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Projection exposure device
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Patent number 7,289,192
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Issue date Oct 30, 2007
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Adtec Engineering Co., Ltd.
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Akira Otsuka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Aligner
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Patent number 6,819,406
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Issue date Nov 16, 2004
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Adtec Engineering Co., Ltd.
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Masatoshi Asami
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Full-contact type exposure device
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Patent number 6,784,979
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Issue date Aug 31, 2004
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Adtec Engineering Co., Ltd.
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Tsunesou Tajima
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Aligner
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Patent number 6,760,094
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Issue date Jul 6, 2004
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Adtec Engineering Co., Ltd.
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Takahiro Shimada
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Board-stage for an aligner
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Patent number 6,597,432
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Issue date Jul 22, 2003
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Adtec Engineering Co., Ltd.
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Ryoichi Ida
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Aligner
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Patent number 6,552,352
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Issue date Apr 22, 2003
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Adtec Engineering Co., Ltd.
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Katsumi Momose
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Aligner
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Patent number 6,252,649
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Issue date Jun 26, 2001
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Adtec Engineering Co., Ltd.
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Katsuya Sangu
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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