DALSA Semiconductor Inc.

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Waterloo, CA

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Patents Grantslast 30 patents

Information Patent Grant
Method of making BIOMEMS devices
- Patent number 7,927,904
- Issue date Apr 19, 2011
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making MEMS wafers
- Patent number 7,807,550
- Issue date Oct 5, 2010
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microchannels for BioMEMS devices
- Patent number 7,799,656
- Issue date Sep 21, 2010
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of controlling film stress in MEMS devices
- Patent number 7,799,376
- Issue date Sep 21, 2010
- DALSA Semiconductor Inc.
- Vincent Fortin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Protection capsule for MEMS devices
- Patent number 7,682,860
- Issue date Mar 23, 2010
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of reducing stress-induced mechanical problems in optical co...
- Patent number 7,614,253
- Issue date Nov 10, 2009
- DALSA Semiconductor Inc.
- Luc Ouellet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of MEMS devices with spin-on glass
- Patent number 7,579,622
- Issue date Aug 25, 2009
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating silicon-based MEMS devices
- Patent number 7,459,329
- Issue date Dec 2, 2008
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making a MEMS device containing a cavity with isotropic e...
- Patent number 7,439,093
- Issue date Oct 21, 2008
- DALSA Semiconductor Inc.
- Richard Beaudry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anhydrous HF release of process for MEMS devices
- Patent number 7,365,016
- Issue date Apr 29, 2008
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices
- Patent number 7,341,905
- Issue date Mar 11, 2008
- Dalsa Semiconductor Inc.
- Stephane Martel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hermetic wafer-level packaging for MEMS devices with low-temperatur...
- Patent number 7,291,513
- Issue date Nov 6, 2007
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of advanced silicon-based MEMS devices
- Patent number 7,160,752
- Issue date Jan 9, 2007
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating silicon-based MEMS devices
- Patent number 7,144,750
- Issue date Dec 5, 2006
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level packaging technique for microdevices
- Patent number 7,138,293
- Issue date Nov 21, 2006
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Titanium silicate films with high dielectric constant
- Patent number 7,101,754
- Issue date Sep 5, 2006
- Dalsa Semiconductor Inc.
- El Khakani My Ali
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making electrical connections to hermetically sealed MEMS...
- Patent number 7,037,745
- Issue date May 2, 2006
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making photonic devices with SOG interlayer
- Patent number 6,937,806
- Issue date Aug 30, 2005
- Dalsa Semiconductor Inc.
- Luc Ouellet
- G02 - OPTICS
Information Patent Grant
Fabrication of microstructures with vacuum-sealed cavity
- Patent number 6,902,656
- Issue date Jun 7, 2005
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS devices with spin-on glass
- Patent number 6,896,821
- Issue date May 24, 2005
- Dalsa Semiconductor Inc.
- Luc Louellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of depositing optical films
- Patent number 6,887,514
- Issue date May 3, 2005
- Dalsa Semiconductor Inc.
- Luc Ouellet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices
- Patent number 6,849,491
- Issue date Feb 1, 2005
- Dalsa Semiconductor Inc.
- Stephane Martel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming an optical sensor device having a composite sandw...
- Patent number 6,833,282
- Issue date Dec 21, 2004
- Dalsa Semiconductor Inc.
- Robert Groulx
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting an anisotropic etch in a microstructure
- Patent number 6,770,213
- Issue date Aug 3, 2004
- Dalsa Semiconductor Inc.
- Robert Antaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of preventing cracking in optical quality silica layers
- Patent number 6,749,893
- Issue date Jun 15, 2004
- Dalsa Semiconductor Inc.
- Luc Ouellet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making a functional device with deposited layers subject...
- Patent number 6,724,967
- Issue date Apr 20, 2004
- Dalsa Semiconductor Inc.
- Luc Ouellet
- G02 - OPTICS
Information Patent Grant
Method of depositing an optical quality silica film by PECVD
- Patent number 6,716,476
- Issue date Apr 6, 2004
- Dalsa Semiconductor Inc.
- Luc Ouellet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of aligning a photolithographic mask to a crystal plane
- Patent number 6,686,214
- Issue date Feb 3, 2004
- Dalsa Semiconductor Inc.
- Robert Antaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making specular infrared mirrors for use in optical devices
- Patent number 6,656,528
- Issue date Dec 2, 2003
- Dalsa Semiconductor Inc.
- Luc Ouellet
- G02 - OPTICS
Information Patent Grant
Wafer-level MEMS packaging
- Patent number 6,635,509
- Issue date Oct 21, 2003
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MAKING BIOMEMS DEVICES
- Publication number 20100173436
- Publication date Jul 8, 2010
- DALSA SEMICONDUCTOR INC.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEEP REACTIVE ION ETCHING
- Publication number 20090242512
- Publication date Oct 1, 2009
- DALSA SEMICONDUCTOR INC.
- Richard Beaudry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING FILM STRESS IN MEMS DEVICES
- Publication number 20090029533
- Publication date Jan 29, 2009
- DALSA SEMICONDUCTOR INC.
- Vincent Fortin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROCHANNELS FOR BioMEMS DEVICES
- Publication number 20080299695
- Publication date Dec 4, 2008
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROTECTION CAPSULE FOR MEMS DEVICES
- Publication number 20070231943
- Publication date Oct 4, 2007
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR REMOVING RESIDUES FORMED DURING THE MANUFACTURE OF MEMS...
- Publication number 20070134927
- Publication date Jun 14, 2007
- DALSA Semiconductor Inc.
- Vincent Fortin
- B08 - CLEANING
Information Patent Application
METHOD OF REDUCING STRESS-INDUCED MECHANICAL PROBLEMS IN OPTICAL CO...
- Publication number 20070130996
- Publication date Jun 14, 2007
- DALSA SEMICONDUCTOR INC.
- Luc Ouellet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Micromachined structures using collimated DRIE
- Publication number 20070065967
- Publication date Mar 22, 2007
- DALSA Semiconductor Inc.
- Richard Beaudry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MAKING MEMS WAFERS
- Publication number 20070015341
- Publication date Jan 18, 2007
- DALSA SEMICONDUCTOR INC.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anhydrous HF release of process for MEMS devices
- Publication number 20060211163
- Publication date Sep 21, 2006
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of advanced silicon-based MEMS devices
- Publication number 20060166403
- Publication date Jul 27, 2006
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of fabricating silicon-based MEMS devices
- Publication number 20060110895
- Publication date May 25, 2006
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Titanium silicate films with high dielectric constant
- Publication number 20050277304
- Publication date Dec 15, 2005
- DALSA Semiconductor Inc.
- El Khakani My Ali
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of making electrical connections to hermetically sealed MEMS...
- Publication number 20050250238
- Publication date Nov 10, 2005
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of MEMS devices with spin-on glass
- Publication number 20050145962
- Publication date Jul 7, 2005
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Hermetic wafer-level packaging for MEMS devices with low-temperatur...
- Publication number 20050142685
- Publication date Jun 30, 2005
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices
- Publication number 20050136599
- Publication date Jun 23, 2005
- DALSA Semiconductor Inc.
- Stephane Martel
- H01 - BASIC ELECTRIC ELEMENTS

