Number | Name | Date | Kind |
---|---|---|---|
3968378 | Roberts et al. | Jul 1976 | |
5504795 | McGeoch | Apr 1996 | |
5577092 | Kublak et al. | Nov 1996 | |
5637962 | Prono et al. | Jun 1997 |
Number | Date | Country |
---|---|---|
610 24135 | Jan 1986 | JPX |
Entry |
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McGeoch, M., "Radio-frequency-preionized xenon Z-pinch source for extreme ultraviolet lithography". Applied Optics, vol. 37, No. 9, Mar. 20, 1998, pp. 1651-1658. |