Carl Zeiss Microelectric Systems GmbH

Follow

Organization

Jena, DE

Organizations

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Device for flat illumination of an object field
- Patent number 6,925,225
- Issue date Aug 2, 2005
- Carl Zeiss Microelectric Systems GmbH
- Thomas Engel
- G02 - OPTICS
Information Patent Grant
Imaging system for an extreme ultraviolet (EUV) beam-based microscope
- Patent number 6,894,837
- Issue date May 17, 2005
- Carl Zeiss Microelectric Systems GmbH
- Hans-Juergen Dobschal
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING