being produced from a liquid or gas

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H05G2/003

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HELECTRICITY H05Electric techniques H05GX-RAY TECHNIQUE H05G2/00Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes

Current Industry

H05G2/003being produced from a liquid or gas

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Mechanical alignment of x-ray sources
- Patent number 12,120,807
- Issue date Oct 15, 2024
- Excillium AB
- Johan Kronstedt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for cleaning an EUV mask
- Patent number 12,099,310
- Issue date Sep 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Hui Li
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet control system
- Patent number 12,044,975
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jen-Yang Chung
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 11,924,955
- Issue date Mar 5, 2024
- Gigaphoton Inc.
- Yoshiyuki Honda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Guiding device and associated system
- Patent number 11,822,252
- Issue date Nov 21, 2023
- ASML Netherlands B.V.
- Dzmitry Labetski
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Mechanical alignment of x-ray sources
- Patent number 11,800,625
- Issue date Oct 24, 2023
- Excillum AB
- Johan Kronstedt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for producing a filamented auxiliary discharge for an app...
- Patent number 11,758,638
- Issue date Sep 12, 2023
- PAUL HOSS KG
- Paul Höß
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Soft X-ray light source
- Patent number 11,751,318
- Issue date Sep 5, 2023
- RAYCAN TECHNOLOGY CO., LTD. (SUZHOU)
- Wei Liu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for cleaning an EUV mask
- Patent number 11,681,235
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Hui Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Droplet collecting system and method of using the same
- Patent number 11,653,438
- Issue date May 16, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Fa Lo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 11,626,704
- Issue date Apr 11, 2023
- ASML Netherlands B.V.
- Sietse Thijmen Van Der Post
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser and drum control for continuous generation of broadband light
- Patent number 11,617,256
- Issue date Mar 28, 2023
- KLA Corporation
- Jian Xu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical isolation module
- Patent number 11,553,582
- Issue date Jan 10, 2023
- ASML Netherlands, B.V.
- Yezheng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser plasma optical device and method for generating ultra-short u...
- Patent number 11,523,489
- Issue date Dec 6, 2022
- Shanghai Jiao Tong University
- Xinglong Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission small-angle X-ray scattering metrology system
- Patent number 11,519,719
- Issue date Dec 6, 2022
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of exposure using extreme ultraviolet and method of manufact...
- Patent number 11,490,499
- Issue date Nov 1, 2022
- Samsung Electronics Co., Ltd.
- Sungho Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber device, extreme ultraviolet light generation apparatus, and...
- Patent number 11,483,917
- Issue date Oct 25, 2022
- Gigaphoton Inc.
- Atsushi Ueda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet control system
- Patent number 11,467,498
- Issue date Oct 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Yang Chung
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target formation apparatus
- Patent number 11,448,967
- Issue date Sep 20, 2022
- ASML Netherlands B.V.
- Georgiy Olegovich Vaschenko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for protecting an X-ray source and an X-ray source
- Patent number 11,438,996
- Issue date Sep 6, 2022
- Excillum AB
- Tomi Tuohimaa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 11,347,155
- Issue date May 31, 2022
- ASML Netherlands B.V.
- David O Dwyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 11,350,515
- Issue date May 31, 2022
- Gigaphoton Inc.
- Hironori Igarashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generation for a laser produced plasma light source
- Patent number 11,343,899
- Issue date May 24, 2022
- KLA Corporation
- Brian Ahr
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation system and electronic device m...
- Patent number 11,337,293
- Issue date May 17, 2022
- Gigaphoton Inc.
- Takanari Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for controlling extreme ultraviolet light
- Patent number 11,320,744
- Issue date May 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ssu-Yu Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Process system and operating method thereof
- Patent number 11,237,482
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chao-Chen Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for generating an electromagnetic radiation
- Patent number 11,153,957
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Jeng Hsu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet radiation source and cleaning method thereof
- Patent number 11,071,191
- Issue date Jul 20, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi Yang
- B08 - CLEANING
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 11,044,799
- Issue date Jun 22, 2021
- Gigaphoton Inc.
- Tsutomu Kashiwazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Debris mitigation system, radiation source and lithographic apparatus
