Claims
- 1. A thin film element, comprising:
- a substrate;
- a multilayer thin film structure formed on said substrate for performing a desired function, said structure having a layer comprising an organic material and a layer comprising a magnetic material; and
- a protective covering on said thin film structure, said covering comprising at least two protective layers of different inorganic nonmagnetic insulating material or mixture thereof, adjacent layers of said protective covering being of different composition, one of said protective layers covering said thin film structure and another of said protective layers covering said one protective layer.
- 2. An element according to claim 1, wherein each layer of said protective covering comprises a mixture of at least two major constituents.
- 3. An element according to claim 1, wherein said protective covering comprises a multilayered film.
- 4. An element according to claim 1, wherein the nonmagnetic insulating materials of said protective covering are two materials selected from the group consisting of Al.sub.2 O.sub.3, SiO.sub.2 and SiC.
- 5. An element according to claim 1, wherein said organic material is a photoresist material.
Priority Claims (1)
Number |
Date |
Country |
Kind |
56-123120 |
Aug 1981 |
JPX |
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Parent Case Info
This application is a continuation, of application Ser. No. 405,058, filed Aug. 4, 1982 and now abandoned.
US Referenced Citations (4)
Continuations (1)
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Number |
Date |
Country |
Parent |
405058 |
Aug 1982 |
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