estimates a thickness of a cuticle layer from the interference caused by light rays reflected from the upper surface (or top surface) and lower surface (a boundary surface between the cuticle layer and the leaf cells) of the cuticle layer, by measurement using polarized light at a specific wavelength.
Referring to
n
air×sin θi=nwaxy×sin θ2 (1),
where nair is a refractive index of the atmosphere (being approximately equal to 1), and nwaxy is a refractive index of the cuticular layer 3a containing the wax component.
The incident light 43 entering into the cuticular layer 3a passes through the interior of the cuticular layer 3a. Then, the incident light 43 is reflected at the position B on the lower surface of the cuticular layer 3a at the incident angle θ3 and the reflection angle θ4 (=θ3), and the phase of the light wave at that time is shifted by 180 degrees. The reflected light 44 reflected at the position B passes through the interior of the cuticular layer 3a again, and is refracted at the position C, and is emitted at the same refraction angle θo as the reflection angle θo at the position A. The outgoing light 42 becomes the outgoing light in the same direction as that of the outgoing light 41, and the outgoing light 42 is combined with the outgoing light 41, and is observed as “a combined reflected light” by the light receiving device.
Therefore, the two outgoing lights 41 and 42 reflected from the upper and lower surfaces of the cuticular layer 3a are in opposite phases to each other when they are combined. In other words, the condition under which the intensities of these two rays 41 and 42 show a peak in the negative direction is expressed by the following equation:
2×nwaxy×t×cos(θ2)=(m−½)λ (2),
where t is the thickness of the cuticular layer 3a, m is a natural number, and λ is the wavelength of light waves in the atmosphere. Solving the Equation (2) for the thickness t, we obtain the following equation:
In other words, if we can measure the refraction angle θ2 at which the intensity peaks in the negative direction due to interference, we can estimate the thickness t of the cuticle layer 3a.
In the embodiment, while changing the incident angle θi to the plant leaf, the measurement device measures the light intensity of the S-polarized light component perpendicular to the incident surface of the outgoing light reflected at the reflection angle θo of the same angle as the incident angle θi, and examines the angle with the minimum value. The significance of measuring the light intensity of the S-polarized light component will be explained in detail later. This measurement method has high advantages over the measurement method using an electron microscope in conventional example 1 in the following two points:
(1) the plant can be measured while it is still alive; and
(2) if a two-dimensional image can be acquired with a spectroscopic camera, it is possible to estimate the thickness t of the cuticle layer 3a over the entire leaf area.
In addition, the polarization component to be measured is different from that of the thin film thickness measurement method of the Conventional Example 2, and the thickness t can be measured with higher accuracy as described in detail below.
Next, the configuration of the plant leaf integument layer thickness measurement device is described below.
Referring to
The CPU 10 is a controller (control unit) that controls each of the components of the measurement control device 1, and executes the measurement process of the measurement device. The ROM 11 stores in advance a program of the measurement process of the measurement control device 1 and the data necessary to execute the same program. The RAM 12 temporarily stores measurement data, etc. when the CPU 10 executes the measurement process of the measurement device. The SSD 13 stores the additional program of the measurement process of the measurement control device 1 and the data necessary to execute the same program, as well as the measurement data. The operation unit 14 includes, for example, a keyboard and a mouse, and is provided for inputting instructions, etc. when executing the measurement process of the measurement control unit 1. The display section 15 displays the measurement results, etc. when the measurement process of the measurement control unit 1 is executed. The communication IF 16 transmits the measurement results to a cloud or server device via a network such as the Internet. The signal IF 17 transmits control signals such as ON/OFF signals from the measurement control device 1 to the light source 4. The signal IF 18 receives a signal indicating the light-receiving intensity signal level from the light-receiving device 5. The mechanism IF 19 transmits control signals to control the operation of the moving mechanism 6 that controls the positions of the light source 4 and the light receiving device 5. The mechanism IF 19 sends control signals to control the operation of the moving mechanism 6 that controls the positions of the light source 4 and the light receiving device 5, and receives ACK signals and other reply signals from the moving mechanism 6.
A plant leaf 3 to be measured is placed on a table 2, and the leaf 3 has a cuticle layer 3a, which is an integument layer, on its upper surface. A virtual horizontal line passing through the upper surface of the cuticle layer 3a is indicated by the numerical reference 9. The moving mechanism 6 with a semicircular rail 7 is supported by a support member 8 on the placing stand 2.
As shown in
As explained above, according to the present embodiment, while changing the incident angle θi to the plant leaf 3, the light intensities of the S-polarized light components perpendicular to the incident surface of the outgoing light reflected at the reflection angle θo of the same angle as the incident angle θi are measured, and then, the angle with the minimum value is examined to be searched. In this way, the thickness t of the cuticle layer 3a can be estimated while the plant is still alive.
