Patent Application
20140166932
The present invention relates to the field of semiconductor optoelectronic materials, in particular to as titanium doped ternary system silicate film and preparation method and application thereof
Thin film electroluminescent displays (TFELD) due to its self-luminous, full-solid state structure impact resistance. fast response, large viewing angle, wide applicable temperature, simple process. etc., has attracted wide attention, and thus has developed very rapidly. A monochromatic TFELD that employs ZnS: Mn as the light-emitting layer has been well-developed and thus commercialized. Currently. TFELD research is focused on the improvement of Blu-ray brightness for achieving multi-color and even full-color TFELD.
In luminescent system materials, in-depth study on rare earth doped silicate based phosphor powder has been conducted, in which good red to blue light excitation has been achieved. However, rare earth elements are expensive, and that silicate as used in the preparation of thin film electroluminescent materials often results in low film quality, poor performance, which limits further applications thereof
The technical problem aimed to be solved by the present invention is to overcome the Shortcomings in the prior art by providing a titanium doped ternary system silicate film and preparation method and application thereof
Another object of the embodiment of the present invention is to provide a preparation method of the above-mentioned titanium doped ternary system silicate film.
Another object of the embodiment of the present invention is to provide a use of titanium doped ternary system silicate film in field emission devices, cathode-ray tubes and or electroluminescent devices.
The embodiment of the present invention is achieved in the following way: the first aspect provides a titanium doped ternary system silicate film, said titanium doped ternary system silicate film has the general formula of Ca2-xMgSi2O7:xTi4+, where x is from range of 0.00017˜0.0256.
The embodiment of the present invention is to provide a method for preparing the above-mentioned titanium doped ternary system silicate film, comprising the following steps:
mixing the CaO powder, MgO powder, SiO2 powder and TiO2. powder in a molar ratio of (2−x):1:2:x, sintering for forming the target, Where x is from range of 0.000170˜0.0256;
loading said target into a magnetron sputtering chamber; vacuum pumping; setting the operating pressure to 0.2 Pa˜4 Pa; pinging a mixed gas of inert gas and hydrogen, Where the flow rate of said mixed gas is 15 sccm˜35 sccm, the substrate temperature is 250° C.˜750° C., sputtering power is 30 W˜200 W; sputtering to afford a titanium doped ternary system silicate film.
The use of a Ti-doped ternary system silicate in the titanium doped ternary system. silicate film of the embodiment of the present invention results in a film that exhibits high luminescent intensity, high thermal stability and chemical stability. Said preparation method employs magnetron sputtering and has the advantages of high deposition rate, good film. adhesion, easy to control and the achievement of large area deposition. Further, said film exhibits high stability, long lifetime as used in optoelectronic semiconductors.
The above and other objects, features, and advantages of the present invention will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for illustrative purpose, rather than limiting the present invention.
The embodiment of the present invention is achieved in the following way: the first aspect provides a titanium doped ternary system silicate film, said titanium doped ternary system silicate film has the general formula of Ca2-xMgSi2O7: xTi4+, where x is from range of 0.00017˜0.0256. Preferably, x is from range of 0.001˜0.008.
Silicate host exhibits high chemical and thermal stability while high-purity raw material of silica is inexpensive and readily available, and thus are ideal host materials. As compared with rare earth elements, Ti is less expensive, even a small amount of it as doped in the host material Ca2MgSi2O7 achieves high luminescent intensity
Another object of the embodiment of the present invention is to provide a preparation method of the titanium doped ternary system silicate film of the embodiment according to the present invention as shown in
S01; mixing the CaO powder, MrO powder, SiO2 powder and TiO2 powder in a molar ratio of (2−x):1:2:x sintering for forming the target, where x is from range of 0.00017˜0.0256;
S02; loading said target into a magnetron sputtering chamber; vacuum pumping; setting the operating pressure to 0.2 Pa˜4 Pa; purging a mixed gas of inert gas and hydrogen, where the flow rate of said mixed gas is 15 sccm-35 sccm, the substrate temperature is 250° C.˜750° C., sputtering power is 30 W˜200 W; sputtering to afford a titanium doped ternary system silicate film.
