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Ion current droop compensation
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Patent number 11,967,484
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Issue date Apr 23, 2024
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Eagle Harbor Technologies, Inc.
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Christopher Bowman
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer biasing in a plasma chamber
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Patent number 11,824,454
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Issue date Nov 21, 2023
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Eagle Harbor Technologies, Inc.
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Kenneth Miller
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Bipolar high voltage pulser
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Patent number 11,824,542
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Issue date Nov 21, 2023
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Eagle Harbor Technologies, Inc.
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Alex Henson
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Nanosecond pulser ADC system
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Patent number 11,810,761
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Issue date Nov 7, 2023
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Eagle Harbor Technologies, Inc.
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Ilia Slobodov
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H01 - BASIC ELECTRIC ELEMENTS
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Ion current droop compensation
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Patent number 11,728,138
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Issue date Aug 15, 2023
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Eagle Harbor Technologies, Inc.
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Christopher Bowman
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H01 - BASIC ELECTRIC ELEMENTS
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High voltage nanosecond pulser
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Patent number 11,558,048
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Issue date Jan 17, 2023
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Eagle Harbor Technologies, Inc.
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Kenneth E. Miller
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H03 - BASIC ELECTRONIC CIRCUITRY
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Transformer resonant converter
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Patent number 11,539,352
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Issue date Dec 27, 2022
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Eagle Harbor Technologies, Inc.
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Kenneth E. Miller
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H03 - BASIC ELECTRONIC CIRCUITRY
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Precise plasma control system
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Patent number 11,532,457
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Issue date Dec 20, 2022
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Eagle Harbor Technologies, Inc.
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Christopher Bowman
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H01 - BASIC ELECTRIC ELEMENTS
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Precise plasma control system
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Patent number 11,430,635
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Issue date Aug 30, 2022
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Eagle Harbor Technologies, Inc.
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Timothy Ziemba
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H01 - BASIC ELECTRIC ELEMENTS
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Ion current droop compensation
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Patent number 11,404,247
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Issue date Aug 2, 2022
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Eagle Harbor Technologies, Inc.
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Christopher Bowman
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H01 - BASIC ELECTRIC ELEMENTS
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High voltage pre-pulsing
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Patent number 11,303,269
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Issue date Apr 12, 2022
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Eagle Harbor Technologies, Inc.
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Kenneth E. Miller
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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High voltage transformer
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Patent number 11,250,988
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Issue date Feb 15, 2022
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Eagle Harbor Technologies, Inc.
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James R. Prager
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H01 - BASIC ELECTRIC ELEMENTS
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ION CURRENT DROOP COMPENSATION
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Publication number 20240347318
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Publication date Oct 17, 2024
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Eagle Harbor Technologies, Inc.
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Christopher Bowman
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H01 - BASIC ELECTRIC ELEMENTS
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NANOSECOND PULSER ADC SYSTEM
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Publication number 20240234090
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Publication date Jul 11, 2024
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Eagle Harbor Technologies, Inc.
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Kenneth Miller
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H01 - BASIC ELECTRIC ELEMENTS
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NANOSECOND PULSER ADC SYSTEM
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Publication number 20240136152
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Publication date Apr 25, 2024
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Eagle Harbor Technologies, Inc.
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Kenneth Miller
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER BIASING IN A PLASMA CHAMBER
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Publication number 20240048056
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Publication date Feb 8, 2024
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Eagle Harbor Technologies, Inc.
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Kenneth Miller
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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ION CURRENT DROOP COMPENSATION
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Publication number 20220328287
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Publication date Oct 13, 2022
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Eagle Harbor Technologies, Inc.
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Christopher Bowman
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H01 - BASIC ELECTRIC ELEMENTS
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HIGH VOLTAGE NANOSECOND PULSER
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Publication number 20220116033
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Publication date Apr 14, 2022
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Eagle Harbor Technologies, Inc.
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Kenneth E. Miller
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H03 - BASIC ELECTRONIC CIRCUITRY
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EFFICIENT IGBT SWITCHING
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Publication number 20220085801
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Publication date Mar 17, 2022
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Eagle Harbor Technologies, Inc.
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Timothy Ziemba
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H01 - BASIC ELECTRIC ELEMENTS
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ION CURRENT DROOP COMPENSATION
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Publication number 20220037122
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Publication date Feb 3, 2022
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Eagle Harbor Technologies, Inc.
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Christopher Bowman
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H01 - BASIC ELECTRIC ELEMENTS
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NANOSECOND PULSER ADC SYSTEM
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Publication number 20220020566
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Publication date Jan 20, 2022
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Eagle Harbor Technologies, Inc.
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Ilia Slobodov
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H03 - BASIC ELECTRONIC CIRCUITRY
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ION CURRENT DROOP COMPENSATION
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Publication number 20220013329
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Publication date Jan 13, 2022
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Eagle Harbor Technologies, Inc.
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Christopher Bowman
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER BIASING IN A PLASMA CHAMBER
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Publication number 20210408917
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Publication date Dec 30, 2021
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Eagle Harbor Technologies, Inc.
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Kenneth Miller
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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NANOSECOND PULSER PULSE GENERATION
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Publication number 20210125812
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Publication date Apr 29, 2021
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Eagle Harbor Technologies, Inc.
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Timothy Ziemba
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H01 - BASIC ELECTRIC ELEMENTS
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