Information
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Patent Grant
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D409158
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Patent Number
D409,158
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Date Filed
Thursday, February 5, 199827 years ago
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Date Issued
Tuesday, May 4, 199925 years ago
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Inventors
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Original Assignees
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Examiners
Agents
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US Classifications
Field of Search
US
- D13 182
- D15 144
- D15 1441
- D15 199
- 414 935-941
- 414 217
- 414 147
- 437 247
- 437 946
- D06 407
- D06 629
- 211 4118
- 206 832
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International Classifications
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Claims
- I claim the ornamental design for wafer boat for use in a semiconductor wafer heat processing apparatus, as shown and described.
Priority Claims (1)
Number |
Date |
Country |
Kind |
9-65101 |
Aug 1997 |
JPX |
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US Referenced Citations (8)