BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD

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BEIJING, CN

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and semiconductor processing apparatus
- Patent number 12,362,217
- Issue date Jul 15, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jian Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier device, semiconductor apparatus, and residual charge detect...
- Patent number 12,315,706
- Issue date May 27, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jian Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Water replenishment control method for semiconductor process device...
- Patent number 12,314,066
- Issue date May 27, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Kaiyue Cao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power adjustment method of upper electrode power supply and semicon...
- Patent number 12,300,460
- Issue date May 13, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jing Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shield cooling assembly, reaction chamber and semiconductor process...
- Patent number 12,278,096
- Issue date Apr 15, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus
- Patent number 12,278,123
- Issue date Apr 15, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jingfeng Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manipulator
- Patent number 12,263,574
- Issue date Apr 1, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Hao Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and mixing inlet device
- Patent number 12,264,393
- Issue date Apr 1, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jingfeng Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Impedance-matching method, impedance-matching device, and semicondu...
- Patent number 12,266,507
- Issue date Apr 1, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jing Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and dielectric window cleaning m...
- Patent number 12,257,608
- Issue date Mar 25, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Chunming Liu
- B08 - CLEANING
Information Patent Grant
Semiconductor process apparatus and plasma ignition method
- Patent number 12,261,022
- Issue date Mar 25, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus and wafer transfer device
- Patent number 12,261,067
- Issue date Mar 25, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Hongshuai Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrying device and semiconductor processing apparatus
- Patent number 12,252,776
- Issue date Mar 18, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and magnetron mechanism
- Patent number 12,249,496
- Issue date Mar 11, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yujie Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature change rate control device, method, and semiconductor p...
- Patent number 12,205,836
- Issue date Jan 21, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Hongwei Geng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor process apparatus and process chamber
- Patent number 12,198,913
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Shiru Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material scheduling method and device of semiconductor processing e...
- Patent number 12,197,195
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Lin Cui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Process chamber
- Patent number 12,198,972
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yancheng Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus and magnetic structure of semiconductor app...
- Patent number 12,198,914
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Zhenduo Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering device with microwave heating mechanism
- Patent number 12,195,842
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Molin Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater and heating base
- Patent number 12,191,170
- Issue date Jan 7, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Dongdong Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor reaction chamber and atomic layer plasma etching appa...
- Patent number 12,191,114
- Issue date Jan 7, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xingfei Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern sheet, semiconductor intermediate product, and hole etching...
- Patent number 12,106,970
- Issue date Oct 1, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qiushi Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liner, reaction chamber and semiconductor processing equipment
- Patent number 12,106,934
- Issue date Oct 1, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jinrong Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method with metal hard mask
- Patent number 12,100,601
- Issue date Sep 24, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yu Zhang
- B08 - CLEANING
Information Patent Grant
Semiconductor processing chamber
- Patent number 12,080,524
- Issue date Sep 3, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yan Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for scheduling apparatuses on production line
- Patent number 11,990,355
- Issue date May 21, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Shangui Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Control circuit, pulsed power supply system, and semiconductor proc...
- Patent number 11,955,313
- Issue date Apr 9, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Gang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering reaction chamber and process assembly of sputtering reac...
- Patent number 11,952,653
- Issue date Apr 9, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Liren Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method, air-gap dielectric layer, and dynamic random-access...
- Patent number 11,948,805
- Issue date Apr 2, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xin Wu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-LAYER FOCUS RING FOR PLASMA SEMICONDUCTOR PROCESSING
- Publication number 20250239438
- Publication date Jul 24, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yulin PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...
- Publication number 20250197993
- Publication date Jun 19, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xiaobin SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FURNACE TUBE ASSEMBLY AND DISASSEMBLY AUXILIARY DEVICE
- Publication number 20250183077
- Publication date Jun 5, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qi WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WATER REPLENISHMENT CONTROL METHOD FOR SEMICONDUCTOR PROCESS DEVICE...
- Publication number 20250172955
- Publication date May 29, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Kaiyue CAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND GAS DISTRIBUTOR OF SEMICONDUCTOR APPARATUS
- Publication number 20250163577
- Publication date May 22, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Leichao ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COIL DEVICE FOR GENERATING PLASMA AND SEMICONDUCTOR EQUIPMENT
- Publication number 20250095962
- Publication date Mar 20, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinji XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20250087480
- Publication date Mar 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Haifeng QIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS APPARATUS SCHEDULING CONTROL METHOD AND SEMIC...
- Publication number 20250068144
- Publication date Feb 27, 2025
- XI'AN NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Junxiang ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS DEVICE AND WAFER TRANSFER SYSTEM THEREOF
- Publication number 20250062155
- Publication date Feb 20, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Donghua ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIPELINE TEMPERATURE CONTROL EQUIPMENT AND PIPELINE TEMPERATURE CON...
- Publication number 20250053183
- Publication date Feb 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Caifeng HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTION DEVICE OF SEMICONDUCTOR THERMAL PROCESSING EQUIPMENT...
- Publication number 20250051917
- Publication date Feb 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Liguang LAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE AND EXHAUST SYSTEM THEREOF
- Publication number 20250054779
- Publication date Feb 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Lika WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS DEVICE AND WAFER SUPPORT STRUCTURE THEREOF
- Publication number 20250046647
- Publication date Feb 6, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shoulin HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT TEMPORARY STORAGE DEVICE AND SEMICONDUCTOR PROCESSING DE...
- Publication number 20250038015
- Publication date Jan 30, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinlong LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND BASE
- Publication number 20250023492
- Publication date Jan 16, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yantian RONG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR PROCESS RECIPE ACQUISITION METHOD AND SYSTEM, AND SEM...
- Publication number 20250013222
- Publication date Jan 9, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yuanwei LIN
- G05 - CONTROLLING REGULATING
Information Patent Application
PROCESS CHAMBER
- Publication number 20250006546
- Publication date Jan 2, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yancheng LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA COLLECTION METHOD, DEVICE, AND SYSTEM OF SEMICONDUCTOR PROCESS...
- Publication number 20240427795
- Publication date Dec 26, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jiajia CHAI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMENT, AND SEMICON...
- Publication number 20240420982
- Publication date Dec 19, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Wenkai CHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING APPARATUS AND WAFER TRANSFER DEVICE
- Publication number 20240420977
- Publication date Dec 19, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Hongshuai MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS DEVICE AND GAS INLET APPARATUS
- Publication number 20240387199
- Publication date Nov 21, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Gang XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
- Publication number 20240371672
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yongfei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT
- Publication number 20240368803
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shikai LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT AND CARRIER DEVICE THEREOF
- Publication number 20240371676
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xiqiang TIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR HEAT TREATMENT DEVICE AND METHOD FOR CONTROLLING PRES...
- Publication number 20240355646
- Publication date Oct 24, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yan JIA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS DEVICE, CONTROL METHOD AND APPARATUS FOR MOVI...
- Publication number 20240338008
- Publication date Oct 10, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinheng ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COIL STRUCTURE FOR GENERATING PLASMA AND SEMICONDUCTOR EQUIPMENT
- Publication number 20240339296
- Publication date Oct 10, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinrong ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING EQUIPMENT, WAFER CHUCK, AND WAFER CLEANING METHOD
- Publication number 20240339353
- Publication date Oct 10, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Hongyu ZHAO
- B08 - CLEANING
Information Patent Application
SUBSTRATE SUPPORT INCLUDING MULTIPLE RADIO FREQUENCY (RF) ELECTRODES
- Publication number 20240321560
- Publication date Sep 26, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yulin PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BASE BIAS ADJUSTMENT APPARATUS AND METHOD, AND SEMICONDUCTOR PROCES...
- Publication number 20240282553
- Publication date Aug 22, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Chao ZHANG
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
79384962 - NAURA
- Serial number 79384962
- Registration number 7602463
- Filing date Nov 2, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- 37 - Building construction
Information Trademark
79208007 - NAURA
- Serial number 79208007
- Registration number 5450583
- Filing date Nov 29, 2016
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- 7 - Machines and machine tools
Information Trademark
79207360 - NAURA
- Serial number 79207360
- Registration number 5455657
- Filing date Nov 29, 2016
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- 7 - Machines and machine tools

