EPION CORPORATION

Organization

BILLERICA, MA, US

Business Address
4 ALFRED CIRCLE BEDFORD MA 01730
State Location
MA
State of Incorporation

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Ionizer and method for gas-cluster ion-beam formation
- Patent number 7,173,252
- Issue date Feb 6, 2007
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
GCIB processing of integrated circuit interconnect structures
- Patent number 7,115,511
- Issue date Oct 3, 2006
- Epion Corporation
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of and apparatus for measurement and control of a gas cluste...
- Patent number 7,067,828
- Issue date Jun 27, 2006
- Epion Corporation
- David R. Swenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for improved processing with a gas-cluster ion...
- Patent number 7,060,989
- Issue date Jun 13, 2006
- Epion Corporation
- David R. Swenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved beam stability in high current ga...
- Patent number 7,060,988
- Issue date Jun 13, 2006
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam size diagnostics and workpiece processing
- Patent number 6,831,272
- Issue date Dec 14, 2004
- Epion Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
GCIB processing to improve interconnection vias and improved interc...
- Patent number 6,812,147
- Issue date Nov 2, 2004
- Epion Corporation
- Wesley J. Skinner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal treatment of fine grain materials in a coarse-grain fluidiz...
- Patent number 6,811,765
- Issue date Nov 2, 2004
- Epion Corporation
- Rolf Maiwald
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Adaptive GCIB for smoothing surfaces
- Patent number 6,805,807
- Issue date Oct 19, 2004
- Epion Corporation
- David B. Fenner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam size diagnostics and workpiece processing
- Patent number 6,770,874
- Issue date Aug 3, 2004
- Epion Corporation
- Jerald P. Dykstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for adjusting the properties of a device by GCIB...
- Patent number 6,750,460
- Issue date Jun 15, 2004
- Epion Corporation
- James A. Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector and method for cluster ion beam diagnostics
- Patent number 6,737,643
- Issue date May 18, 2004
- Epion Corporation
- Richard P. Torti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for improving the effectiveness of medical stents...
- Patent number 6,676,989
- Issue date Jan 13, 2004
- Epion Corporation
- Allen R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond-like carbon film with enhanced adhesion
- Patent number 6,660,340
- Issue date Dec 9, 2003
- Epion Corporation
- Sean R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charging control and dosimetry system for gas cluster ion beam
- Patent number 6,646,277
- Issue date Nov 11, 2003
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam low mass ion filter
- Patent number 6,635,883
- Issue date Oct 21, 2003
- Epion Corporation
- Richard P. Torti
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ionizer for gas cluster ion beam formation
- Patent number 6,629,508
- Issue date Oct 7, 2003
- Epion Corporation
- Jerald P. Dykstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced etching/smoothing of dielectric surfaces
- Patent number 6,624,081
- Issue date Sep 23, 2003
- Epion Corporation
- Jerald P. Dykstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for smoothing thin conductive films by gas clu...
- Patent number 6,613,240
- Issue date Sep 2, 2003
- Epion Corporation
- Wesley J. Skinner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for reduced particulate generation during work...
- Patent number 6,595,506
- Issue date Jul 22, 2003
- Epion Corporation
- Barry M. Zide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for improving thin films by gas cluster ion beam...
- Patent number 6,537,606
- Issue date Mar 25, 2003
- Epion Corporation
- Lisa P. Allen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interface control for film deposition by gas-cluster ion-beam proce...
- Patent number 6,498,107
- Issue date Dec 24, 2002
- Epion Corporation
- David B. Fenner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for improving the effectiveness of artificial hip...
- Patent number 6,491,800
- Issue date Dec 10, 2002
- Epion Corporation
- Allen R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam smoother apparatus
- Patent number 6,486,478
- Issue date Nov 26, 2002
- Epion Corporation
- Bruce K. Libby
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming carbonaceous hard film
- Patent number 6,416,820
- Issue date Jul 9, 2002
- Epion Corporation
- Isao Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adaptive GCIB for smoothing surfaces
- Patent number 6,375,790
- Issue date Apr 23, 2002
- Epion Corporation
- David B. Fenner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced etching/smoothing of dielectric surfaces
- Patent number 6,331,227
- Issue date Dec 18, 2001
- Epion Corporation
- Jerald P. Dykstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface planarization of high temperature superconductors
- Patent number 6,251,835
- Issue date Jun 26, 2001
- Epion Corporation
- Wei-Kan Chu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of protecting surfaces on diamond, diamondlike carbon or carbon
- Patent number 5,855,967
- Issue date Jan 5, 1999
- Epion Corporation
- Allen R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond films and method of growing diamond films on nondiamond sub...
- Patent number 5,082,359
- Issue date Jan 21, 1992
- Epion Corporation
- Allen R. Kirkpatrick
- C30 - CRYSTAL GROWTH

