Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Industry

CPC
C23C14/564

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Structures and methods for processing a semiconductor substrate
- Patent number 12,286,706
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ming-Yi Shen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor cleaning step
- Patent number 12,276,020
- Issue date Apr 15, 2025
- United Semiconductor (Xiamen) Co., Ltd.
- William Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber component and method of forming a surface texture
- Patent number 12,269,095
- Issue date Apr 8, 2025
- Cleanpart Group GmbH
- Olivier Marchand
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Physical vapor deposition (PVD) system and method of processing target
- Patent number 12,252,777
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injection process kit to eliminate arcing and improve uniform g...
- Patent number 12,183,560
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition facility and method for coating a substrate
- Patent number 12,139,784
- Issue date Nov 12, 2024
- Arcelormittal
- Eric Silberberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum deposition facility and method for coating a substrate
- Patent number 12,054,821
- Issue date Aug 6, 2024
- Arcelormittal
- Eric Silberberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-patterned sputter traps and methods of making
- Patent number 12,051,573
- Issue date Jul 30, 2024
- Honeywell International Inc.
- James L. Koch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation apparatus and moisture removal method thereof
- Patent number 12,043,898
- Issue date Jul 23, 2024
- Shibaura Mechatronics Corporation
- Shohei Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of SIN with CCP plasma or RPS clean
- Patent number 12,027,354
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor deposition device
- Patent number 12,006,568
- Issue date Jun 11, 2024
- THERMALYTICA, INC.
- Kazuhide Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter trap having a thin high purity coating layer and method of...
- Patent number 11,981,991
- Issue date May 14, 2024
- Honeywell International Inc.
- Jaeyeon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition equipment with shielding mechanism
- Patent number 11,981,990
- Issue date May 14, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit having tall deposition ring for PVD chamber
- Patent number 11,961,723
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hot showerhead
- Patent number 11,946,140
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for precleaning and treating wafer surfaces
- Patent number 11,939,666
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Xiangjin Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit geometry for particle reduction in PVD processes
- Patent number 11,935,732
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Adolph M. Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of sin with CCP plasma or RPS clean
- Patent number 11,915,918
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shielding device and thin-film-deposition equipment with the same
- Patent number 11,898,238
- Issue date Feb 13, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply member with baffle
- Patent number 11,885,021
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 11,851,751
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Germanium tetraflouride and hydrogen mixtures for an ion implantati...
- Patent number 11,827,973
- Issue date Nov 28, 2023
- Entegris, Inc.
- Oleg Byl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum pumping system having multiple pumps
- Patent number 11,815,079
- Issue date Nov 14, 2023
- Edwards Limited
- Andrew David Chew
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate cleaning apparatus
- Patent number 11,761,075
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Yukimasa Saito
- B08 - CLEANING
Information Patent Grant
Method and apparatus for deposition of metal nitrides
- Patent number 11,739,418
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment for high-temperature cleans
- Patent number 11,699,577
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filter for a plasma plume
- Patent number 11,628,389
- Issue date Apr 18, 2023
- Lam Research Corporation
- Jan Matthijn Dekkers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 11,608,555
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection process kit to eliminate arcing and improve uniform g...
- Patent number 11,600,477
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter trap having a thin high purity coating layer and method of...
- Patent number 11,584,985
- Issue date Feb 21, 2023
- Honeywell International Inc.
- Jaeyeon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DYNAMIC VACUUM SEAL SYSTEM FOR PHYSICAL VAPOR DEPOSITION SPUTTER AP...
- Publication number 20250149303
- Publication date May 8, 2025
- Tosoh SMD, Inc.
- Joseph BUCKFELLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE PREVENTION METHOD IN CHAMBER
- Publication number 20250051907
- Publication date Feb 13, 2025
- SKY TECH INC.
- YAO-SYUAN CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor cleaning step
- Publication number 20240401191
- Publication date Dec 5, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- William Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20240392430
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- B08 - CLEANING
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET
- Publication number 20240376592
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC SEAL SYSTEM FOR A VACUUM PROCESSING SYSTEM
- Publication number 20240368752
- Publication date Nov 7, 2024
- Plasma-Therm NES LLC
- Sarpangala Hariharakeshava Hegde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS
- Publication number 20240360543
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER
- Publication number 20240242947
- Publication date Jul 18, 2024
- Applied Materials, Inc.
- David GUNTHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
- Publication number 20240183028
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Xiangjin XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATER CONDITIONING MODE
- Publication number 20240124970
- Publication date Apr 18, 2024
- BÜHLER ALZENAU GMBH
- Simon LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL LASER EVAPORATION SYSTEM
- Publication number 20240102151
- Publication date Mar 28, 2024
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Wolfgang BRAUN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER
- Publication number 20240102153
- Publication date Mar 28, 2024
- Fuhong ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GATE VALVE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSIN...
- Publication number 20240068090
- Publication date Feb 29, 2024
- KITZ SCT CORPORATION
- Yoshifumi HOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION EQUIPMENT WITH SHIELDING MECHANISM
- Publication number 20240068089
- Publication date Feb 29, 2024
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Deposition of Mental Nitrides
- Publication number 20240003000
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL BARRIER COATING WITH REDUCED STABILIZER CONTENT
- Publication number 20230392251
- Publication date Dec 7, 2023
- Raytheon Technologies Corporation
- Kaylan M. Wessels
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...
- Publication number 20230386802
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20230383400
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- B08 - CLEANING
Information Patent Application
STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
- Publication number 20230383399
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Yi SHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...
- Publication number 20230386803
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR
- Publication number 20230369024
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...
- Publication number 20230187191
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTER TRAP HAVING A THIN HIGH PURITY COATING LAYER AND METHOD OF...
- Publication number 20230143320
- Publication date May 11, 2023
- Honeywell International Inc.
- Jaeyeon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION
- Publication number 20230110960
- Publication date Apr 13, 2023
- K&N Engineering, Inc.
- Kevin McClelland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED PRECLEAN-DEPOSITION SYSTEM FOR OPTICAL FILMS
- Publication number 20230112873
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Kenichi OHNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER
- Publication number 20230073011
- Publication date Mar 9, 2023
- Zhiyong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20230022509
- Publication date Jan 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- B08 - CLEANING
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415636
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415637
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELDING DEVICE AND THIN-FILM-DEPOSITION EQUIPMENT WITH THE SAME
- Publication number 20220411917
- Publication date Dec 29, 2022
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Structures and methods for processing a semiconductor substrate

