VAD detection microphone and method of operating the same

Information

  • Patent Grant
  • 10313796
  • Patent Number
    10,313,796
  • Date Filed
    Wednesday, August 12, 2015
    9 years ago
  • Date Issued
    Tuesday, June 4, 2019
    5 years ago
Abstract
A microphone assembly includes an acoustic sensor configured to produce an electrical signal and an electrical circuit including a voice activity detector coupled to an output of the acoustic sensor. The microphone assembly further includes an internal clock signal generator and a host interface coupled to the electrical circuit. The host interface has external connections including an external clock signal and a data connection. The microphone assembly includes an acoustic activity detection mode of operation when the electrical circuit is clocked by the internal clock signal generator in the absence of an external clock signal at the host interface. The microphone assembly has a plurality of operating modes controlled by an external clock signal received in response to an interrupt signal provided by the electrical circuit. The electrical circuit is configured to provide data representing the electrical signal at the host interface when the external clock signal is received.
Description
TECHNICAL FIELD

This application relates to microphones and, more specifically, to voice activity detection (VAD) approaches used with these microphones.


BACKGROUND

Microphones are used to obtain a voice signal from a speaker. Once obtained, the signal can be processed in a number of different ways. A wide variety of functions can be provided by today's microphones and they can interface with and utilize a variety of different algorithms.


Voice triggering, for example, as used in mobile systems is an increasingly popular feature that customers wish to use. For example, a user may wish to speak commands into a mobile device and have the device react in response to the commands. In these cases, a programmable digital signal processor (DSP) will first use a voice activity detection algorithm to detect if there is voice in an audio signal captured by a microphone, and then, subsequently, analysis is performed on the signal to predict what the spoken word was in the received audio signal. Various voice activity detection (VAD) approaches have been developed and deployed in various types of devices such as cellular phone and personal computers.


In the use of these approaches, power consumption becomes a concern. Lower power consumption gives longer standby time. For today's smart-phones (in particular), the use of power is a key parameter. Unfortunately, present approaches of operating microphones use and waste much power. This has resulted in user dissatisfaction with these previous approaches and systems.





BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the disclosure, reference should be made to the following detailed description and accompanying drawings wherein:



FIG. 1 comprises a block diagram of a system with a microphone that uses a VAD algorithm and includes power savings features according to various embodiments of the present invention;



FIG. 2 comprises a diagram of the various states of a system that uses a microphone that uses a VAD algorithm and includes power savings features according to various embodiments of the present invention;



FIG. 3 comprises a block diagram of a microphone that uses a VAD algorithm and includes power savings features according to various embodiments of the present invention;



FIG. 4 comprises a block diagram of an application specific integrated circuit (ASIC) according to various embodiments of the present invention;



FIG. 5 comprises a block diagram of a host device according to various embodiments of the present invention; and



FIG. 6 comprises a timing diagram showing the operation of a microphone that uses a VAD algorithm and includes power savings features according to various embodiments of the present invention.





Skilled artisans will appreciate that elements in the figures are illustrated for simplicity and clarity. It will be further appreciated that certain actions and/or steps may be described or depicted in a particular order of occurrence while those skilled in the art will understand that such specificity with respect to sequence is not actually required. It will also be understood that the terms and expressions used herein have the ordinary meaning as is accorded to such terms and expressions with respect to their corresponding respective areas of inquiry and study except where specific meanings have otherwise been set forth herein.


DETAILED DESCRIPTION

The present approaches change the way that present mobile systems are partitioned, the functionality of the microphone, and the modes in which it can operate. In these regards, a microphone with a voice or event detection block is presented and this enables the microphone to generate an interrupt signal which can wake the system up.


In some aspects, the microphones described herein include five external connections. The first connection may be a power connection and the second connection may be a ground connection. The third, fourth, and fifth connections are connections from the microphone to a host device (e.g., host circuitry in the device in which the microphone resides). More specifically, the third connection may be a data connection, the fourth connection may be an interrupt (sent from the microphone to the host), and the fifth connection may be a clock signal (sent from the host to the microphone).


The microphone may have several modes of operation and these are controlled by a clock signal. The host receives a data signal from the microphone as well as an interrupt signal. The host has multiple power modes controlled by the interrupt signal generated by the microphone. The host generates the clock signal for the microphone and thereby controls the mode of operation of the microphone. In one example, the absence of a clock causes the microphone to enter voice activity detection (VAD) mode.


In one example, the microphone includes a VAD mode of operation. In this mode of operation, the microphone has a very low power consumption, and it runs on a relatively low clock frequency which can be supplied either externally (from the host) or from an on-chip oscillator.


This operation enables very low power consumption levels as only the most necessary signal processing is active during this mode. In one aspect, the analog signal processing blocks of the microphone (such as the microphone preamplifier, the analog to digital converter, the voltage regulators and the charge pump supplying the bias voltage for the MicroElectroMechanicalSystem (MEMS) microphone) operate at lower power. In this mode, these blocks are operated at reduced power enough for achieving the bandwidth and signal to noise ratio (SNR) needed for the VAD or event detector to function. For example, a bandwidth of operation of approximately 8 kHz after decimation and an SNR of approximately 60 dB can be achieved.


The VAD or event detector can be implemented using well known techniques. For example, short term energy measures vs. long term energy measures, zero crossing and so forth can be used to detect voice signals.


It should also be noted that the interface (the connections between the host and the microphone) is not limited to the exact signals described herein. In these regards, other signals or other combinations of signals may be used. The physical implementation of the interface may also vary. For example, it may be a single physical bi-directional line, or multiple uni-directional lines.


In other aspects, the microphone further includes a delay buffer. In other examples, upon wake up, buffered data is transmitted over a first transmission line and real-time data is transmitted simultaneously over a second and separate output line. In still other examples, buffered data is flushed or discarded upon switching modes.


In still other aspects, the microphone is over-clocked to catch up buffered data to real-time data. The microphone can also be used for multi-microphone voice triggered applications. In one example, the microphone wakes up and enables data synchronizations of a second microphone either in a buffered or a real-time mode.


Referring now to FIG. 1, a system 100 that uses a microphone 102 having a VAD algorithm and includes power savings features is described. The microphone 102 may be, in one example, a MEMS chip (with MEMS die, diaphragm, and charge plate) and an application specific integrated circuit (ASIC). The system also includes a host 104. The host 104 may include various processing functions and may be part of a device (e.g., a personal computer or cellular phone, mobile handset, or tablet) where the microphone 102 resides.


A VDD power signal 112 and a ground signal 114 are coupled to the microphone 102. An interrupt signal 108 and a data signal 110 are sent from the microphone 102 to the host 104. A clock signal 106 is sent from the host 104 to the microphone 102.


In one example of the operation of the system 100 of FIG. 1, the microphone 102 has several modes of operation and these are controlled by the clock signal 106. The host 104 receives the data signal 110 from the microphone 102 as well as an interrupt signal 108. The host 104 has multiple power modes controlled by the interrupt signal 108 that is generated by the microphone 102 upon the detection of voice activity or a particular voice event (e.g., a specific spoken word). The host 104 generates the clock signal 106 for the microphone 102 and thereby controls the mode of operation of the microphone 102.


In one example, the microphone 102 includes a VAD mode of operation. In this mode, the microphone 102 has a very low power consumption, and it runs on a relatively low clock frequency which can be supplied either externally (from the clock signal 106 supplied by the host 104) or from an internal on-chip oscillator in the microphone 102. Consequently, when an interrupt is made, the low power operation can be changed to a higher powered mode of operation. As will be recognized, the interrupt allows the system to be operated in both a low power mode of operation and a high power mode of operation.


In some aspects, the integrated circuit and the MEMS circuit receive a clock signal from an external host. The clock signal is effective to cause the MEMS circuit and integrated circuit to operate in full system operation mode during a first time period and in a voice activity mode of operation during a second time period. The voice activity mode has a first power consumption or level and the full system operation mode has a second power consumption or level. The first power consumption is less than the second power consumption. The integrated circuit is configured to generate an interrupt upon the detection of voice activity, and send the interrupt to the host. The absence of a clock causes the microphone to enter a voice activity detection mode. The clock circuit may be located on the same chip as the other components or located externally.


In other aspects, the present approaches provide the ability to operate the internal clock at a third power consumption or level and thereafter generate an external data stream and clock to signal the system to operate at a fourth power consumption or level. The third power level is less than the fourth power level, and the fourth power level is less than the first power level.


In still other aspects, the external clock may be detected and this may be applied after the detection of voice activity. Then, the internal clock is synchronized to the external clock. Furthermore, the VAD signal processing is also synchronized to the external clock after synchronization.


In yet other aspects, the system may fall back to the internal clock for power savings at the first or second power level when the external clock is removed to reduce overall system power.


