Number | Date | Country | Kind |
---|---|---|---|
44 01 303 | Jan 1994 | DEX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/DE95/00020 | 1/10/1995 | 7/17/1996 | 7/17/1996 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO95/19571 | 7/20/1995 |
Number | Name | Date | Kind |
---|---|---|---|
5211051 | Kaiser et al. | May 1993 | |
5265470 | Kaiser et al. | Nov 1993 | |
5285686 | Peters | Feb 1994 | |
5315247 | Kaiser et al. | May 1994 | |
5431051 | Biebl et al. | Jul 1995 | |
5447067 | Biebl et al. | Sep 1995 | |
5472916 | Bertagnolli et al. | Dec 1995 | |
5596194 | Kubena | Jan 1997 |
Number | Date | Country |
---|---|---|
40 22 464 | Jan 1992 | DEX |
42 14 400 | Dec 1992 | DEX |
WO 9203740 | May 1992 | WOX |
Entry |
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Applied Physics Letters 58, Micromachined Silicon Tunnel Sensor for Motion Detection, T.W. Kenny et al, Jan. 7, 1991, pp. 100-102. |
J. Vac Sci Technol. A10, (4), Electron Tunnel Sensors, T.W. Kenny et al, Jul./Aug. 1992, pp. 2114-2118. |