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CPC
C23C16/4412

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/4412Details relating to the exhausts

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, processing method, and non-transito...
- Patent number 12,368,043
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Akinori Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and exhaust system
- Patent number 12,365,982
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Masanori Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanisms for supplying process gas into wafer process apparatus
- Patent number 12,359,318
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Su-Horng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and method of forming metal oxide layer using...
- Patent number 12,359,313
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam etching chamber with etching by-product redistributor
- Patent number 12,362,154
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,351,913
- Issue date Jul 8, 2025
- Kioxia Corporation
- Tomoki Ishimaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Targeted temporal ALD
- Patent number 12,351,912
- Issue date Jul 8, 2025
- Microsoft Technology Licensing, LLC
- Ville Kalevi Saunajoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for backside deposition of a substrate
- Patent number 12,341,053
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Ronald Nasman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for smoothly exhausting the atmosphere in a processing sp...
- Patent number 12,331,399
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Ju Won Kim
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Method of forming metal oxide layer using deposition apparatus
- Patent number 12,331,398
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,325,915
- Issue date Jun 10, 2025
- Picosun Oy
- Timo Vähä-Ojala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust device, processing apparatus, and exhausting method
- Patent number 12,322,578
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Kazuya Nagaseki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive by-products collection system
- Patent number 12,305,626
- Issue date May 20, 2025
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detoxification device and inlet nozzle
- Patent number 12,303,829
- Issue date May 20, 2025
- Edwards Japan Limited
- Nobuo Mori
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,305,280
- Issue date May 20, 2025
- Kioxia Corporation
- Tomoki Ishimaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Subfab area installation apparatus
- Patent number 12,300,520
- Issue date May 13, 2025
- Ebara Corporation
- Motoshi Kohaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scrubber, ALD process system including the scrubber and method for...
- Patent number 12,290,778
- Issue date May 6, 2025
- Samsung Electronics Co., Ltd.
- Seo Young Maeng
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus, elevator and method of manufacturin...
- Patent number 12,293,932
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust system with U-shaped pipes
- Patent number 12,276,923
- Issue date Apr 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,278,119
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Myung Seok Cha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming phosphosilicate glass layers, structures formed...
- Patent number 12,276,021
- Issue date Apr 15, 2025
- ASM IP Holding B.V.
- Seunghyun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,266,522
- Issue date Apr 1, 2025
- Kokusai Electric Corporation
- Kazuyuki Okuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of manufacturing oxide film and display appara...
- Patent number 12,258,663
- Issue date Mar 25, 2025
- LG Display Co., Ltd.
- Jaeyoon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen recycle system and hydrogen recycle method
- Patent number 12,246,963
- Issue date Mar 11, 2025
- National University Corporation Tokai National Higher Education and Research...
- Shinji Kambara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Apparatus for performing film forming process on substrate and meth...
- Patent number 12,247,287
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead device for semiconductor processing system
- Patent number 12,237,182
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,224,185
- Issue date Feb 11, 2025
- Kokusai Electric Corporation
- Hideharu Itatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and method for oriented deposition
- Patent number 12,215,418
- Issue date Feb 4, 2025
- Canatu Finland Oy
- Ilkka Varjos
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Gas manifold for simultaneous gas property control in deposition sy...
- Patent number 12,215,423
- Issue date Feb 4, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250236950
- Publication date Jul 24, 2025
- Samsung Electronics Co., Ltd.
- Sangyub IE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE SUBSTRATE PROCESSING APPARATUS AND COLD TRAP USED THE...
- Publication number 20250236949
- Publication date Jul 24, 2025
- HPSP Co., Ltd.
- Hye Seong YOON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS WITH DETECTION SYSTEM AND METHODS
- Publication number 20250232992
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Ming-Yao HSIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250223692
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND FI...
- Publication number 20250223694
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Tomoya ONITSUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND METHOD FOR...
- Publication number 20250223693
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- YU-SEN CHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Heat Insulating Structure, Method o...
- Publication number 20250215561
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Gas Supply Assembly, Substrate Proc...
- Publication number 20250215568
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST STRUCTURE, EXHAUST SYSTEM, PROCESSING APPARATUS, AND METHOD...
- Publication number 20250215562
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Masakazu SAKATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20250207287
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250210346
- Publication date Jun 26, 2025
- Kokusai Electric Corporation
- Shingo NOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATU...
- Publication number 20250207249
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Toshiharu Watarai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250207250
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION CHAMBER, ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
- Publication number 20250207252
- Publication date Jun 26, 2025
- BENEQ OY
- Pekka SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Substrate Support, Substrate Proces...
- Publication number 20250207258
- Publication date Jun 26, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20250201585
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...
- Publication number 20250197993
- Publication date Jun 19, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xiaobin SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250198003
- Publication date Jun 19, 2025
- TES CO., LTD.
- Kyung-Ho JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250201551
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250188606
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION DEVICE
- Publication number 20250188612
- Publication date Jun 12, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250188617
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Yuki TAIRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method for Plasma Enhanced Chemical Vapour Deposition
- Publication number 20250179643
- Publication date Jun 5, 2025
- LEYDENJAR TECHNOLOGIES B.V.
- Pavel Kudlacek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS RECYCLING
- Publication number 20250171900
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20250167013
- Publication date May 22, 2025
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250154650
- Publication date May 15, 2025
- EUGENE TECHNOLOGY CO., LTD.
- In Soo SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...
- Publication number 20250137134
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Felix Rabinovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR DEPOSITING THIN FILM, AND THIN FILM
- Publication number 20250137124
- Publication date May 1, 2025
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Xiang LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Manifold for Simultaneous Gas Property Control in Deposition Sy...
- Publication number 20250137130
- Publication date May 1, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...
- Publication number 20250129485
- Publication date Apr 24, 2025
- Bryan C. Hendrix
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Details relating to the exhausts