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Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR SCANNING A WORKPIECE THROUGH AN ION BEAM
- Publication number 20070262267
- Publication date Nov 15, 2007
- Epion Corporation
- Avrum Freytsis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Replacement gate field effect transistor with germanium or SiGe cha...
- Publication number 20060292762
- Publication date Dec 28, 2006
- Epion Corporation
- John O. Borland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Copper interconnect wiring and method of forming thereof
- Publication number 20060105570
- Publication date May 18, 2006
- Epion Corporation
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ionizer and method for gas-cluster ion-beam formation
- Publication number 20060097185
- Publication date May 11, 2006
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for arc suppression in scanned ion beam proces...
- Publication number 20060087244
- Publication date Apr 27, 2006
- Epion Corporation
- Kenneth P. Regan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Formation of doped regions and/or ultra-shallow junctions in semico...
- Publication number 20050277246
- Publication date Dec 15, 2005
- Epion Corporation
- Allen R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual damascene integration structure and method for forming improve...
- Publication number 20050272237
- Publication date Dec 8, 2005
- Epion Corporation
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual damascene integration structure and method for forming improve...
- Publication number 20050272265
- Publication date Dec 8, 2005
- Epion Corporation
- Robert M. Geffken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for improved processing with a gas-cluster ion...
- Publication number 20050205802
- Publication date Sep 22, 2005
- Epion Corporation
- David R. Swenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for improved beam stability in high current ga...
- Publication number 20050205801
- Publication date Sep 22, 2005
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Formation of ultra-shallow junctions by gas-cluster ion irradiation
- Publication number 20050202657
- Publication date Sep 15, 2005
- Epion Corporation
- John O. Borland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of forming doped and un-doped strained semiconductor and se...
- Publication number 20050181621
- Publication date Aug 18, 2005
- Epion Corporation
- John O. Borland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of and apparatus for measurement and control of a gas cluste...
- Publication number 20040222389
- Publication date Nov 11, 2004
- Epion Corporation
- David R. Swenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GCIB processing of integrated circuit interconnect structures
- Publication number 20040137733
- Publication date Jul 15, 2004
- Epion Corporation
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System for and method of gas cluster ion beam processing
- Publication number 20040113093
- Publication date Jun 17, 2004
- Epion Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GCIB processing to improve interconnection vias and improved interc...
- Publication number 20030073314
- Publication date Apr 17, 2003
- Epion Corporation
- Wesley J. Skinner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for improving the effectiveness of artificial joi...
- Publication number 20030009233
- Publication date Jan 9, 2003
- Epion Corporation a Commonwealth of Massachusetts corporation
- Stephen M. Blinn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Adaptive GCIB for smoothing surfaces
- Publication number 20020139772
- Publication date Oct 3, 2002
- Epion Corporation
- David B. Fenner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charging control and dosimetry system for gas cluster ion beam
- Publication number 20020130275
- Publication date Sep 19, 2002
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas cluster ion beam size diagnostics and workpiece processing
- Publication number 20020070361
- Publication date Jun 13, 2002
- Epion Corporation
- Michael E. Mack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for improving the effectiveness of medical stents...
- Publication number 20020051846
- Publication date May 2, 2002
- Epion Corporation
- Allen R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas cluster ion beam size diagnostics and workpiece processing
- Publication number 20020036261
- Publication date Mar 28, 2002
- Epion Corporation
- Jerald P. Dykstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for improving the effectiveness of intraocular le...
- Publication number 20020017454
- Publication date Feb 14, 2002
- Epion Corporation
- Allen R. Kirkpatrick
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Method and system for improving the effectiveness of artificial hip...
- Publication number 20020017455
- Publication date Feb 14, 2002
- Epion Corporation
- Allen R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Surface planarization of high temperature superconductors
- Publication number 20020006877
- Publication date Jan 17, 2002
- Epion Corporation
- Wei-Kan Chu
- B82 - NANO-TECHNOLOGY

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Trademarklast 30 trademarks

Information Trademark
76054103 - EPION
- Serial number 76054103
- Registration number 2535812
- Filing date May 23, 2000
- EPION CORPORATION
- 7 - Machines and machine tools
Information Trademark
76054112 - EPION
- Serial number 76054112
- Registration number 2499992
- Filing date May 23, 2000
- EPION CORPORATION
- 7 - Machines and machine tools
Information Trademark
75904482 - ULTRA SMOOTHER
- Serial number 75904482
- Registration number 2500978
- Filing date Jan 28, 2000
- EPION CORPORATION
- 7 - Machines and machine tools

NSF Awardslast 12 months

processing...

