| Number | Name | Date | Kind |
|---|---|---|---|
| 3002927 | Awe et al. | Oct 1961 | A |
| 4000957 | Ruhland | Jan 1977 | A |
| 4029827 | Imperial et al. | Jun 1977 | A |
| 4101686 | Strella et al. | Jul 1978 | A |
| 4165308 | Serlin | Aug 1979 | A |
| 4167602 | Serlin | Sep 1979 | A |
| 4185140 | Strella et al. | Jan 1980 | A |
| 4257699 | Lentz | Mar 1981 | A |
| 4264181 | Lentz et al. | Apr 1981 | A |
| 4272179 | Seanor | Jun 1981 | A |
| 4859550 | Gruber et al. | Aug 1989 | A |
| 5209464 | Bermel et al. | May 1993 | A |
| 5392105 | Moser | Feb 1995 | A |
| 5516361 | Chow et al. | May 1996 | A |
| 5531813 | Henry et al. | Jul 1996 | A |
| 5568239 | Furukawa et al. | Oct 1996 | A |
| 5627000 | Yamazaki et al. | May 1997 | A |
| 5639549 | Fukunaga et al. | Jun 1997 | A |
| 5641603 | Yamazaki et al. | Jun 1997 | A |
| 5781840 | Chen et al. | Jul 1998 | A |
| 5783719 | Sun et al. | Jul 1998 | A |
| 6045961 | Heeks et al. | Apr 2000 | A |
| 6114041 | Tan et al. | Sep 2000 | A |
| 6261688 | Kaplan et al. | Jul 2001 | B1 |
| 6582871 | Pickering | Jun 2003 | B2 |
| 6617090 | Pickering et al. | Sep 2003 | B2 |
| Entry |
|---|
| Silicon Compounds: Register and Review, 5th Ed., R. Anderson et al. (Eds.), United Chemical Technologies, Inc., Bristol, PA, p. 280 (1991). |
| Silicon, Germanium, & Tin Compounds, Metal Oxides, Metal Diketonates, Silicones, Gelest, Inc., Tullytown, PA, p. 515 (1998). |
| Pickering et al., U.S. application No. 09/387,586, filed Aug. 31, 1999, abandoned. |