KLA Corporation

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Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for measurement of tilt and overlay of a structure
- Patent number 12,209,854
- Issue date Jan 28, 2025
- KLA Corporation
- Stilian Ivanov Pandev
- G01 - MEASURING TESTING
Information Patent Grant
Ensemble of deep learning models for defect review in high volume m...
- Patent number 12,211,196
- Issue date Jan 28, 2025
- KLA Corp.
- Kuljit S. Virk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-layered moiré targets and methods for using the same in measu...
- Patent number 12,204,254
- Issue date Jan 21, 2025
- KLA Corporation
- Yoel Feler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-element super resolution optical inspection system
- Patent number 12,203,857
- Issue date Jan 21, 2025
- KLA Corporation
- Grace Hsiu-Ling Chen
- G01 - MEASURING TESTING
Information Patent Grant
Laser-sustained plasma light source with tapered window
- Patent number 12,198,921
- Issue date Jan 14, 2025
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for determining post bonding overlay
- Patent number 12,197,137
- Issue date Jan 14, 2025
- KLA Corporation
- Franz Zach
- G01 - MEASURING TESTING
Information Patent Grant
Secure remote collaboration for equipment in a manufacturing facility
- Patent number 12,189,374
- Issue date Jan 7, 2025
- KLA Corporation
- Michael Brain
- G05 - CONTROLLING REGULATING
Information Patent Grant
Detecting defects on specimens
- Patent number 12,190,500
- Issue date Jan 7, 2025
- KLA Corp.
- Chunwei Song
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Print check repeater defect detection
- Patent number 12,190,498
- Issue date Jan 7, 2025
- KLA Corp.
- Nurmohammed Patwary
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Estimating in-die overlay with tool induced shift correction
- Patent number 12,181,271
- Issue date Dec 31, 2024
- KLA Corporation
- Min-Yeong Moon
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for correction of impact of wafer tilt on misre...
- Patent number 12,170,215
- Issue date Dec 17, 2024
- KLA Corporation
- Vladimir Levinski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptive modeling misregistration measurement system and method
- Patent number 12,165,930
- Issue date Dec 10, 2024
- KLA Corporation
- Amnon Manassen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for mitigating overlay distortion patterns caused...
- Patent number 12,164,277
- Issue date Dec 10, 2024
- KLA Corporation
- Franz Zach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Joint electron-optical columns for flood-charging and image-forming...
- Patent number 12,165,838
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Counterflow gas nozzle for contamination mitigation in extreme ultr...
- Patent number 12,158,576
- Issue date Dec 3, 2024
- KLA Corporation
- Rudy F. Garcia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for focus control in extreme ultraviolet lithogra...
- Patent number 12,153,352
- Issue date Nov 26, 2024
- KLA Corporation
- Roel Gronheid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivation of nonlinear optical crystals
- Patent number 12,152,316
- Issue date Nov 26, 2024
- KLA Corporation
- Yung-Ho Alex Chuang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Correcting target locations for temperature in semiconductor applic...
- Patent number 12,148,639
- Issue date Nov 19, 2024
- KLA Corp.
- Min-Yeong Moon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay target design for improved target placement accuracy
- Patent number 12,140,859
- Issue date Nov 12, 2024
- KLA Corporation
- Vladimir Levinski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective marking of a substrate with fluorescent conjugated polyme...
- Patent number 12,140,550
- Issue date Nov 12, 2024
- KLA Corporation
- Jinsang Kim
- G01 - MEASURING TESTING
Information Patent Grant
Rotating target for extreme ultraviolet source with liquid metal
- Patent number 12,133,318
- Issue date Oct 29, 2024
- KLA Corporation
- Alexander Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor fabrication process parameter determination using a g...
- Patent number 12,131,103
- Issue date Oct 29, 2024
- KLA Corporation
- Anuj Pandey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for improved metrology for semiconductor device...
- Patent number 12,131,959
- Issue date Oct 29, 2024
- KLA Corporation
- Liran Yerushalmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bandwidth adjustment for remote control of a manufacturing tool
- Patent number 12,130,612
- Issue date Oct 29, 2024
- KLA Corporation
- Michael Brain
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Metrology target design for tilted device designs
- Patent number 12,117,347
- Issue date Oct 15, 2024
- KLA Corporation
- Myungjun Lee
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology utilizing short-wave infrared wavelengths
- Patent number 12,111,580
- Issue date Oct 8, 2024
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Imaging overlay targets using moiré elements and rotational symmetr...
