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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
9,728,379
Issue date
Aug 8, 2017
Beijing NMC Co., Ltd.
Fenggang Zhang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Inductively coupled coil and inductively coupled plasma device usin...
Patent number
9,552,965
Issue date
Jan 24, 2017
Beijing NMC Co., Ltd.
Qiaoli Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing equipment and gas distribution apparatus thereof
Patent number
9,540,732
Issue date
Jan 10, 2017
Beijing NMC Co., Ltd.
Liqiang Yao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate etching method
Patent number
9,478,439
Issue date
Oct 25, 2016
Beijing NMC Co., Ltd.
Zhongwei Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Magnetron source, magnetron sputtering apparatus and magnetron sput...
Patent number
9,399,817
Issue date
Jul 26, 2016
Beijing NMC Co., Ltd.
Yangchao Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate etching method and substrate processing device
Patent number
9,187,319
Issue date
Nov 17, 2015
Beijing NMC Co., Ltd.
Gang Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plasma processing equipment and gas distribution apparatus thereof
Patent number
8,888,949
Issue date
Nov 18, 2014
Beijing NMC Co., Ltd.
Liqiang Yao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
8,547,021
Issue date
Oct 1, 2013
Beijing NMC Co. Ltd.
Gang Wei
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Semiconductor structure and method for manufacturing the same
Patent number
8,546,910
Issue date
Oct 1, 2013
Institute of Microelectronics, Chinese Academy of Sciences
Haizhou Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for controlling DC bias of RF discharge system
Patent number
8,217,579
Issue date
Jul 10, 2012
Beijing NMC Co. Ltd.
Yi Zhao
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Method of online predicting maintenance of an apparatus
Patent number
8,154,721
Issue date
Apr 10, 2012
Beijing NMC Co., Ltd.
Zhuo Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR PLASMA TREATMENT AND METHOD OF OPERATING THE APPARATUS
Publication number
20170301523
Publication date
Oct 19, 2017
BEIJING NMC CO., LTD
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTION CHAMBER AND SEMI-CONDUCTOR PROCESSING DEVICE
Publication number
20170154758
Publication date
Jun 1, 2017
Beijing NMC Co., Ltd.
Yanzhao ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
APPARATUS FOR SPUTTERING AND OPERATION METHOD THEREOF
Publication number
20170114446
Publication date
Apr 27, 2017
BEIJING NMC CO., LTD
Yujie YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
INDUCTIVELY COUPLED COIL AND INDUCTIVELY COUPLED PLASMA DEVICE USIN...
Publication number
20170092466
Publication date
Mar 30, 2017
Beijing NMC Co., Ltd.
Qiaoli SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MECHANICAL CHUCK AND PLASMA MACHINING DEVICE
Publication number
20170044660
Publication date
Feb 16, 2017
Beijing NMC Co., Ltd.
Jue HOU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTION CHAMBER AND PLASMA PROCESSING APPARATUS
Publication number
20170011938
Publication date
Jan 12, 2017
Beijing NMC Co., Ltd.
Xingcun LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEARING DEVICE AND PLASMA PROCESSING APPARATUS
Publication number
20170011892
Publication date
Jan 12, 2017
Beijing NMC Co., Ltd.
Hao GUO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETRON AND MAGNETRON SPUTTERING DEVICE
Publication number
20170011894
Publication date
Jan 12, 2017
Beijing NMC Co., Ltd.
Yujie YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CASSETTE POSITIONING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20160329228
Publication date
Nov 10, 2016
Beijing NMC Co., Ltd.
Meng LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20160322206
Publication date
Nov 3, 2016
Beijing NMC Co., Ltd.
Feng LV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHAMBER
Publication number
20160322243
Publication date
Nov 3, 2016
Beijing NMC Co., Ltd.
Xuewei WU
B08 - CLEANING
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Patent Application
PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTA...
Publication number
20160148789
Publication date
May 26, 2016
BEIJING NMC CO., LTD
PENG CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE ETCHING METHOD
Publication number
20150311091
Publication date
Oct 29, 2015
Beijing NMC Co., Ltd.
Zhongwei JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRAY DEVICE, REACTION CHAMBER AND MOCVD APPARATUS
Publication number
20150284846
Publication date
Oct 8, 2015
Beijing NMC Co., Ltd.
Ye Tu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE ETCHING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20140363975
Publication date
Dec 11, 2014
Beijing NMC Co., Ltd.
Gang Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor structure and method for manufacturing the same
Publication number
20140124859
Publication date
May 8, 2014
Beijing NMC Co., Ltd.
Haizhou Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETRON SOURCE, MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUT...
Publication number
20130277205
Publication date
Oct 24, 2013
Beijing NMC Co., Ltd.
Yangchao Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOUR CHAMBER AND SUBSTRATE PROCESSING EQUIPMENT USING SAME
Publication number
20130269614
Publication date
Oct 17, 2013
Beijing NMC Co., Ltd.
Mengxin Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20130256129
Publication date
Oct 3, 2013
Beijing NMC Co., Ltd.
Peng Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR APPLYING POWER TO TARGET MATERIAL, POWER SUPPLY FOR TARG...
Publication number
20130256119
Publication date
Oct 3, 2013
Beijing NMC Co., Ltd.
Bai Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor structure and method for manufacturing the same
Publication number
20130001691
Publication date
Jan 3, 2013
BEIJING NMC., LTD.
Haizhou Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20120319181
Publication date
Dec 20, 2012
Beijing NMC Co., Ltd.
Haizhou Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20120313158
Publication date
Dec 13, 2012
Beijing NMC Co., Ltd.
Haizhou Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20120313149
Publication date
Dec 13, 2012
Beijing NMC Co., Ltd.
Haizhou Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND METHOD FOR REMOVING REMAINING CHARGES THEREON
Publication number
20120200981
Publication date
Aug 9, 2012
Beijing NMC Co., Ltd.
Baohui Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEEP-TRENCH SILICON ETCHING AND GAS INLET SYSTEM THEREOF
Publication number
20120138228
Publication date
Jun 7, 2012
Beijing NMC Co., Ltd.
Yang Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20110162801
Publication date
Jul 7, 2011
Beijing NMC Co., Ltd.
Fenggang Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR CONTROLLING DC BIAS OF RF DISCHARGE SYSTEM
Publication number
20100283446
Publication date
Nov 11, 2010
Beijing NMC., Ltd.
Yi Zhao
H03 - BASIC ELECTRONIC CIRCUITRY
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last 30 trademarks
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Trademark
79208007 - NAURA
Serial number
79208007
Registration number
5450583
Filing date
Nov 29, 2016
Beijing NAURA Microelectronics Equipment Co., Ltd.
7 - Machines and machine tools
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Trademark
79207360 - NAURA
Serial number
79207360
Registration number
5455657
Filing date
Nov 29, 2016
Beijing NAURA Microelectronics Equipment Co., Ltd.
7 - Machines and machine tools