Wafer boat for use in a semiconductor wafer heat processing apparatus

Information

  • Patent Grant
  • D409158
  • Patent Number
    D409,158
  • Date Filed
    Thursday, February 5, 1998
    27 years ago
  • Date Issued
    Tuesday, May 4, 1999
    25 years ago
Abstract
Description
Claims
  • I claim the ornamental design for wafer boat for use in a semiconductor wafer heat processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
9-65101 Aug 1997 JPX
US Referenced Citations (8)
Number Name Date Kind
D291413 Uehara et al. Aug 1987
D361752 Yamaga Aug 1995
D378823 Watanabe et al. Apr 1997
4743156 Raffay et al. May 1988
4857689 Lee Aug 1989
5174045 Thompson et al. Dec 1992
5314574 Takahashi May 1994
5320218 Yamashita et al. Jun 1994