This is a continuation of copending application Ser. No. 07/677,018 filed on Mar. 28, 1991; abandoned.
Number | Name | Date | Kind |
---|---|---|---|
4465532 | Fukano | Aug 1984 | |
4668338 | Maydan et al. | May 1987 | |
4778563 | Stone | Oct 1988 | |
4785962 | Toshima | Nov 1988 | |
4786360 | Cote et al. | Nov 1988 | |
4789426 | Pipkin | Dec 1988 | |
4799991 | Dockrey | Jan 1989 | |
4818334 | Shwartzman et al. | Apr 1989 | |
4833096 | Huang et al. | May 1989 | |
4836886 | Daubenspeck | Jun 1989 | |
4842683 | Cheng et al. | Jun 1989 | |
4951601 | Maydan et al. | Aug 1990 | |
5024722 | Cathey | Jun 1991 | |
5110411 | Long | May 1992 |
Number | Date | Country |
---|---|---|
02094520 | Apr 1990 | JPX |
Entry |
---|
Lum, Robert T., et al., "Precision 5000 Etch: Tungsten Silicide Process Capability", Etch News, vol. VII, No. 1, Spring 1990, p. 1-18. |
Number | Date | Country | |
---|---|---|---|
Parent | 677018 | Mar 1991 |