In step S01, CaO powder, MgO powder, SiO2 powder and TiO2 powder are weighed and mixed homogenously, sintering for forming the target. For example, sintering is conducted at a temperature from 900° C.˜1300° C., and results in the formation of a ceramic target of about Φ50×2 mm. Preferably, the sintering temperature is 1250° C. The purity of the powder is preferably greater than 99.99%. The molar ratio of each component in the mixture CaO: MgO:TiO2 is (2−x):1:2:s, where x is from range of 0.00017˜0.0256. The content of the matrix composition and the doping element is the major factor that affects the properties and structure of the film. Doping of metal ions affects the material structure, from which entry of foreign metal ions into the lattice renders the lattice structure some distortions. Therefore, excessive doping causes excessive lattice distortion, which disturbs the ion ordering in the lattice or leads to the generation of impurity phase in the material, and thus seriously weakens the material properties, while deficient doping results in degradation of the luminescent performance. Preferably, x is from range of 0.001 to 0.008.
In step 502, the substrate is a hard substrate like sapphire, quartz glass, silicon. Said substrate is subjected to ultrasonic washing with acetone, ethanol and deionized water before use. Also, a substrate may be further selected according to application, such as ITO glass substrate. The distance between the target and the substrate is preferably 45 min˜95 mm. More preferably, the distance between the target and the substrate is 60 mm. The target is loaded into the sputtering chamber, which the chamber is evacuated by means of a mechanical pump or a molecular pump such that a vacuum level of 1.0×10−3 Pa˜1.0×10−5 Pa or more, preferably 6.0×10−4 Pa, is reached. For the sake of obtaining a titanium doped ternary system silicate film of high performance, setting of the process condition is very important. The operating gas in the sputtering chamber is a mixed gas of an inert gas and hydrogen, wherein the content in volume percentage of hydrogen is 1% to 15%, preferably 3% to 8%. Preferably, the flow rate of the mixed gas is 20 sccm˜30 sccm, the operating pressure is 1.5 Pa˜2.5 Pa, a substrate temperature is 400° C.˜600° C., a sputtering power is 100 W˜140 W Further, the thus-obtained titanium doped ternary system silicate film is then subjected to annealing, which results in the improvement of the film properties. The titanium doped ternary system silicate film obtained under the above-mentioned specific condition is subjected to annealing, which the annealing process comprises the process of heating the titanium doped ternary system silicate film to an annealing temperature, and the process of maintaining the temperature. Annealing temperature is 500° C.˜800° C. Preferably, the annealing temperature is 550° C.˜650° C. and the annealing environment may be an inert gas, such as nitrogen, argon, etc., or vacuum. In a preferred embodiment of the invention, the annealing process is conducted in a vacuum furnace at 0.01 Pa. The temperature for annealing cannot be elevated too rapidly or too slowly, the elevation rate is 1° C./min˜10° C./min, preferably, the elevation rate is 5° C./min˜8° C./min. The temperature is elevated to an annealing temperature, which the temperature is maintained for 1 h˜3 h, preferably 2 h. Annealing improves the crystallization quality of the film and also improves the luminescence efficiency of the film.
The embodiment of the present invention also provides the use of above-mentioned titanium doped ternary system silicate film in field emission devices, cathode-ray tubes and/or electroluminescent devices. As exemplified by an electroluminescent device as shown in
The embodiment of the present invention provides a titanium doped ternary system silicate film, which the titanium doped ternary system silicate film thus obtained achieves high crystallinity just by doping with a small amount of titanium. The preparation method of said titanium doped ternary system silicate film employs magnetron sputtering, and achieves a film having high luminescent intensity, stable performance, while a good lifetime is also obtained. Moreover, subjecting the titanium doped ternary system silicate film to an annealing process by means of a mixed gas of inert gas and hydrogen after sputtering can improve the luminescence efficiency of the film, where a smaller amount of doping is sufficient to achieve an excellent film, which the film has a strong emission in the blue region.
