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Atomic layer deposition apparatus
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Patent number 11,926,896
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Issue date Mar 12, 2024
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Beneq Oy
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Johannes Wesslin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Coating machine
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Patent number D998660
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Issue date Sep 12, 2023
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Beneq Oy
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Heikki Naulapää
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D15 - Machines not elsewhere specified
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Nozzle and nozzle head
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Patent number 11,702,745
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Issue date Jul 18, 2023
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Beneq Oy
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Pekka Soininen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Coating machine
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Patent number D978933
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Issue date Feb 21, 2023
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Beneq Oy
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Heikki Naulapää
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D15 - Machines not elsewhere specified
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Coating machine
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Patent number D978932
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Issue date Feb 21, 2023
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Beneq Oy
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Heikki Naulapää
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D15 - Machines not elsewhere specified
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Precursor supply cabinet
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Patent number 11,549,702
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Issue date Jan 10, 2023
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Beneq Oy
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Pekka Soininen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Nozzle head and apparatus
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Patent number 11,214,866
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Issue date Jan 4, 2022
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Beneq Oy
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Pekka Soininen
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B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Thin film display element
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Patent number 11,101,334
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Issue date Aug 24, 2021
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Beneq Oy
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Janne Lesonen
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G06 - COMPUTING CALCULATING COUNTING
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Apparatus, method and reaction chamber
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Patent number 10,590,536
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Issue date Mar 17, 2020
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Beneq Oy
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Mikko Soderlund
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for coating a substrate
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Patent number 10,513,776
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Issue date Dec 24, 2019
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Beneq Oy
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Leif Keto
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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ATOMIC LAYER DEPOSITION APPARATUS
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Publication number 20240018652
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Publication date Jan 18, 2024
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BENEQ OY
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Johannes WESSLIN
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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AN ATOMIC LAYER DEPOSITION APPARATUS
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Publication number 20230374658
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Publication date Nov 23, 2023
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BENEQ OY
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Pekka SOININEN
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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AN ATOMIC LAYER DEPOSITION APPARATUS
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Publication number 20220259733
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Publication date Aug 18, 2022
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BENEQ OY
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Hulda AMINOFF
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PRECURSOR SUPPLY CHAMBER
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Publication number 20220220614
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Publication date Jul 14, 2022
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BENEQ OY
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Johannes WESSLIN
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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ATOMIC LAYER DEPOSITION APPARATUS
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Publication number 20220205098
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Publication date Jun 30, 2022
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BENEQ OY
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Pekka SOININEN
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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AN ATOMIC LAYER DEPOSITION APPARATUS
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Publication number 20220205097
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Publication date Jun 30, 2022
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BENEQ OY
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Ville MIIKKULAINEN
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DISPLAY ARRANGEMENT AND METHOD
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Publication number 20220206603
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Publication date Jun 30, 2022
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BENEQ OY
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Janne LESONEN
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G06 - COMPUTING CALCULATING COUNTING
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PRECURSOR SUPPLY CABINET
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Publication number 20220146051
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Publication date May 12, 2022
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BENEQ OY
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Pekka SOININEN
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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NOZZLE HEAD
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Publication number 20210214847
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Publication date Jul 15, 2021
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BENEQ OY
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Pekka Soininen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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APPARATUS AND METHOD
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Publication number 20210164100
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Publication date Jun 3, 2021
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BENEQ OY
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Pekka SOININEN
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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NOZZLE HEAD AND APPARATUS
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Publication number 20210115561
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Publication date Apr 22, 2021
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BENEQ OY
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Pekka SOININEN
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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79279175 - BENEQ TRANSFORM
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Serial number 79279175
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Registration number 6279526
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Filing date Jan 29, 2020
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Beneq Group Oy
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7 - Machines and machine tools
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79147513 - NSILVER
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Serial number 79147513
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Registration number 4729611
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Filing date Apr 17, 2014
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Beneq Oy
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40 - Treatment of materials
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79145973 - TASEL
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Serial number 79145973
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Registration number 4651056
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Filing date Mar 26, 2014
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Beneq Oy
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9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
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79131327 - LUMINEQ
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Serial number 79131327
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Registration number 4565921
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Filing date May 8, 2013
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Beneq Oy
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7 - Machines and machine tools
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79074722 - NAERO
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Serial number 79074722
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Registration number 3939916
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Filing date Sep 3, 2009
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Beneq Oy
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7 - Machines and machine tools
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79036407 - NHALO
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Serial number 79036407
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Registration number 3427103
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Filing date Jan 11, 2007
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Beneq Oy
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7 - Machines and machine tools
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79029054 - NSILVER
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Serial number 79029054
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Registration number 3324888
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Filing date Jun 16, 2006
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Beneq Oy
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7 - Machines and machine tools
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79029053 - NCLEAR
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Serial number 79029053
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Registration number 3352624
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Filing date Jun 16, 2006
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Beneq Oy
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7 - Machines and machine tools
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79027832 - BENEQ
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Serial number 79027832
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Registration number 3492777
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Filing date Jun 16, 2006
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Beneq Oy
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7 - Machines and machine tools