In another example, an external signal may be generated from the internal combination of the clock and the acoustic activity detection that acts as a signal and clock combination to signal the host to interrupt/wake up and recognize the voice signal. The bandwidth of the input signal after buffering may be in one example approximately 8 kHz. Other examples are possible. Data may be provided in PCM or PDM formats. Other examples of formats are possible.


Referring now to FIG. 2 various operational states of a system that uses a microphone that uses a VAD algorithm is described. The approach of FIG. 2 has three modes of operation: a VAD mode 202, a wake up host (partially) mode 204, and a full system operation mode 206.


In the VAD mode 202, no data is transmitted out of the microphone. The host is sleeping in this mode. In one aspect, when the host is sleeping only the functionality needed to react to a generated interrupt signal from the microphone is enabled. In this mode, the host is clocked at a very low clock to lower power and all unnecessary functionality is powered down. This mode has the absolute lowest power consumption possible as all unnecessary blocks are powered down and no switching of clock or data signals occur. In other words, the mode 202 is a low power mode, where VAD is enabled and no external clock is being received from the host.


In the wake up host (partially) mode 204, the external clock is received from the host. Data is transmitted out of the microphone. The host becomes partially awake due to the detection of a keyword and/or the detection of voice activity. Subsequently, the external clock for the microphone is enabled with a clock frequency corresponding to a higher performance level enough for doing reliable keyword detection.


The full system operation mode 206 is the high power or standard operating mode of the microphone.


In one example of the operation of the state transition diagram of FIG. 2, the system begins in mode 202. The VAD algorithm detects an event which will trigger the transition from VAD mode 202 to partially wake up/wake up mode 204.


In the mode 204, the host detects a keyword/speech and decides that a specific key word, phrase, or sentence is recognized. This determination triggers the transition from the mode 204 to the full system wake up 206.


In the mode 206, the host keyword detect/speech recognition algorithm decides that no key word, phrase, or sentence is recognized which triggers the transition back to the VAD mode 202. In this respect, another mode or state (not shown here in FIG. 2) determines that the system should enter partially wake up/wake up mode 204 or go directly to the VAD mode 202.


Referring now to FIG. 3, a microphone 300 that uses a VAD algorithm and includes power savings features is described. The microphone 300 includes a microphone chip or device 302. The microphone chip 302 includes a MEMS die, diaphragm, and charge plate. The system also includes an ASIC 304. The ASIC 304 may include various processing functions. The MEMS chip 302 receives a charge pump signal 315 from the ASIC 304 to power the MEMS chip 302.


A VDD power signal 312 and a ground signal 314 are coupled to the ASIC 304. An interrupt signal 308 and a data signal 310 are sent by the ASIC 304 to a host (e.g., the host 104 of FIG. 1). A clock signal 306 sent from the host is received by the ASIC 304.


In one example of the operation of the microphone 300 of FIG. 3, the microphone 300 has several modes of operation and these are controlled by the clock signal 306. A voice signal is received by the MEMS chip 302 and this sound is converted into an electrical signal and sent over data lead 311 to the ASIC 304. The ASIC 304 processes the signal into a data signal and then transmits the data signal 310 from the ASIC 304 as well as creating an interrupt signal 308. The host (e.g., the host 104 of FIG. 1) generates the clock signal 306 and this controls the mode of operation of the microphone 300.


In one example, the microphone 300 includes a VAD mode of operation. In this mode, the microphone 300 has a very low power consumption, and it runs on a relatively low clock frequency which can be supplied either externally (from the clock signal 306 supplied by the host) or from an internal on-chip oscillator in the microphone 300. Consequently, when an interrupt is made, the low power operation can be changed to a higher powered operation. The interrupt allows the system to be operated in both a low power mode of operation and a high power mode of operation.


Referring now FIG. 4, a block diagram of an application specific integrated circuit (ASIC) 400 is described. The ASIC 400 includes a charge pump (CHP) 402, an amplifier 404, an analog-to-digital converter 406, a voice activity detector (VAD) 408, a control block 410 (with oscillator 412), and a switch 414.


The charge pump CHP 402 charges the MEMS element (e.g., the MEMS chip 302 of FIG. 3) to convert changes in capacitance to voltage. The amplifier 404 buffers the electrical signal of the MEMS element (e.g., the MEMS chip 302 of FIG. 3) and subsequently amplifies the signal with a gain of A.