Count: 3

NSF Awards

Information NSF Award
SBIR/STTR Phase II: Gas-Cluster Ion Source for Mass Spectrometer an...
- Award Id 0078580
- Effective date Sep 15, 2000
Information NSF Award
SBIR Phase I: Gas-Cluster Ion Source for Mass Spectrometer and Micr...
- Award Id 9861050
- Effective date Jan 1, 1999
Information NSF Award
SBIR Phase I: Graphite to Diamond Transformation by Gas Cluster Ion...
- Award Id 9661626
- Effective date Jan 1, 1997

EPION CORPORATION

Organization

Business Address

State Location

State of Incorporation

Patents Grantslast 30 patents

Ionizer and method for gas-cluster ion-beam formation

GCIB processing of integrated circuit interconnect structures

Method of and apparatus for measurement and control of a gas cluste...

Method and apparatus for improved processing with a gas-cluster ion...

Method and apparatus for improved beam stability in high current ga...

Gas cluster ion beam size diagnostics and workpiece processing

GCIB processing to improve interconnection vias and improved interc...

Thermal treatment of fine grain materials in a coarse-grain fluidiz...

Adaptive GCIB for smoothing surfaces

Gas cluster ion beam size diagnostics and workpiece processing

System and method for adjusting the properties of a device by GCIB...

Detector and method for cluster ion beam diagnostics

Method and system for improving the effectiveness of medical stents...

Diamond-like carbon film with enhanced adhesion

Charging control and dosimetry system for gas cluster ion beam

Gas cluster ion beam low mass ion filter

Ionizer for gas cluster ion beam formation

Enhanced etching/smoothing of dielectric surfaces

Method and apparatus for smoothing thin conductive films by gas clu...

Apparatus and method for reduced particulate generation during work...

System and method for improving thin films by gas cluster ion beam...

Interface control for film deposition by gas-cluster ion-beam proce...

Method and system for improving the effectiveness of artificial hip...

Gas cluster ion beam smoother apparatus

Method for forming carbonaceous hard film

Adaptive GCIB for smoothing surfaces

Enhanced etching/smoothing of dielectric surfaces

Surface planarization of high temperature superconductors

Method of protecting surfaces on diamond, diamondlike carbon or carbon

Diamond films and method of growing diamond films on nondiamond sub...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR SCANNING A WORKPIECE THROUGH AN ION BEAM

Replacement gate field effect transistor with germanium or SiGe cha...

Copper interconnect wiring and method of forming thereof

Ionizer and method for gas-cluster ion-beam formation

Method and apparatus for arc suppression in scanned ion beam proces...

Formation of doped regions and/or ultra-shallow junctions in semico...

Dual damascene integration structure and method for forming improve...

Dual damascene integration structure and method for forming improve...

Method and apparatus for improved processing with a gas-cluster ion...

Method and apparatus for improved beam stability in high current ga...

Formation of ultra-shallow junctions by gas-cluster ion irradiation

Methods of forming doped and un-doped strained semiconductor and se...

Method of and apparatus for measurement and control of a gas cluste...

GCIB processing of integrated circuit interconnect structures

System for and method of gas cluster ion beam processing

GCIB processing to improve interconnection vias and improved interc...

Method and system for improving the effectiveness of artificial joi...

Adaptive GCIB for smoothing surfaces

Charging control and dosimetry system for gas cluster ion beam

Gas cluster ion beam size diagnostics and workpiece processing

Method and system for improving the effectiveness of medical stents...

Gas cluster ion beam size diagnostics and workpiece processing

Method and system for improving the effectiveness of intraocular le...

Method and system for improving the effectiveness of artificial hip...

Surface planarization of high temperature superconductors

Trademarklast 30 trademarks

76054103 - EPION

76054112 - EPION

75904482 - ULTRA SMOOTHER

NSF Awardslast 12 months

NSF Awards

SBIR/STTR Phase II: Gas-Cluster Ion Source for Mass Spectrometer an...

SBIR Phase I: Gas-Cluster Ion Source for Mass Spectrometer and Micr...

SBIR Phase I: Graphite to Diamond Transformation by Gas Cluster Ion...