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD

Organization

Patents Grantslast 30 patents

Electrostatic chuck and semiconductor processing apparatus

Carrier device, semiconductor apparatus, and residual charge detect...

Water replenishment control method for semiconductor process device...

Power adjustment method of upper electrode power supply and semicon...

Shield cooling assembly, reaction chamber and semiconductor process...

Semiconductor processing apparatus

Manipulator

Semiconductor processing apparatus and mixing inlet device

Impedance-matching method, impedance-matching device, and semicondu...

Semiconductor processing apparatus and dielectric window cleaning m...

Semiconductor process apparatus and plasma ignition method

Wafer cleaning apparatus and wafer transfer device

Carrying device and semiconductor processing apparatus

Semiconductor processing apparatus and magnetron mechanism

Temperature change rate control device, method, and semiconductor p...

Semiconductor process apparatus and process chamber

Material scheduling method and device of semiconductor processing e...

Process chamber

Semiconductor apparatus and magnetic structure of semiconductor app...

Sputtering device with microwave heating mechanism

Heater and heating base

Semiconductor reaction chamber and atomic layer plasma etching appa...

Pattern sheet, semiconductor intermediate product, and hole etching...

Liner, reaction chamber and semiconductor processing equipment

Etching method with metal hard mask

Semiconductor processing chamber

Method and system for scheduling apparatuses on production line

Control circuit, pulsed power supply system, and semiconductor proc...

Sputtering reaction chamber and process assembly of sputtering reac...

Etching method, air-gap dielectric layer, and dynamic random-access...

Patents Applicationslast 30 patents

MULTI-LAYER FOCUS RING FOR PLASMA SEMICONDUCTOR PROCESSING

VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...

FURNACE TUBE ASSEMBLY AND DISASSEMBLY AUXILIARY DEVICE

WATER REPLENISHMENT CONTROL METHOD FOR SEMICONDUCTOR PROCESS DEVICE...

SEMICONDUCTOR APPARATUS AND GAS DISTRIBUTOR OF SEMICONDUCTOR APPARATUS

COIL DEVICE FOR GENERATING PLASMA AND SEMICONDUCTOR EQUIPMENT

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF

SEMICONDUCTOR PROCESS APPARATUS SCHEDULING CONTROL METHOD AND SEMIC...

SEMICONDUCTOR PROCESS DEVICE AND WAFER TRANSFER SYSTEM THEREOF

PIPELINE TEMPERATURE CONTROL EQUIPMENT AND PIPELINE TEMPERATURE CON...

GAS INJECTION DEVICE OF SEMICONDUCTOR THERMAL PROCESSING EQUIPMENT...

SEMICONDUCTOR PROCESSING DEVICE AND EXHAUST SYSTEM THEREOF

SEMICONDUCTOR PROCESS DEVICE AND WAFER SUPPORT STRUCTURE THEREOF

WAFER BOAT TEMPORARY STORAGE DEVICE AND SEMICONDUCTOR PROCESSING DE...

ELECTROSTATIC CHUCK AND BASE

SEMICONDUCTOR PROCESS RECIPE ACQUISITION METHOD AND SYSTEM, AND SEM...

PROCESS CHAMBER

DATA COLLECTION METHOD, DEVICE, AND SYSTEM OF SEMICONDUCTOR PROCESS...

PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMENT, AND SEMICON...

WAFER CLEANING APPARATUS AND WAFER TRANSFER DEVICE

SEMICONDUCTOR PROCESS DEVICE AND GAS INLET APPARATUS

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...

REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT

SEMICONDUCTOR PROCESSING EQUIPMENT AND CARRIER DEVICE THEREOF

SEMICONDUCTOR HEAT TREATMENT DEVICE AND METHOD FOR CONTROLLING PRES...

SEMICONDUCTOR PROCESS DEVICE, CONTROL METHOD AND APPARATUS FOR MOVI...

COIL STRUCTURE FOR GENERATING PLASMA AND SEMICONDUCTOR EQUIPMENT

WAFER CLEANING EQUIPMENT, WAFER CHUCK, AND WAFER CLEANING METHOD

SUBSTRATE SUPPORT INCLUDING MULTIPLE RADIO FREQUENCY (RF) ELECTRODES

BASE BIAS ADJUSTMENT APPARATUS AND METHOD, AND SEMICONDUCTOR PROCES...

Trademarklast 30 trademarks

79384962 - NAURA

79208007 - NAURA

79207360 - NAURA