In the above embodiment, the moving mechanism 6 controls the position P1 of the light source 4 and the position P2 of the light receiving device 5 so that the incident angle θi=the outgoing angle θo. The present invention is not limited to this. Instead of the moving mechanism 6 of
In this case, with respect to the position P1 of the light source 21 and the position P2 of the light receiving device 31, the CPU 10 of the measurement control unit 1 controls the position P1 of the light source 21 and the position P2 of the light receiving device 31 so that the incident angle θi=the outgoing angle θo.
In the above embodiment, the light receiving devices 5 and 31 are used. However, the present invention is not limited thereto, and the thickness t of the cuticle layer 3a can be estimated over the entire upper surface of the leaf by measuring the entire upper surface of the plant leaf 3 by using an imaging device such as a spectral camera.
Furthermore, in the above embodiment, the light receiving device 5 is provided with the polarization filter 5f. However, the present invention is not limited to this, and in order to remove noise outside a predetermined band, a band pass wavelength filter, which passes only the band to be received, may be provided in front of the light receiving device 5.
The following is a description of the measurement results obtained by the inventors by using the thickness measurement device shown in
In other words,
This type of effect is not only seen in the mirror reflections, but also in the BRF measurements of coffee plant leaves. In this case, the strongly observed structural or constructive peaks, which can be seen at wavelengths from 460 nm to 550 nm, are much larger than the refractive index of the cuticular layer, which contains the wax component of the mesophilic layer at this optical wavelength. From strawberry leaves, we could not see any interference waves.
As can be seen from
In addition, the following photographic images were taken by the inventors by using an electron microscope (TEM).
Referring to
As can be seen from
In the present embodiment, the thickness of the cuticular layer 3a is measured by using the light intensity of the S-polarized light component. In contrast, the Patent document 1 discloses the measurement of the thickness of the thin film layer of an object by using the light intensity of the P-polarized light component. These differences are explained below.
The invention of the Patent document 1 is based on the description in
(A) the reflected light to be measured is P-polarized light;
(B) the minimum value of the intensity variation of the reflected light is used; and
(C) the measurement target is a film with a thickness of 200 nm or less.
The invention of the Patent document 1 claimed that the method has the excellent effect of measuring the object to be measured with an accuracy of about ±3% (See, for example, paragraph 0062; the Patent document 1 (See, for example, paragraph 0062; See also the opinion letter dated Nov. 2, 2007 in the examination process of the application for the Patent document 1).
On the other hand, the present embodiment differs from the Patent document 1 in that it is characterized, in particular, by the following:
(A) The reflected light to be measured is an S-polarized light. (As is clear from the electron microscope measurements described above, the S-polarized component is presumed to be composed mainly of light that passes through and is reflected from the cuticular layer 3a twice. On the other hand, the P-polarized light component is estimated to be mainly composed of the light component that is reflected back from the cuticular layer 3a and the underside of the main leaf layer below the cuticular layer 3a. Most of the cuticular layer 3a contains cells with a refractive index of 1.5, while the main layer of the leaf contains cells with a refractive index of 1.5 and intercellular spaces with a refractive index of 1.0, so the main layer of the leaf has a refractive index of about 1.2 to 1.4. It is clear from FIG. 4 of the Patent document 1 that the refractive index of the membrane 42 in
(B) While changing the incident angle of the incident light, the minimum value of the light intensities of the combined reflected lights for the incident angle is used.
(C) The measurement target is the integument layer (such as a cuticular layer) of plant leaves. (As an example of thickness, the thickness of the cuticular layer of a coffee leaf is about 403 nm, and the thickness of the cuticular layer of a pothos is 4.2 μm). In the Patent document 1, the thickness of the film on the silicon substrate is targeted.
As explained above, according to a thickness measurement device for measuring a thickness of an integument layer of a plant leaf of the embodiments and its modified embodiments, the thickness measurement device is characterized by including:
a light source that causes light of a predetermined wavelength λ to enter the incident surface of the plant leaf as an incident light from an air layer at a predetermined incident angle θi;
a light receiving device that receives a combined reflected light obtained by combining first and second reflected lights, and detects a light intensity of an S-polarized light component perpendicular to the incident surface among the combined reflected light; and
a controller configured to calculates and outputs the thickness t of the first layer,
wherein the first reflected light is obtained such that the incident light is reflected at a reflection angle identical to the incident angle θi at the incident surface of the plant leaf,
wherein the second reflected light is obtained such that the incident light is refracted at a refraction angle θ2 at the incident surface of the plant leaf, is incident onto the integument layer of the plant leaf, and then, is reflected by the opposing surface of the integument layer of the plant leaf, and returns to the incident surface of the plant leaf, and is refracted by the incident surface of the plant leaf and outputted, and
wherein the controller is configured to detect the light intensities of the S-polarized light components for each of the incident angles θi while changing the incident angle θi, searches for the incident angle θi corresponding to a minimum value of the light intensities of the detected S-polarized light components, and calculates and outputs the thickness t of the first layer by using the following equation:
and
nair×sin θi=nwaxy×sin θ2,
where m is a natural number,
nair is a refractive index in the atmosphere, and
nwaxy is a refractive index of the integument layer.
