Claims
- 1. A trap apparatus comprising:
an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump; a hermetically sealed trapping and regenerating casing extending across said exhaust passage and a regenerating passage adjacent to said exhaust passage; a trap unit movably housed in said trapping and regenerating casing for selective movement between a trapping position connected to said exhaust passage and a regenerating position connected to said regenerating passage; wherein said trap unit has disk-shaped cooling bodies in said casing and cooling fins disposed between the disk-shaped cooling bodies, and said fins comprises fins of arcuate shape and fins of flat shape.
- 2. A trap apparatus comprising:
an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump; a hermetically seated trapping and regenerating casing extending across said exhaust passage and a regenerating passage adjacent to said exhaust passage; a trap unit movably housed in said trapping and regenerating casing for selective movement between a trapping position connected to said exhaust passage and a regenerating position connected to said regenerating passage; an upstream passage portion spreading inwardly toward a shaft of the trap unit and a downstream passage portion directed outwardly from the shaft of the trap unit, wherein said trap passages are provided on opposite sides with respect to said shaft.
- 3. A trap apparatus comprising:
an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump; a hermetically sealed trapping and regenerating casing extending across said exhaust passage and a regenerating passage adjacent to said exhaust passage; a trap unit movably housed in said trapping and regenerating casing for selective movement between a trapping position connected to said exhaust passage and a regenerating position connected to said regenerating passage; wherein said trap unit contains trap passages comprising an upstream passage portion spreading inwardly toward a shaft of the trap unit and a downstream passage portion directed outwardly from the shaft of the trap unit, wherein said trap passages are provided on opposite sides with respect to said shaft, and wherein said trap unit has disk-shaped cooling bodies in said casing and cooling fins disposed between the disk-shaped cooling bodies, and said fins comprises fins of arcuate shape and fins of flat shape.
- 4. A trap apparatus according to claim 1, wherein said fins are given a temperature gradient by mounting a cooling jacket in said disk-shaped cooling body, which supports said fins, and restricting flow of a coolant into inlet and outlet ports of the cooling jacket within inner coolant passage.
- 5. A trap apparatus according to claim 1, wherein said fins are progressively thinner toward inlet and outlet ports.
- 6. A trap apparatus according to claim 1, wherein said fins are progressively thicker toward center of the trap unit.
- 7. A trap apparatus according to claim 1, wherein said fins disposed near inlet and outlet ports are made of ceramics of low thermal conductivity.
Priority Claims (2)
Number |
Date |
Country |
Kind |
2000-345139 |
Nov 2000 |
JP |
|
2001-8325 |
Jan 2001 |
JP |
|
Parent Case Info
[0001] This is a divisional application of Ser. No. 10/387,567, fled Mar. 14, 2003, which is a divisional application of Ser. No. 09/986,672, filed Nov. 9, 2001, now U.S. Pat. No. 6,553,811.
Divisions (2)
|
Number |
Date |
Country |
Parent |
10387567 |
Mar 2003 |
US |
Child |
10839288 |
May 2004 |
US |
Parent |
09986672 |
Nov 2001 |
US |
Child |
10387567 |
Mar 2003 |
US |