Number | Date | Country | Kind |
---|---|---|---|
62-199769 | Aug 1987 | JPX | |
62-201736 | Aug 1987 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3340186 | Weyl | Sep 1967 | |
3878054 | Rodgers | Apr 1975 | |
4079522 | Ham | Mar 1978 | |
4612712 | Pescatore et al. | Sep 1986 | |
4879041 | Kurokawa et al. | Nov 1989 |
Number | Date | Country |
---|---|---|
61-138582 | Jun 1986 | JPX |
61-138583 | Jun 1986 | JPX |
61-174982 | Aug 1986 | JPX |
61-200885 | Sep 1986 | JPX |
Entry |
---|
Moreau et al, Wafer Cleaner System, IBM Technical Disclosure Bulletin vol. 14, No. 10, Mar. 1972. |
"Ultra-Pure Water High Purity Chemical Substance Supply System Proceeding" Second Symposium on Ultra LSI Ultra-Clean Technology Symposium No.2, pp. 399-419. |