Detailed description to the present invention will now be given with reference to the exemplary embodiments:
CaO powder, MgO powder, SiO2 powder and TiO2. powder haying a purity of 99.99% are mixed the molar ratio of each component in the mixture CaO:MgO:SiO2:TiO2 is 1.994:1:2:0.006, where the mass of CaO powder is 111.6 g, the mass of MgO powder is 40 g, the mass of SiO2 powder is 120 g, the mass of TiO2 powder is 0.48 g. After homogenous mixing, a ceramic target of Φ50×2 mm is obtained by high-temperature sintering at 1250° C., the target is loaded into a vacuum chamber. An ITO coated glass substrate is then subjected to ultrasonic washing with a sequential use of acetone, anhydrous ethanol and deionized water which is then subjected to oxygen plasma treatment, followed by placing it into the vacuum chamber. The distance between the target and the substrate is set to be 60 mm. The chamber is evacuated by means of a mechanical pump and molecular pump such that a vacuum level 5.0×10−5 Pa is reached, to which the vacuum chamber is purged with a mixed gas of argon gas and hydrogen, where the hydrogen content is 5% (in volume percentage), the gas flow rate is 25 sccm, the pressure is adjusted to 2.0 Pa, the substrate temperature is set to 500° C., the sputtering power is adjusted to 120 W, a titanium doped ternary system silicate film is obtained after sputtering. The thus-obtained titanium doped ternary system silicate film is subjected to annealing in a vacuum furnace at 0.01 Pa, where the annealing temperature is 600° C., the elevation rate is 6° C./ruin, the maintaining time is 2 h. The resulting film sample has a formula of Ca1.994MgSi2O7: 0.006Ti4+.
CaO powder, MgO powder, SiO2 powder and TiO2 powder having a purity of 99.99% are mixed, the molar ratio of each component in the mixture CaO:MgO:SiO2:TiO2 is 1.9997:1:2:0.0003, where the mass of CaO powder is 111.98 g, the mass of MgO powder is 40 g, the mass of SiO2 powder is 120 g, the mass of TiO2 powder is 0.024 g. After homogenous mixing, a ceramic target of Φ50×2 mm is obtained by high-temperature sintering at 900° C., the target is loaded into a vacuum chamber. A sapphire substrate is then subjected to ultrasonic washing with a sequential use of acetone, anhydrous ethanol and deionized water, and rinsed again with deionized water, and dried by high-temperature nitrogen blowing, and placed into the vacuum chamber. The distance between the target and the substrate is set to be 45 mm. The chamber is evacuated by means of a mechanical pump and molecular pump such that the vacuum level readies 1.0×10−3 Pa, to which the vacuum chamber is purged with a mixed gas of argon and hydrogen, where the hydrogen content is 1% (in volume percentage), the gas flow rate is 10 sccm, the pressure is adjusted to 0.2 Pa, the substrate temperature is set to 250° C., the sputtering power is adjusted to 30 W, a titanium doped ternary system silicate film is obtained after sputtering. The thus-obtained titanium doped ternary system silicate film is subjected to annealing in a vacuum furnace at 0.01 Pa, where the annealing temperature is 500° C. the elevation rate is 10° C/min, the maintaining time is 1 h. The resulting film sample has a formula of Ca1.9997MgSi2O7: 0.0003Ti4+.
CaO powder, MgO powder, SiO2 powder and TiO2 powder having a purity of 99.99% are mixed, the molar ratio of each component in the mixture CaO:MgO:SiO2:TiO2 is 1.995:1:2:0.005, where the mass of CaO powder is 111.72 g, the mass of MgO powder is 40 g, the mass of SiO2 powder is 120 g, the mass of TiO2, powder is 0.4 g. After homogenous mixing, a ceramic target of Φ50×2 mm is obtained by high-temperature sintering at 1300° C., the target is loaded into a vacuum chamber. A sapphire substrate is then subjected to ultrasonic washing with a sequential use of acetone, anhydrous ethanol and deionized water, and rinsed again with deionized water, and dried by high-temperature nitrogen blowing, and placed into the vacuum chamber. The distance between the target and the substrate is set to be 95 mm. The chamber is evacuated by means of a mechanical pump and molecular pump such that a vacuum level 1.0×10−5 Pa is reached, to which the vacuum chamber is purged with a mixed gas of argon and hydrogen, where the hydrogen content is 1% (in volume percentage), the gas flow rate is 35 sccm, the pressure is adjusted to 4.0 Pa, the substrate temperature is set to 750° C. the sputtering power is adjusted to 200 W, a titanium doped ternary system silicate film is obtained after sputtering. The thus-obtained titanium doped ternary system silicate film is subjected to annealing in a vacuum furnace at 0.01 Pa, where the annealing temperature is 800° C. the elevation rate is 1° C./min, the maintaining time is 3 h. The resulting film sample has a formula of Ca1.95MgSiO7: 0.05Ti4+.
