Number | Name | Date | Kind |
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3615272 | Frye et al. | Oct 1971 | |
4239811 | Kemlage | Dec 1980 | |
4756977 | Haluska et al. | Jul 1988 | |
4808653 | Haluska et al. | Feb 1989 | |
4911992 | Haluska et al. | Mar 1990 | |
4973526 | Haluska | Nov 1990 | |
4999397 | Weiss et al. | Mar 1991 | |
5010159 | Bank et al. | Apr 1991 | |
5063267 | Hanneman et al. | Nov 1991 | |
5165955 | Gentle | Nov 1992 |
Entry |
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Desu et al., J. Electrochem. Soc., vol. 139, No. 9, Sep. 1992, Low Temperature CVD of SiO.sub.2 Films Using Novel Precursors. |