- Patent number 12,105,433
- Issue date Oct 1, 2024
- KLA Corporation
- Yoel Feler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining material parameters of a multilayer test sample
- Patent number 12,105,136
- Issue date Oct 1, 2024
- KLA Corporation
- Alberto Cagliani
- G01 - MEASURING TESTING
Information Patent Grant
Targets for diffraction-based overlay error metrology
- Patent number 12,105,414
- Issue date Oct 1, 2024
- KLA Corporation
- Itay Gdor
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY TARGET DESIGN FOR TILTED DEVICE DESIGNS
- Publication number 20250035489
- Publication date Jan 30, 2025
- KLA Corporation
- Myungjun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEEP LEARNING BASED MODE SELECTION FOR INSPECTION
- Publication number 20250020598
- Publication date Jan 16, 2025
- KLA Corporation
- Rajkumar Theagarajan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGING OVERLAY TARGETS USING MOIRÉ ELEMENTS AND ROTATIONAL SYMMETR...
- Publication number 20250021019
- Publication date Jan 16, 2025
- KLA Corporation
- Yoel Feler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LASER-SUSTAINED PLASMA GENERATION IN SUPERSONIC GAS JETS
- Publication number 20250016905
- Publication date Jan 9, 2025
- KLA Corporation
- Oleg Khodykin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MINI ENVIRONMENT INSTRUMENTED WAFER
- Publication number 20250014950
- Publication date Jan 9, 2025
- KLA Corporation
- Giampietro Bieli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multiple Pass Optical Measurements Of Semiconductor Structures
- Publication number 20250012734
- Publication date Jan 9, 2025
- KLA Corporation
- Zhengquan Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...
- Publication number 20250004384
- Publication date Jan 2, 2025
- KLA Corporation
- Zhaxylyk Kudyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...
- Publication number 20250005435
- Publication date Jan 2, 2025
- KLA Corporation
- Houssam Chouaib
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...
- Publication number 20250004047
- Publication date Jan 2, 2025
- KLA Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Application
GRATING-OVER-GRATING OVERLAY MEASUREMENT WITH PARALLEL COLOR PER LAYER
- Publication number 20240427252
- Publication date Dec 26, 2024
- KLA Corporation
- Amnon Manassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Acoustic Xenon Droplet Generator
- Publication number 20240431012
- Publication date Dec 26, 2024
- KLA Corporation
- Sherman Seelinger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTRON BEAM POSITION DETECTION AND REPOSITIONING
- Publication number 20240429017
- Publication date Dec 26, 2024
- KLA Corporation
- Henning Stoschus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GROWTH OF QUASI-PHASE MATCHED STRONTIUM TETRA...
- Publication number 20240426021
- Publication date Dec 26, 2024
- KLA Corporation
- Kelly Mauser
- C30 - CRYSTAL GROWTH
Information Patent Application
Optics For Measurement Of Thick Films And High Aspect Ratio Structures
- Publication number 20240418635
- Publication date Dec 19, 2024
- KLA Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...
- Publication number 20240418633
- Publication date Dec 19, 2024
- KLA Corporation
- Shova Subedi
- G01 - MEASURING TESTING
Information Patent Application
AUTOFOCUS METHOD FOR SINGLE BEAM AND MULTI-BEAM SYSTEMS
- Publication number 20240412944
- Publication date Dec 12, 2024
- KLA Corporation
- Weijie Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLIDING OUTER TOOL ENCLOSURE
- Publication number 20240412993
- Publication date Dec 12, 2024
- KLA Corporation
- Gurupkar Singh Nerwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DETECTING CHEMICALLY CONTAMINATED SAMPLES
- Publication number 20240410909
- Publication date Dec 12, 2024
- KLA Corporation
- Mandar Paranjape
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK
- Publication number 20240412992
- Publication date Dec 12, 2024
- KLA Corporation
- Jaime Poris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE GRAB PUPIL LANDSCAPE VIA BROADBAND ILLUMINATION
- Publication number 20240402615
- Publication date Dec 5, 2024
- KLA Corporation
- Yaniv Weiss
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY OF NANOSHEET SURFACE ROUGHNESS AND PROFILE
- Publication number 20240377758
- Publication date Nov 14, 2024
- KLA Corporation
- Houssam Chouaib
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR IMPROVING MEASUREMENT PERFORMANCE OF CHARACTE...
- Publication number 20240378483
- Publication date Nov 14, 2024
- KLA Corporation
- Stilian Pandev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DYNAMIC FREEFORM OPTICS FOR LITHOGRAPHY ILLUMINATION BEAM SHAPING
- Publication number 20240377753
- Publication date Nov 14, 2024
- KLA Corporation
- Mahsa Farsad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER SIGNATURE LOCAL MAXIMA VIA CLUSTERING FOR METROLOGY GUIDED IN...
- Publication number 20240362765
- Publication date Oct 31, 2024