CaO powder, MgO powder, SiO2 powder and TiO2, powder having a purity of 99.99% are mixed, the molar ratio of each component in the mixture CaO:MgO:SiO2:TiO2 is 1.99983:1:2:0.00017, where the mass of CaO powder is 111.99 g, the mass of MgO powder is 40 g, the mass of SiO2 powder is 120 g, the mass of TiO2powder is 0.0136 g. After homogenous mixing, a ceramic target of Φ50×2 mm is obtained by high-temperature sintering at 1200° C., the target is loaded into a vacuum chamber. A sapphire substrate is then subjected to ultrasonic washing with a sequential use of acetone, anhydrous ethanol and deionized water, and rinsed again with deionized water, and dried by high-temperature nitrogen blowing, and placed into the vacuum chamber The distance between the target and the substrate is set to be 50 mm. The chamber is evacuated by means of a mechanical pump and molecular pump such that a vacuum level 8.0×10−4 Pa is reached, to which the vacuum chamber is purged with a mixed gas of argon and hydrogen, where the hydrogen content is 3% (in volume percentage), the gas flow rate is 15 sccm, the pressure is adjusted to 2.5 Pa, the substrate temperature is set to 400° C., the sputtering power is adjusted to 100 W, a titanium doped ternary system silicate film is obtained after sputtering. The thus-obtained titanium doped ternary system silicate film is subjected to annealing under argon, where the annealing temperature is 650° C., the elevation rate is 4° C. /min, the maintaining time is 2.5 h. The resulting film sample has a formula of Ca1.99983MgSi2O7: 0.00017Ti4+.
CaO powder, MgO powder, SiO, powder and TiO2 powder having a purity of 99.99% are mixed, the molar ratio of each component in the mixture CaO:MgO:SiO2:TiO2 is 1.9744:1:2:0.0256, where the mass of CaO powder is 110.57 g, the mass of MgO powder is 40 g, the mass of SiO2 powder is 120 g, the mass of TiO2 powder is 2.048 g. After homogenous mixing, a ceramic target of Φ50×2 mm is obtained by high-temperature sintering at 1200° C., the target is loaded into a vacuum chamber. A sapphire substrate is then subjected to ultrasonic washing with a sequential use of acetone, anhydrous ethanol and deionized water, and rinsed again with deionized water, and dried by high-temperature nitrogen blowing, and placed into the vacuum chamber. The distance between the target and the substrate is set to be 70 mm. The chamber is evacuated by means of a. mechanical pump and molecular pump such that a vacuum level 7.0×10−4 Pa is reached, to which the vacuum chamber is purged with a mixed gas of argon and hydrogen, where the hydrogen content is 8% (in volume percentage), the gas flow rate is 30 sccm, the pressure is adjusted to 1.5 Pa, the substrate temperature is set to 600° C., the sputtering power is adjusted to 140 W, a titanium doped ternary system silicate film is obtained after sputtering. The thus-obtained titanium doped ternary system silicate film is subjected to annealing under argon, where the annealing temperature is 550° C., the elevation rate is 8° C./min, the maintaining time is 1.5 h. The resulting film sample has a formula of Ca1.9744MgSi2O7: 0.0256Ti4+.
Although the present invention has been described and illustrated in detail, it is clearly understood that the same is by way of illustrating the preferred embodiment of the present invention and is not to be taken by way of limitation, it should be understood that various changes, substitutions, and alterations could be made hereto without departing from the spirit and scope of the invention.
| Filing Document | Filing Date | Country | Kind | 371c Date |
|---|---|---|---|---|
| PCT/CN2011/076446 | 6/27/2011 | WO | 00 | 1/30/2014 |
