Aplex Group

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafer carrier head with inflatable bladder and attack angle control...
- Patent number 6,080,040
- Issue date Jun 27, 2000
- Aplex Group
- Gregory A. Appel
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system including a hydrostatic fluid bearing support
- Patent number 6,062,959
- Issue date May 16, 2000
- Aplex Group
- David E. Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing tool having a sealed fluid chamber for support of polishi...
- Patent number 5,980,368
- Issue date Nov 9, 1999
- Aplex Group
- Shou-sung Chang
- B24 - GRINDING POLISHING
Information Patent Grant
In-situ monitoring of polishing pad wear
- Patent number 5,934,974
- Issue date Aug 10, 1999
- Aplex Group
- Huey-Ming Tzeng
- B24 - GRINDING POLISHING

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