In this case, the thickness measurement device further includes a moving mechanism that moves the light source and the light receiving device so that the incident angle θi and the outgoing angle of the first and second reflected lights are the same as each other under the control of the controller.
In addition, the thickness measurement device for measuring the thickness of the integument layer of the plant leaf includes:
a plurality of light sources; and
a plurality of light receiving devices,
wherein the controller detects the light intensities of the S-polarized light components for each of the changed incident angles θi while changing the incident angle θi, by turning on one of the plurality of light sources sequentially and selectively to use a turned-on light source as a light source for being incident on the incident surface of the plant leaf, and by turning on one of the plurality of light receiving devices sequentially and selectively to use a turned-on light receiving device as a light receiving device for detecting the combined reflected light.
In this case, the light receiving device includes a polarization filter that detects the S-polarized light component perpendicular to the incident surface among the combined reflected light.
As explained above, the thickness measurement device and method for measuring the thickness of the integument layer of the plant leaf can measure the thickness of the integument layer of the plant leaf more easily and with higher accuracy than that of the conventional cases. This makes it possible to measure the nutritional status of the plants in an extremely simple manner.
The above embodiments and their modified embodiments describe the integument layer thickness measurement device and method for measuring the thickness of the integument layer of the plant leaf, which is the thickness of the cuticular layer containing wax component of the plant leaf. However, the invention is not limited to this, and can also be applied to devices for detecting the thickness and conditions of the skin surface layer of animals each including the human body, the amount of perspiration from animals, the skin cell layer of animals, or the epidermal cell layer of animals and plants. A thickness measurement device for measuring the thickness of a living body or an object will be described below.
Referring to
(1) the outgoing light 41 which is a first reflected light that is reflected at the incident surface at the same reflection angle θo as the incident angle θi; and
(2) the light is refracted at the refraction angle θ2 at the incident surface and incident on the first layer 51, and thereafter, the incident light is incident at the position B on the opposite side of the first layer 51 (or the upper side of the second layer 52) at the incident angle θ3, the same incident light is reflected at the angle θ4 to return to the incident surface, and is incident to the position C of the incident surface at the incident angle θ2. Then the incident light is refracted at the refraction angle or outgoing angle θ0 to output or emit the light, which is the outgoing light 42 that is the second reflected light.
In this way, the conditions, under which the incident light is incident to the light receiving device 5 by allowing the incident light to be incident, be refracted and reflected etc., are expressed by the following equation:
n
0
<n
1
<n
2 (4),
where n0 is a refractive index of the air layer 50, n1 is a refractive index of the first layer 51, and n2 is a refractive index of the second layer.
The measurement control device 1 of
and
n
0×sin θi=n1×sin θ2 (6),
where m is a natural number, and the natural number m corresponds to the wavenumber of the incident light of wavelength λ when the incident light passes through the first layer 51. In order to calculate the thickness t of the first layer 51 with high accuracy, the natural number m is preferably 1, 2 or 3. As is clear from the relationship between the wavelength λ of the incident light and the thickness t in Equation (5), it is necessary to select the wavelength λ of the incident light so that the numerical value on the right side of equation (5) is substantially equal to the thickness t (about the same order).
As explained above, the present modified embodiment can measure the thickness of the first layer 51 of a living body or human body more easily and with higher accuracy than that of the prior art.
In addition, it is also clear from the Non-patent documents 2 and 3 that, we can find such plots that the perspiration rate per minute of a human body is 0.05 to 0.5 [mg/min/cm2], for example. Assuming that the specific gravity of sweat is 1 g/cm3, the thickness t of the surface layer of the human body can be converted to 0.5 to 5 μm. In other words, if we measure the thickness t of the skin surface layer of the human body by using the measurement device shown in
As described in detail above, the thickness measurement device and method of the present invention can measure the thickness of the first layer of the living body or the object more easily and with higher accuracy than that of the prior art. This makes it possible to measure the growth state, perspiration rate, etc. of a living body or other object.
Number | Date | Country | Kind |
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2019-136105 | Jul 2019 | JP | national |
Filing Document | Filing Date | Country | Kind |
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PCT/JP2020/013087 | 3/24/2020 | WO |