- Patent number 10,990,015
- Issue date Apr 27, 2021
- ASML Netherlands B.V.
- Michel Riepen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
- Publication number 20240377766
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Hui LI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...
- Publication number 20240160107
- Publication date May 16, 2024
- Gigaphoton Inc.
- Yoshiyuki HONDA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
- Publication number 20240121877
- Publication date Apr 11, 2024
- Samsung Electronics Co., Ltd.
- Injae LEE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
- Publication number 20240085796
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Dzmitry LABETSKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240023223
- Publication date Jan 18, 2024
- Gigaphoton Inc.
- Yuichi NISHIMURA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MECHANICAL ALIGNMENT OF X-RAY SOURCES
- Publication number 20240015875
- Publication date Jan 11, 2024
- Excillum AB
- Johan KRONSTEDT
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE APPARATUS
- Publication number 20230400786
- Publication date Dec 14, 2023
- Ushio Denki Kabushiki Kaisha
- Yusuke Teramoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE APPARATUS
- Publication number 20230319970
- Publication date Oct 5, 2023
- Ushio Denki Kabushiki Kaisha
- Yusuke Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV LIGHT SOURCE TARGET METROLOGY
- Publication number 20230300965
- Publication date Sep 21, 2023
- ASML NETHERLANDS B.V.
- Robert Jay Rafac
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20230292426
- Publication date Sep 14, 2023
- Gigaphoton Inc.
- Yoshiyuki HONDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
- Publication number 20230280666
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Hui LI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20230269857
- Publication date Aug 24, 2023
- Gigaphoton Inc.
- Atsushi UEDA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
OPTICAL ISOLATION MODULE
- Publication number 20230139746
- Publication date May 4, 2023
- ASML NETHERLANDS B.V.
- Yezheng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET CONTROL SYSTEM
- Publication number 20230030134
- Publication date Feb 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Yang CHUNG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET COLLECTING SYSTEM AND METHOD OF USING THE SAME
- Publication number 20220408537
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- Yu-Fa LO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR EFFICIENT HIGH HARMONIC GENERATION
- Publication number 20220390388
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- G01 - MEASURING TESTING
Information Patent Application
RADIATION CONDUIT
- Publication number 20220390852
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Remco Johannes Elisa HEIJMANS
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
- Publication number 20220283521
- Publication date Sep 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Hui LI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT
- Publication number 20220260927
- Publication date Aug 18, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ssu-Yu CHEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER AND DRUM CONTROL FOR CONTINUOUS GENERATION OF BROADBAND LIGHT
- Publication number 20220210901
- Publication date Jun 30, 2022
- KLA Corporation
- Jian Xu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR GENERATING EXTREME ULTRAVIOLET (EUV), METHOD OF MANUF...
- Publication number 20220167492
- Publication date May 26, 2022
- Research & Business Foundation Sungkyunkwan University
- JIHOON NA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR COMPACT LASER WAKEFIELD ACCELERATED ELECTR...
- Publication number 20220117075
- Publication date Apr 14, 2022
- The Regents of the University of California
- Toshiki Tajima
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METHOD OF EXPOSURE USING EXTREME ULTRAVIOLET AND METHOD OF MANUFACT...
- Publication number 20220070992
- Publication date Mar 3, 2022
- Samsung Electronics Co., Ltd.
- SUNGHO JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT
- Publication number 20210364931
- Publication date Nov 25, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ssu-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET FORMATION APPARATUS
- Publication number 20210311398
- Publication date Oct 7, 2021
- ASML NETHERLANDS B.V.
- Georgiy Olegovich Vaschenko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHAMBER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND...
- Publication number 20210289611
- Publication date Sep 16, 2021
- Gigaphoton Inc.
- Atsushi UEDA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
LASER PLASMA OPTICAL DEVICE AND METHOD FOR GENERATING ULTRA-SHORT U...
- Publication number 20210282254
- Publication date Sep 9, 2021
- Shanghai Jiao Tong University
- Xinglong ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PRODUCING A FILAMENTED AUXILIARY DISCHARGE FOR AN APP...
- Publication number 20210259088
- Publication date Aug 19, 2021
- Paul Höß KG
- Paul HÖß
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET CONTROL SYSTEM
- Publication number 20210223701
- Publication date Jul 22, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jen-Yang CHUNG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
- Publication number 20210141311
- Publication date May 13, 2021
- ASML NETHERLANDS B.V.
- Dzmitry LABETSKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