DALSA Semiconductor Inc.

Organization

Patents Grantslast 30 patents

Method of making BIOMEMS devices

Method of making MEMS wafers

Microchannels for BioMEMS devices

Method of controlling film stress in MEMS devices

Protection capsule for MEMS devices

Method of reducing stress-induced mechanical problems in optical co...

Fabrication of MEMS devices with spin-on glass

Method of fabricating silicon-based MEMS devices

Method of making a MEMS device containing a cavity with isotropic e...

Anhydrous HF release of process for MEMS devices

Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices

Hermetic wafer-level packaging for MEMS devices with low-temperatur...

Fabrication of advanced silicon-based MEMS devices

Method of fabricating silicon-based MEMS devices

Wafer level packaging technique for microdevices

Titanium silicate films with high dielectric constant

Method of making electrical connections to hermetically sealed MEMS...

Method of making photonic devices with SOG interlayer

Fabrication of microstructures with vacuum-sealed cavity

Fabrication of MEMS devices with spin-on glass

Method of depositing optical films

Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices

Method of forming an optical sensor device having a composite sandw...

Method of inspecting an anisotropic etch in a microstructure

Method of preventing cracking in optical quality silica layers

Method of making a functional device with deposited layers subject...

Method of depositing an optical quality silica film by PECVD

Method of aligning a photolithographic mask to a crystal plane

Method of making specular infrared mirrors for use in optical devices

Wafer-level MEMS packaging

Patents Applicationslast 30 patents

METHOD OF MAKING BIOMEMS DEVICES

DEEP REACTIVE ION ETCHING

METHOD OF CONTROLLING FILM STRESS IN MEMS DEVICES

MICROCHANNELS FOR BioMEMS DEVICES

PROTECTION CAPSULE FOR MEMS DEVICES

METHOD FOR REMOVING RESIDUES FORMED DURING THE MANUFACTURE OF MEMS...

METHOD OF REDUCING STRESS-INDUCED MECHANICAL PROBLEMS IN OPTICAL CO...

Micromachined structures using collimated DRIE

METHOD OF MAKING MEMS WAFERS

Anhydrous HF release of process for MEMS devices

Fabrication of advanced silicon-based MEMS devices

Method of fabricating silicon-based MEMS devices

Titanium silicate films with high dielectric constant

Method of making electrical connections to hermetically sealed MEMS...

Fabrication of MEMS devices with spin-on glass

Hermetic wafer-level packaging for MEMS devices with low-temperatur...

Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices

Trademarklast 30 trademarks