- KLA Corporation
- Alan Davila
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR BONDING HIGH FLUENCE OPTICS TO OPTOMECHANICAL...
- Publication number 20240360023
- Publication date Oct 31, 2024
- KLA Corporation
- Mandar Anand Paranjape
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
HIGH-PRECISION ALIGNABLE OPTICAL MOUNTING
- Publication number 20240361556
- Publication date Oct 31, 2024
- KLA Corporation
- Shreyas Bhaban
- G02 - OPTICS
Information Patent Application
ANGULAR AVERAGING CALIBRATION ON BARE WAFER METROLOGY TOOLS FOR ESF...
- Publication number 20240353219
- Publication date Oct 24, 2024
- KLA Corporation
- Haifeng Wang
- G01 - MEASURING TESTING
Information Patent Application
ENSEMBLE OF DEEP LEARNING MODELS FOR DEFECT REVIEW IN HIGH VOLUME M...
- Publication number 20240354925
- Publication date Oct 24, 2024
- KLA Corporation
- Kuljit S. Virk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Full Wafer Measurement Based On A Trained Full Wafer Measurement Model
- Publication number 20240353759
- Publication date Oct 24, 2024
- KLA Corporation
- Stilian Ivanov Pandev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Laser-Beam Homogenization or Shaping
- Publication number 20240353686
- Publication date Oct 24, 2024
- KLA Corporation
- Avner Safrani
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
98676146 - LUMINA
- Serial number 98676146
- Filing date Jul 31, 2024
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
98249422 - PROSPECT
- Serial number 98249422
- Filing date Nov 1, 2023
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97520650 - ICON
- Serial number 97520650
- Filing date Jul 26, 2022
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90678377 - GEO
- Serial number 90678377
- Filing date Apr 28, 2021
- KLA Corporation
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
90678294 - GLOBAL EXPERT ONSITE
- Serial number 90678294
- Filing date Apr 28, 2021
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90678151 - TENCOR
- Serial number 90678151
- Registration number 7135308
- Filing date Apr 28, 2021
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90021003 - TERAX
- Serial number 90021003
- Filing date Jun 25, 2020
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88901359 - WAFERS LIKE ME
- Serial number 88901359
- Filing date May 5, 2020
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88886964 - WIZARD
- Serial number 88886964
- Registration number 6349824
- Filing date Apr 24, 2020
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88840490 - INSPECTWISE
- Serial number 88840490
- Filing date Mar 19, 2020
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88840572 - DESIGNWISE
- Serial number 88840572
- Registration number 6343121
- Filing date Mar 19, 2020
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88751673 - UNANO
- Serial number 88751673
- Registration number 6302414
- Filing date Jan 8, 2020
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88735858 - DEFECTWISE
- Serial number 88735858
- Registration number 6273955
- Filing date Dec 20, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88723858 - ROSETTA
- Serial number 88723858
- Filing date Dec 11, 2019
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88683610 - IRARCHER
- Serial number 88683610
- Registration number 6646965
- Filing date Nov 7, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88677322 - RAIM
- Serial number 88677322
- Registration number 6512096
- Filing date Nov 1, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88653689 - PROETCH
- Serial number 88653689
- Registration number 6290375
- Filing date Oct 14, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88614442 - DAIM
- Serial number 88614442
- Filing date Sep 12, 2019
- KLA Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88602844 - SURFSERVER
- Serial number 88602844
- Registration number 6428983
- Filing date Sep 3, 2019
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88190458 - TERABEAM
- Serial number 88190458
- Registration number 6201029
- Filing date Nov 12, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88979159 - KEEP LOOKING AHEAD
- Serial number 88979159
- Registration number 6191737
- Filing date Sep 11, 2018
- KLA-Tencor Corporation
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
88112179 - KEEP LOOKING AHEAD
- Serial number 88112179
- Registration number 6493711
- Filing date Sep 11, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87923948 - MACH
- Serial number 87923948
- Registration number 6091521
- Filing date May 16, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87923976 - SPOT
- Serial number 87923976
- Registration number 6639495
- Filing date May 16, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87896185 - AXION
- Serial number 87896185
- Registration number 6228436
- Filing date Apr 27, 2018
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87472061 - I-PAT
- Serial number 87472061
- Registration number 6251635
- Filing date Jun 1, 2017
- KLA CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