being produced from a liquid or gas

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Mechanical alignment of x-ray sources

System and method for cleaning an EUV mask

Extreme ultraviolet control system

Extreme ultraviolet light generation apparatus and electronic devic...

Guiding device and associated system

Mechanical alignment of x-ray sources

Apparatus for producing a filamented auxiliary discharge for an app...

Soft X-ray light source

System and method for cleaning an EUV mask

Droplet collecting system and method of using the same

Methods and apparatus for predicting performance of a measurement m...

Laser and drum control for continuous generation of broadband light

Optical isolation module

Laser plasma optical device and method for generating ultra-short u...

Transmission small-angle X-ray scattering metrology system

Method of exposure using extreme ultraviolet and method of manufact...

Chamber device, extreme ultraviolet light generation apparatus, and...

Extreme ultraviolet control system

Target formation apparatus

Method for protecting an X-ray source and an X-ray source

Illumination source for an inspection apparatus, inspection apparat...

Laser system

Droplet generation for a laser produced plasma light source

Extreme ultraviolet light generation system and electronic device m...

Method and apparatus for controlling extreme ultraviolet light

Process system and operating method thereof

Apparatus and method for generating an electromagnetic radiation

Extreme ultraviolet radiation source and cleaning method thereof

Extreme ultraviolet light generation apparatus and electronic devic...

Debris mitigation system, radiation source and lithographic apparatus

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR CLEANING AN EUV MASK

EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

GUIDING DEVICE AND ASSOCIATED SYSTEM

EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD

MECHANICAL ALIGNMENT OF X-RAY SOURCES

LIGHT SOURCE APPARATUS

LIGHT SOURCE APPARATUS

EUV LIGHT SOURCE TARGET METROLOGY

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

SYSTEM AND METHOD FOR CLEANING AN EUV MASK

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

OPTICAL ISOLATION MODULE

EXTREME ULTRAVIOLET CONTROL SYSTEM

DROPLET COLLECTING SYSTEM AND METHOD OF USING THE SAME

METHOD AND APPARATUS FOR EFFICIENT HIGH HARMONIC GENERATION

RADIATION CONDUIT

SYSTEM AND METHOD FOR CLEANING AN EUV MASK

METHOD FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT

LASER AND DRUM CONTROL FOR CONTINUOUS GENERATION OF BROADBAND LIGHT

APPARATUS FOR GENERATING EXTREME ULTRAVIOLET (EUV), METHOD OF MANUF...

SYSTEMS AND METHODS FOR COMPACT LASER WAKEFIELD ACCELERATED ELECTR...

METHOD OF EXPOSURE USING EXTREME ULTRAVIOLET AND METHOD OF MANUFACT...

METHOD AND APPARATUS FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT

TARGET FORMATION APPARATUS

CHAMBER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND...

LASER PLASMA OPTICAL DEVICE AND METHOD FOR GENERATING ULTRA-SHORT U...

APPARATUS FOR PRODUCING A FILAMENTED AUXILIARY DISCHARGE FOR AN APP...

EXTREME ULTRAVIOLET CONTROL SYSTEM

GUIDING DEVICE AND ASSOCIATED SYSTEM