Number | Date | Country | Kind |
---|---|---|---|
55-129737 | Sep 1980 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
2332309 | Drummond | Oct 1943 | |
3368523 | Becker | Feb 1968 | |
4205623 | Mahl | Jun 1980 | |
4223048 | Engle, Jr. | Sep 1980 | |
4228004 | Foster | Oct 1980 |
Entry |
---|
Chern, "Improved Design for CVD Reactor", Insulation/Circuits, vol. 26, No. 12, Nov. 1980, pp. 62-63. |