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Patents Grantslast 30 patents

Information Patent Grant
Capacitively coupled RF-plasma reactor
- Patent number 5,981,899
- Issue date Nov 9, 1999
- Balzers Aktiengesellschaft
- Jerome Perrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport and transfer apparatus
- Patent number 5,882,171
- Issue date Mar 16, 1999
- Balzers Aktiengesellschaft
- Peter Tinner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber, at least for the transport of workpieces, a chamber combin...
- Patent number 5,865,588
- Issue date Feb 2, 1999
- Balzers Aktiengesellschaft
- Roman Schertler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improving the rate of a plasma enhanced vacuum treatment
- Patent number 5,693,238
- Issue date Dec 2, 1997
- Balzers Aktiengesellschaft
- Jacques Schmitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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