The A/D converter 406 converts the analog signal from the amplifier 404 to a digital signal. The VAD 408 processes the digital signal from the A/D converter 406 and generates an interrupt signal 411 if voice is detected. The control block 410 controls the internal states of the ASIC 400 in response to an external clock signal 413 (received from a host) and the interrupt signal 411 from the VAD 408. The switch 414 is controlled by the control block 410 to allow data 415 to be sent to an external host.


A data buffer may be included at the output of the A/D converter 406. The buffer may buffer data representing the audio signal and correspond to or approximate the delay of the VAD 408 (e.g., 10 ms-360 ms to mention one example range with other ranges being possible). A decimation filter stage could be included at the output of the A/D converter in order to reduce buffer size (sampler RAM) and power, this will limit the bandwidth. In this case an interpolation stage at the buffer output must be added as well. In this case, the delay may be around 200 msec. In another example, the delay may be around 360 msec. Other examples of delay values are possible. The buffer is provided to allow any recognition algorithm the latency required to wake up the host, collect sufficient background noise statistics, and recognize the key phrase within the ambient noise.


The buffered data may be sent to the host via some connection such as the interrupt line 411 or the data line 415. If sending data via the data line 415, it may be sent at an increased clock rate compared to the sampling clock.


Additionally, the parameters or settings of the VAD 408 may be changed or controlled. For example, the reading or writing settings of registers and memory (both erasable and non-erasable) of the VAD 408 may be changed or controlled to, for example, account for various levels of background noise.


The functionality of the VAD 408 may be enhanced or changed. For example, voice or phrase detection may be used. Other functions may also be included.


Referring now FIG. 5, a block diagram of host 500 is described. The host 500 includes an interface block 502, a digital signal processing (DSP) block 504 (including a keyword detection block 506 and word/voice recognition block 508), a control block 510 (clocked by an on-chip oscillator 511), and a memory 512.


The interface block 502 provides interfacing functionality with respect to a microphone (e.g., the microphone 102 in FIG. 1). The interface block transmits the clock signal 520 to the microphone and receives from the microphone an interrupt signal 522 and a data signal 524. The DSP block processes the data signal in two steps using the keyword detection block 506 (detecting a keyword) and the word/voice recognition block 508 (detecting a word or voice).


The control block 510 controls the power states of the microphone (e.g., the microphone 102 of FIG. 1), the blocks of the host 500, and the entire system including other blocks and functions outside the host and microphone (not shown here in FIG. 5).


The memory 512 stores the states of the system, data, and other information. The on chip oscillator 511 is controllable from the control block 510 and enables at least two clock modes corresponding to at least two power modes.


Referring now FIG. 6, a timing diagram showing the operation of a microphone that uses a VAD algorithm and includes power savings features is described. The signals of FIG. 6 show how the system and in particular how the microphone reacts to a voice/event signal and generates an interrupt signal. Subsequent to the interrupt signal, the diagrams show how the host reacts to the interrupt signal by changing its mode and afterwards changing the frequency of the clock signal to change the mode of the microphone.


Signal 602 shows an audio signal. Upon detection of an audio signal, the microphone generates an interrupt as shown by signal 604. Data is also generated by the microphone as shown by signal 606. As can be seen by signal 608, the host in response to the interrupt changes the clock signal (sent to the microphone) from a low frequency signal to a high frequency signal. Alternatively (as shown by signal 610), in low power mode (before the event), the host may not send a clock signal and may only start the high frequency clock signal upon detection of the event.


Preferred embodiments of this disclosure are described herein, including the best mode known to the inventors. It should be understood that the illustrated embodiments are exemplary only, and should not be taken as limiting the scope of the appended claims.

