containing silicon

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CPC
C23C16/401

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/401containing silicon

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 12,163,220
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yu Komai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,163,219
- Issue date Dec 10, 2024
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for forming self-assembled monolayer on substrate
- Patent number 12,152,304
- Issue date Nov 26, 2024
- Tokyo Electron Limited
- Shuji Azumo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF pulsing assisted low-k film deposition with high mechanical stre...
- Patent number 12,125,675
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single precursor low-k film deposition and UV cure for advanced tec...
- Patent number 12,119,223
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask, mask fabrication method, and mask assembly
- Patent number 12,116,660
- Issue date Oct 15, 2024
- Samsung Display Co., Ltd.
- Ji-Hee Son
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective silicon deposition
- Patent number 12,106,972
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Yifeng Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,104,251
- Issue date Oct 1, 2024
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of post-deposition treatment for silicon oxide film
- Patent number 12,100,588
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Switchable delivery for semiconductor processing system
- Patent number 12,094,689
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Sai Susmita Addepalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
- Patent number 12,094,936
- Issue date Sep 17, 2024
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon oxycarbide-based environmental barrier coating
- Patent number 12,091,756
- Issue date Sep 17, 2024
- RTX Corporation
- Xia Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, substrate processing apparatus, rec...
- Patent number 12,094,708
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Yoshitomo Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure and manufacturing method of surface acoustic wave filter...
- Patent number 12,088,271
- Issue date Sep 10, 2024
- Shenzhen Newsonic Technologies Co., Ltd.
- Guojun Weng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density plasma enhanced process chamber
- Patent number 12,080,516
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,080,546
- Issue date Sep 3, 2024
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming patterned structures using multiple p...
- Patent number 12,074,022
- Issue date Aug 27, 2024
- ASM IP Holding B.V.
- Naoki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating of fluid-permeable materials
- Patent number 12,065,730
- Issue date Aug 20, 2024
- Picosun Oy
- Marko Pudas
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for conditioning a plasma processing chamber
- Patent number 12,060,636
- Issue date Aug 13, 2024
- Lam Research Corporation
- Chiara Helena Catherina Giammanco MacPherson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,054,828
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 12,049,695
- Issue date Jul 30, 2024
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,040,179
- Issue date Jul 16, 2024
- Kokusai Electric Corporation
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant coated article and thermal chemical vapor depos...
- Patent number 12,036,765
- Issue date Jul 16, 2024
- Silcotek Corp.
- Min Yuan
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Modulated atomic layer deposition
- Patent number 12,040,181
- Issue date Jul 16, 2024
- Lam Research Corporation
- Chan Myae Myae Soe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for filling a gap and related systems and devices
- Patent number 12,027,365
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Zecheng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-κ ALD gap-fill methods and material
- Patent number 12,020,923
- Issue date Jun 25, 2024
- Lam Research Corporation
- Joseph R. Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High selectivity atomic layer deposition process
- Patent number 11,993,845
- Issue date May 28, 2024
- Applied Materials, Inc.
- Jong Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas nozzle, substrate processing apparatus, and substrate processin...
- Patent number 11,993,848
- Issue date May 28, 2024
- Tokyo Electron Limited
- Kuniyasu Sakashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 11,976,362
- Issue date May 7, 2024
- Kioxia Corporation
- Takashi Asano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...
- Publication number 20240417138
- Publication date Dec 19, 2024
- SiO2 Medical Products, Inc.
- John T. Felts
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
CONFORMAL SILICON OXIDE DEPOSITION USING AMINOSILANE AND CHLOROSILA...
- Publication number 20240410053
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20240392434
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- JIANHENG LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION
- Publication number 20240384414
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC BEAD AND MAGNETIC BEAD REAGENT
- Publication number 20240376575
- Publication date Nov 14, 2024
- SEIKO EPSON CORPORATION
- Fumio TAKAGI
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...
- Publication number 20240368766
- Publication date Nov 7, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL CHEMICAL VAPOR DEPOSITION COATING PROCESS
- Publication number 20240359430
- Publication date Oct 31, 2024
- SILCOTEK CORP.
- Min YUAN
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
IN-SITU CORE PROTECTION IN MULTI-PATTERNING
- Publication number 20240355624
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Nuoya Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE FILM REACTION SURFACE CONTROL AGENT, METHOD OF FORMING OXIDE...
- Publication number 20240352583
- Publication date Oct 24, 2024
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTICLE HAVING WATER- AND OIL-REPELLENT SURFACE LAYER
- Publication number 20240343919
- Publication date Oct 17, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takashi UCHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENVIRONMENTAL BARRIER COATING AND METHOD OF APPLYING THE SAME
- Publication number 20240343917
- Publication date Oct 17, 2024
- Raytheon Technologies Corporation
- James T. Beals
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-K ALD GAP-FILL METHODS AND MATERIAL
- Publication number 20240347337
- Publication date Oct 17, 2024
- LAM RESEARCH CORPORATION
- Joseph R. Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING AN INSULATING LAYER PATTERN, PRECURSORS USED IN...
- Publication number 20240347462
- Publication date Oct 17, 2024
- DONGJIN SEMICHEM CO., LTD.
- Ha Kyung YUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...
- Publication number 20240332000
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...
- Publication number 20240332023
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF DIELECTRIC MATERIAL UPON...
- Publication number 20240332071
- Publication date Oct 3, 2024
- Intel Corporation
- Alireza Narimannezhad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND...
- Publication number 20240327976
- Publication date Oct 3, 2024
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MODULATED ATOMIC LAYER DEPOSITION
- Publication number 20240332007
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Chan Myae Myae Soe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Additive Manufacturing Powder, Method For Producing Additive Manufa...
- Publication number 20240316630
- Publication date Sep 26, 2024
- SEIKO EPSON CORPORATION
- Yasutaka MATSUMOTO
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240312777
- Publication date Sep 19, 2024
- Kokusai Electric Corporation
- Shingo NOHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR MATERIALS, SILICON-CONTAINING FILMS, AND RELATED...
- Publication number 20240308856
- Publication date Sep 19, 2024
- Entegris, Inc.
- YoonHae Kim
- C01 - INORGANIC CHEMISTRY
Information Patent Application
ANTENNA AND PLASMA PROCESSING APPARATUS
- Publication number 20240304416
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240287673
- Publication date Aug 29, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Organoamino-Functionalized Linear and Cyclic Oligosiloxanes for Dep...
- Publication number 20240287257
- Publication date Aug 29, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED M...
- Publication number 20240282546
- Publication date Aug 22, 2024
- Kayaku Advanced Materials, Inc.
- W. Shannan O'Shaughnessy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279797
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240282571
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Lin Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279799
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279794
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279796
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

