with measurement of polarization

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CPC
G01B11/0641

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GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B11/00Measuring arrangements characterised by the use of optical means

Current Industry

G01B11/0641with measurement of polarization

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for surface normals sensing with polarization
- Patent number 12,099,148
- Issue date Sep 24, 2024
- Intrinsic Innovation LLC
- Achuta Kadambi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical metrology models for in-line film thickness measurements
- Patent number 12,062,583
- Issue date Aug 13, 2024
- Applied Materials Israel Ltd.
- Eric Chin Hong Ng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for augmentation of sensor systems and imaging...
- Patent number 11,982,775
- Issue date May 14, 2024
- Intrinsic Innovation LLC
- Achuta Kadambi
- G01 - MEASURING TESTING
Information Patent Grant
Laser absorptivity measurement device
- Patent number 11,913,830
- Issue date Feb 27, 2024
- National Technology & Engineering Solutions of Sandia, LLC
- Daniel Tung
- G01 - MEASURING TESTING
Information Patent Grant
Contactless method for polymer coating thickness measurement
- Patent number 11,852,457
- Issue date Dec 26, 2023
- GM Global Technology Operations LLC
- Fang Dai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rapid measurement method for ultra-thin film optical constant
- Patent number 11,662,197
- Issue date May 30, 2023
- Huazhong University of Science & Technology
- Honggang Gu
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry based methods and systems for measurement of strain i...
- Patent number 11,573,077
- Issue date Feb 7, 2023
- KLA Corporation
- Houssam Chouaib
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical monitor
- Patent number 11,542,596
- Issue date Jan 3, 2023
- Viavi Solutions Inc.
- Markus K. Tilsch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ellipsometer
- Patent number 11,493,322
- Issue date Nov 8, 2022
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- G01 - MEASURING TESTING
Information Patent Grant
Two-degree-of-freedom heterodyne grating interferometry measurement...
- Patent number 11,307,018
- Issue date Apr 19, 2022
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
System and method for use in high spatial resolution ellipsometry
- Patent number 11,262,293
- Issue date Mar 1, 2022
- Ronen Rapaport
- G01 - MEASURING TESTING
Information Patent Grant
Ellipsometer and method for estimating thickness of film
- Patent number 11,255,658
- Issue date Feb 22, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Feng Yuan Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ full wafer metrology system
- Patent number 11,204,312
- Issue date Dec 21, 2021
- Applied Materials, Inc.
- Ami Sade
- G01 - MEASURING TESTING
Information Patent Grant
Measurement methodology of advanced nanostructures
- Patent number 11,156,548
- Issue date Oct 26, 2021
- KLA-Tencor Corporation
- Manh Nguyen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and systems for measurement of thick films and high aspect...
- Patent number 11,119,050
- Issue date Sep 14, 2021
- KLA Corporation
- Noam Sapiens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimizing computational efficiency by multiple truncation of spati...
- Patent number 11,086,288
- Issue date Aug 10, 2021
- KLA-Tencor Corporation
- Andrei Veldman
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry based methods and systems for measurement of strain i...
- Patent number 11,060,846
- Issue date Jul 13, 2021
- KLA Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Grant
Multi-dimensional model of optical dispersion
- Patent number 11,060,982
- Issue date Jul 13, 2021
- KLA Corporation
- Natalia Malkova
- G01 - MEASURING TESTING
Information Patent Grant
Compensation for Goos-Hanchen error in autofocus systems
- Patent number 10,928,187
- Issue date Feb 23, 2021
- Nikon Corporation
- Daniel Gene Smith
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology system using infrared wavelengths
- Patent number 10,901,241
- Issue date Jan 26, 2021
- Onto Innovation Inc.
- George Andrew Antonelli
- G01 - MEASURING TESTING