Claims
  • 1. A microphone assembly comprising: an acoustic sensor configured to produce an electrical signal at an output of the acoustic sensor in response to sensing an acoustic signal;an electrical circuit including an acoustic activity detector, the electrical circuit having an input coupled to the output of the acoustic sensor, the electrical circuit configured to process the electrical signal to generate data representing the electrical signal;an internal clock signal generator coupled to the electrical circuit;a host interface with external connections coupled to the electrical circuit, the external connections including a connection for an external clock signal and data;the microphone assembly having an acoustic activity detection mode of operation when the electrical circuit is clocked by the internal clock signal generator in the absence of an external clock signal at the host interface, the electrical circuit configured to provide an interrupt signal to the host interface upon detection of an acoustic event by the electrical circuit,the microphone assembly having a plurality of operating modes with different power consumptions, the plurality of operating modes controlled by an external clock signal received at the host interface in response to providing the interrupt signal,wherein the electrical circuit is configured to provide the data representing the electrical signal to the host interface when the external clock signal is received at the host interface.
  • 2. The microphone assembly of claim 1, the electrical circuit including a data buffer, wherein the electrical circuit is configured to buffer data representing the electrical signal in the data buffer during the acoustic activity detection mode of operation and the electrical circuit is configured to provide the buffered data to the host interface after the interrupt signal is provided to the host interface.
  • 3. The microphone assembly of claim 2, the electrical circuit including an analog-to-digital converter having an input coupled to the output of the acoustic sensor, the analog-to-digital converter including an output coupled to the acoustic activity detector and to the data buffer.
  • 4. The microphone assembly of claim 3, the acoustic sensor is a microelectromechanical systems (MEMS) transducer and the electrical circuit is an integrated circuit.
  • 5. The microphone assembly of claim 4, the MEMS transducer is a capacitive device and the electrical circuit includes a charge pump having a bias signal output coupled to the capacitive device.
  • 6. The microphone assembly of claim 2, the acoustic activity detection mode of operation has lower power consumption than the plurality of operating modes controlled by the external clock signal.
  • 7. The microphone assembly of claim 2, the electrical circuit is configured to provide buffered data to the host interface when the external clock signal is received at the host interface.
  • 8. The microphone assembly of claim 7, wherein the electrical circuit is overclocked to catch up buffered data provided to the host interface to real time.
  • 9. The microphone assembly of claim 2, wherein the electrical circuit is clocked by the internal clock signal generator in the absence of the external clock signal at the host interface and the electrical circuit is clocked by the external clock signal when the external clock signal is received at the host interface.
  • 10. A microphone assembly comprising: an acoustic sensor;an electrical circuit having an input coupled to an output of the acoustic sensor, the electrical circuit including an acoustic activity detector;an internal clock signal generator coupled to the electrical circuit;a host interface with external connections coupled to the electrical circuit, the host interface including a connection for an external clock signal and data;the acoustic activity detector configured to process, in an acoustic activity detection mode, data representing an electrical signal output by the acoustic sensor for acoustic activity when the electrical circuit is clocked by a clock signal from the internal clock signal generator in the absence of an external clock signal on the host interface,the electrical circuit configured to provide an interrupt signal to the host interface after detection of an acoustic event, and the electrical circuit configured to control an operating mode of the microphone assembly based on an external clock signal received at the host interface in response to the interrupt signal, the microphone assembly having a plurality of different power consumption modes,wherein the electrical circuit is configured to provide the data representing the electrical signal to the host interface when the external clock signal is received at the host interface.
  • 11. The microphone assembly of claim 10, the electrical circuit including a data buffer, wherein the electrical circuit is configured to buffer data representing the electrical signal in the data buffer during operation in the acoustic activity detection mode and the electrical circuit is configured to provide the buffered data to the host interface after the interrupt signal is provided to the host interface.
  • 12. The microphone assembly of claim 11, the electrical circuit is configured to provide buffered data to the host interface when the external clock signal is received at the host interface.
  • 13. The microphone assembly of claim 11, wherein the electrical circuit is overclocked to catch up buffered data provided to the host interface to real time.
  • 14. The microphone assembly of claim 11, wherein the electrical circuit is clocked by the internal clock signal generator in the absence of the external clock signal at the host interface and the electrical circuit is clocked by the external clock signal when the external clock signal is received at the host interface.
  • 15. The microphone assembly of claim 11, the acoustic activity detection mode of operation has lower power consumption than other operating modes of the microphone assembly.
  • 16. The microphone assembly of claim 11, the electrical circuit including an analog-to-digital converter having an input coupled to the output of the acoustic sensor, the analog-to-digital converter including an output coupled to the acoustic activity detector and to the data buffer.
  • 17. The microphone assembly of claim 16, the acoustic sensor is a microelectromechanical systems (MEMS) transducer and the electrical circuit is an integrated circuit.
  • 18. The microphone assemble of claim 17, the acoustic activity detection mode of operation has lower power consumption than an operating mode controlled by the external clock signal.
  • 19. The microphone assembly of claim 10, wherein the electrical circuit is overclocked to catch up buffered data provided to the host interface to real time.
  • 20. A microphone assembly comprising: a microelectromechanical systems (MEMS) transducer;an electrical circuit including an acoustic activity detector, an A/D converter and a data buffer, an output of the MEMS transducer coupled to an input of the A/D converter and an output of the A/D converter coupled to the acoustic activity detector and the data buffer;an internal clock signal generator coupled to the electrical circuit;a host interface with external connections coupled to the electrical circuit, the host interface including a connection for an external clock signal and data;the microphone assembly having an acoustic activity detection mode when the electrical circuit is clocked by the internal clock signal generator in the absence of an external clock signal at the host interface, wherein during acoustic activity detection mode the electrical circuit is configured to process data representing an electrical signal output by the MEMS transducer for acoustic activity while data representing the electrical signal output by the MEMS transducer is buffered in the data buffer,the electrical circuit configured to provide an interrupt signal to the host interface after detection of an acoustic event and the electrical circuit configured to control an operating mode of the microphone assembly based on an external clock signal received at the host interface in response to the interrupt signal, the microphone assembly having a plurality of different power consumption modes,wherein buffered data is provided to the host interface in an operating mode when the external clock signal is received at the host interface.
CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of prior application Ser. No. 14/522,158, filed Oct. 23, 2014, which is a continuation of prior U.S. application Ser. No. 14/282,101, entitled “VAD detection Microphone and Method of Operating the Same,” filed May 20, 2014, which claims the benefit under 35 U.S.C. § 119 (e) to U.S. Provisional Application No. 61/826,587, filed May 23, 2013, the content of all of which are incorporated herein by reference in their entireties.

