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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer carrier head with inflatable bladder and attack angle control...
Patent number
6,080,040
Issue date
Jun 27, 2000
Aplex Group
Gregory A. Appel
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing system including a hydrostatic fluid bearing support
Patent number
6,062,959
Issue date
May 16, 2000
Aplex Group
David E. Weldon
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing tool having a sealed fluid chamber for support of polishi...
Patent number
5,980,368
Issue date
Nov 9, 1999
Aplex Group
Shou-sung Chang
B24 - GRINDING POLISHING
Information
Patent Grant
In-situ monitoring of polishing pad wear
Patent number
5,934,974
Issue date
Aug 10, 1999
Aplex Group
Huey-Ming Tzeng
B24 - GRINDING POLISHING