KLA Corporation

Organization

Patents Grantslast 30 patents

Methods and systems for measurement of tilt and overlay of a structure

Ensemble of deep learning models for defect review in high volume m...

Multi-layered moiré targets and methods for using the same in measu...

Multi-element super resolution optical inspection system

Laser-sustained plasma light source with tapered window

System and method for determining post bonding overlay

Secure remote collaboration for equipment in a manufacturing facility

Detecting defects on specimens

Print check repeater defect detection

Estimating in-die overlay with tool induced shift correction

Systems and methods for correction of impact of wafer tilt on misre...

Adaptive modeling misregistration measurement system and method

System and method for mitigating overlay distortion patterns caused...

Method and system of image-forming multi-electron beams

Joint electron-optical columns for flood-charging and image-forming...

Counterflow gas nozzle for contamination mitigation in extreme ultr...

System and method for focus control in extreme ultraviolet lithogra...

Passivation of nonlinear optical crystals

Correcting target locations for temperature in semiconductor applic...

Overlay target design for improved target placement accuracy

Selective marking of a substrate with fluorescent conjugated polyme...

Rotating target for extreme ultraviolet source with liquid metal

Semiconductor fabrication process parameter determination using a g...

Systems and methods for improved metrology for semiconductor device...

Bandwidth adjustment for remote control of a manufacturing tool

Metrology target design for tilted device designs

Optical metrology utilizing short-wave infrared wavelengths

Imaging overlay targets using moiré elements and rotational symmetr...

Method for determining material parameters of a multilayer test sample

Targets for diffraction-based overlay error metrology

Patents Applicationslast 30 patents

METROLOGY TARGET DESIGN FOR TILTED DEVICE DESIGNS

DEEP LEARNING BASED MODE SELECTION FOR INSPECTION

IMAGING OVERLAY TARGETS USING MOIRÉ ELEMENTS AND ROTATIONAL SYMMETR...

LASER-SUSTAINED PLASMA GENERATION IN SUPERSONIC GAS JETS

MINI ENVIRONMENT INSTRUMENTED WAFER

Multiple Pass Optical Measurements Of Semiconductor Structures

METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...

METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...

METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...

GRATING-OVER-GRATING OVERLAY MEASUREMENT WITH PARALLEL COLOR PER LAYER

Acoustic Xenon Droplet Generator

ELECTRON BEAM POSITION DETECTION AND REPOSITIONING

SYSTEM AND METHOD FOR GROWTH OF QUASI-PHASE MATCHED STRONTIUM TETRA...

Optics For Measurement Of Thick Films And High Aspect Ratio Structures

COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...

AUTOFOCUS METHOD FOR SINGLE BEAM AND MULTI-BEAM SYSTEMS

SLIDING OUTER TOOL ENCLOSURE

SYSTEM AND METHOD FOR DETECTING CHEMICALLY CONTAMINATED SAMPLES

SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK

SINGLE GRAB PUPIL LANDSCAPE VIA BROADBAND ILLUMINATION

METROLOGY OF NANOSHEET SURFACE ROUGHNESS AND PROFILE

SYSTEM AND METHOD FOR IMPROVING MEASUREMENT PERFORMANCE OF CHARACTE...

DYNAMIC FREEFORM OPTICS FOR LITHOGRAPHY ILLUMINATION BEAM SHAPING

WAFER SIGNATURE LOCAL MAXIMA VIA CLUSTERING FOR METROLOGY GUIDED IN...

METHOD AND SYSTEM FOR BONDING HIGH FLUENCE OPTICS TO OPTOMECHANICAL...

HIGH-PRECISION ALIGNABLE OPTICAL MOUNTING

ANGULAR AVERAGING CALIBRATION ON BARE WAFER METROLOGY TOOLS FOR ESF...

ENSEMBLE OF DEEP LEARNING MODELS FOR DEFECT REVIEW IN HIGH VOLUME M...

Full Wafer Measurement Based On A Trained Full Wafer Measurement Model

Laser-Beam Homogenization or Shaping

Trademarklast 30 trademarks

98676146 - LUMINA

98249422 - PROSPECT

97520650 - ICON

90678377 - GEO

90678294 - GLOBAL EXPERT ONSITE

90678151 - TENCOR

90021003 - TERAX

88901359 - WAFERS LIKE ME

88886964 - WIZARD

88840490 - INSPECTWISE

88840572 - DESIGNWISE

88751673 - UNANO

88735858 - DEFECTWISE

88723858 - ROSETTA

88683610 - IRARCHER