containing silicon

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film formation method and film formation device

Deposition method and deposition apparatus

Ex situ coating of chamber components for semiconductor processing

Film forming method for forming self-assembled monolayer on substrate

RF pulsing assisted low-k film deposition with high mechanical stre...

Single precursor low-k film deposition and UV cure for advanced tec...

Mask, mask fabrication method, and mask assembly

Selective silicon deposition

Substrate processing method and substrate processing apparatus

Method of post-deposition treatment for silicon oxide film

Switchable delivery for semiconductor processing system

Methods for forming a metal silicate film on a substrate in a react...

Silicon oxycarbide-based environmental barrier coating

Method of processing substrate, substrate processing apparatus, rec...

Structure and manufacturing method of surface acoustic wave filter...

High density plasma enhanced process chamber

Method of processing substrate, method of manufacturing semiconduct...

Method and system for forming patterned structures using multiple p...

Coating of fluid-permeable materials

Method for conditioning a plasma processing chamber

Substrate processing method and substrate processing apparatus

Compositions and methods using same for deposition of silicon-conta...

Method of manufacturing semiconductor device, substrate processing...

Corrosion-resistant coated article and thermal chemical vapor depos...

Modulated atomic layer deposition

Methods for filling a gap and related systems and devices

Low-κ ALD gap-fill methods and material

High selectivity atomic layer deposition process

Gas nozzle, substrate processing apparatus, and substrate processin...

Substrate processing apparatus and method for manufacturing semicon...

Patents Applicationslast 30 patents

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...

CONFORMAL SILICON OXIDE DEPOSITION USING AMINOSILANE AND CHLOROSILA...

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION

MAGNETIC BEAD AND MAGNETIC BEAD REAGENT

THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...

THERMAL CHEMICAL VAPOR DEPOSITION COATING PROCESS

IN-SITU CORE PROTECTION IN MULTI-PATTERNING

OXIDE FILM REACTION SURFACE CONTROL AGENT, METHOD OF FORMING OXIDE...

ARTICLE HAVING WATER- AND OIL-REPELLENT SURFACE LAYER

ENVIRONMENTAL BARRIER COATING AND METHOD OF APPLYING THE SAME

LOW-K ALD GAP-FILL METHODS AND MATERIAL

METHOD FOR FORMING AN INSULATING LAYER PATTERN, PRECURSORS USED IN...

DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...

METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF DIELECTRIC MATERIAL UPON...

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND...

MODULATED ATOMIC LAYER DEPOSITION

Additive Manufacturing Powder, Method For Producing Additive Manufa...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SILICON PRECURSOR MATERIALS, SILICON-CONTAINING FILMS, AND RELATED...

ANTENNA AND PLASMA PROCESSING APPARATUS

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

Organoamino-Functionalized Linear and Cyclic Oligosiloxanes for Dep...

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED M...

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES