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Patents Grants
last 30 patents
Information
Patent Grant
Temperature change rate control device, method, and semiconductor p...
Patent number
12,205,836
Issue date
Jan 21, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Hongwei Geng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor process apparatus and process chamber
Patent number
12,198,913
Issue date
Jan 14, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Shiru Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Material scheduling method and device of semiconductor processing e...
Patent number
12,197,195
Issue date
Jan 14, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Lin Cui
G05 - CONTROLLING REGULATING
Information
Patent Grant
Process chamber
Patent number
12,198,972
Issue date
Jan 14, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Yancheng Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering device with microwave heating mechanism
Patent number
12,195,842
Issue date
Jan 14, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Molin Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor apparatus and magnetic structure of semiconductor app...
Patent number
12,198,914
Issue date
Jan 14, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Zhenduo Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heater and heating base
Patent number
12,191,170
Issue date
Jan 7, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Dongdong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor reaction chamber and atomic layer plasma etching appa...
Patent number
12,191,114
Issue date
Jan 7, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xingfei Mao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern sheet, semiconductor intermediate product, and hole etching...
Patent number
12,106,970
Issue date
Oct 1, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qiushi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liner, reaction chamber and semiconductor processing equipment
Patent number
12,106,934
Issue date
Oct 1, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jinrong Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method with metal hard mask
Patent number
12,100,601
Issue date
Sep 24, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Yu Zhang
B08 - CLEANING
Information
Patent Grant
Semiconductor processing chamber
Patent number
12,080,524
Issue date
Sep 3, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Yan Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for scheduling apparatuses on production line
Patent number
11,990,355
Issue date
May 21, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Shangui Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Control circuit, pulsed power supply system, and semiconductor proc...
Patent number
11,955,313
Issue date
Apr 9, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Gang Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering reaction chamber and process assembly of sputtering reac...
Patent number
11,952,653
Issue date
Apr 9, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Liren Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method, air-gap dielectric layer, and dynamic random-access...
Patent number
11,948,805
Issue date
Apr 2, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xin Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and reaction chamber
Patent number
11,837,491
Issue date
Dec 5, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qiwei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spray device and cleaning apparatus
Patent number
11,823,917
Issue date
Nov 21, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Wei Liu
B08 - CLEANING
Information
Patent Grant
Control system and method of machine and host computer
Patent number
11,776,830
Issue date
Oct 3, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xiangwei Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reaction chamber
Patent number
11,773,505
Issue date
Oct 3, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Gang Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for pulse modulation of radio frequency power sup...
Patent number
11,749,502
Issue date
Sep 5, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Gang Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Physical vapor deposition chamber and physical vapor deposition app...
Patent number
11,732,346
Issue date
Aug 22, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Hongrui Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reaction chamber and plasma apparatus
Patent number
11,715,627
Issue date
Aug 1, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Wei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reaction chamber and semiconductor processing apparatus
Patent number
11,715,632
Issue date
Aug 1, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xingcun Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reaction gas supply system and control method thereof
Patent number
11,708,636
Issue date
Jul 25, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Chun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering method
Patent number
11,710,624
Issue date
Jul 25, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Bingliang Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Material processing path selection method and device
Patent number
11,703,839
Issue date
Jul 18, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Lin Cui
B08 - CLEANING
Information
Patent Grant
Plasma system and filter device
Patent number
11,705,307
Issue date
Jul 18, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Peng Chen
B08 - CLEANING
Information
Patent Grant
Magnetic thin film laminated structure deposition method
Patent number
11,699,541
Issue date
Jul 11, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Yujie Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lift thimble system, reaction chamber, and semiconductor processing...
Patent number
11,694,880
Issue date
Jul 4, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xingfei Mao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR PROCESS DEVICE AND WAFER TRANSFER SYSTEM THEREOF
Publication number
20250062155
Publication date
Feb 20, 2025
Beijing NAURA Microelectronics Equipment Co., Ltd.
Donghua ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIPELINE TEMPERATURE CONTROL EQUIPMENT AND PIPELINE TEMPERATURE CON...
Publication number
20250053183
Publication date
Feb 13, 2025
Beijing NAURA Microelectronics Equipment Co., Ltd.
Caifeng HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS INJECTION DEVICE OF SEMICONDUCTOR THERMAL PROCESSING EQUIPMENT...
Publication number
20250051917
Publication date
Feb 13, 2025
Beijing NAURA Microelectronics Equipment Co., Ltd.
Liguang LAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING DEVICE AND EXHAUST SYSTEM THEREOF
Publication number
20250054779
Publication date
Feb 13, 2025
Beijing NAURA Microelectronics Equipment Co., Ltd.