Information Patent Grant
Automatic selection of sample values for optical metrology
- Patent number 10,895,810
- Issue date Jan 19, 2021
- KLA Corporation
- Meng Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Prism coupling methods of characterizing stress in glass-based ion-...
- Patent number 10,859,451
- Issue date Dec 8, 2020
- Corning Incorporated
- Vitor Marino Schneider
- G01 - MEASURING TESTING
Information Patent Grant
Integrated system, integrated system operation method and film trea...
- Patent number 10,840,102
- Issue date Nov 17, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Weibo Yu
- G01 - MEASURING TESTING
Information Patent Grant
Ellipsometer and method for estimating thickness of film
- Patent number 10,760,896
- Issue date Sep 1, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Feng Yuan Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical metrology device for measuring samples having thin or thick...
- Patent number 10,746,530
- Issue date Aug 18, 2020
- Onto Innovation Inc.
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Grant
Detection and measurement of dimensions of asymmetric structures
- Patent number 10,732,515
- Issue date Aug 4, 2020
- KLA-Tencor Corporation
- Phillip R. Atkins
- G01 - MEASURING TESTING
Information Patent Grant
Thin film analysis apparatus and method for a curved surface
- Patent number 10,709,327
- Issue date Jul 14, 2020
- Aizhong Zhang
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Methods and systems for measurement of thick films and high aspect...
- Patent number 10,690,602
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Noam Sapiens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phase revealing optical and X-ray semiconductor metrology
- Patent number 10,677,586
- Issue date Jun 9, 2020
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring thickness variations in a layer of a multilaye...
- Patent number 10,619,997
- Issue date Apr 14, 2020
- Soitec
- Oleg Kononchuk
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...
- Publication number 20240418633
- Publication date Dec 19, 2024
- KLA Corporation
- Shova Subedi
- G01 - MEASURING TESTING
Information Patent Application
ANGLE-RESOLVED SPECTROSCOPIC ELLIPSOMETER USING SPATIAL LIGHT MODUL...
- Publication number 20240369473
- Publication date Nov 7, 2024
- Seoul National University R&DB Foundation
- Heui Jae PAHK
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS TO CHARACTERIZE SUBSTRATES AND FILMS
- Publication number 20240027186
- Publication date Jan 25, 2024
- ONTO INNOVATION INC.
- Jian Ding
- G01 - MEASURING TESTING
Information Patent Application
CONTACTLESS METHOD FOR POLYMER COATING THICKNESS MEASUREMENT
- Publication number 20230194242
- Publication date Jun 22, 2023
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Fang DAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR AUGMENTATION OF SENSOR SYSTEMS AND IMAGING...
- Publication number 20230184912
- Publication date Jun 15, 2023
- Intrinsic Innovation LLC
- Achuta Kadambi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS
- Publication number 20230160688
- Publication date May 25, 2023
- SAMSUNG DISPLAY CO., LTD.
- JAISUN KYOUNG
- G01 - MEASURING TESTING
Information Patent Application
Spectroscopic Reflectometry And Ellipsometry Measurements With Elec...
- Publication number 20230109008
- Publication date Apr 6, 2023
- KLA Corporation
- William McGahan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR MEASURING THE PROFILE OF FLAT OBJECTS COMPRIS...
- Publication number 20220390355
- Publication date Dec 8, 2022
- SENTRONICS METROLOGY GMBH
- Bernd SROCKA
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR SURFACE NORMALS SENSING WITH POLARIZATION
- Publication number 20220307819
- Publication date Sep 29, 2022
- Intrinsic Innovation LLC
- Achuta KADAMBI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
THICKNESS MEASUREMENT DEVICE AND METHOD FOR MEASURING THICKNESS OF...
- Publication number 20220282966
- Publication date Sep 8, 2022
- National University Corporation Hokkaido University
- Yukihiro TAKAHASHI
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
LAMINATED COATING LAYER, METHOD FOR MANUFACTURING SAME, AND METHOD...
- Publication number 20220018020
- Publication date Jan 20, 2022
