Carl Zeiss Microelectric Systems GmbH

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device for flat illumination of an object field
- Patent number 6,925,225
- Issue date Aug 2, 2005
- Carl Zeiss Microelectric Systems GmbH
- Thomas Engel
- G02 - OPTICS
Information Patent Grant
Imaging system for an extreme ultraviolet (EUV) beam-based microscope
- Patent number 6,894,837
- Issue date May 17, 2005
- Carl Zeiss Microelectric Systems GmbH
- Hans-Juergen Dobschal
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

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