US Referenced Citations (190)
Number Name Date Kind
4052568 Jankowski Oct 1977 A
4831558 Shoup May 1989 A
5555287 Gulick et al. Sep 1996 A
5577164 Kaneko Nov 1996 A
5598447 Usui Jan 1997 A
5675808 Gulick Oct 1997 A
5819219 De Vos et al. Oct 1998 A
5822598 Lam Oct 1998 A
5983186 Miyazawa Nov 1999 A
6049565 Paradine Apr 2000 A
6057791 Knapp May 2000 A
6070140 Tran May 2000 A
6154721 Sonnic Nov 2000 A
6249757 Cason Jun 2001 B1
6259291 Huang Jul 2001 B1
6282268 Hughes Aug 2001 B1
6324514 Matulich Nov 2001 B2
6397186 Bush May 2002 B1
6453020 Hughes Sep 2002 B1
6564330 Martinez May 2003 B1
6591234 Chandran Jul 2003 B1
6640208 Zhang Oct 2003 B1
6756700 Zeng Jun 2004 B2
6829244 Wildfeuer et al. Dec 2004 B1
7102452 Holmes Sep 2006 B1
7190038 Dehe et al. Mar 2007 B2
7415416 Rees Aug 2008 B2
7473572 Dehe et al. Jan 2009 B2
7546498 Tang et al. Jun 2009 B1
7619551 Wu Nov 2009 B1
7630504 Poulsen Dec 2009 B2
7774202 Spengler Aug 2010 B2
7774204 Mozer Aug 2010 B2
7781249 Laming et al. Aug 2010 B2
7795695 Weigold et al. Sep 2010 B2
7825484 Martin et al. Nov 2010 B2
7829961 Hsiao Nov 2010 B2
7856283 Burk Dec 2010 B2
7856804 Laming et al. Dec 2010 B2
7903831 Song Mar 2011 B2
7936293 Hamashita May 2011 B2
7941313 Garudadri May 2011 B2
7957972 Huang Jun 2011 B2
7994947 Ledzius Aug 2011 B1
8171322 Fiennes May 2012 B2
8208621 Hsu Jun 2012 B1
8274856 Byeon Sep 2012 B2
8275148 Li Sep 2012 B2
8331581 Pennock Dec 2012 B2
8666751 Murthi Mar 2014 B2
8687823 Loeppert Apr 2014 B2
8731210 Cheng May 2014 B2
8798289 Every Aug 2014 B1
8804974 Melanson Aug 2014 B1
8849231 Murgia Sep 2014 B1
8972252 Hung Mar 2015 B2
8996381 Mozer Mar 2015 B2
9020819 Saitoh Apr 2015 B2
9043211 Haiut May 2015 B2
9059630 Gueorguiev Jun 2015 B2
9073747 Ye Jul 2015 B2
9076447 Nandy Jul 2015 B2
9111548 Nandy et al. Aug 2015 B2
9112984 Sejnoha Aug 2015 B2
9113263 Furst Aug 2015 B2
9119150 Murgia Aug 2015 B1
9142215 Rosner Sep 2015 B2
9147397 Thomsen Sep 2015 B2
9161112 Ye Oct 2015 B2
20020054588 Mehta May 2002 A1
20020116186 Strauss Aug 2002 A1
20020123893 Woodward Sep 2002 A1
20020184015 Li Dec 2002 A1
20030004720 Garudadri Jan 2003 A1
20030061036 Garudadri Mar 2003 A1
20030138061 Li Jul 2003 A1
20030144844 Colmenarez Jul 2003 A1
20030171907 Gal-On et al. Sep 2003 A1
20040022379 Klos Feb 2004 A1
20050207605 Dehe et al. Sep 2005 A1
20060013415 Winchester Jan 2006 A1
20060074658 Chadha Apr 2006 A1
20060164151 Chatterjee et al. Jul 2006 A1
20060233389 Mao et al. Oct 2006 A1
20060247923 Chandran Nov 2006 A1
20070127761 Poulsen Jun 2007 A1
20070168908 Paolucci Jul 2007 A1
20070274297 Cross et al. Nov 2007 A1
20070278501 MacPherson et al. Dec 2007 A1