Semiconductor cleaning step

Process chamber component and method of forming a surface texture

Physical vapor deposition (PVD) system and method of processing target

Gas injection process kit to eliminate arcing and improve uniform g...

Vacuum deposition facility and method for coating a substrate

Vacuum deposition facility and method for coating a substrate

Multi-patterned sputter traps and methods of making

Film formation apparatus and moisture removal method thereof

Cleaning of SIN with CCP plasma or RPS clean

Vapor deposition device

Sputter trap having a thin high purity coating layer and method of...

Deposition equipment with shielding mechanism

Process kit having tall deposition ring for PVD chamber

Hot showerhead

Methods and apparatus for precleaning and treating wafer surfaces

Process kit geometry for particle reduction in PVD processes

Cleaning of sin with CCP plasma or RPS clean

Shielding device and thin-film-deposition equipment with the same

Gas supply member with baffle

Deposition system and method

Germanium tetraflouride and hydrogen mixtures for an ion implantati...

Vacuum pumping system having multiple pumps

Substrate cleaning apparatus

Method and apparatus for deposition of metal nitrides

Treatment for high-temperature cleans

Filter for a plasma plume

Sputtering apparatus

Gas injection process kit to eliminate arcing and improve uniform g...

Sputter trap having a thin high purity coating layer and method of...

Patents Applicationslast 30 patents

DYNAMIC VACUUM SEAL SYSTEM FOR PHYSICAL VAPOR DEPOSITION SPUTTER AP...

PARTICLE PREVENTION METHOD IN CHAMBER

Semiconductor cleaning step

DEPOSITION SYSTEM AND METHOD

PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET

DYNAMIC SEAL SYSTEM FOR A VACUUM PROCESSING SYSTEM

FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS

PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER

METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES

COATER CONDITIONING MODE

THERMAL LASER EVAPORATION SYSTEM

PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER

GATE VALVE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSIN...

DEPOSITION EQUIPMENT WITH SHIELDING MECHANISM

Method and Apparatus for Deposition of Mental Nitrides

THERMAL BARRIER COATING WITH REDUCED STABILIZER CONTENT

PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...

DEPOSITION SYSTEM AND METHOD

STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...

SPUTTER TRAP HAVING A THIN HIGH PURITY COATING LAYER AND METHOD OF...

MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION

INTEGRATED PRECLEAN-DEPOSITION SYSTEM FOR OPTICAL FILMS

SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER

DEPOSITION SYSTEM AND METHOD

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

SHIELDING DEVICE AND THIN-FILM-DEPOSITION EQUIPMENT WITH THE SAME