- YAMAGATA UNIVERSITY
- Fumihiko HIROSE
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
IN-SITU FULL WAFER METROLOGY SYSTEM
- Publication number 20210285865
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Ami Sade
- G01 - MEASURING TESTING
Information Patent Application
TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT...
- Publication number 20210164772
- Publication date Jun 3, 2021
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
MULTILAYER STRUCTURE INSPECTION APPARATUS AND METHOD, AND SEMICONDU...
- Publication number 20210026152
- Publication date Jan 28, 2021
- Samsung Electronics Co., Ltd.
- Sung-yoon Ryu
- G01 - MEASURING TESTING
Information Patent Application
ELLIPSOMETER AND METHOD FOR ESTIMATING THICKNESS OF FILM
- Publication number 20200386539
- Publication date Dec 10, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- FENG YUAN HSU
- G01 - MEASURING TESTING
Information Patent Application
RAPID MEASUREMENT METHOD FOR ULTRA-THIN FILM OPTICAL CONSTANT
- Publication number 20200333132
- Publication date Oct 22, 2020
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Honggang Gu
- G01 - MEASURING TESTING
Information Patent Application
Multi-Dimensional Model Of Optical Dispersion
- Publication number 20200292467
- Publication date Sep 17, 2020
- KLA Corporation
- Natalia Malkova
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods And Systems For Measurement Of Thick Films And High Aspect...
- Publication number 20200284733
- Publication date Sep 10, 2020
- KLA Corporation
- Noam Sapiens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scatterometry Based Methods And Systems For Measurement Of Strain I...
- Publication number 20200200525
- Publication date Jun 25, 2020
- KLA Corporation
- Houssam Chouaib
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL METROLOGY DEVICE FOR MEASURING SAMPLES HAVING THIN OR THICK...
- Publication number 20200182606
- Publication date Jun 11, 2020
- ONTO INNOVATION INC.
- Jeffrey T. Fanton
- G01 - MEASURING TESTING
Information Patent Application
Phase Revealing Optical and X-Ray Semiconductor Metrology
- Publication number 20200080836
- Publication date Mar 12, 2020
- KLA-Tencor Corporation
- John Hench
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELLIPSOMETER AND METHOD FOR ESTIMATING THICKNESS OF FILM
- Publication number 20200072598
- Publication date Mar 5, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- FENG YUAN HSU
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR USE IN HIGH SPATIAL RESOLUTION ELLIPSOMETRY
- Publication number 20200025678
- Publication date Jan 23, 2020
- Yissum Research Development Company of the Hebrew University of Jerusalem Ltd.
- Ronen RAPAPORT
- G01 - MEASURING TESTING
Information Patent Application
HALFWAY CUTTER CHANGING METHOD FOR LARGE-AREA MICROSTRUCTURE CUTTIN...
- Publication number 20200023441
- Publication date Jan 23, 2020
- BEIJING INSTITUTE OF TECHNOLOGY
- Tianfeng ZHOU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
IN-SITU ELLIPSOMETRY FOR ELECTRIC VEHICLE BATTERY CELL LITHIUM PLAT...
- Publication number 20190296406
- Publication date Sep 26, 2019
- SF Motors, Inc.
- Brennan Campbell
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
THIN FILM ANALYSIS APPARATUS AND METHOD FOR A CURVED SURFACE
- Publication number 20190183332
- Publication date Jun 20, 2019
- Aizhong Zhang
- G02 - OPTICS
Information Patent Application
Measurement Methodology of Advanced Nanostructures
- Publication number 20190178788
- Publication date Jun 13, 2019
- KLA-Tencor Corporation
- Manh Nguyen
- G05 - CONTROLLING REGULATING
Information Patent Application
Optimizing Computational Efficiency By Multiple Truncation Of Spati...
- Publication number 20190129376
- Publication date May 2, 2019
- KLA-Tencor Corporation
- Andrei Veldman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Detection And Measurement Of Dimensions Of Asymmetric Structures
- Publication number 20190094711
- Publication date Mar 28, 2019
- KLA-Tencor Corporation
- Phillip R. Atkins
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multilayer Film Metrology Using An Effective Media Approximation
- Publication number 20190033211
- Publication date Jan 31, 2019
- KLA-Tencor Corporation
- Mark A. Neil
- G02 - OPTICS