20080089536 Josefsson Apr 2008 A1
20080175425 Roberts et al. Jul 2008 A1
20080201138 Visser Aug 2008 A1
20080267431 Leidl et al. Oct 2008 A1
20080279407 Pahl Nov 2008 A1
20080283942 Huang et al. Nov 2008 A1
20090001553 Pahl et al. Jan 2009 A1
20090003629 Shajaan et al. Jan 2009 A1
20090180655 Tien et al. Jul 2009 A1
20090234645 Bruhn Sep 2009 A1
20090257289 Byeon Oct 2009 A1
20100046780 Song Feb 2010 A1
20100052082 Lee et al. Mar 2010 A1
20100057474 Kong Mar 2010 A1
20100128894 Petit May 2010 A1
20100128914 Khenkin May 2010 A1
20100131783 Weng May 2010 A1
20100183181 Wang Jul 2010 A1
20100246877 Wang et al. Sep 2010 A1
20100290644 Wu et al. Nov 2010 A1
20100292987 Kawaguchi Nov 2010 A1
20100322443 Wu et al. Dec 2010 A1
20100322451 Wu et al. Dec 2010 A1
20110007907 Park Jan 2011 A1
20110013787 Chang Jan 2011 A1
20110029109 Thomsen Feb 2011 A1
20110075875 Wu et al. Mar 2011 A1
20110106533 Yu May 2011 A1
20110107010 Strauss et al. May 2011 A1
20110170714 Hanzlik et al. Jul 2011 A1
20110208520 Lee Aug 2011 A1
20110280109 Raymond Nov 2011 A1
20110293115 Henriksen Dec 2011 A1
20120010890 Koverzin Jan 2012 A1
20120112804 Li et al. May 2012 A1
20120113899 Overmars May 2012 A1
20120177227 Adachi Jul 2012 A1
20120232896 Taleb Sep 2012 A1
20120250881 Mulligan Oct 2012 A1
20120250910 Shajaan et al. Oct 2012 A1
20120310641 Niemisto Dec 2012 A1
20130035777 Niemisto et al. Feb 2013 A1
20130044898 Schultz Feb 2013 A1
20130058495 Furst et al. Mar 2013 A1
20130058506 Boor Mar 2013 A1
20130195291 Josefsson Aug 2013 A1
20130223635 Singer Aug 2013 A1
20130226324 Hannuksela et al. Aug 2013 A1
20130246071 Lee Sep 2013 A1
20130322461 Poulsen Dec 2013 A1
20130343584 Bennett et al. Dec 2013 A1
20140064523 Kropfitsch Mar 2014 A1
20140122078 Joshi May 2014 A1
20140143545 McKeeman May 2014 A1
20140163978 Basye Jun 2014 A1
20140177113 Gueorguiev Jun 2014 A1
20140188467 Jing Jul 2014 A1
20140188470 Chang Jul 2014 A1
20140197887 Hovesten Jul 2014 A1
20140244269 Tokutake Aug 2014 A1
20140244273 Laroche et al. Aug 2014 A1
20140249820 Hsu Sep 2014 A1
20140257813 Mortensen Sep 2014 A1
20140257821 Adams Sep 2014 A1
20140270260 Goertz et al. Sep 2014 A1
20140274203 Ganong Sep 2014 A1
20140278435 Ganong et al. Sep 2014 A1
20140281628 Nigam Sep 2014 A1
20140343949 Huang Nov 2014 A1
20140348345 Furst Nov 2014 A1
20140358552 Xu Dec 2014 A1
20150039303 Lesso Feb 2015 A1
20150043755 Furst Feb 2015 A1
20150046157 Wolff Feb 2015 A1
20150046162 Aley-Raz Feb 2015 A1
20150049884 Ye Feb 2015 A1
20150055803 Qutub Feb 2015 A1
20150058001 Dai Feb 2015 A1
20150063594 Nielsen Mar 2015 A1
20150073780 Sharma Mar 2015 A1
20150073785 Sharma Mar 2015 A1
