Upper electrode for manufacturing semiconductors

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Information

Patent Grant
D412513

References
Source

Patent Number
D412,513
Date Filed
Monday, July 28, 1997
29 years ago
Date Issued
Tuesday, August 3, 1999
27 years ago

Inventors
- Jun Ooyabu
Original Assignees
- TOKYO ELECTRON LIMITED
Examiners
- Vinson; Brian N.
Agents
- Ladas & Parry

US Classifications
- D15 - Machines not elsewhere specified
Field of Search
- US
- D13 152
- D15 122
- D15 144
- D15 1441
- 414 935-941
International Classifications
- 1501
- Term of Grant
  14Years

Information

Abstract

Description

Claims

I claim the ornamental design for an upper electrode for manufacturing semiconductors, as shown and described.

Priority Claims (1)

Number	Date	Country	Kind
9-2208	Jan 1997	JPX

US Referenced Citations (3)

Number	Name	Date	Kind
4857689	Lee	Aug 1989
5314574	Takahashi	May 1994
5320218	Yamashita et al.	Jun 1994