with measurement of polarization

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for surface normals sensing with polarization

Optical metrology models for in-line film thickness measurements

Systems and methods for augmentation of sensor systems and imaging...

Laser absorptivity measurement device

Contactless method for polymer coating thickness measurement

Rapid measurement method for ultra-thin film optical constant

Scatterometry based methods and systems for measurement of strain i...

Optical monitor

Ellipsometer

Two-degree-of-freedom heterodyne grating interferometry measurement...

System and method for use in high spatial resolution ellipsometry

Ellipsometer and method for estimating thickness of film

In-situ full wafer metrology system

Measurement methodology of advanced nanostructures

Methods and systems for measurement of thick films and high aspect...

Optimizing computational efficiency by multiple truncation of spati...

Scatterometry based methods and systems for measurement of strain i...

Multi-dimensional model of optical dispersion

Compensation for Goos-Hanchen error in autofocus systems

Optical metrology system using infrared wavelengths

Automatic selection of sample values for optical metrology

Prism coupling methods of characterizing stress in glass-based ion-...

Integrated system, integrated system operation method and film trea...

Ellipsometer and method for estimating thickness of film

Optical metrology device for measuring samples having thin or thick...

Detection and measurement of dimensions of asymmetric structures

Thin film analysis apparatus and method for a curved surface

Methods and systems for measurement of thick films and high aspect...

Phase revealing optical and X-ray semiconductor metrology

Method for measuring thickness variations in a layer of a multilaye...

Patents Applicationslast 30 patents

COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...

ANGLE-RESOLVED SPECTROSCOPIC ELLIPSOMETER USING SPATIAL LIGHT MODUL...

APPARATUS TO CHARACTERIZE SUBSTRATES AND FILMS

CONTACTLESS METHOD FOR POLYMER COATING THICKNESS MEASUREMENT

SYSTEMS AND METHODS FOR AUGMENTATION OF SENSOR SYSTEMS AND IMAGING...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS

Spectroscopic Reflectometry And Ellipsometry Measurements With Elec...

DEVICE AND METHOD FOR MEASURING THE PROFILE OF FLAT OBJECTS COMPRIS...

SYSTEMS AND METHODS FOR SURFACE NORMALS SENSING WITH POLARIZATION

THICKNESS MEASUREMENT DEVICE AND METHOD FOR MEASURING THICKNESS OF...

LAMINATED COATING LAYER, METHOD FOR MANUFACTURING SAME, AND METHOD...

IN-SITU FULL WAFER METROLOGY SYSTEM

TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT...

MULTILAYER STRUCTURE INSPECTION APPARATUS AND METHOD, AND SEMICONDU...

ELLIPSOMETER AND METHOD FOR ESTIMATING THICKNESS OF FILM

RAPID MEASUREMENT METHOD FOR ULTRA-THIN FILM OPTICAL CONSTANT

Multi-Dimensional Model Of Optical Dispersion

Methods And Systems For Measurement Of Thick Films And High Aspect...

Scatterometry Based Methods And Systems For Measurement Of Strain I...

OPTICAL METROLOGY DEVICE FOR MEASURING SAMPLES HAVING THIN OR THICK...

Phase Revealing Optical and X-Ray Semiconductor Metrology

ELLIPSOMETER AND METHOD FOR ESTIMATING THICKNESS OF FILM

SYSTEM AND METHOD FOR USE IN HIGH SPATIAL RESOLUTION ELLIPSOMETRY

HALFWAY CUTTER CHANGING METHOD FOR LARGE-AREA MICROSTRUCTURE CUTTIN...

IN-SITU ELLIPSOMETRY FOR ELECTRIC VEHICLE BATTERY CELL LITHIUM PLAT...

THIN FILM ANALYSIS APPARATUS AND METHOD FOR A CURVED SURFACE

Measurement Methodology of Advanced Nanostructures

Optimizing Computational Efficiency By Multiple Truncation Of Spati...

Detection And Measurement Of Dimensions Of Asymmetric Structures

Multilayer Film Metrology Using An Effective Media Approximation