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus, processing method, and non-transito...

Processing apparatus and exhaust system

Mechanisms for supplying process gas into wafer process apparatus

Deposition apparatus and method of forming metal oxide layer using...

Ion beam etching chamber with etching by-product redistributor

Film forming apparatus and film forming method

Targeted temporal ALD

System for backside deposition of a substrate

Apparatus for smoothly exhausting the atmosphere in a processing sp...

Method of forming metal oxide layer using deposition apparatus

Substrate processing apparatus and method

Exhaust device, processing apparatus, and exhausting method

Reactive by-products collection system

Detoxification device and inlet nozzle

Film forming apparatus and film forming method

Subfab area installation apparatus

Scrubber, ALD process system including the scrubber and method for...

Substrate processing apparatus, elevator and method of manufacturin...

Exhaust system with U-shaped pipes

Apparatus for treating substrate

Methods of forming phosphosilicate glass layers, structures formed...

Substrate supporting plate, thin film deposition apparatus includin...

Substrate processing apparatus, method of manufacturing semiconduct...

Apparatus and method of manufacturing oxide film and display appara...

Hydrogen recycle system and hydrogen recycle method

Apparatus for performing film forming process on substrate and meth...

Showerhead device for semiconductor processing system

Method of manufacturing semiconductor device

Apparatuses and method for oriented deposition

Gas manifold for simultaneous gas property control in deposition sy...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM

HIGH PRESSURE SUBSTRATE PROCESSING APPARATUS AND COLD TRAP USED THE...

DEPOSITION APPARATUS WITH DETECTION SYSTEM AND METHODS

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND FI...

APPARATUS FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND METHOD FOR...

Substrate Processing Apparatus, Heat Insulating Structure, Method o...

Substrate Processing Apparatus, Gas Supply Assembly, Substrate Proc...

EXHAUST STRUCTURE, EXHAUST SYSTEM, PROCESSING APPARATUS, AND METHOD...

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATU...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

REACTION CHAMBER, ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD

Substrate Processing Apparatus, Substrate Support, Substrate Proces...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

FILM DEPOSITION DEVICE

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

Apparatus and Method for Plasma Enhanced Chemical Vapour Deposition

PROCESS GAS RECYCLING

SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS

CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...

METHOD AND DEVICE FOR DEPOSITING THIN FILM, AND THIN FILM

Gas Manifold for Simultaneous Gas Property Control in Deposition Sy...

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...