20150088500 Conliffe Mar 2015 A1
20150106085 Lindahl Apr 2015 A1
20150110290 Furst Apr 2015 A1
20150112690 Guha Apr 2015 A1
20150134331 Millet May 2015 A1
20150154981 Barreda Jun 2015 A1
20150161989 Hsu Jun 2015 A1
20150195656 Ye Jul 2015 A1
20150206527 Connolly Jul 2015 A1
20150256660 Kaller Sep 2015 A1
20150256916 Volk Sep 2015 A1
20150287401 Lee Oct 2015 A1
20150302865 Pilli Oct 2015 A1
20150304502 Pilli Oct 2015 A1
20150350760 Nandy Dec 2015 A1
20150350774 Furst Dec 2015 A1
20160012007 Popper Jan 2016 A1
20160087596 Yurrtas Mar 2016 A1
20160133271 Kuntzman May 2016 A1
20160134975 Kuntzman May 2016 A1
Foreign Referenced Citations (20)
Number Date Country
1083639 Mar 1994 CN
1306472 Aug 2001 CN
1868118 Nov 2006 CN
102272826 Dec 2011 CN
102568480 Jul 2012 CN
102770909 Nov 2012 CN
102983868 Mar 2013 CN
103117065 May 2013 CN
2001236095 Aug 2001 JP
2001236095 Aug 2001 JP
2004219728 Aug 2004 JP
WO-9013890 Nov 1990 WO
WO-0203747 Jan 2002 WO
WO-02061727 Aug 2002 WO
WO-2005009072 Jan 2005 WO
2009130591 Jan 2009 WO
2011106065 Jan 2011 WO
2011140096 Feb 2011 WO
2013049358 Jan 2013 WO
2013085499 Jan 2013 WO
Non-Patent Literature Citations (17)
Entry
International Search Report and Written Opinion for PCT/US2014/038790, dated Sep. 24, 2014 (9 pages).
U.S. Appl. No. 14/285,585, filed May 22, 2014, Santos.
U.S. Appl. No. 14/495,482, filed Sep. 24, 2014, Murgia.
U.S. Appl. No. 14/522,264, filed Oct. 23, 2014, Murgia.
U.S. Appl. No. 14/698,652, filed Apr. 28, 2015, Yapanel.
U.S. Appl. No. 14/749,425, filed Jun. 24, 2015, Verma.
U.S. Appl. No. 14/853,947, filed Sep. 14, 2015, Yen.
U.S. Appl. No. 62/100,758, filed Jan. 7, 2015, Rossum.
International Search Report and Written Opinion for PCT/US2016/013859 dated Apr. 29, 2016 (12 pages).
Search Report of Taiwan Patent Application No. 103135811, dated Apr. 18, 2016 (1 page).
“MEMS technologies: Microphone” EE Herald Jun. 20, 2013.
Delta-sigma modulation, Wikipedia (Jul. 4, 2013).
International Search Report and Written Opinion for PCT/EP2014/064324, dated Feb. 12, 2015 (13 pages).
International Search Report and Written Opinion for PCT/US2014/060567 dated Jan. 16, 2015 (12 pages).
International Search Report and Written Opinion for PCT/US2014/062861 dated Jan. 23, 2015 (12 pages).
Kite, Understanding PDM Digital Audio, Audio Precision, Beaverton, OR, 2012.
Pulse-density modulation, Wikipedia (May 3, 2013).
Related Publications (1)
Number Date Country
20150350774 A1 Dec 2015 US
Provisional Applications (1)
Number Date Country
61826587 May 2013 US
Continuations (2)
Number Date Country
Parent 14522158 Oct 2014 US
Child 14824736 US
Parent 14282101 May 2014 US
Child 14522158 US