Lika WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS DEVICE AND WAFER SUPPORT STRUCTURE THEREOF
Publication number
20250046647
Publication date
Feb 6, 2025
Beijing NAURA Microelectronics Equipment Co., Ltd.
Shoulin HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER BOAT TEMPORARY STORAGE DEVICE AND SEMICONDUCTOR PROCESSING DE...
Publication number
20250038015
Publication date
Jan 30, 2025
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinlong LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND BASE
Publication number
20250023492
Publication date
Jan 16, 2025
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yantian RONG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SEMICONDUCTOR PROCESS RECIPE ACQUISITION METHOD AND SYSTEM, AND SEM...
Publication number
20250013222
Publication date
Jan 9, 2025
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yuanwei LIN
G05 - CONTROLLING REGULATING
Information
Patent Application
PROCESS CHAMBER
Publication number
20250006546
Publication date
Jan 2, 2025
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yancheng LU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA COLLECTION METHOD, DEVICE, AND SYSTEM OF SEMICONDUCTOR PROCESS...
Publication number
20240427795
Publication date
Dec 26, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jiajia CHAI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMENT, AND SEMICON...
Publication number
20240420982
Publication date
Dec 19, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Wenkai CHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING APPARATUS AND WAFER TRANSFER DEVICE
Publication number
20240420977
Publication date
Dec 19, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Hongshuai MA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS DEVICE AND GAS INLET APPARATUS
Publication number
20240387199
Publication date
Nov 21, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Gang XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
Publication number
20240371672
Publication date
Nov 7, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yongfei WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT
Publication number
20240368803
Publication date
Nov 7, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Shikai LI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT AND CARRIER DEVICE THEREOF
Publication number
20240371676
Publication date
Nov 7, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xiqiang TIAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR HEAT TREATMENT DEVICE AND METHOD FOR CONTROLLING PRES...
Publication number
20240355646
Publication date
Oct 24, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yan JIA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS DEVICE, CONTROL METHOD AND APPARATUS FOR MOVI...
Publication number
20240338008
Publication date
Oct 10, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinheng ZHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COIL STRUCTURE FOR GENERATING PLASMA AND SEMICONDUCTOR EQUIPMENT
Publication number
20240339296
Publication date
Oct 10, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING EQUIPMENT, WAFER CHUCK, AND WAFER CLEANING METHOD
Publication number
20240339353
Publication date
Oct 10, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Hongyu ZHAO
B08 - CLEANING
Information
Patent Application
SUBSTRATE SUPPORT INCLUDING MULTIPLE RADIO FREQUENCY (RF) ELECTRODES
Publication number
20240321560
Publication date
Sep 26, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yulin PENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BASE BIAS ADJUSTMENT APPARATUS AND METHOD, AND SEMICONDUCTOR PROCES...
Publication number
20240282553
Publication date
Aug 22, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Chao ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTION CHAMBER COMPONENT, PREPARATION METHOD, AND REACTION CHAMBER
Publication number
20240271310
Publication date
Aug 15, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yicheng LI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER
Publication number
20240266150
Publication date
Aug 8, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yan LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN SHEET, SEMICONDUCTOR INTERMEDIATE PRODUCT, AND HOLE ETCHING...
Publication number
20240266182
Publication date
Aug 8, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qiushi XIE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT AND IMPEDANCE-MATCHING METHOD
Publication number
20240249917
Publication date
Jul 25, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Wenqing LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POWER CONTROL METHOD AND DEVICE OF LOWER RADIO FREQUENCY POWER SUPP...
Publication number
20240234088
Publication date
Jul 11, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATERIAL SCHEDULING METHOD AND DEVICE OF SEMICONDUCTOR PROCESSING E...
Publication number
20240210926
Publication date
Jun 27, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Lin CUI
G05 - CONTROLLING REGULATING
Information
Patent Application
POWER ADJUSTMENT METHOD OF UPPER ELECTRODE POWER SUPPLY AND SEMICON...
Publication number
20240194441
Publication date
Jun 13, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BIAS MAGNETIC FIELD CONTROL METHOD, CONTROL DEVICE, AND SEMICONDUCT...
Publication number
20240191340
Publication date
Jun 13, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yujie GENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Trademark
last 30 trademarks
Information
Trademark
79384962 - NAURA
Serial number
79384962
Registration number
7602463
Filing date
Nov 2, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
37 - Building construction
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Trademark
79208007 - NAURA
Serial number
79208007
Registration number
5450583
Filing date
Nov 29, 2016
Beijing NAURA Microelectronics Equipment Co., Ltd.
7 - Machines and machine tools
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Trademark
79207360 - NAURA
Serial number
79207360
Registration number
5455657
Filing date
Nov 29, 2016
Beijing NAURA Microelectronics Equipment Co., Ltd.
7 - Machines and machine tools